DE112014005663B4 - Strahlungserfassungsvorrichtung, Strahlungserfassungssystem und Verfahren zur Herstellung der Strahlungserfassungsvorrichtung - Google Patents

Strahlungserfassungsvorrichtung, Strahlungserfassungssystem und Verfahren zur Herstellung der Strahlungserfassungsvorrichtung

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Publication number
DE112014005663B4
DE112014005663B4 DE112014005663.4T DE112014005663T DE112014005663B4 DE 112014005663 B4 DE112014005663 B4 DE 112014005663B4 DE 112014005663 T DE112014005663 T DE 112014005663T DE 112014005663 B4 DE112014005663 B4 DE 112014005663B4
Authority
DE
Germany
Prior art keywords
sensor substrates
sheet
sensor
radiation detection
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112014005663.4T
Other languages
German (de)
English (en)
Other versions
DE112014005663T5 (de
Inventor
Shinji Ono
Takamasa Ishii
Kota Nishibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE112014005663T5 publication Critical patent/DE112014005663T5/de
Application granted granted Critical
Publication of DE112014005663B4 publication Critical patent/DE112014005663B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/46—Arrangements for interfacing with the operator or the patient
    • A61B6/461—Displaying means of special interest
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/48—Diagnostic techniques
    • A61B6/486—Diagnostic techniques involving generating temporal series of image data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20185—Coupling means between the photodiode and the scintillator, e.g. optical couplings using adhesives with wavelength-shifting fibres
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/29—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to radiation having very short wavelengths, e.g. X-rays, gamma-rays or corpuscular radiation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Surgery (AREA)
  • Optics & Photonics (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biophysics (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Human Computer Interaction (AREA)
  • Measurement Of Radiation (AREA)
DE112014005663.4T 2013-12-13 2014-10-30 Strahlungserfassungsvorrichtung, Strahlungserfassungssystem und Verfahren zur Herstellung der Strahlungserfassungsvorrichtung Active DE112014005663B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013258139A JP6270450B2 (ja) 2013-12-13 2013-12-13 放射線検出装置、放射線検出システム、及び、放射線検出装置の製造方法
JP2013-258139 2013-12-13
PCT/JP2014/078874 WO2015087636A1 (ja) 2013-12-13 2014-10-30 放射線検出装置、放射線検出システム、及び、放射線検出装置の製造方法

Publications (2)

Publication Number Publication Date
DE112014005663T5 DE112014005663T5 (de) 2016-09-15
DE112014005663B4 true DE112014005663B4 (de) 2025-08-21

Family

ID=53370953

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112014005663.4T Active DE112014005663B4 (de) 2013-12-13 2014-10-30 Strahlungserfassungsvorrichtung, Strahlungserfassungssystem und Verfahren zur Herstellung der Strahlungserfassungsvorrichtung

Country Status (7)

Country Link
US (2) US20160291172A1 (enExample)
JP (1) JP6270450B2 (enExample)
KR (1) KR101818874B1 (enExample)
CN (3) CN110045410B (enExample)
DE (1) DE112014005663B4 (enExample)
GB (1) GB2536394B (enExample)
WO (1) WO2015087636A1 (enExample)

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JP6877289B2 (ja) * 2017-07-31 2021-05-26 キヤノン株式会社 放射線検出装置、放射線検出システム、及び放射線出装置の製造方法
JP6601825B2 (ja) 2018-04-06 2019-11-06 株式会社ＥｍｂｏｄｙＭｅ 画像処理装置および２次元画像生成用プログラム
JP6659182B2 (ja) 2018-07-23 2020-03-04 キヤノン株式会社 放射線撮像装置、その製造方法及び放射線撮像システム
CN114401672B (zh) * 2019-09-30 2025-08-08 富士胶片株式会社 放射线摄像装置
KR20230117136A (ko) * 2020-12-04 2023-08-07 가부시끼가이샤 레조낙 경화성 수지 필름, 반도체 장치 제조용 필름재, 반도체 장치 제조용 경화성 수지 조성물, 및, 반도체 장치를 제조하는 방법
JP7608148B2 (ja) * 2020-12-23 2025-01-06 浜松ホトニクス株式会社 放射線検出器、放射線検出器の製造方法、及びシンチレータパネルユニット

Citations (6)

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US20020066860A1 (en) * 2000-12-04 2002-06-06 General Electric Company Imaging array minimizing leakage currents
US20020159563A1 (en) * 2001-04-27 2002-10-31 Canon Kabushiki Kaisha Radiation imaging apparatus and radiation imaging system using the same
US20030062481A1 (en) * 2001-08-27 2003-04-03 Satoshi Okada Radiation detection device and system, and scintillator panel provided to the same
US20110315886A1 (en) * 2010-06-24 2011-12-29 Canon Kabushiki Kaisha Radiation detection apparatus and radiation imaging system
JP2012007948A (ja) * 2010-06-23 2012-01-12 Canon Inc 放射線撮像装置、放射線撮像システム及び放射線撮像装置の製造方法
US20130026380A1 (en) * 2011-07-26 2013-01-31 General Electric Company Radiation detector with angled surfaces and method of fabrication

