KR20000065226A - 방사선 검출소자 및 그 제조방법 - Google Patents
방사선 검출소자 및 그 제조방법 Download PDFInfo
- Publication number
- KR20000065226A KR20000065226A KR1019980709606A KR19980709606A KR20000065226A KR 20000065226 A KR20000065226 A KR 20000065226A KR 1019980709606 A KR1019980709606 A KR 1019980709606A KR 19980709606 A KR19980709606 A KR 19980709606A KR 20000065226 A KR20000065226 A KR 20000065226A
- Authority
- KR
- South Korea
- Prior art keywords
- light receiving
- resin
- film
- protective film
- radiation
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20188—Auxiliary details, e.g. casings or cooling
- G01T1/20189—Damping or insulation against damage, e.g. caused by heat or pressure
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
Abstract
Description
Claims (6)
- 복수의 수광소자를 기판위에 1차원 혹은 2차원으로 배열하여 수광부를 형성하며, 상기 수광부의 각 행 또는 각 열의 상기 수광소자와 전기적으로 접속된 복수의 본딩패드를 상기 수광부의 외부에 배치한 수광소자 어레이와,상기 수광부의 상기 수광소자 위에 퇴적된 방사선을 가시광으로 변환하는 신틸레이터(scintillator)층과,상기 수광소자 어레이 위에 상기 신틸레이터층이 형성된 영역과 상기 본딩패드의 배치된 영역을 구분하는 폐쇄된 틀형상으로 형성된 수지로 이루어지는 하나 혹은 복수의 수지틀과,유기막과 그 위에 적층된 무기막을 포함하는 2층이상의 다층막으로 이루어지며, 적어도 상기 신틸레이터층을 덮음과 동시에, 상기 수지틀 위까지 도달하여 적어도 상기 본딩패드부를 노출시키고 있는 방사선 투과성의 내습 보호막을 구비하고 있는 방사선 검출소자.
- 제 1항에 있어서, 상기 수지틀의 적어도 하나는, 상기 신틸레이터층을 둘러싸는 구형상에 가깝게 형성되어 있는 것을 특징으로 하는 방사선 검출소자.
- 제 1항에 있어서, 상기 하나 혹은 복수의 수지틀은, 각각 상기 본딩패드부 영역을 둘러싸는 구형상에 가깝게 형성되어 있는 것을 특징으로 하는 방사선 검출소자.
- 제 1항에 있어서, 상기 수지틀에 따라서 상기 내습 보호막의 테두리를 덮는 피복수지를 또한 구비하고 있는 방사선 검출소자.
- 복수의 수광소자를 기판위에 1차원 혹은 2차원으로 배열하여 수광부를 형성하며, 상기 수광부의 각 행 또는 각 열의 상기 수광소자와 전기적으로 접속된 복수의 본딩패드를 상기 수광부의 외부에 배치한 수광소자 어레이인 상기 수광부의 상기 수광소자 위에 방사선을 가시광으로 변환하는 신틸레이터층을 퇴적시키는 제 1공정과,상기 수광소자 어레이 위에 수지에 의해 상기 신틸레이터층과 상기 본딩패드부를 구분하는 하나 혹은 복수의 폐쇄된 틀형상의 수지틀을 형성하는 제 2공정과,상기 수광소자 어레이 전체를 싸넣는 방사선 투과성의 제 1유기막을 형성하는 제 3공정과,상기 제 1유기막 위에 무기막을 포함하는 1층이상의 막을 적층하여 2층이상의 다층막으로 이루어지는 방사선 투과성의 내습 보호막을 형성하는 제 4공정과, 상기 수지틀의 길이방향에 따라서, 상기 내습보호막을 절단하며, 본딩패드부 위의 상기 내습 보호막을 제거하여 상기 본딩패드부를 노출시키는 제 5공정을 갖는 방사선 검출소자의 제조방법.
