KR19990079658A - 반도체패키지 - Google Patents

반도체패키지 Download PDF

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Publication number
KR19990079658A
KR19990079658A KR1019980012364A KR19980012364A KR19990079658A KR 19990079658 A KR19990079658 A KR 19990079658A KR 1019980012364 A KR1019980012364 A KR 1019980012364A KR 19980012364 A KR19980012364 A KR 19980012364A KR 19990079658 A KR19990079658 A KR 19990079658A
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KR
South Korea
Prior art keywords
semiconductor chip
semiconductor
semiconductor package
lead
input
Prior art date
Application number
KR1019980012364A
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English (en)
Other versions
KR100260997B1 (ko
Inventor
이선구
Original Assignee
마이클 디. 오브라이언
앰코 테크놀로지 코리아 주식회사
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Application filed by 마이클 디. 오브라이언, 앰코 테크놀로지 코리아 주식회사 filed Critical 마이클 디. 오브라이언
Priority to KR1019980012364A priority Critical patent/KR100260997B1/ko
Priority to JP06867099A priority patent/JP3196026B2/ja
Priority to US09/287,711 priority patent/US6303997B1/en
Publication of KR19990079658A publication Critical patent/KR19990079658A/ko
Application granted granted Critical
Publication of KR100260997B1 publication Critical patent/KR100260997B1/ko

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    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • H01L23/4951Chip-on-leads or leads-on-chip techniques, i.e. inner lead fingers being used as die pad
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    • H01L2924/1532Connection portion the connection portion being formed on the die mounting surface of the substrate
    • H01L2924/1533Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate
    • H01L2924/15331Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate being a ball array, e.g. BGA

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Abstract

본 발명은 반도체패키지에 관한 것으로, 반도체패키지의 두께를 초박형으로 함과 더불어 열방출성을 향상시키고 또한 그 반도체패키지를 다수개로 적층하여 사용할 수 있음으로써 실장밀도를 극대화시키기 위해, 다수의 입출력패드가 구비된 반도체칩(2)과; 상기 반도체칩(2)의 상면 외주연에 위치되어 있되, 일단에는 상하돌출부(6b)가 형성되어 있는 다수의 리드(6a)와; 상기 반도체칩(2)의 입출력패드와 리드(6a)의 타단을 전기적으로 접속하는 접속수단과; 상기 리드(6a)의 상하돌출부(6b) 하면에 입출력단자로써 융착된 솔더볼(10)과; 상기 반도체칩(2), 접속수단 등을 외부의 환경으로부터 보호하기 위해 봉지재로 감싸서 형성된 몸체(12)를 포함하여 이루어진 것을 특징으로 한다.

Description

반도체패키지
본 발명은 반도체패키지에 관한 것으로, 보다 상세하게 설명하면 반도체패키지의 두께를 초박형으로 하는 동시에 전기적 성능 및 열방출성을 향상시키고 또한 그 반도체패키지를 다수개로 적층하여 사용할 수 있음으로써 실장밀도를 극대화시킬 수 있는 반도체패키지에 관한 것이다.
일반적으로 메모리용반도체소자를 위한 패키징 기술은 고밀도 실장기술을 요구하고 있다. 즉, 동일한 면적에서 보다 많은 메모리 용량을 확보하기 위해서는 반도체칩의 집적 기술도 중요하지만, 마더보드(Mother Board) 등에의 실장시에 얼마나 많은 반도체패키지를 적은 면적에 효율적으로 실장하는가도 큰 변수로 작용하기 때문이다. 이와 같이 실장밀도를 증가시키는 방법의 하나로써 종래에 리드프레임을 이용한 반도체패키지 또는 볼그리드어레이(Ball Grid Array)반도체패키지(이하 BGA패키지로 칭함)를 수직으로 적층한채 마더보드에 실장하는 기술이 알려져 있다.
상기의 반도체패키지 중에서 최근의 BGA패키지(30')를 이용한 적층형 반도체패키지(40')를 도1에 도시하였다.
도시된 바와 같이 종래 적층형 반도체패키지(40')는 다수의 BGA패키지(30')를 일렬로 쌓아 놓은 형태를 한다. 상기 각각의 BGA패키지(30') 구조는 인쇄회로기판(2')을 중심으로 그 상면에 접착제(4')로 반도체칩(6')이 접착되어 있고, 상기 반도체칩(6')의 입/출력패드(도시되지 않음)는 인쇄회로기판(2') 상면에 전도체로 형성된 회로패턴(8')에 전도성와이어(10')로 본딩되어 있으며, 상기 회로패턴(8')은 전도성비아홀(도시되지 않음)을 통해 하부의 솔더볼랜드(12')에 연결되어 있으며, 상기 솔더볼랜드(12')에는 솔더볼(14')이 융착되어 있으며, 상기 인쇄회로기판(2')의 상면은 반도체칩(6') 및 전도성와이어(10') 등을 외부의 환경으로부터 보호하기 위해 봉지재로 몸체(16')가 형성되어 있다. 여기서 상기 인쇄회로기판(2') 상면에 형성된 회로패턴(8')은 외부로 직접 노출되어 있고, 상기 회로패턴(8')에는 상부를 향하여 돌출된 돌출패드(18')가 형성되어 있다.
이러한 구조를 하는 BGA패키지는 각각의 독립된 형태로 마더보드에 실장될 수도 있으며, 그 실장 밀도를 증대하기 위해 하나의 BGA패키지 상면에 또다른 BGA패키지를 융착하되 상면의 BGA패키지의 하면에 형성된 솔더볼을 그 하면의 BGA패키지 상면에 형성된 돌출패드에 융착하는 방법으로 다수개를 적층함으로써 실장밀도를 증대시키고 있다.
그러나 이러한 종래의 적층형 반도체패키지는 각각의 BGA패키지 두께가 차지하는 부피가 큼으로써 전체 높이가 커지는 단점이 있다. 즉, 단순히 기존의 일반적인 BGA패키지의 인쇄회로기판 상부 주변 둘레에 돌출패드를 형성하고 그 돌출패드에 솔더볼을 융착하는 방법을 사용함으로써 실장 밀도는 증가하지만 그 높이가 커짐으로써 결국 전자기기의 부피를 축소하는데는 한계를 나타내고 있다. 또한 상기와 같이 다수의 BGA패키지를 적층함으로서 반도체칩으로부터 발생되는 열도 증가하지만 이를 적절히 방출시키는 수단이 없음으로서 그 동작속도가 현저히 저하되는 문제점이 있다. 아울러 상기 각각의 BGA패키지용 인쇄회로기판상에는 회로패턴이 길게 형성되어 있음으로서 전체 신호라인이 길어져 전기적 성능이 현저히 저하되는 단점이 있고 또한 고가의 인쇄회로기판을 사용함으로써 제조비용이 상승하는 문제점도 있다.
본 발명은 상기와 같은 종래의 문제점을 해결하기 위해 안출한 것으로, 상하돌출패드를 갖는 리드프레임을 이용하여 두께가 얇은 반도체패키지를 구비함과 아울러 전기적 성능 및 열방출성을 향상시킬 수 있고, 각각의 반도체패키지가 적층될 수 있도록 함으로써 실장밀도를 증대시킬 수 있는 반도체패키지를 제공하는데 있다.
