KR101528515B1 - 접합 방법, 접합 구조, 전자 장치, 전자 장치의 제조 방법 및 전자 부품 - Google Patents

접합 방법, 접합 구조, 전자 장치, 전자 장치의 제조 방법 및 전자 부품 Download PDF

Info

Publication number
KR101528515B1
KR101528515B1 KR1020137007337A KR20137007337A KR101528515B1 KR 101528515 B1 KR101528515 B1 KR 101528515B1 KR 1020137007337 A KR1020137007337 A KR 1020137007337A KR 20137007337 A KR20137007337 A KR 20137007337A KR 101528515 B1 KR101528515 B1 KR 101528515B1
Authority
KR
South Korea
Prior art keywords
metal
melting point
metal member
bonding material
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020137007337A
Other languages
English (en)
Korean (ko)
Other versions
KR20130077873A (ko
Inventor
코스케 나카노
히데키요 타카오카
Original Assignee
가부시키가이샤 무라타 세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 무라타 세이사쿠쇼 filed Critical 가부시키가이샤 무라타 세이사쿠쇼
Publication of KR20130077873A publication Critical patent/KR20130077873A/ko
Application granted granted Critical
Publication of KR101528515B1 publication Critical patent/KR101528515B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R4/00Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
    • H01R4/02Soldered or welded connections
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0233Sheets, foils
    • B23K35/0238Sheets, foils layered
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016Brazing of electronic components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/19Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244Powders, particles or spheres; Preforms made therefrom
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • B23K35/262Sn as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C13/00Alloys based on tin
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C13/00Alloys based on tin
    • C22C13/02Alloys based on tin with antimony or bismuth as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/05Alloys based on copper with manganese as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/06Alloys based on copper with nickel or cobalt as the next major constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R4/00Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
    • H01R4/58Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation characterised by the form or material of the contacting members
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof
    • H05K3/3463Solder compositions in relation to features of the printed circuit board or the mounting process
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/42Printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0263Details about a collection of particles
    • H05K2201/0272Mixed conductive particles, i.e. using different conductive particles, e.g. differing in shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Die Bonding (AREA)
KR1020137007337A 2010-12-24 2011-12-22 접합 방법, 접합 구조, 전자 장치, 전자 장치의 제조 방법 및 전자 부품 Active KR101528515B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2010287782 2010-12-24
JPJP-P-2010-287782 2010-12-24
JP2011159922 2011-07-21
JPJP-P-2011-159922 2011-07-21
PCT/JP2011/079781 WO2012086745A1 (ja) 2010-12-24 2011-12-22 接合方法、接合構造、電子装置、電子装置の製造方法、および電子部品

Publications (2)

Publication Number Publication Date
KR20130077873A KR20130077873A (ko) 2013-07-09
KR101528515B1 true KR101528515B1 (ko) 2015-06-12

Family

ID=46314012

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137007337A Active KR101528515B1 (ko) 2010-12-24 2011-12-22 접합 방법, 접합 구조, 전자 장치, 전자 장치의 제조 방법 및 전자 부품

Country Status (7)