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US5844243A (en) * 1997-07-15 1998-12-01 Direct Radiography Co. Method for preparing digital radiography panels
EP1258739B1 (en) * 2000-02-25 2008-08-06 Hamamatsu Photonics K.K. X-ray imaging device and method of manufacture thereof
JP2002341042A (ja) * 2001-05-21 2002-11-27 Canon Inc 光電変換装置
JP2004303925A (ja) * 2003-03-31 2004-10-28 Canon Inc 撮像用基板
JP2006052979A (ja) * 2004-08-10 2006-02-23 Canon Inc 放射線検出装置及びシンチレータパネル
JP2006278877A (ja) * 2005-03-30 2006-10-12 Canon Inc 放射線撮像装置及びその製造方法
JP2007017215A (ja) * 2005-07-06 2007-01-25 Fujifilm Holdings Corp 放射線像変換パネルの製造方法
US7828926B1 (en) * 2006-04-04 2010-11-09 Radiation Monitoring Devices, Inc. Selective removal of resin coatings and related methods
JP5004848B2 (ja) * 2007-04-18 2012-08-22 キヤノン株式会社 放射線検出装置及び放射線検出システム
US8003950B2 (en) * 2008-01-18 2011-08-23 Kabushiki Kaisha Toshiba Radiation detector, X-ray CT apparatus, and method for manufacturing radiation detector
JP2010008123A (ja) * 2008-06-25 2010-01-14 Panasonic Electric Works Co Ltd センサモジュール
WO2010058335A2 (en) * 2008-11-21 2010-05-27 Koninklijke Philips Electronics N.V. Assembly method for a tiled radiation detector
JP5305996B2 (ja) * 2009-03-12 2013-10-02 株式会社東芝 放射線検出器およびその製造方法
JP2010249722A (ja) * 2009-04-17 2010-11-04 Konica Minolta Medical & Graphic Inc 放射線画像検出カセッテ
JP2011128085A (ja) * 2009-12-18 2011-06-30 Canon Inc 放射線撮像装置、放射線撮像システム及び放射線撮像装置の製造方法
US20120045883A1 (en) * 2010-08-23 2012-02-23 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing soi substrate
JP5792958B2 (ja) * 2011-01-13 2015-10-14 キヤノン株式会社 放射線撮像装置、放射線撮像システム及び放射線撮像装置の製造方法
JP2012168128A (ja) * 2011-02-16 2012-09-06 Canon Inc 放射線検出装置及び放射線撮像システム
JP5498982B2 (ja) * 2011-03-11 2014-05-21 富士フイルム株式会社 放射線撮影装置
JP2013002887A (ja) * 2011-06-14 2013-01-07 Canon Inc 放射線検出パネルおよび放射線撮影装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020066860A1 (en) * 2000-12-04 2002-06-06 General Electric Company Imaging array minimizing leakage currents
US20020159563A1 (en) * 2001-04-27 2002-10-31 Canon Kabushiki Kaisha Radiation imaging apparatus and radiation imaging system using the same
US20030062481A1 (en) * 2001-08-27 2003-04-03 Satoshi Okada Radiation detection device and system, and scintillator panel provided to the same
JP2012007948A (ja) * 2010-06-23 2012-01-12 Canon Inc 放射線撮像装置、放射線撮像システム及び放射線撮像装置の製造方法
US20110315886A1 (en) * 2010-06-24 2011-12-29 Canon Kabushiki Kaisha Radiation detection apparatus and radiation imaging system
US20130026380A1 (en) * 2011-07-26 2013-01-31 General Electric Company Radiation detector with angled surfaces and method of fabrication

Also Published As

Publication number Publication date
US11226419B2 (en) 2022-01-18
CN109239761B (zh) 2023-01-10
CN109239761A (zh) 2019-01-18
CN110045410A (zh) 2019-07-23
GB2536394A (en) 2016-09-14
CN105829916B (zh) 2019-04-02
US20200183022A1 (en) 2020-06-11
CN105829916A (zh) 2016-08-03
CN110045410B (zh) 2023-01-03
KR20160094438A (ko) 2016-08-09
GB201612140D0 (en) 2016-08-24
WO2015087636A1 (ja) 2015-06-18
JP6270450B2 (ja) 2018-01-31
JP2015114268A (ja) 2015-06-22
GB2536394B (en) 2020-12-09
KR101818874B1 (ko) 2018-01-15
US20160291172A1 (en) 2016-10-06
DE112014005663T5 (de) 2016-09-15

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R018 Grant decision by examination section/examining division