도1은 종래의 적층형 반도체패키지를 도시한 단면도이다.
도2a 및 도2b는 본 발명에 의한 반도체패키지의 한실시예를 도시한 단면도이다.
도3은 도2a의 반도체패키지를 도시한 평면도이다.
도4는 본 발명에 의한 반도체패키지가 다수개 적층된 상태를 도시한 단면도이다.
도5a내지 도5d는 본 발명에 의한 반도체패키지의 다른 실시예들을 도시한 단면도이다.
도6a 내지 도6b는 본 발명에 의한 반도체패키지의 또다른 실시예들을 도시한 단면도이다.
- 도면중 주요 부분에 대한 부호의 설명 -
2 ; 반도체칩 4 ; 접착수단
6a ; 리드(Lead) 6b ; 상하돌출부
6c ; 반도체칩탑재판 8a ; 전도성와이어(Conductive Wire)
8b ; 전도성볼(Conductive Ball)
8c ; TAB(Tape Automated Bonding)본딩부
10 ; 솔더볼(Solder Ball) 12 ; 몸체
30,31,32,33,34,35,36,37 ; 본발명에 의한 반도체패키지
40 ; 본발명에 의한 반도체패키지가 적층된 상태
상기한 목적을 달성하기 위해 본 발명에 의한 반도체패키지는 다수의 입출력패드가 구비된 반도체칩과; 상기 반도체칩의 상면 외주연에 위치되어 있되, 일단에는 상하돌출부가 형성되어 있는 다수의 리드와; 상기 반도체칩의 입출력패드와 리드의 타단을 전기적으로 접속하는 접속수단과; 상기 리드의 상하돌출부 하면에 입출력단자로써 융착된 솔더볼과; 상기 반도체칩, 접속수단 등을 외부의 환경으로부터 보호하기 위해 봉지재로 감싸서 형성된 몸체를 포함하여 이루어진 것을 특징으로 한다.
여기서, 상기 리드는 반도체칩의 상면에까지 연장되어 반도체칩의 입출력패드와 접속수단으로 연결될 수 있는데, 상기 접속수단은 전도성볼, 전도성와이어를 이용하거나 상기 리드를 반도체칩의 입출력패드에 직접 열압착한 TAB본딩부를 이용할 수 있다.
또한, 상기 반도체칩의 상면에는 금속재의 반도체칩탑재판이 접착수단으로 접착될 수 있는데, 그 반도체칩탑재판은 상면이 외부로 노출되도록 하여 열방출성을 향상시킬 수 있다.
한편, 상기 반도체칩탑재판은 반도체칩의 넓이보다 넓게 형성하거나 또는 좁게 형성하는 것이 가능하며, 상기 리드와 반도체칩탑재판의 상면 모두가 외부를 향해 노출될 수 있으며, 이때에는 상기 리드와 반도체칩탑재판의 상면을 동일평면으로 형성한다.
그리고, 상기 몸체는 반도체칩의 저면이 외부로 직접 노출되도록 형성함으로서 상기 반도체칩탑재판과 상기 노출된 반도체칩의 일면으로 인해 열방출성을 더욱 향상시킬 수 있다.
이하 본 발명이 속하는 기술분야에서 통상의 지식을 가진자가 본 발명을 용이하게 실시할 수 있을 정도로 본 발명의 바람직한 실시예를 첨부된 도면을 참조하여 상세하게 설명하면 다음과 같다.
도2a, 도2b 및 도3은 본 발명에 의한 반도체패키지(30,31)를 도시한 단면도 및 평면도이다.
먼저 도2a를 참조하면, 반도체칩(2) 상면의 중앙부에는 다수개의 입출력패드(도시되지 않음)가 형성되어 있고, 그 상부에는 리드(6a)가 접착수단(4)으로 접착되어 있다. 상기 리드(6a)는 상기 반도체칩(2)의 상면에 형성된 입출력패드 바깥둘레를 향하여 방사상으로 길게 연장되어 있고, 그 연장된 끝단 즉, 반도체칩(2)의 바깥둘레에 위치된 리드(6a) 단부에는 상하로 돌출된 상하돌출부(6b)가 형성되어 있다. 상기 상하돌출부(6b)는 통상 에칭(Etching) 기술로 형성되며 이는 구리원판을 이용하여 리드프레임의 제조시 리드(6a)부분에는 할프에칭(Half Etching)기술을 이용하여 에칭하고, 상기 상하돌출부(6b)에는 에칭을 적용시키지 않음으로써 상하돌출부(6b) 두께가 리드(6a)의 두께보다 약 3배 정도 커지도록 한 것이다. 이와 같이 상하돌출부(6b)의 두께를 리드(6a)두께보다 크게 형성한 이유는 차후에 솔더볼(10)의 융착시 그 솔더볼(10)이 위치된 부분의 두께가 반도체칩(2)이 위치된 부분의 두께보다 크게 되도록 함으로써 마더보드(Mother Board)에 실장하거나 다수의 반도체패키지(30)를 적층가능하게 하기 위함이다.
또한 상기 리드(6a)를 반도체칩(2)의 상면에 접착시키기 위한 접착수단(4)은 비전도성인 물질로써 일반적인 접착제를 이용하거나 또는 양면테이프를 이용한다.
한편, 상기 반도체칩(2)의 입출력패드와 리드(6a) 일단은 접속수단으로 전도성와이어(8) 즉, 골드(Au)와이어 또는 알루미늄(Al)와이어를 이용한다.
상기 리드(6a) 단부에 형성된 상하돌출부(6b)는 그 하면에 입출력단자로써 솔더볼(10)이 융착되어 있고, 상기 상하돌출부(6b)의 상부 표면을 제외한(도3 참조) 상기 반도체칩(2), 전도성와이어(8)로 된 접속수단, 리드(6a) 등은 외부의 환경으로부터 보호되도록 에폭시몰딩컴파운드(Epoxy Molding Compound) 또는 글럽탑(Glop Top)과 같은 봉지재로 봉지되어 몸체(12)를 형성하고 있다.
한편, 도2b는 상기 리드(6a)의 단부를 반도체칩(2)의 입출력패드상에 올려놓고 열압착하여 직접 연결시킴으로서 TAB본딩부(8c)를 형성한 것이며, 이것은 접속수단으로서 전도성와이어(8a)를 사용하지 않아도 되어 생산비를 절감할 수 있는 장점이 있다.
도4는 본 발명에 의한 반도체패키지(30)가 다수개로 적층된 상태를 도시한 단면도이다.
