KR101485972B1 - 옵셋 적층된 다이를 구비한 집적회로 패키지 시스템 - Google Patents
옵셋 적층된 다이를 구비한 집적회로 패키지 시스템 Download PDFInfo
- Publication number
- KR101485972B1 KR101485972B1 KR20070129217A KR20070129217A KR101485972B1 KR 101485972 B1 KR101485972 B1 KR 101485972B1 KR 20070129217 A KR20070129217 A KR 20070129217A KR 20070129217 A KR20070129217 A KR 20070129217A KR 101485972 B1 KR101485972 B1 KR 101485972B1
- Authority
- KR
- South Korea
- Prior art keywords
- integrated circuit
- circuit die
- die
- layer
- interdie
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5445—Dispositions of bond wires being orthogonal to a side surface of the chip, e.g. parallel arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/547—Dispositions of multiple bond wires
- H10W72/5473—Dispositions of multiple bond wires multiple bond wires connected to a common bond pad
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
- H10W72/5524—Materials of bond wires comprising metals or metalloids, e.g. silver comprising aluminium [Al]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/20—Configurations of stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/20—Configurations of stacked chips
- H10W90/231—Configurations of stacked chips the stacked chips being on both top and bottom sides of an auxiliary carrier having no electrical connection structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/20—Configurations of stacked chips
- H10W90/24—Configurations of stacked chips at least one of the stacked chips being laterally offset from a neighbouring stacked chip, e.g. chip stacks having a staircase shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/752—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Die Bonding (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US87113406P | 2006-12-20 | 2006-12-20 | |
| US60/871,134 | 2006-12-20 | ||
| US11/950,216 | 2007-12-04 | ||
| US11/950,216 US8242607B2 (en) | 2006-12-20 | 2007-12-04 | Integrated circuit package system with offset stacked die and method of manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20080058186A KR20080058186A (ko) | 2008-06-25 |
| KR101485972B1 true KR101485972B1 (ko) | 2015-01-23 |
Family
ID=39541681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR20070129217A Active KR101485972B1 (ko) | 2006-12-20 | 2007-12-12 | 옵셋 적층된 다이를 구비한 집적회로 패키지 시스템 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8242607B2 (https=) |
| JP (1) | JP5263811B2 (https=) |
| KR (1) | KR101485972B1 (https=) |
| TW (1) | TWI499028B (https=) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8704379B2 (en) | 2007-09-10 | 2014-04-22 | Invensas Corporation | Semiconductor die mount by conformal die coating |
| JP4498403B2 (ja) * | 2007-09-28 | 2010-07-07 | 株式会社東芝 | 半導体装置と半導体記憶装置 |
| KR100886717B1 (ko) * | 2007-10-16 | 2009-03-04 | 주식회사 하이닉스반도체 | 적층 반도체 패키지 및 이의 제조 방법 |
| TWI415201B (zh) * | 2007-11-30 | 2013-11-11 | 矽品精密工業股份有限公司 | 多晶片堆疊結構及其製法 |
| JP5150243B2 (ja) * | 2007-12-27 | 2013-02-20 | 株式会社東芝 | 半導体記憶装置 |
| JP5207868B2 (ja) | 2008-02-08 | 2013-06-12 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US8178978B2 (en) | 2008-03-12 | 2012-05-15 | Vertical Circuits, Inc. | Support mounted electrically interconnected die assembly |
