KR101294450B1 - 유리시트를 측정하기 위한 장치 및 방법 - Google Patents

유리시트를 측정하기 위한 장치 및 방법 Download PDF

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Publication number
KR101294450B1
KR101294450B1 KR1020087004569A KR20087004569A KR101294450B1 KR 101294450 B1 KR101294450 B1 KR 101294450B1 KR 1020087004569 A KR1020087004569 A KR 1020087004569A KR 20087004569 A KR20087004569 A KR 20087004569A KR 101294450 B1 KR101294450 B1 KR 101294450B1
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South Korea
Prior art keywords
glass sheet
base
bearing
measuring
support member
Prior art date
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Expired - Fee Related
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KR1020087004569A
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English (en)
Korean (ko)
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KR20080036118A (ko
Inventor
제시 알. 프레데릭
제프리 씨. 맥크리어리
존 씨. 모리슨
브라이언 피. 스트린스
제임스 피. 트라이스
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코닝 인코포레이티드
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Publication of KR20080036118A publication Critical patent/KR20080036118A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C5/00—Measuring height; Measuring distances transverse to line of sight; Levelling between separated points; Surveyors' levels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/045—Ball or roller bearings having rolling elements journaled in one of the moving parts
    • F16C29/046—Ball or roller bearings having rolling elements journaled in one of the moving parts with balls journaled in pockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020087004569A 2005-07-27 2006-07-13 유리시트를 측정하기 위한 장치 및 방법 Expired - Fee Related KR101294450B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US70332305P 2005-07-27 2005-07-27
US60/703,323 2005-07-27
PCT/US2006/027492 WO2007015772A2 (en) 2005-07-27 2006-07-13 Apparatus and method for measuring a glass sheet

Publications (2)

Publication Number Publication Date
KR20080036118A KR20080036118A (ko) 2008-04-24
KR101294450B1 true KR101294450B1 (ko) 2013-08-07

Family

ID=37709041

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087004569A Expired - Fee Related KR101294450B1 (ko) 2005-07-27 2006-07-13 유리시트를 측정하기 위한 장치 및 방법

Country Status (6)

Country Link
EP (1) EP1907791A4 (enrdf_load_stackoverflow)
JP (3) JP5469340B2 (enrdf_load_stackoverflow)
KR (1) KR101294450B1 (enrdf_load_stackoverflow)
CN (1) CN101268356B (enrdf_load_stackoverflow)
TW (1) TWI300838B (enrdf_load_stackoverflow)
WO (1) WO2007015772A2 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5469340B2 (ja) * 2005-07-27 2014-04-16 コーニング インコーポレイテッド シート状ガラスを測定するための装置及び方法
JP5654354B2 (ja) * 2007-11-30 2015-01-14 コーニング インコーポレイテッド 動いている基板の形状変化を検出する方法および装置
CN102721356A (zh) * 2012-06-12 2012-10-10 无锡市麦希恩机械制造有限公司 汽车玻璃天窗检具结构
CN103418644B (zh) * 2013-09-02 2015-02-18 苏州赛斯德工程设备有限公司 一种具有辅助定位治具的折弯机
US9835442B2 (en) 2013-11-25 2017-12-05 Corning Incorporated Methods for determining a shape of a substantially cylindrical specular reflective surface
CN103673915A (zh) * 2013-12-20 2014-03-26 苏州精创光学仪器有限公司 触摸屏保护玻璃翘曲度快速测量装置
CN104006769B (zh) * 2014-05-13 2017-01-18 苏州金牛精密机械有限公司 一种用于检测翘片管平面度的治具
CN104310032A (zh) * 2014-11-03 2015-01-28 苏州精创光学仪器有限公司 玻璃测量系统的输送装置
CN105783794B (zh) * 2016-03-22 2019-03-15 阳谷祥光铜业有限公司 一种平面检测方法及设备
CN105806247A (zh) * 2016-05-23 2016-07-27 南京林业大学 一种木质板材翘曲的在线检测装置和检测方法
CN109737881A (zh) * 2019-03-22 2019-05-10 李兆祥 一种齿轮监测设备
CN112595281B (zh) * 2020-12-31 2022-09-27 域鑫科技（惠州）有限公司 一种工件的面轮廓度快速测量方法及介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06331339A (ja) * 1993-05-21 1994-12-02 Hitachi Cable Ltd 薄板の変形測定方法及びその装置
JP2001041712A (ja) * 1999-07-27 2001-02-16 Fuji Photo Optical Co Ltd 被測定体の支持装置およびその製造方法
JP2001330430A (ja) * 2000-05-22 2001-11-30 Daido Steel Co Ltd 平面度測定方法および平面度測定装置