본 발명에 의한 반도체패키지(30)는 독립된 개체로써 마더보드에 직접 실장하는 것도 가능하지만 도시된 바와 같이 다수개를 적층한 상태(40)로 마더보드에 실장하는 것도 가능하다. 이와 같이 다수개의 반도체패키지(30)를 적층할 경우에는 리드(6a) 단부에 형성된 상하돌출부(6b)를 이용하게 되는데 상기 상하돌출부(6b)의 상부표면은 몸체(12)의 외부로 노출되어 있기 때문에 가능한 것이다. 즉, 상기 노출된 상하돌출부(6b)의 상부표면에 다른 반도체패키지(30)의 솔더볼(10)이 위치되도록 위치를 정렬한 다음 리플로우(Reflow)함으로써 적층을 하게 되고 그 적층된 반도체패키지(30)의 상면에 상기와 같은 과정을 재차 실시함으로써 다수개의 반도체패키지(30)를 수직으로 적층하여 사용할 수 있는 것이다.
한편, 도5a내지 도5d는 본 발명에 의한 반도체패키지의 다른 실시예들을 도시한 단면도이다.
먼저 도5a에 도시된 반도체패키지(32)는, 반도체칩(2)상에 그 반도체칩(2)의 상면 넓이보다 큰 반도체칩탑재판(6c)이 접착수단(4)에 의해 접착되어 있음으로서 반도체칩(2)으로부터 발생되는 열을 외부로 신속히 방출할 수 있도록 되어 있다. 또한 리드(6a)의 길이는 도2a에 도시된 것보다 작게 형성된채 반도체칩(2)의 상면 외주연에만 위치되어 있고, 상기 리드(6a)의 단부와 반도체칩(2)의 입출력패드는 접속수단으로서 전도성와이어(8a)에 의해 접속되어 있다. 여기서 상기 입출력패드는 반도체칩(2)의 하면에 형성되어 있다.
도5b에 도시된 반도체패키지(33)는, 반도체칩탑재판(6c)이 그 반도체칩(2)의 상면 넓이보다 작게 형성된채 접착수단(4)으로 접착되어 있고, 반도체칩(2)의 상면 외주연에 형성된 입출력패드와 리드(6a)의 단부는 접속수단으로서 전도성와이어(8a)에 의해 연결되어 있다. 여기서 상기와 같이 반도체칩탑재판(6c)이 반도체칩(2)의 상면 넓이보다 작게 형성됨으로서 상기 입출력패드가 반도체칩(2)의 상면 외주연에 위치하도록 하여 반도체패키지를 제조할 수 있는 장점이 있다.
도5c에 도시된 반도체패키지(34)는, 반도체칩(2)의 상면 넓이보다 작은 반도체칩탑재판(6c)이 접착수단(4)에 의해 접착되어 있으며, 상기 반도체칩(2)의 입출력패드와 리드(6a)의 단부는 접속수단으로서 전도성볼(8b)에 의해 연결되어 있음으로서 전기적 경로를 더욱 짧게 할 수 있다.
한편, 도5d에 도시된 반도체패키지(35)는 반도체칩(2)의 상면 넓이보다 작은 반도체칩탑재판(6c)이 접착수단(4)에 의해 접착되어 있되, 상기 반도체칩탑재판(6c)의 두께는 리드(6a)와 동일평면을 이루도록 되어 있다. 즉, 상기 리드(6a)의 상면 전체 및 반도체칩탑재판(6c)의 상면전체가 할프에칭되어 형성됨으로서 그 반도체패키지의 두께를 초박형으로 형성할 수 있고, 또한 상기 반도체칩탑재판(6c) 및 리드(6a)의 상면이 모두 외부에 직접 노출되어 있음으로서 반도체칩(2)으로부터의 열을 보다 용이하게 방출할 수 있는 효과가 있는 것이다.
다음으로 도6a 내지 도6b는 본 발명에 의한 반도체패키지의 또다른 실시예들을 도시한 단면도이다.
도6a의 반도체패키지(36)는 도5c와 마찬가지로 반도체칩(2)의 상면 넓이보다 작은 반도체칩탑재판(6c)이 접착수단(4)에 의해 접착되어 있고, 상기 반도체칩(2)의 입출력패드와 리드(6a)의 단부는 전도성볼(8b)에 의해 연결되어 있다. 여기서 상기 반도체칩(2)은 저면에는 외부로 노출된 노출면(2a)이 형성되어 있는데, 이것은 상기 반도체칩(2)의 주변에만 액상의 봉지재등을 도포하여 몸체(12)를 형성한 것이다. 상기와 같이 반도체칩(2)의 일면에 노출면(2a)이 형성됨으로서 상기 반도체칩탑재판(6c)의 작용과 더불어 반도체칩(2)의 열을 보다 양호하게 방출할 수 있게 된다.
또한 도6b의 반도체패키지(37)는 도5d와 마찬가지로 반도체칩(2)의 상면 넓이보다 작은 반도체칩탑재판(6c)이 접착수단(4)에 의해 접착되어 있되, 상기 반도체칩탑재판(6c)의 두께는 리드(6a)와 동일평면을 이루도록 되어 있는 동시에 반도체칩(2)의 주변에만 봉지재가 도포되어 몸체(12)를 형성함으로서, 반도체칩(2)의 노출면(2a)을 형성하여 상기의 도6a의 반도체패키지(36)와 같이 반도체칩의 열방출성을 더욱 향상시킬 수 있게 된다.
상기 도6a와 6b와 같이 반도체칩의 저면에 몸체외부로 노출된 노출면을 형성하는 것은 본 발명의 모든 실시예에 적용가능하며, 상기와 같이 반도체칩의 저면이 노출되도록 몸체를 형성하는 방법은 글럽탑과 같은 액상봉지재를 봉지하고자 하는 부분에만 도포함으로서 가능한 것이며 이러한 액상봉지재는 당업자에게 잘 알려져 있는 물질이므로 여기서는 설명을 생략한다.
이상에서와 같이 본 발명은 비록 상기의 실시예에 한하여 설명하였지만 여기예만 한정되지 않으며 당업자가 본 발명의 내용을 숙지한 후에는 본 발명의 범주와 사상을 벗어나지 않는 범위내에서 여러가지로 변형된 실시예를 창작할 수 도 있을 것이다.
이상에서와 같이 본 발명에 의한 반도체패키지에 의하면, 인쇄회로기판 대신에 리드와 솔더볼을 사용함으로써 반도체패키지의 두께를 현저히 감소시킬 수 있으며, 전체적인 신호라인을 짧게 함으로서 그 전기적 성능을 향상시킬 수 있으며, 반도체칩탑재판을 외부로 노출시키거나 또는 반도체칩의 일면을 직접 외부로 노출시킴으로서 반도체칩으로부터의 열을 용이하게 방출할 수 있는 효과가 있다. 또한 본 발명에 의한 반도체패키지를 다수개 적층하여 메모리 소자로 사용함으로서 적은 면적에서 메모리용량을 극대화할 수 있는 효과가 있는 것이다.

Claims (10)

  1. 다수의 입출력패드가 구비된 반도체칩(2)과;
    상기 반도체칩(2)의 상면 외주연에 위치되어 있되, 일단에는 상하돌출부(6b)가 형성되어 있는 다수의 리드(6a)와;
    상기 반도체칩(2)의 입출력패드와 리드(6a)의 타단을 전기적으로 접속하는 접속수단과;
    상기 리드(6a)의 상하돌출부(6b) 하면에 입출력단자로써 융착된 솔더볼(10)과;
    상기 반도체칩(2), 접속수단 등을 외부의 환경으로부터 보호하기 위해 봉지재로 감싸서 형성된 몸체(12)를 포함하여 이루어진 것을 특징으로 하는 반도체패키지.