Country Link
US (2) US9209527B2 (enExample)
EP (1) EP2656955B1 (enExample)
JP (2) JP5664664B2 (enExample)
KR (1) KR101528515B1 (enExample)
CN (1) CN103167926B (enExample)
TW (1) TWI461252B (enExample)
WO (1) WO2012086745A1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015105088A1 (ja) * 2014-01-07 2015-07-16 株式会社村田製作所 構造材接合方法、接合用シートおよび接合構造
WO2015159784A1 (ja) * 2014-04-18 2015-10-22 株式会社村田製作所 被着体の接着分離方法、金属複合材料
JP6287739B2 (ja) * 2014-09-30 2018-03-07 株式会社村田製作所 ステンドグラスの製造方法
CN105081500B (zh) * 2015-09-02 2017-02-22 哈尔滨工业大学 一种使用激光前向转印具有特定晶粒取向和数量薄膜诱发金属间化合物生长的方法
WO2017047293A1 (ja) 2015-09-15 2017-03-23 株式会社村田製作所 接合用部材、接合用部材の製造方法、および、接合方法
JP6528852B2 (ja) 2015-09-28 2019-06-12 株式会社村田製作所 ヒートパイプ、放熱部品、ヒートパイプの製造方法
WO2017077824A1 (ja) * 2015-11-05 2017-05-11 株式会社村田製作所 接合用部材、および、接合用部材の製造方法
CN108430690B (zh) 2016-02-01 2021-05-14 株式会社村田制作所 接合材料、使用该接合材料的接合方法和接合结构
JP6621068B2 (ja) * 2016-12-08 2019-12-18 パナソニックIpマネジメント株式会社 実装構造体
JP6355091B1 (ja) * 2017-03-07 2018-07-11 パナソニックIpマネジメント株式会社 はんだ合金およびそれを用いた接合構造体
CN109983544A (zh) * 2017-03-23 2019-07-05 积水化学工业株式会社 导电性粒子、导电材料以及连接结构体
DE102017206932A1 (de) * 2017-04-25 2018-10-25 Siemens Aktiengesellschaft Lotformteil zum Erzeugen einer Diffusionslötverbindung und Verfahren zum Erzeugen eines Lotformteils
JP6998557B2 (ja) * 2017-09-29 2022-01-18 パナソニックIpマネジメント株式会社 はんだ合金およびそれを用いた接合構造体
CN108098172B (zh) * 2017-12-01 2020-03-27 北京工业大学 一种实现Cu/Sn/Cu界面可逆连接的方法
KR102574413B1 (ko) * 2018-12-10 2023-09-04 삼성전기주식회사 코일 전자 부품
US11581239B2 (en) * 2019-01-18 2023-02-14 Indium Corporation Lead-free solder paste as thermal interface material
KR102148297B1 (ko) * 2019-03-06 2020-08-26 성균관대학교산학협력단 이종 금속 재료 간의 접합을 위한 천이액상소결접합 방법
CN109822256B (zh) * 2019-03-15 2021-08-06 南昌大学 一种低熔点In-Sn-Bi合金钎料及制备方法
EP4005727A4 (en) * 2019-07-26 2023-07-26 Nihon Superior Co., Ltd. PREFORM SOLDER AND ITEM FORMED WITH THIS PREFORM SOLDER BOUND
WO2021045131A1 (ja) * 2019-09-02 2021-03-11 株式会社日本スペリア社 はんだペースト及びはんだ接合体
CN113275787B (zh) * 2020-01-31 2023-05-30 铟泰公司 作为热界面材料的无铅焊料膏
US12330212B2 (en) * 2020-03-06 2025-06-17 Mitsubishi Electric Corporation Thin sheet-like connecting member and manufacturing method therefor, semiconductor device and manufacturing method therefor, and power conversion device
JP6799701B1 (ja) * 2020-03-12 2020-12-16 有限会社 ナプラ 金属粒子

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6602777B1 (en) * 2001-12-28 2003-08-05 National Central University Method for controlling the formation of intermetallic compounds in solder joints