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Publication number Priority date Publication date Assignee Title
GB1277576A (en) * 1968-06-27 1972-06-14 Ernest James Price Conveyors or supports
JPS60146807U (ja) * 1984-03-12 1985-09-30 河口湖精密株式会社 デジタルノギスの防塵構造
JPH057532Y2 (enrdf_load_stackoverflow) * 1986-07-07 1993-02-25
US5291269A (en) * 1991-12-06 1994-03-01 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
JP2991932B2 (ja) * 1994-07-12 1999-12-20 新日本製鐵株式会社 鋼板の平坦度測定方法
JPH08166226A (ja) * 1994-12-14 1996-06-25 Casio Comput Co Ltd 平面度測定装置およびそれを用いた平面度測定方法
JPH1070179A (ja) * 1996-08-28 1998-03-10 Canon Inc 基板保持装置およびこれを用いた露光装置
JPH11351857A (ja) * 1998-06-08 1999-12-24 Kuroda Precision Ind Ltd 薄板の表面形状測定方法および薄板の表面形状測定装置
JP2000065506A (ja) * 1998-08-24 2000-03-03 Ngk Insulators Ltd 厚さ測定用治具
US6608689B1 (en) * 1998-08-31 2003-08-19 Therma-Wave, Inc. Combination thin-film stress and thickness measurement device
JP2000314613A (ja) * 1999-05-06 2000-11-14 Kobe Steel Ltd 表面形状測定装置
ATE401550T1 (de) * 1999-08-31 2008-08-15 Nxp Bv Verfahren und vorrichtung zur bestimmung des verziehens einer halbleiterscheibe
JP2001332609A (ja) * 2000-03-13 2001-11-30 Nikon Corp 基板保持装置及び露光装置
US20020036774A1 (en) * 2000-08-08 2002-03-28 Emil Kamieniecki Apparatus and method for handling and testing of wafers
JP2004087593A (ja) * 2002-08-23 2004-03-18 Nikon Corp ステージ装置および露光装置
JP2004303923A (ja) * 2003-03-31 2004-10-28 Shimadzu Corp 基板アライメント機構、及びそれを用いた基板検査装置
US7131211B2 (en) * 2003-08-18 2006-11-07 Micron Technology, Inc. Method and apparatus for measurement of thickness and warpage of substrates
US7225665B2 (en) * 2005-07-27 2007-06-05 Corning Incorporated Process and apparatus for measuring the shape of an article
JP5469340B2 (ja) * 2005-07-27 2014-04-16 コーニング インコーポレイテッド シート状ガラスを測定するための装置及び方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06331339A (ja) * 1993-05-21 1994-12-02 Hitachi Cable Ltd 薄板の変形測定方法及びその装置
JP2001041712A (ja) * 1999-07-27 2001-02-16 Fuji Photo Optical Co Ltd 被測定体の支持装置およびその製造方法
JP2001330430A (ja) * 2000-05-22 2001-11-30 Daido Steel Co Ltd 平面度測定方法および平面度測定装置

Also Published As

Publication number Publication date
JP2014066721A (ja) 2014-04-17
JP6169063B2 (ja) 2017-07-26
WO2007015772A3 (en) 2007-04-12
EP1907791A2 (en) 2008-04-09
CN101268356B (zh) 2012-07-25
KR20080036118A (ko) 2008-04-24
TWI300838B (en) 2008-09-11
TW200722705A (en) 2007-06-16
JP5469340B2 (ja) 2014-04-16
CN101268356A (zh) 2008-09-17
WO2007015772A2 (en) 2007-02-08
JP2009503504A (ja) 2009-01-29
JP2015062023A (ja) 2015-04-02
EP1907791A4 (en) 2009-12-23
JP5676726B2 (ja) 2015-02-25

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