KR20040073301A - 전자 부품 실장 구조 및 그 제조 방법 - Google Patents
전자 부품 실장 구조 및 그 제조 방법 Download PDFInfo
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- KR20040073301A KR20040073301A KR1020040005988A KR20040005988A KR20040073301A KR 20040073301 A KR20040073301 A KR 20040073301A KR 1020040005988 A KR1020040005988 A KR 1020040005988A KR 20040005988 A KR20040005988 A KR 20040005988A KR 20040073301 A KR20040073301 A KR 20040073301A
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- insulating film
- electronic component
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Abstract
Description
Claims (22)
- 배선 패턴을 구비한 배선 기판과,상기 배선 기판 위에 형성되고, 전자 부품이 실장(實裝)되는 실장 영역에 개구부를 구비한 제 1 절연막과,상기 제 1 절연막의 개구부로 노출되는 상기 배선 패턴에, 접속 단자가 플립칩(flip-chip) 실장된 상기 전자 부품과,상기 전자 부품을 피복(被覆)하는 제 2 절연막과,상기 배선 패턴 위의 상기 제 1 및 제 2 절연막의 소정부에 형성된 비어 홀(via hole)과,상기 제 2 절연막 위에 형성되고, 상기 비어 홀을 통하여 상기 배선 패턴에 접속된 상측 배선 패턴을 갖는 것을 특징으로 하는 전자 부품 실장 구조.
- 배선 패턴을 구비한 배선 기판과,상기 배선 기판 위에 형성되고, 상기 전자 부품이 실장되는 실장 영역에 개구부를 구비한 절연막과,상기 절연막의 개구부로 노출되는 상기 배선 패턴에, 소자 형성면에 접속 단자를 구비하고, 또한, 배면(背面)에 보호막을 구비한 상기 전자 부품의 상기 접속 단자가 플립칩 실장된 상기 전자 부품과,상기 배선 패턴 위의 상기 절연막의 소정부에 형성된 비어 홀과,상기 절연막 및 보호막 위에 형성되고, 상기 비어 홀을 통하여 상기 배선 패턴에 접속된 상측 배선 패턴을 갖는 것을 특징으로 하는 전자 부품 실장 구조.
- 배선 패턴을 구비한 배선 기판과,상기 배선 기판 위에 형성되고, 전자 부품이 실장되는 실장 영역에 개구부를 구비한 절연막과,상기 절연막의 개구부로 노출되는 상기 배선 패턴에, 소자 형성면에 접속 단자를 구비하고, 또한, 배면에 보호막을 구비한 상기 전자 부품의 상기 접속 단자가 플립칩 실장된 상기 전자 부품과,상기 접속 단자 위의 상기 전자 부품 및 보호막의 소정부를 관통하는 비어 홀과,상기 절연막 및 보호막 위에 형성되고, 상기 전자 부품의 비어 홀을 통하여 상기 접속 단자에 접속된 상측 배선 패턴을 갖는 것을 특징으로 하는 전자 부품 실장 구조.
- 배선 패턴을 구비한 배선 기판과,상기 배선 기판 위에 형성되고, 전자 부품이 실장되는 실장 영역에 개구부를 구비한 제 1 절연막과,상기 제 1 절연막의 개구부로 노출되는 상기 배선 패턴에, 접속 단자가 플립칩 실장된 상기 전자 부품과,상기 전자 부품을 피복하는 제 2 절연막과,상기 접속 단자 위의 상기 전자 부품 및 제 2 절연막의 소정부(所定部)를 관통하는 비어 홀과,상기 제 2 절연막 위에 형성되고, 상기 전자 부품의 비어 홀을 통하여 상기 접속 단자에 접속된 상측 배선 패턴을 갖는 것을 특징으로 하는 전자 부품 실장 구조.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,상기 전자 부품의 접속 단자는 금으로 이루어지고, 또한, 상기 절연막의 개구부의 상기 배선 패턴 표면에는 금막(金膜)이 형성되어 있으며, 상기 전자 부품의 접속 단자와 상기 배선 패턴이 금과 금의 접합에 의해 플립칩 실장되어 있는 것을 특징으로 하는 전자 부품 실장 구조.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,상기 전자 부품이 상기 절연막의 개구부에 플립칩 실장된 구조는, 상기 전자 부품과 상기 배선 기판 및 상기 개구부 측면의 틈 중의 적어도 상기 전자 부품과 상기 배선 기판의 틈에 충전 절연막이 형성되어 있는 구조를 포함하는 것을 특징으로 하는 전자 부품 실장 구조.
