KR101505702B1 - 전자부품 검사 방법과 이에 이용되는 장치 - Google Patents

전자부품 검사 방법과 이에 이용되는 장치 Download PDF

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KR101505702B1
KR101505702B1 KR1020107019709A KR20107019709A KR101505702B1 KR 101505702 B1 KR101505702 B1 KR 101505702B1 KR 1020107019709 A KR1020107019709 A KR 1020107019709A KR 20107019709 A KR20107019709 A KR 20107019709A KR 101505702 B1 KR101505702 B1 KR 101505702B1
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South Korea
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electronic component
distance
stage
focal length
imaging
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KR1020107019709A
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English (en)
Korean (ko)
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KR20100124742A (ko
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도요히코 츠다
츈셩 장
사토시 고토
웨이홍 궈
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유겐가이샤 교도 셋케이 기카쿠
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020107019709A 2008-03-04 2009-03-04 전자부품 검사 방법과 이에 이용되는 장치 KR101505702B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2008-053642 2008-03-04
JP2008053642A JP5038191B2 (ja) 2008-03-04 2008-03-04 電子部品検査方法およびそれに用いられる装置
PCT/JP2009/054092 WO2009110518A1 (ja) 2008-03-04 2009-03-04 電子部品検査方法およびそれに用いられる装置

Publications (2)

Publication Number Publication Date
KR20100124742A KR20100124742A (ko) 2010-11-29
KR101505702B1 true KR101505702B1 (ko) 2015-03-30

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KR1020107019709A KR101505702B1 (ko) 2008-03-04 2009-03-04 전자부품 검사 방법과 이에 이용되는 장치

Country Status (5)

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JP (1) JP5038191B2 (ja)
KR (1) KR101505702B1 (ja)
CN (1) CN101960295B (ja)
TW (1) TWI490477B (ja)
WO (1) WO2009110518A1 (ja)

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JP5209441B2 (ja) * 2008-10-30 2013-06-12 芝浦メカトロニクス株式会社 実装部品の検査装置及び検査方法
JP2011021999A (ja) * 2009-07-15 2011-02-03 Kyodo Design & Planning Corp 基板検査装置
CN102269713B (zh) * 2011-08-02 2013-04-17 武汉科技大学 一种连铸结晶器铜板表面图像采集装置
KR101306289B1 (ko) 2011-09-15 2013-09-09 (주) 인텍플러스 평판 패널 검사방법
CN102590224A (zh) * 2012-01-18 2012-07-18 肇庆市宏华电子科技有限公司 一种片式电子元件外观检测机
CN104280398A (zh) * 2013-07-05 2015-01-14 上海维锐智能科技有限公司 一种电子元器件的自动测试装置
JP6176789B2 (ja) * 2014-01-31 2017-08-09 有限会社共同設計企画 電子部品検査装置
JP2015149451A (ja) * 2014-02-07 2015-08-20 デクセリアルズ株式会社 アライメント方法、電子部品の接続方法、接続体の製造方法、接続体、異方性導電フィルム
WO2016147535A1 (ja) * 2015-03-16 2016-09-22 セイコーエプソン株式会社 電子部品搬送装置、電子部品検査装置、結露あるいは着霜の検査用試験片、および結露あるいは着霜の検査方法
CN106370656B (zh) * 2015-07-23 2019-03-05 旭东机械工业股份有限公司 自动化显微取像设备及取像方法
US10319797B2 (en) 2016-05-26 2019-06-11 Samsung Display Co., Ltd. Organic light-emitting display device and method of manufacturing the same
CN107031124A (zh) * 2016-12-14 2017-08-11 江苏宇驰包装股份有限公司 一种可调节物料位置的压痕机
CN108364879B (zh) * 2017-01-26 2020-07-24 中芯国际集成电路制造(上海)有限公司 一种半导体器件的缺陷扫描方法及扫描装置
US20190320145A1 (en) * 2017-02-02 2019-10-17 Ismeca Semiconductor Holding Sa Assembly and method for inspecting components
JP7015987B2 (ja) * 2017-10-03 2022-02-04 パナソニックＩｐマネジメント株式会社 部品実装装置および実装基板の製造方法
CN107748428A (zh) * 2017-10-18 2018-03-02 歌尔股份有限公司 屏幕检测自动对焦方法及装置
TWI662262B (zh) * 2018-04-20 2019-06-11 國立臺灣大學 具等向性轉換函數之量化差分相位對比顯微系統
CN108802046B (zh) * 2018-06-01 2021-01-29 中国电子科技集团公司第三十八研究所 一种混合集成电路组件缺陷光学检测装置及其检测方法
JP7035857B2 (ja) * 2018-07-03 2022-03-15 オムロン株式会社 検査方法、検査システム及びプログラム
CN108645868A (zh) * 2018-08-10 2018-10-12 北京妙想科技有限公司 一种小张印铁双面质量检测设备
TWI705744B (zh) * 2019-04-26 2020-09-21 旭東機械工業股份有限公司 壓合機構
CN110031467A (zh) * 2019-05-10 2019-07-19 厦门柯尔自动化设备有限公司 导电粒子检测光学模组
CN110132982A (zh) * 2019-05-27 2019-08-16 武汉中导光电设备有限公司 一种高灵敏度的自动光学检测方法及设备
CN110208289A (zh) * 2019-05-27 2019-09-06 武汉中导光电设备有限公司 基于图像清晰度的自动面型跟踪对焦系统及方法
CN110702685A (zh) * 2019-09-24 2020-01-17 深圳市华星光电半导体显示技术有限公司 显示面板的缺陷检测方法及缺陷检测系统
CN112735307A (zh) * 2019-10-28 2021-04-30 深圳汉和智造有限公司 一种获取导电粒子压痕图像的装置及获取方法
JP2021081252A (ja) * 2019-11-15 2021-05-27 義晴 加藤 電子部品検査装置及び電子部品検査方法
KR20210116777A (ko) * 2020-03-13 2021-09-28 (주)테크윙 전자부품 처리장비용 촬영장치
CN111239143B (zh) * 2020-03-17 2021-04-27 合肥市商巨智能装备有限公司 液晶面板缺陷复判方法
CN111522074B (zh) * 2020-05-29 2023-04-25 深圳市燕麦科技股份有限公司 麦克风检测设备及麦克风检测方法
CN113322653B (zh) * 2021-06-01 2022-08-30 苏州精梭智能技术有限公司 一种自动定位纺织品缺陷检测系统
CN113865509A (zh) * 2021-09-29 2021-12-31 苏州华兴源创科技股份有限公司 自动跟随检测装置
TWI832503B (zh) * 2022-10-20 2024-02-11 英業達股份有限公司 生產線零件進料時序資料誤差追認修正系統

