KR101818874B1 - 방사선 검출 장치, 방사선 검출 시스템 및 방사선 검출 장치의 제조 방법 - Google Patents
방사선 검출 장치, 방사선 검출 시스템 및 방사선 검출 장치의 제조 방법 Download PDFInfo
- Publication number
- KR101818874B1 KR101818874B1 KR1020167017969A KR20167017969A KR101818874B1 KR 101818874 B1 KR101818874 B1 KR 101818874B1 KR 1020167017969 A KR1020167017969 A KR 1020167017969A KR 20167017969 A KR20167017969 A KR 20167017969A KR 101818874 B1 KR101818874 B1 KR 101818874B1
- Authority
- KR
- South Korea
- Prior art keywords
- sensor substrates
- sensor
- substrates
- bonding
- scintillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/46—Arrangements for interfacing with the operator or the patient
- A61B6/461—Displaying means of special interest
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/48—Diagnostic techniques
- A61B6/486—Diagnostic techniques involving generating temporal series of image data
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2002—Optical details, e.g. reflecting or diffusing layers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20185—Coupling means between the photodiode and the scintillator, e.g. optical couplings using adhesives with wavelength-shifting fibres
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/29—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to radiation having very short wavelengths, e.g. X-rays, gamma-rays or corpuscular radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
- H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Medical Informatics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Surgery (AREA)
- Optics & Photonics (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Biophysics (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Human Computer Interaction (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2013-258139 | 2013-12-13 | ||
| JP2013258139A JP6270450B2 (ja) | 2013-12-13 | 2013-12-13 | 放射線検出装置、放射線検出システム、及び、放射線検出装置の製造方法 |
| PCT/JP2014/078874 WO2015087636A1 (ja) | 2013-12-13 | 2014-10-30 | 放射線検出装置、放射線検出システム、及び、放射線検出装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160094438A KR20160094438A (ko) | 2016-08-09 |
| KR101818874B1 true KR101818874B1 (ko) | 2018-01-15 |
Family
ID=53370953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020167017969A Expired - Fee Related KR101818874B1 (ko) | 2013-12-13 | 2014-10-30 | 방사선 검출 장치, 방사선 검출 시스템 및 방사선 검출 장치의 제조 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20160291172A1 (enExample) |
| JP (1) | JP6270450B2 (enExample) |
| KR (1) | KR101818874B1 (enExample) |
| CN (3) | CN109239761B (enExample) |
| DE (1) | DE112014005663B4 (enExample) |
| GB (1) | GB2536394B (enExample) |
| WO (1) | WO2015087636A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6877289B2 (ja) * | 2017-07-31 | 2021-05-26 | キヤノン株式会社 | 放射線検出装置、放射線検出システム、及び放射線出装置の製造方法 |
| JP6601825B2 (ja) | 2018-04-06 | 2019-11-06 | 株式会社EmbodyMe | 画像処理装置および2次元画像生成用プログラム |
| JP6659182B2 (ja) * | 2018-07-23 | 2020-03-04 | キヤノン株式会社 | 放射線撮像装置、その製造方法及び放射線撮像システム |
| EP4039193B1 (en) * | 2019-09-30 | 2025-08-13 | FUJIFILM Corporation | Radiation imaging device and radiation imaging device control method |
| CN116547799A (zh) * | 2020-12-04 | 2023-08-04 | 株式会社力森诺科 | 固化性树脂膜、半导体装置制造用膜材料、半导体装置制造用固化性树脂组合物、及制造半导体装置的方法 |