- 배선 패턴을 구비한 배선 기판과,상기 배선 기판 위에 형성되고, 전자 부품이 실장되는 실장 영역에 개구부를 구비한 제 1 절연막과,상기 제 1 절연막의 개구부의 상기 실장 영역에, 접속 단자가 상향으로 되어 실장된 상기 전자 부품과,상기 전자 부품을 피복하는 제 2 절연막과,상기 접속 단자 및 상기 배선 패턴 위의 상기 절연막의 소정부에 각각 형성된 비어 홀과,상기 제 2 절연막 위에 형성되고, 상기 비어 홀을 통하여 상기 접속 단자 및 상기 배선 패턴에 각각 접속된 상측 배선 패턴을 갖는 것을 특징으로 하는 전자 부품 실장 구조.
- 배선 패턴을 구비한 배선 기판과,상기 배선 기판 위에 형성되고, 전자 부품이 실장되는 실장 영역에 개구부를 구비한 절연막과,상기 절연막의 개구부의 상기 실장 영역에, 소자 형성면에 접속 단자와 상기 접속 단자를 노출시키는 개구부를 갖는 패시베이션막(passivation 膜)을 구비한 상기 전자 부품이, 상기 접속 단자가 상측으로 되어 실장된 상기 전자 부품과,상기 배선 패턴 위의 상기 절연막의 소정부에 형성된 비어 홀과,상기 절연막 및 상기 패시베이션막 위에 형성되고, 상기 비어 홀을 통하여 상기 배선 패턴에 접속되는 동시에, 상기 개구부를 통하여 상기 접속 단자에 접속된 상측 배선 패턴을 갖는 것을 특징으로 하는 전자 부품 실장 구조.
- 제 1 항 내지 제 4 항, 제 7 항 및 제 8 항 중 어느 한 항에 있어서,상기 전자 부품의 상면(上面)과 상기 개구부를 구비한 절연막의 상면은 대략 동일한 높이로 조정되어 있는 것을 특징으로 하는 전자 부품 실장 구조.
- 제 1 항 내지 제 4 항, 제 7 항 및 제 8 항 중 어느 한 항에 있어서,상기 상측 배선 패턴에 접속 단자가 플립칩 실장된 상측 전자 부품을 더 갖는 것을 특징으로 하는 전자 부품 실장 구조.
- 제 10 항에 있어서,상기 상측 전자 부품이 실장되는 실장 영역을 일괄적으로 개구하는 개구부를 구비한 솔더 레지스트막이 상기 절연막 및 상기 상측 배선 패턴 위에 형성되어 있고, 또한, 상기 상측 전자 부품의 하면측의 틈에 충전 절연막이 형성되어 있는 것을 특징으로 하는 전자 부품 실장 구조.
- 제 1 항 내지 제 4 항, 제 7 항 및 제 8 항 중 어느 한 항에 있어서,상기 전자 부품은 두께가 150 ㎛ 정도 이하인 반도체 칩으로서,상기 절연막은 수지로 이루어지는 것을 특징으로 하는 전자 부품 실장 구조.