  2. 제1항에 있어서, 상기 리드(6a)는 반도체칩(2)의 상면에까지 연장되어 반도체칩(2)의 입출력패드와 접속수단으로 연결된 것을 특징으로 하는 반도체패키지.
  3. 제1항에 있어서, 상기 접속수단은 전도성볼(8a)인 것을 특징으로 하는 반도체패키지.
  4. 제1항에 있어서, 상기 접속수단은 전도성와이어(8b)인 것을 특징으로 하는 반도체패키지.
  5. 제1항에 있어서, 상기 접속수단은 리드 끝단을 열압착하여 반도체칩의 입출력패드에 직접 접속시킨 것을 특징으로 하는 반도체패키지.
  6. 제1항에 있어서, 상기 반도체칩(2)의 상면에는 금속재의 반도체칩탑재판(6c)이 접착수단(4)으로 접착되어 있는 것을 특징으로 하는 반도체패키지.
  7. 제6항에 있어서, 상기 반도체칩탑재판(6c)은 그 상면이 외부를 향해 노출되어 있는 것을 특징으로 하는 반도체패키지.
  8. 제6항에 있어서, 상기 리드(6a)와 반도체칩탑재판(6c)은 그 상면이 외부를 향해 노출되어 있는 것을 특징으로 하는 반도체패키지.
  9. 제8항에 있어서, 상기 리드(6a)와 반도체칩탑재판(6c)은 그 상면이 동일평면인 것을 특징으로 하는 반도체패키지.
  10. 제1항에 있어서, 상기 몸체(12)는 반도체칩(2)의 저면이 외부로 직접 노출되도록 형성된 것을 특징으로 하는 반도체패키지.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100501878B1 (ko) * 2000-06-12 2005-07-18 앰코 테크놀로지 코리아 주식회사 반도체패키지
KR100542672B1 (ko) * 2000-06-12 2006-01-12 앰코 테크놀로지 코리아 주식회사 반도체패키지
KR100549311B1 (ko) * 2000-08-21 2006-02-02 앰코 테크놀로지 코리아 주식회사 반도체패키지

Families Citing this family (222)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6143981A (en) 1998-06-24 2000-11-07 Amkor Technology, Inc. Plastic integrated circuit package and method and leadframe for making the package
US6153929A (en) 1998-08-21 2000-11-28 Micron Technology, Inc. Low profile multi-IC package connector
KR20000029054A (ko) * 1998-10-15 2000-05-25 이데이 노부유끼 반도체 장치 및 그 제조 방법
US6122171A (en) * 1999-07-30 2000-09-19 Micron Technology, Inc. Heat sink chip package and method of making
US6424033B1 (en) * 1999-08-31 2002-07-23 Micron Technology, Inc. Chip package with grease heat sink and method of making
KR20010037247A (ko) * 1999-10-15 2001-05-07 마이클 디. 오브라이언 반도체패키지
KR20010066268A (ko) * 1999-12-31 2001-07-11 마이클 디. 오브라이언 적층형 반도체 패키지 및 그 제조방법
JP4251421B2 (ja) * 2000-01-13 2009-04-08 新光電気工業株式会社 半導体装置の製造方法
JP2001250907A (ja) * 2000-03-08 2001-09-14 Toshiba Corp 半導体装置及びその製造方法
JP2001274196A (ja) * 2000-03-28 2001-10-05 Rohm Co Ltd 半導体装置
US7042068B2 (en) 2000-04-27 2006-05-09 Amkor Technology, Inc. Leadframe and semiconductor package made using the leadframe
US7247932B1 (en) 2000-05-19 2007-07-24 Megica Corporation Chip package with capacitor
US6548764B1 (en) 2000-06-07 2003-04-15 Micron Technology, Inc. Semiconductor packages and methods for making the same
US6543510B1 (en) 2000-06-07 2003-04-08 Micron Technology, Inc. Apparatus and methods for coverlay removal and adhesive application
JP2002009236A (ja) * 2000-06-21 2002-01-11 Shinko Electric Ind Co Ltd 多層半導体装置及びその製造方法
TW473965B (en) * 2000-09-04 2002-01-21 Siliconware Precision Industries Co Ltd Thin type semiconductor device and the manufacturing method thereof
JP3874062B2 (ja) * 2000-09-05 2007-01-31 セイコーエプソン株式会社 半導体装置
JP3405456B2 (ja) * 2000-09-11 2003-05-12 沖電気工業株式会社 半導体装置,半導体装置の製造方法,スタック型半導体装置及びスタック型半導体装置の製造方法
JP3798620B2 (ja) * 2000-12-04 2006-07-19 富士通株式会社 半導体装置の製造方法
US6885106B1 (en) 2001-01-11 2005-04-26 Tessera, Inc. Stacked microelectronic assemblies and methods of making same
US6545345B1 (en) 2001-03-20 2003-04-08 Amkor Technology, Inc. Mounting for a package containing a chip
KR100393448B1 (ko) * 2001-03-27 2003-08-02 앰코 테크놀로지 코리아 주식회사 반도체 패키지 및 그 제조 방법
KR100369393B1 (ko) 2001-03-27 2003-02-05 앰코 테크놀로지 코리아 주식회사 리드프레임 및 이를 이용한 반도체패키지와 그 제조 방법
KR20030042819A (ko) * 2001-11-24 2003-06-02 앰코 테크놀로지 코리아 주식회사 반도체 패키지 및 상기 반도체 패키지를 적층한 적층형반도체 패키지, 이를 제조하는 제조방법
JP3925615B2 (ja) * 2001-07-04 2007-06-06 ソニー株式会社 半導体モジュール
US6451626B1 (en) 2001-07-27 2002-09-17 Charles W.C. Lin Three-dimensional stacked semiconductor package
US6765287B1 (en) 2001-07-27 2004-07-20 Charles W. C. Lin Three-dimensional stacked semiconductor package
US6790710B2 (en) 2002-01-31 2004-09-14 Asat Limited Method of manufacturing an integrated circuit package
US7605479B2 (en) * 2001-08-22 2009-10-20 Tessera, Inc. Stacked chip assembly with encapsulant layer
US20030048624A1 (en) * 2001-08-22 2003-03-13 Tessera, Inc. Low-height multi-component assemblies
US6613606B1 (en) * 2001-09-17 2003-09-02 Magic Corporation Structure of high performance combo chip and processing method
DE10297316T5 (de) * 2001-10-09 2004-12-09 Tessera, Inc., San Jose Gestapelte Baugruppen
US6987034B1 (en) 2002-01-09 2006-01-17 Bridge Semiconductor Corporation Method of making a semiconductor package device that includes singulating and trimming a lead
US7190060B1 (en) * 2002-01-09 2007-03-13 Bridge Semiconductor Corporation Three-dimensional stacked semiconductor package device with bent and flat leads and method of making same
US6936495B1 (en) 2002-01-09 2005-08-30 Bridge Semiconductor Corporation Method of making an optoelectronic semiconductor package device
US6891276B1 (en) 2002-01-09 2005-05-10 Bridge Semiconductor Corporation Semiconductor package device
JP2003264260A (ja) * 2002-03-08 2003-09-19 Toshiba Corp 半導体チップ搭載基板、半導体装置、半導体モジュール及び半導体装置実装基板
US6653723B2 (en) * 2002-03-09 2003-11-25 Fujitsu Limited System for providing an open-cavity low profile encapsulated semiconductor package
US6803303B1 (en) 2002-07-11 2004-10-12 Micron Technology, Inc. Method of fabricating semiconductor component having encapsulated, bonded, interconnect contacts
US6765288B2 (en) * 2002-08-05 2004-07-20 Tessera, Inc. Microelectronic adaptors, assemblies and methods
AU2003265417A1 (en) * 2002-08-16 2004-03-03 Tessera, Inc. Microelectronic packages with self-aligning features
JP3801121B2 (ja) * 2002-08-30 2006-07-26 松下電器産業株式会社 樹脂封止型半導体装置およびその製造方法
US7294928B2 (en) 2002-09-06 2007-11-13 Tessera, Inc. Components, methods and assemblies for stacked packages
US7071547B2 (en) 2002-09-11 2006-07-04 Tessera, Inc. Assemblies having stacked semiconductor chips and methods of making same
US7061122B2 (en) * 2002-10-11 2006-06-13 Tessera, Inc. Components, methods and assemblies for multi-chip packages