| US9153517B2 (en) | 2008-05-20 | 2015-10-06 | Invensas Corporation | Electrical connector between die pad and z-interconnect for stacked die assemblies |
| JP4776675B2 (ja) * | 2008-10-31 | 2011-09-21 | 株式会社東芝 | 半導体メモリカード |
| KR20100049283A (ko) * | 2008-11-03 | 2010-05-12 | 삼성전자주식회사 | 반도체 패키지 및 그 제조 방법 |
| JP5126002B2 (ja) * | 2008-11-11 | 2013-01-23 | セイコーエプソン株式会社 | 半導体装置及び半導体装置の製造方法 |
| KR101013563B1 (ko) * | 2009-02-25 | 2011-02-14 | 주식회사 하이닉스반도체 | 스택 패키지 |
| KR20100134354A (ko) * | 2009-06-15 | 2010-12-23 | 삼성전자주식회사 | 반도체 패키지, 스택 모듈, 카드 및 전자 시스템 |
| CN102473697B (zh) * | 2009-06-26 | 2016-08-10 | 伊文萨思公司 | 曲折配置的堆叠裸片的电互连 |
| KR101026488B1 (ko) * | 2009-08-10 | 2011-04-01 | 주식회사 하이닉스반도체 | 반도체 패키지 |
| KR101563630B1 (ko) * | 2009-09-17 | 2015-10-28 | 에스케이하이닉스 주식회사 | 반도체 패키지 |
| US8552546B2 (en) * | 2009-10-06 | 2013-10-08 | Samsung Electronics Co., Ltd. | Semiconductor package, semiconductor package structure including the semiconductor package, and mobile phone including the semiconductor package structure |
| KR20110044077A (ko) * | 2009-10-22 | 2011-04-28 | 삼성전자주식회사 | 반도체 패키지 구조물 |
| WO2011056668A2 (en) | 2009-10-27 | 2011-05-12 | Vertical Circuits, Inc. | Selective die electrical insulation additive process |
| CN103098206A (zh) * | 2010-03-18 | 2013-05-08 | 莫塞德技术公司 | 具有偏移裸片叠层的多芯片封装及其制造方法 |
| KR20110138789A (ko) * | 2010-06-22 | 2011-12-28 | 하나 마이크론(주) | 적층형 반도체 패키지 |
| US8502375B2 (en) | 2010-06-29 | 2013-08-06 | Sandisk Technologies Inc. | Corrugated die edge for stacked die semiconductor package |
| KR101686553B1 (ko) * | 2010-07-12 | 2016-12-14 | 삼성전자 주식회사 | 반도체 패키지 및 패키지 온 패키지 |
| KR20120024099A (ko) * | 2010-09-06 | 2012-03-14 | 삼성전자주식회사 | 멀티-칩 패키지 및 그의 제조 방법 |
| KR101213288B1 (ko) | 2011-01-25 | 2012-12-18 | 하나 마이크론(주) | 계단식 적층구조를 갖는 반도체 패키지 및 그의 제조방법 |
| WO2013071399A1 (en) * | 2011-11-14 | 2013-05-23 | Mosaid Technologies Incorporated | Package having stacked memory dies with serially connected buffer dies |
| CN104769714B (zh) | 2013-02-26 | 2018-10-26 | 晟碟信息科技(上海)有限公司 | 包括交替形成台阶的半导体裸芯堆叠的半导体器件 |
| US9412722B1 (en) * | 2015-02-12 | 2016-08-09 | Dawning Leading Technology Inc. | Multichip stacking package structure and method for manufacturing the same |
| US9825002B2 (en) | 2015-07-17 | 2017-11-21 | Invensas Corporation | Flipped die stack |
| US9490195B1 (en) | 2015-07-17 | 2016-11-08 | Invensas Corporation | Wafer-level flipped die stacks with leadframes or metal foil interconnects |
| US9871019B2 (en) | 2015-07-17 | 2018-01-16 | Invensas Corporation | Flipped die stack assemblies with leadframe interconnects |
| WO2017095401A1 (en) | 2015-12-02 | 2017-06-08 | Intel Corporation | Die stack with cascade and vertical connections |
| US9508691B1 (en) | 2015-12-16 | 2016-11-29 | Invensas Corporation | Flipped die stacks with multiple rows of leadframe interconnects |
| US10566310B2 (en) | 2016-04-11 | 2020-02-18 | Invensas Corporation | Microelectronic packages having stacked die and wire bond interconnects |
| US9595511B1 (en) | 2016-05-12 | 2017-03-14 | Invensas Corporation | Microelectronic packages and assemblies with improved flyby signaling operation |
| US9728524B1 (en) | 2016-06-30 | 2017-08-08 | Invensas Corporation | Enhanced density assembly having microelectronic packages mounted at substantial angle to board |