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JPH0996513A (ja) * 1995-09-29 1997-04-08 Dainippon Printing Co Ltd 画像取得装置
US20030057379A1 (en) 1998-05-15 2003-03-27 Montagu Jean I. Focusing of microscopes and reading of microarrays
JP2006090990A (ja) 2004-09-27 2006-04-06 Mitsubishi Heavy Ind Ltd 透明電極膜基板の検査装置及びその方法並びにプログラム

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JP3816615B2 (ja) * 1997-01-29 2006-08-30 オリンパス株式会社 基板検査装置
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JP2006170622A (ja) * 2004-12-10 2006-06-29 Olympus Corp 外観検査装置
JP2006184303A (ja) * 2004-12-24 2006-07-13 Olympus Corp 画像検査装置
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US20090039908A1 (en) * 2006-04-26 2009-02-12 Tokyo Electron Limited Microstructure inspecting apparatus and microstructure inspecting method

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Publication number Priority date Publication date Assignee Title
JPH08178858A (ja) * 1994-12-26 1996-07-12 Nec Corp スルーホール検査装置
JPH0996513A (ja) * 1995-09-29 1997-04-08 Dainippon Printing Co Ltd 画像取得装置
US20030057379A1 (en) 1998-05-15 2003-03-27 Montagu Jean I. Focusing of microscopes and reading of microarrays
JP2006090990A (ja) 2004-09-27 2006-04-06 Mitsubishi Heavy Ind Ltd 透明電極膜基板の検査装置及びその方法並びにプログラム

Also Published As

Publication number Publication date
CN101960295B (zh) 2012-07-04
TW201000885A (en) 2010-01-01
JP5038191B2 (ja) 2012-10-03
CN101960295A (zh) 2011-01-26
WO2009110518A1 (ja) 2009-09-11
TWI490477B (zh) 2015-07-01
JP2009210414A (ja) 2009-09-17
KR20100124742A (ko) 2010-11-29

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