KR101967778B1 - 폴리머 파라-자일릴렌 또는 치환된 파라-자일릴렌의 얇은 층을 증착시키기 위한 방법 및 장치 - Google Patents

폴리머 파라-자일릴렌 또는 치환된 파라-자일릴렌의 얇은 층을 증착시키기 위한 방법 및 장치 Download PDF

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KR101967778B1
KR101967778B1 KR1020107029891A KR20107029891A KR101967778B1 KR 101967778 B1 KR101967778 B1 KR 101967778B1 KR 1020107029891 A KR1020107029891 A KR 1020107029891A KR 20107029891 A KR20107029891 A KR 20107029891A KR 101967778 B1 KR101967778 B1 KR 101967778B1
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gas
temperature
chamber
substrate
support surface
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KR20110015661A (ko
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마르쿠스 게르스도르프
바스커 파가다라 고피
니코 메이어
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아익스트론 에스이
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
KR1020107029891A 2008-06-03 2009-06-03 폴리머 파라-자일릴렌 또는 치환된 파라-자일릴렌의 얇은 층을 증착시키기 위한 방법 및 장치 Expired - Fee Related KR101967778B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008026974A DE102008026974A1 (de) 2008-06-03 2008-06-03 Verfahren und Vorrichtung zum Abscheiden dünner Schichten aus polymeren Para-Xylylene oder substituiertem Para-Xylylene
DE102008026974.3 2008-06-03
PCT/EP2009/056768 WO2009147156A1 (de) 2008-06-03 2009-06-03 Verfahren und vorrichtung zum abscheiden dünner schichten aus polymeren para-xylylene oder substituiertem para-xylylene

Publications (2)

Publication Number Publication Date
KR20110015661A KR20110015661A (ko) 2011-02-16
KR101967778B1 true KR101967778B1 (ko) 2019-08-13

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KR1020107029891A Expired - Fee Related KR101967778B1 (ko) 2008-06-03 2009-06-03 폴리머 파라-자일릴렌 또는 치환된 파라-자일릴렌의 얇은 층을 증착시키기 위한 방법 및 장치

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Country Link
US (1) US20110293832A1 (enExample)
EP (1) EP2293883B1 (enExample)
JP (1) JP2011522130A (enExample)
KR (1) KR101967778B1 (enExample)
CN (1) CN102056679B (enExample)
DE (1) DE102008026974A1 (enExample)
RU (1) RU2481901C2 (enExample)
TW (1) TWI463031B (enExample)
WO (1) WO2009147156A1 (enExample)

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WO2022025591A1 (ko) * 2020-07-30 2022-02-03 연세대학교 산학협력단 폴리머 증착기 및 폴리머 증착 방법

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DE102010000480A1 (de) 2010-02-19 2011-08-25 Aixtron Ag, 52134 Vorrichtung zum Abscheiden einer organischen Schicht, insbesondere einer Polymerschicht mit einem Aerosolerzeuger sowie ein hierzu geeigneter Aerosolerzeuger
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TW201540772A (zh) * 2014-04-24 2015-11-01 美樺興業股份有限公司 高分子粒子及其製備方法
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KR101709344B1 (ko) * 2014-12-11 2017-03-08 한국과학기술원 종이기판 및 그 제조방법과 종이기판을 이용하는 센서 및 그 제조방법
US10743421B2 (en) * 2016-06-17 2020-08-11 Hzo, Inc. Mixing dimers for moisture resistant materials
CN108355855B (zh) * 2018-03-23 2020-05-29 德淮半导体有限公司 增粘剂涂布装置
GB201814231D0 (en) * 2018-08-31 2018-10-17 Univ Surrey Apparatus for forming a poly(p-xylylene) film on a component
WO2020251696A1 (en) 2019-06-10 2020-12-17 Applied Materials, Inc. Processing system for forming layers
US11788190B2 (en) 2019-07-05 2023-10-17 Asm Ip Holding B.V. Liquid vaporizer
GB201913140D0 (en) * 2019-09-12 2019-10-30 Ucl Business Plc Methods and apparatuses for fabricating polymeric conformal coatings, parts coated with polymeric conformal coatings, and optical apparatus
US11946136B2 (en) 2019-09-20 2024-04-02 Asm Ip Holding B.V. Semiconductor processing device
CN114277359B (zh) * 2021-12-28 2023-11-28 新美光(苏州)半导体科技有限公司 进气管道、化学气相沉积炉及向其通入前驱体的方法
DE102022122315A1 (de) * 2022-09-02 2024-03-07 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und vorrichtung zur herstellung einer tragstruktur, tragstruktur und optisches gerät mit einer tragstruktur
CN115572946B (zh) * 2022-09-16 2024-09-24 华为数字能源技术有限公司 一种钙钛矿的制备方法、制备设备及光电转换器

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WO2022025591A1 (ko) * 2020-07-30 2022-02-03 연세대학교 산학협력단 폴리머 증착기 및 폴리머 증착 방법

Also Published As

Publication number Publication date
JP2011522130A (ja) 2011-07-28
RU2481901C2 (ru) 2013-05-20
KR20110015661A (ko) 2011-02-16
DE102008026974A1 (de) 2009-12-10
RU2010154436A (ru) 2012-07-20
TWI463031B (zh) 2014-12-01
EP2293883B1 (de) 2018-03-21
US20110293832A1 (en) 2011-12-01
EP2293883A1 (de) 2011-03-16
CN102056679A (zh) 2011-05-11
WO2009147156A1 (de) 2009-12-10
TW201009109A (en) 2010-03-01
CN102056679B (zh) 2015-01-14

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