TW567601B (en) 2002-10-18 2003-12-21 Siliconware Precision Industries Co Ltd Module device of stacked semiconductor package and method for fabricating the same
JP3736516B2 (ja) * 2002-11-01 2006-01-18 松下電器産業株式会社 リードフレームおよびその製造方法ならびに樹脂封止型半導体装置およびその製造方法
CN100336221C (zh) * 2002-11-04 2007-09-05 矽品精密工业股份有限公司 可堆栈半导体封装件的模块化装置及其制法
US7723210B2 (en) 2002-11-08 2010-05-25 Amkor Technology, Inc. Direct-write wafer level chip scale package
US6905914B1 (en) 2002-11-08 2005-06-14 Amkor Technology, Inc. Wafer level package and fabrication method
KR100616435B1 (ko) * 2002-11-28 2006-08-29 삼성전자주식회사 반도체 패키지 및 그를 적층한 적층 패키지
DE10259221B4 (de) * 2002-12-17 2007-01-25 Infineon Technologies Ag Elektronisches Bauteil mit einem Stapel aus Halbleiterchips und Verfahren zur Herstellung desselben
US6798047B1 (en) 2002-12-26 2004-09-28 Amkor Technology, Inc. Pre-molded leadframe
US6686656B1 (en) * 2003-01-13 2004-02-03 Kingston Technology Corporation Integrated multi-chip chip scale package
US7253510B2 (en) 2003-01-16 2007-08-07 International Business Machines Corporation Ball grid array package construction with raised solder ball pads
US6750545B1 (en) 2003-02-28 2004-06-15 Amkor Technology, Inc. Semiconductor package capable of die stacking
US6794740B1 (en) 2003-03-13 2004-09-21 Amkor Technology, Inc. Leadframe package for semiconductor devices
US6841883B1 (en) * 2003-03-31 2005-01-11 Micron Technology, Inc. Multi-dice chip scale semiconductor components and wafer level methods of fabrication
US7309923B2 (en) * 2003-06-16 2007-12-18 Sandisk Corporation Integrated circuit package having stacked integrated circuits and method therefor
US6984881B2 (en) * 2003-06-16 2006-01-10 Sandisk Corporation Stackable integrated circuit package and method therefor
US7191516B2 (en) * 2003-07-16 2007-03-20 Maxwell Technologies, Inc. Method for shielding integrated circuit devices
US20050012207A1 (en) * 2003-07-16 2005-01-20 Jackson Hsieh Substrate structure for an integrated circuit package and method for manufacturing the same
US7368810B2 (en) * 2003-08-29 2008-05-06 Micron Technology, Inc. Invertible microfeature device packages
US7180165B2 (en) * 2003-09-05 2007-02-20 Sanmina, Sci Corporation Stackable electronic assembly
US7061121B2 (en) 2003-11-12 2006-06-13 Tessera, Inc. Stacked microelectronic assemblies with central contacts
US7993983B1 (en) 2003-11-17 2011-08-09 Bridge Semiconductor Corporation Method of making a semiconductor chip assembly with chip and encapsulant grinding
US7425759B1 (en) 2003-11-20 2008-09-16 Bridge Semiconductor Corporation Semiconductor chip assembly with bumped terminal and filler
US7538415B1 (en) 2003-11-20 2009-05-26 Bridge Semiconductor Corporation Semiconductor chip assembly with bumped terminal, filler and insulative base
US6998703B2 (en) * 2003-12-04 2006-02-14 Palo Alto Research Center Inc. Thin package for stacking integrated circuits
US7227249B1 (en) 2003-12-24 2007-06-05 Bridge Semiconductor Corporation Three-dimensional stacked semiconductor package with chips on opposite sides of lead
TWI244174B (en) * 2003-12-31 2005-11-21 Siliconware Precision Industries Co Ltd Photosensitive semiconductor package and method for fabricating the same
DE102004009056B4 (de) * 2004-02-23 2010-04-22 Infineon Technologies Ag Verfahren zur Herstellung eines Halbleitermoduls aus mehreren stapelbaren Halbleiterbauteilen mit einem Umverdrahtungssubstrat
US7091581B1 (en) * 2004-06-14 2006-08-15 Asat Limited Integrated circuit package and process for fabricating the same
US7411289B1 (en) 2004-06-14 2008-08-12 Asat Ltd. Integrated circuit package with partially exposed contact pads and process for fabricating the same
US7678610B2 (en) * 2004-10-28 2010-03-16 UTAC-United Test and Assembly Test Center Ltd. Semiconductor chip package and method of manufacture
CN101053079A (zh) 2004-11-03 2007-10-10 德塞拉股份有限公司 堆叠式封装的改进
US7750483B1 (en) 2004-11-10 2010-07-06 Bridge Semiconductor Corporation Semiconductor chip assembly with welded metal pillar and enlarged plated contact terminal
US7645640B2 (en) * 2004-11-15 2010-01-12 Stats Chippac Ltd. Integrated circuit package system with leadframe substrate
JP2006196709A (ja) * 2005-01-13 2006-07-27 Sharp Corp 半導体装置およびその製造方法
US7446396B2 (en) * 2005-02-10 2008-11-04 Stats Chippac Ltd. Stacked integrated circuit leadframe package system
US7196427B2 (en) * 2005-04-18 2007-03-27 Freescale Semiconductor, Inc. Structure having an integrated circuit on another integrated circuit with an intervening bent adhesive element
US7615851B2 (en) * 2005-04-23 2009-11-10 Stats Chippac Ltd. Integrated circuit package system
JP4308797B2 (ja) * 2005-05-02 2009-08-05 株式会社アドバンストシステムズジャパン 半導体パッケージおよびソケット付き回路基板
US20060267173A1 (en) * 2005-05-26 2006-11-30 Sandisk Corporation Integrated circuit package having stacked integrated circuits and method therefor
TWI255561B (en) * 2005-07-21 2006-05-21 Chipmos Technologies Inc Manufacturing process for chip package without core
US8643163B2 (en) * 2005-08-08 2014-02-04 Stats Chippac Ltd. Integrated circuit package-on-package stacking system and method of manufacture thereof
US8039956B2 (en) * 2005-08-22 2011-10-18 Texas Instruments Incorporated High current semiconductor device system having low resistance and inductance
US7335536B2 (en) 2005-09-01 2008-02-26 Texas Instruments Incorporated Method for fabricating low resistance, low inductance interconnections in high current semiconductor devices
US7507603B1 (en) 2005-12-02 2009-03-24 Amkor Technology, Inc. Etch singulated semiconductor package
US7572681B1 (en) 2005-12-08 2009-08-11 Amkor Technology, Inc. Embedded electronic component package
US8058101B2 (en) 2005-12-23 2011-11-15 Tessera, Inc. Microelectronic packages and methods therefor