| JP2019161095A (ja) * | 2018-03-15 | 2019-09-19 | 東芝メモリ株式会社 | 半導体装置 |
| US11139283B2 (en) * | 2018-12-22 | 2021-10-05 | Xcelsis Corporation | Abstracted NAND logic in stacks |
| US11282814B2 (en) | 2019-12-27 | 2022-03-22 | Micron Technology, Inc. | Semiconductor device assemblies including stacked individual modules |
| KR20230166701A (ko) * | 2022-05-31 | 2023-12-07 | 삼성전자주식회사 | 반도체 패키지 및 이의 제조 방법 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100335717B1 (ko) * | 2000-02-18 | 2002-05-08 | 윤종용 | 고용량 메모리 카드 |
| JP2002359346A (ja) | 2001-05-30 | 2002-12-13 | Sharp Corp | 半導体装置および半導体チップの積層方法 |
| US6900528B2 (en) | 2001-06-21 | 2005-05-31 | Micron Technology, Inc. | Stacked mass storage flash memory package |
| JP2006313798A (ja) * | 2005-05-06 | 2006-11-16 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3007023B2 (ja) * | 1995-05-30 | 2000-02-07 | シャープ株式会社 | 半導体集積回路およびその製造方法 |
| US6621155B1 (en) * | 1999-12-23 | 2003-09-16 | Rambus Inc. | Integrated circuit device having stacked dies and impedance balanced transmission lines |
| US6376904B1 (en) * | 1999-12-23 | 2002-04-23 | Rambus Inc. | Redistributed bond pads in stacked integrated circuit die package |
| JP3768761B2 (ja) | 2000-01-31 | 2006-04-19 | 株式会社日立製作所 | 半導体装置およびその製造方法 |
| JP3813788B2 (ja) | 2000-04-14 | 2006-08-23 | 株式会社ルネサステクノロジ | 半導体装置及びその製造方法 |
| US7045887B2 (en) * | 2002-10-08 | 2006-05-16 | Chippac, Inc. | Semiconductor multi-package module having inverted second package stacked over die-up flip-chip ball grid array (BGA) package |
| DE102004049356B4 (de) * | 2004-10-08 | 2006-06-29 | Infineon Technologies Ag | Halbleitermodul mit einem internen Halbleiterchipstapel und Verfahren zur Herstellung desselben |
| TWI255492B (en) * | 2005-05-25 | 2006-05-21 | Siliconware Precision Industries Co Ltd | Multi-chip stack structure |
| US20060267173A1 (en) * | 2005-05-26 | 2006-11-30 | Sandisk Corporation | Integrated circuit package having stacked integrated circuits and method therefor |
| US20070085184A1 (en) * | 2005-10-13 | 2007-04-19 | Stats Chippac Ltd. | Stacked die packaging system |
| US8710675B2 (en) * | 2006-02-21 | 2014-04-29 | Stats Chippac Ltd. | Integrated circuit package system with bonding lands |
-
2007
- 2007-12-04 US US11/950,216 patent/US8242607B2/en active Active
- 2007-12-11 TW TW096147152A patent/TWI499028B/zh active
- 2007-12-12 KR KR20070129217A patent/KR101485972B1/ko active Active
- 2007-12-19 JP JP2007327757A patent/JP5263811B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100335717B1 (ko) * | 2000-02-18 | 2002-05-08 | 윤종용 | 고용량 메모리 카드 |
| JP2002359346A (ja) | 2001-05-30 | 2002-12-13 | Sharp Corp | 半導体装置および半導体チップの積層方法 |
| US6900528B2 (en) | 2001-06-21 | 2005-05-31 | Micron Technology, Inc. | Stacked mass storage flash memory package |
| JP2006313798A (ja) * | 2005-05-06 | 2006-11-16 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8242607B2 (en) | 2012-08-14 |
| TWI499028B (zh) | 2015-09-01 |
| US20080150158A1 (en) | 2008-06-26 |
| TW200832672A (en) | 2008-08-01 |
| KR20080058186A (ko) | 2008-06-25 |
| JP2008160119A (ja) | 2008-07-10 |
| JP5263811B2 (ja) | 2013-08-14 |
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