- 배선 패턴을 구비한 배선 기판을 준비하는 공정과,상기 배선 기판 위의 전자 부품이 실장되는 실장 영역에 개구부를 구비한 제 1 절연막을 형성하는 공정과,상기 제 1 절연막의 개구부로 노출되는 상기 배선 패턴에, 상기 전자 부품의 접속 단자를 플립칩 실장하는 공정과,상기 전자 부품을 피복하는 제 2 절연막을 형성하는 공정과,상기 배선 패턴 위의 상기 제 1 및 제 2 절연막의 소정부에 상기 배선 패턴에 도달하는 깊이의 비어 홀을 형성하는 공정과,상기 비어 홀을 통하여 상기 배선 패턴에 접속되는 상측 배선 패턴을 상기 제 2 절연막 위에 형성하는 공정을 갖는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 배선 패턴을 구비한 배선 기판을 준비하는 공정과,상기 배선 기판 위의 전자 부품이 실장되는 실장 영역에 개구부를 구비한 절연막을 형성하는 공정과,상기 절연막의 개구부로 노출되는 상기 배선 패턴에, 소자 형성면에 접속 단자를 구비하고, 또한, 배면(背面)에 보호막을 구비한 상기 전자 부품의 상기 접속 단자를 플립칩 실장하는 공정과,상기 배선 패턴 위의 상기 절연막의 소정부에 상기 배선 패턴에 도달하는 깊이의 비어 홀을 형성하는 공정과,상기 비어 홀을 통하여 상기 배선 패턴에 접속되는 상측 배선 패턴을 상기 절연막 및 보호막 위에 형성하는 공정을 갖는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 배선 패턴을 구비한 배선 기판을 준비하는 공정과,상기 배선 기판 위의 전자 부품이 실장되는 실장 영역에 개구부를 구비한 절연막을 형성하는 공정과,상기 절연막의 개구부로 노출되는 상기 배선 패턴에, 소자 형성면에 접속 단자를 구비하고, 또한, 배면에 보호막을 구비한 상기 전자 부품의 상기 접속 단자를 플립칩 실장하는 공정과,상기 접속 단자 위의 상기 전자 부품 및 상기 보호막의 소정부를 에칭함으로써, 상기 접속 단자에 도달하는 깊이의 비어 홀을 형성하는 공정과,상기 비어 홀을 통하여 상기 접속 단자에 접속되는 상측 배선 패턴을 상기 절연막 및 보호막 위에 형성하는 공정을 갖는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 배선 패턴을 구비한 배선 기판을 준비하는 공정과,상기 배선 기판 위의 전자 부품이 실장되는 실장 영역에 개구부를 구비한 제 1 절연막을 형성하는 공정과,상기 제 1 절연막의 개구부로 노출되는 상기 배선 패턴에, 상기 전자 부품의접속 단자를 플립칩 실장하는 공정과,상기 전자 부품을 피복하는 제 2 절연막을 형성하는 공정과,상기 접속 단자 위의 상기 전자 부품 및 상기 제 2 절연막의 소정부를 에칭함으로써, 접속 단자에 도달하는 깊이의 비어 홀을 형성하는 공정과,상기 비어 홀을 통하여 상기 접속 단자에 접속되는 상측 배선 패턴을 상기 제 2 절연막 위에 형성하는 공정을 갖는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 제 13 항 내지 제 16 항 중 어느 한 항에 있어서,상기 개구부를 구비한 절연막을 형성하는 공정 이후(以後)로서, 상기 전자 부품을 플립칩 실장하는 공정 전(前)에,상기 절연막을 마스크로 하여, 상기 절연막의 개구부로 노출되는 상기 배선 패턴 위에 무전해(無電解) 도금에 의해 금막(金膜)을 선택적으로 형성하는 공정을 더 갖고,상기 전자 부품을 플립칩 실장하는 공정에서, 상기 배선 패턴의 금막에 상기 전자 부품의 금으로 이루어지는 접속 단자를 플립칩 실장하는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 제 13 항 내지 제 16 항 중 어느 한 항에 있어서,상기 전자 부품을 플립칩 실장하는 공정은, 상기 전자 부품과 상기 배선 기판 사이에 충전 절연막을 형성하는 것을 포함하는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 전자 부품이 실장되는 배선 기판을 준비하는 공정과,상기 배선 기판 위의 전자 부품이 실장되는 실장 영역에 개구부를 구비한 제 1 절연막을 형성하는 공정과,상기 배선 기판 위의 상기 제 1 절연막의 개구부에, 상기 전자 부품의 