US7714453B2 (en) * 2006-05-12 2010-05-11 Broadcom Corporation Interconnect structure and formation for package stacking of molded plastic area array package
US7902660B1 (en) 2006-05-24 2011-03-08 Amkor Technology, Inc. Substrate for semiconductor device and manufacturing method thereof
TW200818451A (en) * 2006-06-02 2008-04-16 Renesas Tech Corp Semiconductor device
US8581381B2 (en) * 2006-06-20 2013-11-12 Broadcom Corporation Integrated circuit (IC) package stacking and IC packages formed by same
US7968998B1 (en) 2006-06-21 2011-06-28 Amkor Technology, Inc. Side leaded, bottom exposed pad and bottom exposed lead fusion quad flat semiconductor package
SG139573A1 (en) * 2006-07-17 2008-02-29 Micron Technology Inc Microelectronic packages with leadframes, including leadframes configured for stacked die packages, and associated systems and methods
TWI336502B (en) * 2006-09-27 2011-01-21 Advanced Semiconductor Eng Semiconductor package and semiconductor device and the method of making the same
US7811863B1 (en) 2006-10-26 2010-10-12 Bridge Semiconductor Corporation Method of making a semiconductor chip assembly with metal pillar and encapsulant grinding and heat sink attachment
US20080157302A1 (en) * 2006-12-27 2008-07-03 Lee Seungju Stacked-package quad flat null lead package
US7687893B2 (en) 2006-12-27 2010-03-30 Amkor Technology, Inc. Semiconductor package having leadframe with exposed anchor pads
US7829990B1 (en) 2007-01-18 2010-11-09 Amkor Technology, Inc. Stackable semiconductor package including laminate interposer
US7982297B1 (en) 2007-03-06 2011-07-19 Amkor Technology, Inc. Stackable semiconductor package having partially exposed semiconductor die and method of fabricating the same
TWI335070B (en) * 2007-03-23 2010-12-21 Advanced Semiconductor Eng Semiconductor package and the method of making the same
US7763983B2 (en) * 2007-07-02 2010-07-27 Tessera, Inc. Stackable microelectronic device carriers, stacked device carriers and methods of making the same
US7977774B2 (en) 2007-07-10 2011-07-12 Amkor Technology, Inc. Fusion quad flat semiconductor package
US7687899B1 (en) 2007-08-07 2010-03-30 Amkor Technology, Inc. Dual laminate package structure with embedded elements
US7777351B1 (en) 2007-10-01 2010-08-17 Amkor Technology, Inc. Thin stacked interposer package
US8089159B1 (en) 2007-10-03 2012-01-03 Amkor Technology, Inc. Semiconductor package with increased I/O density and method of making the same
US7847386B1 (en) 2007-11-05 2010-12-07 Amkor Technology, Inc. Reduced size stacked semiconductor package and method of making the same
US7956453B1 (en) 2008-01-16 2011-06-07 Amkor Technology, Inc. Semiconductor package with patterning layer and method of making same
US7723852B1 (en) 2008-01-21 2010-05-25 Amkor Technology, Inc. Stacked semiconductor package and method of making same
TWI358816B (en) * 2008-03-19 2012-02-21 Chipmos Technologies Inc Chip package structure
US8067821B1 (en) 2008-04-10 2011-11-29 Amkor Technology, Inc. Flat semiconductor package with half package molding
US7768135B1 (en) 2008-04-17 2010-08-03 Amkor Technology, Inc. Semiconductor package with fast power-up cycle and method of making same
US7808084B1 (en) 2008-05-06 2010-10-05 Amkor Technology, Inc. Semiconductor package with half-etched locking features
TWI473553B (zh) * 2008-07-03 2015-02-11 Advanced Semiconductor Eng 晶片封裝結構
US8125064B1 (en) 2008-07-28 2012-02-28 Amkor Technology, Inc. Increased I/O semiconductor package and method of making same
US8184453B1 (en) 2008-07-31 2012-05-22 Amkor Technology, Inc. Increased capacity semiconductor package
KR100997793B1 (ko) * 2008-09-01 2010-12-02 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
US7847392B1 (en) 2008-09-30 2010-12-07 Amkor Technology, Inc. Semiconductor device including leadframe with increased I/O
US7989933B1 (en) 2008-10-06 2011-08-02 Amkor Technology, Inc. Increased I/O leadframe and semiconductor device including same
US8008758B1 (en) 2008-10-27 2011-08-30 Amkor Technology, Inc. Semiconductor device with increased I/O leadframe
KR101461630B1 (ko) * 2008-11-06 2014-11-20 삼성전자주식회사 실장 높이는 축소되나, 솔더 접합 신뢰도는 개선되는 웨이퍼 레벨 칩 온 칩 패키지와, 패키지 온 패키지 및 그 제조방법
US8089145B1 (en) 2008-11-17 2012-01-03 Amkor Technology, Inc. Semiconductor device including increased capacity leadframe
US8072050B1 (en) 2008-11-18 2011-12-06 Amkor Technology, Inc. Semiconductor device with increased I/O leadframe including passive device
US7875963B1 (en) 2008-11-21 2011-01-25 Amkor Technology, Inc. Semiconductor device including leadframe having power bars and increased I/O
US7982298B1 (en) 2008-12-03 2011-07-19 Amkor Technology, Inc. Package in package semiconductor device
US8487420B1 (en) 2008-12-08 2013-07-16 Amkor Technology, Inc. Package in package semiconductor device with film over wire
US20170117214A1 (en) 2009-01-05 2017-04-27 Amkor Technology, Inc. Semiconductor device with through-mold via
US8680656B1 (en) 2009-01-05 2014-03-25 Amkor Technology, Inc. Leadframe structure for concentrated photovoltaic receiver package
US20100171206A1 (en) * 2009-01-07 2010-07-08 Chi-Chih Chu Package-on-Package Device, Semiconductor Package, and Method for Manufacturing The Same
TWI499024B (zh) * 2009-01-07 2015-09-01 Advanced Semiconductor Eng 堆疊式多封裝構造裝置、半導體封裝構造及其製造方法
US8012797B2 (en) * 2009-01-07 2011-09-06 Advanced Semiconductor Engineering, Inc. Method for forming stackable semiconductor device packages including openings with conductive bumps of specified geometries
US8058715B1 (en) 2009-01-09 2011-11-15 Amkor Technology, Inc. Package in package device for RF transceiver module
US8026589B1 (en) 2009-02-23 2011-09-27 Amkor Technology, Inc. Reduced profile stackable semiconductor package