| JP7608148B2 (ja) * | 2020-12-23 | 2025-01-06 | 浜松ホトニクス株式会社 | 放射線検出器、放射線検出器の製造方法、及びシンチレータパネルユニット |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002511944A (ja) * | 1997-07-15 | 2002-04-16 | ディレクト レディオグラフィ コーポレーション | ディジタル式放射線写真パネルの製造方法 |
| JP2003017676A (ja) * | 2001-04-27 | 2003-01-17 | Canon Inc | 放射線撮像装置およびそれを用いた放射線撮像システム |
| US20030062481A1 (en) | 2001-08-27 | 2003-04-03 | Satoshi Okada | Radiation detection device and system, and scintillator panel provided to the same |
| US20130026380A1 (en) | 2011-07-26 | 2013-01-31 | General Electric Company | Radiation detector with angled surfaces and method of fabrication |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5381014B1 (en) * | 1993-12-29 | 1997-06-10 | Du Pont | Large area x-ray imager and method of fabrication |
| JP4293584B2 (ja) * | 2000-02-25 | 2009-07-08 | 浜松ホトニクス株式会社 | X線像撮像装置及びその製造方法 |
| US6504158B2 (en) * | 2000-12-04 | 2003-01-07 | General Electric Company | Imaging array minimizing leakage currents |
| JP2002341042A (ja) * | 2001-05-21 | 2002-11-27 | Canon Inc | 光電変換装置 |
| JP2004303925A (ja) * | 2003-03-31 | 2004-10-28 | Canon Inc | 撮像用基板 |
| JP2006052979A (ja) * | 2004-08-10 | 2006-02-23 | Canon Inc | 放射線検出装置及びシンチレータパネル |
| JP2006278877A (ja) * | 2005-03-30 | 2006-10-12 | Canon Inc | 放射線撮像装置及びその製造方法 |
| JP2007017215A (ja) * | 2005-07-06 | 2007-01-25 | Fujifilm Holdings Corp | 放射線像変換パネルの製造方法 |
| US7828926B1 (en) * | 2006-04-04 | 2010-11-09 | Radiation Monitoring Devices, Inc. | Selective removal of resin coatings and related methods |
| JP5004848B2 (ja) * | 2007-04-18 | 2012-08-22 | キヤノン株式会社 | 放射線検出装置及び放射線検出システム |
| US8003950B2 (en) * | 2008-01-18 | 2011-08-23 | Kabushiki Kaisha Toshiba | Radiation detector, X-ray CT apparatus, and method for manufacturing radiation detector |
| JP2010008123A (ja) * | 2008-06-25 | 2010-01-14 | Panasonic Electric Works Co Ltd | センサモジュール |
| JP5870375B2 (ja) * | 2008-11-21 | 2016-03-01 | トリクセル | タイル型検出器の組み立て方法 |
| JP5305996B2 (ja) * | 2009-03-12 | 2013-10-02 | 株式会社東芝 | 放射線検出器およびその製造方法 |
| JP2010249722A (ja) * | 2009-04-17 | 2010-11-04 | Konica Minolta Medical & Graphic Inc | 放射線画像検出カセッテ |
| JP2011128085A (ja) * | 2009-12-18 | 2011-06-30 | Canon Inc | 放射線撮像装置、放射線撮像システム及び放射線撮像装置の製造方法 |
| JP5645500B2 (ja) * | 2010-06-23 | 2014-12-24 | キヤノン株式会社 | 放射線撮像装置、放射線撮像システム及び放射線撮像装置の製造方法 |
| JP5665494B2 (ja) * | 2010-06-24 | 2015-02-04 | キヤノン株式会社 | 放射線検出装置及び放射線撮像システム |
| US20120045883A1 (en) * | 2010-08-23 | 2012-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing soi substrate |
| JP5792958B2 (ja) * | 2011-01-13 | 2015-10-14 | キヤノン株式会社 | 放射線撮像装置、放射線撮像システム及び放射線撮像装置の製造方法 |
| JP2012168128A (ja) * | 2011-02-16 | 2012-09-06 | Canon Inc | 放射線検出装置及び放射線撮像システム |
| JP5498982B2 (ja) * | 2011-03-11 | 2014-05-21 | 富士フイルム株式会社 | 放射線撮影装置 |
| JP2013002887A (ja) * | 2011-06-14 | 2013-01-07 | Canon Inc | 放射線検出パネルおよび放射線撮影装置 |
-
2013
- 2013-12-13 JP JP2013258139A patent/JP6270450B2/ja active Active
-
2014
- 2014-10-30 CN CN201811096760.1A patent/CN109239761B/zh active Active
- 2014-10-30 KR KR1020167017969A patent/KR101818874B1/ko not_active Expired - Fee Related
- 2014-10-30 WO PCT/JP2014/078874 patent/WO2015087636A1/ja not_active Ceased
- 2014-10-30 CN CN201480068223.XA patent/CN105829916B/zh active Active
- 2014-10-30 DE DE112014005663.4T patent/DE112014005663B4/de active Active