접속 단자를 상측으로 하여 상기 전자 부품을 실장하는 공정과,상기 전자 부품을 피복하는 제 2 절연막을 형성하는 공정과,상기 접속 단자 및 상기 배선 패턴 위의 절연막의 소정부에 비어 홀을 각각 형성하는 공정과,상기 비어 홀을 통하여 상기 접속 단자 및 배선 패턴에 각각 접속되는 상측 배선 패턴을 제 2 절연막 위에 형성하는 공정을 갖는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 전자 부품이 실장되는 배선 기판을 준비하는 공정과,상기 배선 기판 위의 전자 부품이 실장되는 실장 영역에 개구부를 구비한 절연막을 형성하는 공정과,상기 배선 기판 위의 상기 절연막의 개구부에, 소자 형성면에 접속 단자와 상기 접속 단자를 노출시키는 개구부를 갖는 패시베이션막을 구비한 상기 전자 부품을 상기 접속 단자를 상측으로 하여 실장하는 공정과,상기 배선 패턴 위의 절연막의 소정부에 상기 배선 패턴에 도달하는 깊이의 비어 홀을 형성하는 공정과,상기 비어 홀을 통하여 상기 배선 패턴에 접속되는 동시에, 상기 개구부를 통하여 상기 접속 단자에 접속되는 상측 배선 패턴을 상기 절연막 및 상기 패시베이션막 위에 형성하는 공정을 갖는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 제 13 항 내지 제 16 항, 제 19 항 및 제 20 항 중 어느 한 항에 있어서,상기 전자 부품의 상면과 상기 개구부를 구비한 절연막의 상면이 대략 동일한 높이로 되도록 설정되는 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
- 제 13 항 내지 제 16 항, 제 19 항 및 제 20 항 중 어느 한 항에 있어서,상기 전자 부품은 두께가 150 ㎛ 정도 이하인 반도체 칩으로서,상기 절연막은 수지막인 것을 특징으로 하는 전자 부품 실장 구조의 제조 방법.
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JP2003035156A JP4137659B2 (ja) | 2003-02-13 | 2003-02-13 | 電子部品実装構造及びその製造方法 |
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US (4) | US7057290B2 (ko) |
EP (1) | EP1447850A3 (ko) |
JP (1) | JP4137659B2 (ko) |
KR (1) | KR101041011B1 (ko) |
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- 2004-02-09 EP EP04250677A patent/EP1447850A3/en not_active Withdrawn
- 2004-02-09 TW TW093102945A patent/TWI331389B/zh not_active IP Right Cessation
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JP2004247475A (ja) | 2004-09-02 |
US7964950B2 (en) | 2011-06-21 |
JP4137659B2 (ja) | 2008-08-20 |
KR101041011B1 (ko) | 2011-06-16 |
EP1447850A2 (en) | 2004-08-18 |
US7691673B2 (en) | 2010-04-06 |
US7545049B2 (en) | 2009-06-09 |
US20060145359A1 (en) | 2006-07-06 |
US7057290B2 (en) | 2006-06-06 |
US20090206471A1 (en) | 2009-08-20 |
US20040178510A1 (en) | 2004-09-16 |
CN1521847A (zh) | 2004-08-18 |
TW200416997A (en) | 2004-09-01 |
US20070013048A1 (en) | 2007-01-18 |
EP1447850A3 (en) | 2010-07-21 |
TWI331389B (en) | 2010-10-01 |
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