US7960818B1 (en) 2009-03-04 2011-06-14 Amkor Technology, Inc. Conformal shield on punch QFN semiconductor package
US8575742B1 (en) 2009-04-06 2013-11-05 Amkor Technology, Inc. Semiconductor device with increased I/O leadframe including power bars
US8580609B2 (en) * 2009-06-30 2013-11-12 Intel Corporation Semiconductor device with embedded interconnect pad
US8310835B2 (en) * 2009-07-14 2012-11-13 Apple Inc. Systems and methods for providing vias through a modular component
TWI469283B (zh) * 2009-08-31 2015-01-11 Advanced Semiconductor Eng 封裝結構以及封裝製程
US8796561B1 (en) 2009-10-05 2014-08-05 Amkor Technology, Inc. Fan out build up substrate stackable package and method
US8198131B2 (en) 2009-11-18 2012-06-12 Advanced Semiconductor Engineering, Inc. Stackable semiconductor device packages
JP2010080971A (ja) * 2009-11-25 2010-04-08 Dainippon Printing Co Ltd 樹脂封止型半導体装置とその製造方法
US8937381B1 (en) 2009-12-03 2015-01-20 Amkor Technology, Inc. Thin stackable package and method
US9691734B1 (en) 2009-12-07 2017-06-27 Amkor Technology, Inc. Method of forming a plurality of electronic component packages
US8476775B2 (en) * 2009-12-17 2013-07-02 Stats Chippac Ltd. Integrated circuit packaging system with embedded interconnect and method of manufacture thereof
TWI408785B (zh) 2009-12-31 2013-09-11 Advanced Semiconductor Eng 半導體封裝結構
US8569894B2 (en) 2010-01-13 2013-10-29 Advanced Semiconductor Engineering, Inc. Semiconductor package with single sided substrate design and manufacturing methods thereof
TWI419283B (zh) * 2010-02-10 2013-12-11 Advanced Semiconductor Eng 封裝結構
TWI411075B (zh) 2010-03-22 2013-10-01 Advanced Semiconductor Eng 半導體封裝件及其製造方法
US8624374B2 (en) 2010-04-02 2014-01-07 Advanced Semiconductor Engineering, Inc. Semiconductor device packages with fan-out and with connecting elements for stacking and manufacturing methods thereof
US8278746B2 (en) 2010-04-02 2012-10-02 Advanced Semiconductor Engineering, Inc. Semiconductor device packages including connecting elements
US8324511B1 (en) 2010-04-06 2012-12-04 Amkor Technology, Inc. Through via nub reveal method and structure
US8294276B1 (en) 2010-05-27 2012-10-23 Amkor Technology, Inc. Semiconductor device and fabricating method thereof
US8482111B2 (en) 2010-07-19 2013-07-09 Tessera, Inc. Stackable molded microelectronic packages
US9159708B2 (en) 2010-07-19 2015-10-13 Tessera, Inc. Stackable molded microelectronic packages with area array unit connectors
US8440554B1 (en) 2010-08-02 2013-05-14 Amkor Technology, Inc. Through via connected backside embedded circuit features structure and method
US8487445B1 (en) 2010-10-05 2013-07-16 Amkor Technology, Inc. Semiconductor device having through electrodes protruding from dielectric layer
TWI451546B (zh) 2010-10-29 2014-09-01 Advanced Semiconductor Eng 堆疊式封裝結構、其封裝結構及封裝結構之製造方法
KR101075241B1 (ko) 2010-11-15 2011-11-01 테세라, 인코포레이티드 유전체 부재에 단자를 구비하는 마이크로전자 패키지
US8791501B1 (en) 2010-12-03 2014-07-29 Amkor Technology, Inc. Integrated passive device structure and method
US8674485B1 (en) 2010-12-08 2014-03-18 Amkor Technology, Inc. Semiconductor device including leadframe with downsets
US20120146206A1 (en) 2010-12-13 2012-06-14 Tessera Research Llc Pin attachment
US8390130B1 (en) 2011-01-06 2013-03-05 Amkor Technology, Inc. Through via recessed reveal structure and method
TWI445155B (zh) 2011-01-06 2014-07-11 Advanced Semiconductor Eng 堆疊式封裝結構及其製造方法
US8648450B1 (en) 2011-01-27 2014-02-11 Amkor Technology, Inc. Semiconductor device including leadframe with a combination of leads and lands
TWI557183B (zh) 2015-12-16 2016-11-11 財團法人工業技術研究院 矽氧烷組成物、以及包含其之光電裝置
US9171792B2 (en) 2011-02-28 2015-10-27 Advanced Semiconductor Engineering, Inc. Semiconductor device packages having a side-by-side device arrangement and stacking functionality
KR101128063B1 (ko) 2011-05-03 2012-04-23 테세라, 인코포레이티드 캡슐화 층의 표면에 와이어 본드를 구비하는 패키지 적층형 어셈블리
US8618659B2 (en) 2011-05-03 2013-12-31 Tessera, Inc. Package-on-package assembly with wire bonds to encapsulation surface
US8836136B2 (en) 2011-10-17 2014-09-16 Invensas Corporation Package-on-package assembly with wire bond vias
US8552548B1 (en) 2011-11-29 2013-10-08 Amkor Technology, Inc. Conductive pad on protruding through electrode semiconductor device
US8946757B2 (en) 2012-02-17 2015-02-03 Invensas Corporation Heat spreading substrate with embedded interconnects
US8372741B1 (en) 2012-02-24 2013-02-12 Invensas Corporation Method for package-on-package assembly with wire bonds to encapsulation surface
US9349706B2 (en) 2012-02-24 2016-05-24 Invensas Corporation Method for package-on-package assembly with wire bonds to encapsulation surface
US9704725B1 (en) 2012-03-06 2017-07-11 Amkor Technology, Inc. Semiconductor device with leadframe configured to facilitate reduced burr formation
US20130234317A1 (en) 2012-03-09 2013-09-12 Taiwan Semiconductor Manufacturing Company, Ltd. Packaging Methods and Packaged Semiconductor Devices
US9263412B2 (en) 2012-03-09 2016-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Packaging methods and packaged semiconductor devices
US9048298B1 (en) 2012-03-29 2015-06-02 Amkor Technology, Inc. Backside warpage control structure and fabrication method
US9129943B1 (en) 2012-03-29 2015-09-08 Amkor Technology, Inc. Embedded component package and fabrication method
US8835228B2 (en) 2012-05-22 2014-09-16 Invensas Corporation Substrate-less stackable package with wire-bond interconnect
US9391008B2 (en) 2012-07-31 2016-07-12 Invensas Corporation Reconstituted wafer-level package DRAM
US9502390B2 (en) 2012-08-03 2016-11-22 Invensas Corporation BVA interposer
US8975738B2 (en) 2012-11-12 2015-03-10 Invensas Corporation Structure for microelectronic packaging with terminals on dielectric mass