- 제 5항에 있어서, 상기 제 5공정의 후에, 상기 내습 보호막의 테두리를 상기 수지틀에 따라서 수지에 의해 덮어 접착하는 제 6공정을 또한, 구비하는 방사선 검출소자의 제조방법.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3051097 | 1997-02-14 | ||
JP97-30510 | 1997-02-14 | ||
PCT/JP1998/000551 WO1998036291A1 (fr) | 1997-02-14 | 1998-02-12 | Dispositif de detection de radiations et son procede de production |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20000065226A true KR20000065226A (ko) | 2000-11-06 |
KR100514547B1 KR100514547B1 (ko) | 2005-12-14 |
Family
ID=12305818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-1998-0709606A KR100514547B1 (ko) | 1997-02-14 | 1998-02-12 | 방사선검출소자및그제조방법 |
Country Status (9)
Country | Link |
---|---|
US (2) | US6262422B1 (ko) |
EP (1) | EP0903590B1 (ko) |
JP (1) | JP3077941B2 (ko) |
KR (1) | KR100514547B1 (ko) |
CN (3) | CN1256596C (ko) |
AU (1) | AU5878898A (ko) |
CA (1) | CA2260041C (ko) |
DE (1) | DE69803344T2 (ko) |
WO (1) | WO1998036291A1 (ko) |
Cited By (1)
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KR20180053291A (ko) * | 2015-09-15 | 2018-05-21 | 하마마츠 포토닉스 가부시키가이샤 | 신틸레이터 패널 및 방사선 검출기 |
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1998
- 1998-02-12 JP JP10535567A patent/JP3077941B2/ja not_active Expired - Lifetime
- 1998-02-12 KR KR10-1998-0709606A patent/KR100514547B1/ko not_active IP Right Cessation
- 1998-02-12 AU AU58788/98A patent/AU5878898A/en not_active Abandoned
- 1998-02-12 WO PCT/JP1998/000551 patent/WO1998036291A1/ja active IP Right Grant
- 1998-02-12 CN CNB2003101161074A patent/CN1256596C/zh not_active Expired - Lifetime
- 1998-02-12 EP EP98902186A patent/EP0903590B1/en not_active Expired - Lifetime
- 1998-02-12 DE DE69803344T patent/DE69803344T2/de not_active Expired - Lifetime
- 1998-02-12 CA CA002260041A patent/CA2260041C/en not_active Expired - Lifetime
- 1998-02-12 CN CN2006100661387A patent/CN1844953B/zh not_active Expired - Lifetime
- 1998-02-12 CN CNB988003988A patent/CN1133881C/zh not_active Expired - Lifetime
-
1999
- 1999-02-10 US US09/247,299 patent/US6262422B1/en not_active Ceased
-
2004
- 2004-06-17 US US10/870,409 patent/USRE40291E1/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180053291A (ko) * | 2015-09-15 | 2018-05-21 | 하마마츠 포토닉스 가부시키가이샤 | 신틸레이터 패널 및 방사선 검출기 |
Also Published As
Publication number | Publication date |
---|---|
CA2260041A1 (en) | 1998-08-20 |
USRE40291E1 (en) | 2008-05-06 |
JP3077941B2 (ja) | 2000-08-21 |
KR100514547B1 (ko) | 2005-12-14 |
EP0903590A1 (en) | 1999-03-24 |
AU5878898A (en) | 1998-09-08 |
DE69803344D1 (de) | 2002-02-28 |
EP0903590A4 (en) | 1999-07-21 |
DE69803344T2 (de) | 2002-08-14 |
CN1220732A (zh) | 1999-06-23 |
EP0903590B1 (en) | 2002-01-02 |
CN1844953B (zh) | 2012-06-27 |
CA2260041C (en) | 2001-10-09 |
CN1501095A (zh) | 2004-06-02 |
US6262422B1 (en) | 2001-07-17 |
WO1998036291A1 (fr) | 1998-08-20 |
CN1133881C (zh) | 2004-01-07 |
CN1844953A (zh) | 2006-10-11 |
CN1256596C (zh) | 2006-05-17 |
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