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6371361B1 (en) * 1996-02-09 2002-04-16 Matsushita Electric Industrial Co., Ltd. Soldering alloy, cream solder and soldering method
US5863493A (en) * 1996-12-16 1999-01-26 Ford Motor Company Lead-free solder compositions
WO1999048639A1 (en) * 1998-03-26 1999-09-30 Nihon Superior Sha Co., Ltd. Leadless solder
JP3414388B2 (ja) 2000-06-12 2003-06-09 株式会社日立製作所 電子機器
JP3763520B2 (ja) * 2000-12-25 2006-04-05 Tdk株式会社 はんだ付け用組成物
JP2003211289A (ja) * 2002-01-21 2003-07-29 Fujitsu Ltd 導電性接合材料、それを用いた接合方法及び電子機器
JP2003332731A (ja) * 2002-05-09 2003-11-21 Murata Mfg Co Ltd Pbフリー半田付け物品
JP4071049B2 (ja) * 2002-06-18 2008-04-02 松下電器産業株式会社 鉛フリー半田ペースト
JP4271684B2 (ja) * 2003-10-24 2009-06-03 日鉱金属株式会社 ニッケル合金スパッタリングターゲット及びニッケル合金薄膜
US7064446B2 (en) 2004-03-29 2006-06-20 Intel Corporation Under bump metallization layer to enable use of high tin content solder bumps
JP2005288458A (ja) * 2004-03-31 2005-10-20 Toshiba Corp 接合体、半導体装置、接合方法、及び半導体装置の製造方法
KR100867871B1 (ko) 2005-01-11 2008-11-07 가부시키가이샤 무라타 세이사쿠쇼 솔더 페이스트, 및 전자장치
JP4344707B2 (ja) * 2005-02-24 2009-10-14 株式会社ルネサステクノロジ 半導体装置およびその製造方法
JP4501818B2 (ja) * 2005-09-02 2010-07-14 日立電線株式会社 銅合金材およびその製造方法
EP2017031B1 (en) * 2006-04-26 2017-09-13 Senju Metal Industry Co., Ltd Solder paste
CN101512761A (zh) * 2006-09-01 2009-08-19 株式会社村田制作所 电子部件装置及其制造方法与电子部件组件及其制造方法
CN101681888B (zh) 2007-06-04 2012-08-22 株式会社村田制作所 电子零部件装置及其制造方法
KR101406174B1 (ko) * 2007-06-18 2014-06-12 엠케이전자 주식회사 주석, 은 및 비스무스를 함유하는 무연솔더
WO2009051181A1 (ja) * 2007-10-19 2009-04-23 Nihon Superior Sha Co., Ltd. 無鉛はんだ合金
CN101842506B (zh) * 2007-11-01 2012-08-22 古河电气工业株式会社 强度、弯曲加工性、抗应力松弛性能优异的铜合金材料及其制造方法
JP5169354B2 (ja) * 2008-03-18 2013-03-27 富士通株式会社 接合材料及びそれを用いた接合方法
JP5584909B2 (ja) * 2008-11-28 2014-09-10 株式会社弘輝 接続構造体
KR101276147B1 (ko) * 2009-09-03 2013-06-18 가부시키가이샤 무라타 세이사쿠쇼 솔더 페이스트, 그것을 사용한 접합 방법, 및 접합 구조
TWI480382B (zh) * 2010-11-19 2015-04-11 村田製作所股份有限公司 A conductive material, a connecting method using the same, and a connecting structure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6602777B1 (en) * 2001-12-28 2003-08-05 National Central University Method for controlling the formation of intermetallic compounds in solder joints

Also Published As

Publication number Publication date
CN103167926A (zh) 2013-06-19
EP2656955A1 (en) 2013-10-30
JPWO2012086745A1 (ja) 2014-06-05
JP2014223678A (ja) 2014-12-04
JP5664664B2 (ja) 2015-02-04
TW201233485A (en) 2012-08-16
CN103167926B (zh) 2016-03-09
WO2012086745A1 (ja) 2012-06-28
US20130299236A1 (en) 2013-11-14
US9209527B2 (en) 2015-12-08
US20160043480A1 (en) 2016-02-11
TWI461252B (zh) 2014-11-21
EP2656955A4 (en) 2017-07-19
KR20130077873A (ko) 2013-07-09
EP2656955B1 (en) 2021-08-04
JP5907215B2 (ja) 2016-04-26
US9614295B2 (en) 2017-04-04

Similar Documents

Publication Publication Date Title
KR101528515B1 (ko) 접합 방법, 접합 구조, 전자 장치, 전자 장치의 제조 방법 및 전자 부품
TWI505899B (zh) A bonding method, a bonding structure, and a method for manufacturing the same
JP5943065B2 (ja) 接合方法、電子装置の製造方法、および電子部品
JP2014223678A5 (enExample)
TWI505898B (zh) A bonding method, a bonding structure, and a method for manufacturing the same
WO2008026761A1 (en) Lid for functional part and process for producing the same
JP2024526066A (ja) 混合はんだ合金粉末を用いた高信頼性鉛フリーはんだペースト
US11738411B2 (en) Lead-free solder paste with mixed solder powders for high temperature applications
JP4369643B2 (ja) はんだ接合層
JP6887183B1 (ja) はんだ合金および成形はんだ
CN105189003A (zh) 焊剂接合物及焊剂接合方法
TW201634167A (zh) 焊膏

Legal Events

Date Code Title Description
A201 Request for examination
PA0105 International application

Patent event date: 20130322

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20140602

Patent event code: PE09021S01D

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20141216

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20150518

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20150608

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20150609

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20210527

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20220530

Start annual number: 8

End annual number: 8

PR1001 Payment of annual fee

Payment date: 20240530

Start annual number: 10

End annual number: 10