US8878353B2 (en) 2012-12-20 2014-11-04 Invensas Corporation Structure for microelectronic packaging with bond elements to encapsulation surface
US9136254B2 (en) 2013-02-01 2015-09-15 Invensas Corporation Microelectronic package having wire bond vias and stiffening layer
KR101486790B1 (ko) 2013-05-02 2015-01-28 앰코 테크놀로지 코리아 주식회사 강성보강부를 갖는 마이크로 리드프레임
US9023691B2 (en) 2013-07-15 2015-05-05 Invensas Corporation Microelectronic assemblies with stack terminals coupled by connectors extending through encapsulation
US8883563B1 (en) 2013-07-15 2014-11-11 Invensas Corporation Fabrication of microelectronic assemblies having stack terminals coupled by connectors extending through encapsulation
US9034696B2 (en) 2013-07-15 2015-05-19 Invensas Corporation Microelectronic assemblies having reinforcing collars on connectors extending through encapsulation
US9167710B2 (en) 2013-08-07 2015-10-20 Invensas Corporation Embedded packaging with preformed vias
US9685365B2 (en) 2013-08-08 2017-06-20 Invensas Corporation Method of forming a wire bond having a free end
US20150076714A1 (en) 2013-09-16 2015-03-19 Invensas Corporation Microelectronic element with bond elements to encapsulation surface
KR101563911B1 (ko) 2013-10-24 2015-10-28 앰코 테크놀로지 코리아 주식회사 반도체 패키지
US9087815B2 (en) 2013-11-12 2015-07-21 Invensas Corporation Off substrate kinking of bond wire
US9082753B2 (en) 2013-11-12 2015-07-14 Invensas Corporation Severing bond wire by kinking and twisting
US9263394B2 (en) 2013-11-22 2016-02-16 Invensas Corporation Multiple bond via arrays of different wire heights on a same substrate
US9379074B2 (en) 2013-11-22 2016-06-28 Invensas Corporation Die stacks with one or more bond via arrays of wire bond wires and with one or more arrays of bump interconnects
US9583456B2 (en) 2013-11-22 2017-02-28 Invensas Corporation Multiple bond via arrays of different wire heights on a same substrate
US9484278B2 (en) * 2013-11-27 2016-11-01 Infineon Technologies Ag Semiconductor package and method for producing the same
US9583411B2 (en) 2014-01-17 2017-02-28 Invensas Corporation Fine pitch BVA using reconstituted wafer with area array accessible for testing
US9214454B2 (en) 2014-03-31 2015-12-15 Invensas Corporation Batch process fabrication of package-on-package microelectronic assemblies
US9673122B2 (en) 2014-05-02 2017-06-06 Amkor Technology, Inc. Micro lead frame structure having reinforcing portions and method
US10381326B2 (en) 2014-05-28 2019-08-13 Invensas Corporation Structure and method for integrated circuits packaging with increased density
US9646917B2 (en) 2014-05-29 2017-05-09 Invensas Corporation Low CTE component with wire bond interconnects
US9412714B2 (en) 2014-05-30 2016-08-09 Invensas Corporation Wire bond support structure and microelectronic package including wire bonds therefrom
US9735084B2 (en) 2014-12-11 2017-08-15 Invensas Corporation Bond via array for thermal conductivity
KR101718321B1 (ko) * 2014-12-23 2017-03-21 인텔 코포레이션 패키지 온 패키지 제품을 위한 와이어 리드를 포함하는 적층 패키지 어셈블리, 컴퓨팅 디바이스 및 집적 패키지 설계 방법
US9888579B2 (en) 2015-03-05 2018-02-06 Invensas Corporation Pressing of wire bond wire tips to provide bent-over tips
US9502372B1 (en) 2015-04-30 2016-11-22 Invensas Corporation Wafer-level packaging using wire bond wires in place of a redistribution layer
US9761554B2 (en) 2015-05-07 2017-09-12 Invensas Corporation Ball bonding metal wire bond wires to metal pads
US9490222B1 (en) 2015-10-12 2016-11-08 Invensas Corporation Wire bond wires for interference shielding
US10490528B2 (en) 2015-10-12 2019-11-26 Invensas Corporation Embedded wire bond wires
US10332854B2 (en) 2015-10-23 2019-06-25 Invensas Corporation Anchoring structure of fine pitch bva
US10181457B2 (en) 2015-10-26 2019-01-15 Invensas Corporation Microelectronic package for wafer-level chip scale packaging with fan-out
US9911718B2 (en) 2015-11-17 2018-03-06 Invensas Corporation ‘RDL-First’ packaged microelectronic device for a package-on-package device
US9659848B1 (en) 2015-11-18 2017-05-23 Invensas Corporation Stiffened wires for offset BVA
US9984992B2 (en) 2015-12-30 2018-05-29 Invensas Corporation Embedded wire bond wires for vertical integration with separate surface mount and wire bond mounting surfaces
US9935075B2 (en) 2016-07-29 2018-04-03 Invensas Corporation Wire bonding method and apparatus for electromagnetic interference shielding
US10299368B2 (en) 2016-12-21 2019-05-21 Invensas Corporation Surface integrated waveguides and circuit structures therefor
KR102582066B1 (ko) * 2018-04-17 2023-09-25 삼성디스플레이 주식회사 칩 온 필름 패키지 및 칩 온 필름 패키지를 포함하는 표시 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2967697B2 (ja) * 1994-11-22 1999-10-25 ソニー株式会社 リードフレームの製造方法と半導体装置の製造方法
US5945741A (en) * 1995-11-21 1999-08-31 Sony Corporation Semiconductor chip housing having a reinforcing plate
US5677566A (en) * 1995-05-08 1997-10-14 Micron Technology, Inc. Semiconductor chip package
JPH1098072A (ja) * 1996-09-20 1998-04-14 Hitachi Ltd 半導体装置及びその製造方法
US5952611A (en) * 1997-12-19 1999-09-14 Texas Instruments Incorporated Flexible pin location integrated circuit package
US6049129A (en) * 1997-12-19 2000-04-11 Texas Instruments Incorporated Chip size integrated circuit package

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100501878B1 (ko) * 2000-06-12 2005-07-18 앰코 테크놀로지 코리아 주식회사 반도체패키지
KR100542672B1 (ko) * 2000-06-12 2006-01-12 앰코 테크놀로지 코리아 주식회사 반도체패키지
KR100549311B1 (ko) * 2000-08-21 2006-02-02 앰코 테크놀로지 코리아 주식회사 반도체패키지

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KR100260997B1 (ko) 2000-07-01
JP3196026B2 (ja) 2001-08-06
US6303997B1 (en) 2001-10-16

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