- 2014-10-30 GB GB1612140.2A patent/GB2536394B/en active Active
- 2014-10-30 CN CN201910219458.9A patent/CN110045410B/zh active Active
- 2014-10-30 US US15/103,247 patent/US20160291172A1/en not_active Abandoned
-
2020
- 2020-02-19 US US16/794,731 patent/US11226419B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002511944A (ja) * | 1997-07-15 | 2002-04-16 | ディレクト レディオグラフィ コーポレーション | ディジタル式放射線写真パネルの製造方法 |
| JP2003017676A (ja) * | 2001-04-27 | 2003-01-17 | Canon Inc | 放射線撮像装置およびそれを用いた放射線撮像システム |
| US20030062481A1 (en) | 2001-08-27 | 2003-04-03 | Satoshi Okada | Radiation detection device and system, and scintillator panel provided to the same |
| US20130026380A1 (en) | 2011-07-26 | 2013-01-31 | General Electric Company | Radiation detector with angled surfaces and method of fabrication |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110045410A (zh) | 2019-07-23 |
| CN105829916B (zh) | 2019-04-02 |
| US20160291172A1 (en) | 2016-10-06 |
| GB201612140D0 (en) | 2016-08-24 |
| CN105829916A (zh) | 2016-08-03 |
| JP6270450B2 (ja) | 2018-01-31 |
| US20200183022A1 (en) | 2020-06-11 |
| DE112014005663T5 (de) | 2016-09-15 |
| US11226419B2 (en) | 2022-01-18 |
| JP2015114268A (ja) | 2015-06-22 |
| CN109239761A (zh) | 2019-01-18 |
| CN109239761B (zh) | 2023-01-10 |
| WO2015087636A1 (ja) | 2015-06-18 |
| KR20160094438A (ko) | 2016-08-09 |
| CN110045410B (zh) | 2023-01-03 |
| GB2536394B (en) | 2020-12-09 |
| GB2536394A (en) | 2016-09-14 |
| DE112014005663B4 (de) | 2025-08-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11226419B2 (en) | Radiation detecting device, radiation detecting system, and method for manufacturing the radiation detecting device | |
| JP5693173B2 (ja) | 放射線検出装置及び放射線検出システム | |
| JP6000680B2 (ja) | 放射線検出装置、その製造方法及び撮像システム | |
| EP3566248B1 (en) | Detach and reattach of a flexible polyimide based x-ray detector | |
| JP4464260B2 (ja) | 半導体装置、放射線撮像装置、及びその製造方法 | |
| WO2012111492A2 (en) | Radiation detection apparatus and radiation detection system | |
| US20140284486A1 (en) | Radiation detecting apparatus and radiation detecting system | |
| US10345455B2 (en) | Radiation detection apparatus, radiation imaging system, and method of manufacturing radiation detection apparatus | |
| JP2006220439A (ja) | シンチレータパネル、放射線検出装置及びその製造方法 | |
| JP2012047627A (ja) | 放射線検出パネル | |
| JP2005283262A (ja) | 二次元像検出器 | |
| EP3625827B1 (en) | Flexible substrate module and fabrication method | |
| JP2014106201A (ja) | 放射線撮像装置、及び放射線撮像システム | |
| US11411041B2 (en) | Flexible substrate module and fabrication method | |
| JP4819344B2 (ja) | 半導体装置、放射線撮像装置、及びその製造方法 | |
| JP2021056092A (ja) | 放射線撮像装置 | |
| JP2022092707A (ja) | 放射線検出装置の製造方法 | |
| JP2022092706A (ja) | 放射線検出装置の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U12-oth-PR1002 Fee payment year number: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 4 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 5 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 6 |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: A-4-4-U10-U13-oth-PC1903 Not in force date: 20240110 Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: N-4-6-H10-H13-oth-PC1903 Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE Not in force date: 20240110 |