TW200722705A - Apparatus and method for measuring a glass sheet - Google Patents

Apparatus and method for measuring a glass sheet

Info

Publication number
TW200722705A
TW200722705A TW095127223A TW95127223A TW200722705A TW 200722705 A TW200722705 A TW 200722705A TW 095127223 A TW095127223 A TW 095127223A TW 95127223 A TW95127223 A TW 95127223A TW 200722705 A TW200722705 A TW 200722705A
Authority
TW
Taiwan
Prior art keywords
glass sheet
measuring
support members
glass
ranging device
Prior art date
Application number
TW095127223A
Other languages
Chinese (zh)
Other versions
TWI300838B (en
Inventor
Jeffrey Clinton Mccreary
Brian Paul Strines
James Patrick Trice
Jesse Ray Frederick
John C Morrison
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of TW200722705A publication Critical patent/TW200722705A/en
Application granted granted Critical
Publication of TWI300838B publication Critical patent/TWI300838B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C5/00—Measuring height; Measuring distances transverse to line of sight; Levelling between separated points; Surveyors' levels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/045—Ball or roller bearings having rolling elements journaled in one of the moving parts
    • F16C29/046—Ball or roller bearings having rolling elements journaled in one of the moving parts with balls journaled in pockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

An apparatus for measuring a pane of glass. The apparatus includes a stable base having a plurality of repositionable support members arrayed on the base. A glass sheet is placed overtop the support members, and a conventional distance measuring device, such as a laser ranging device coupled to a system for translating the ranging device along the x-y and z axes, is suspended above the glass sheet. A plurality of distance measurements are taken, and the out-of-plane deviation of the glass sheet is thereafter determined. Contact between each support member and the glass sheet to be measured is preferably a point contact.
TW095127223A 2005-07-27 2006-07-25 Apparatus and method for measuring a glass sheet TWI300838B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70332305P 2005-07-27 2005-07-27

Publications (2)

Publication Number Publication Date
TW200722705A true TW200722705A (en) 2007-06-16
TWI300838B TWI300838B (en) 2008-09-11

Family

ID=37709041

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095127223A TWI300838B (en) 2005-07-27 2006-07-25 Apparatus and method for measuring a glass sheet

Country Status (6)

Country Link
EP (1) EP1907791A4 (en)
JP (3) JP5469340B2 (en)
KR (1) KR101294450B1 (en)
CN (1) CN101268356B (en)
TW (1) TWI300838B (en)
WO (1) WO2007015772A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101294450B1 (en) * 2005-07-27 2013-08-07 코닝 인코포레이티드 Apparatus and method for measuring a glass sheet
JP5654354B2 (en) * 2007-11-30 2015-01-14 コーニング インコーポレイテッド Method and apparatus for detecting shape change of a moving substrate
CN102721356A (en) * 2012-06-12 2012-10-10 无锡市麦希恩机械制造有限公司 Inspection device structure for automotive glass skylight
CN103418644B (en) * 2013-09-02 2015-02-18 苏州赛斯德工程设备有限公司 Bending machine with assisted locating jig
JP2017501951A (en) * 2013-11-25 2017-01-19 コーニング インコーポレイテッド Method for determining the shape of a specular reflecting surface that is substantially columnar
CN103673915A (en) * 2013-12-20 2014-03-26 苏州精创光学仪器有限公司 Device for quickly measuring warping degree of touch screen protective glass
CN104006769B (en) * 2014-05-13 2017-01-18 苏州金牛精密机械有限公司 Jig used for detecting planarity of fin tube
CN104310032A (en) * 2014-11-03 2015-01-28 苏州精创光学仪器有限公司 Conveying device of glass measuring system
CN105783794B (en) * 2016-03-22 2019-03-15 阳谷祥光铜业有限公司 A kind of plane monitoring-network method and apparatus
CN105806247A (en) * 2016-05-23 2016-07-27 南京林业大学 Wood board warping online detection device and detection method
CN109737881A (en) * 2019-03-22 2019-05-10 李兆祥 A kind of gear monitoring device
CN112595281B (en) * 2020-12-31 2022-09-27 域鑫科技（惠州）有限公司 Method and medium for rapidly measuring surface profile of workpiece

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1277576A (en) * 1968-06-27 1972-06-14 Ernest James Price Conveyors or supports
JPS60146807U (en) * 1984-03-12 1985-09-30 河口湖精密株式会社 Dustproof structure of digital caliper
JPH057532Y2 (en) * 1986-07-07 1993-02-25
US5291269A (en) * 1991-12-06 1994-03-01 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
JPH06331339A (en) * 1993-05-21 1994-12-02 Hitachi Cable Ltd Method and device for measuring deformation of thin plate
JP2991932B2 (en) * 1994-07-12 1999-12-20 新日本製鐵株式会社 Steel plate flatness measurement method
JPH08166226A (en) * 1994-12-14 1996-06-25 Casio Comput Co Ltd Flatness measuring device and flatness measuring method using the same
JPH1070179A (en) * 1996-08-28 1998-03-10 Canon Inc Substrate holding apparatus and aligner using the same
JPH11351857A (en) * 1998-06-08 1999-12-24 Kuroda Precision Ind Ltd Method and apparatus for measurement of surface shape of thin plate
JP2000065506A (en) * 1998-08-24 2000-03-03 Ngk Insulators Ltd Thickness measurement jig
US6608689B1 (en) * 1998-08-31 2003-08-19 Therma-Wave, Inc. Combination thin-film stress and thickness measurement device
JP2000314613A (en) * 1999-05-06 2000-11-14 Kobe Steel Ltd Surface shape measurement device
JP4218916B2 (en) * 1999-07-27 2009-02-04 フジノン株式会社 Method of manufacturing support device for object to be measured
WO2001016559A1 (en) * 1999-08-31 2001-03-08 Koninklijke Philips Electronics N.V. Method of and device for determining the warpage of a wafer
JP2001332609A (en) * 2000-03-13 2001-11-30 Nikon Corp Apparatus for holding substrate and aligner
JP2001330430A (en) * 2000-05-22 2001-11-30 Daido Steel Co Ltd Method and apparatus for measurement of flatness
US20020036774A1 (en) * 2000-08-08 2002-03-28 Emil Kamieniecki Apparatus and method for handling and testing of wafers
JP2004087593A (en) * 2002-08-23 2004-03-18 Nikon Corp Stage device and exposure device
JP2004303923A (en) * 2003-03-31 2004-10-28 Shimadzu Corp Substrate alignment arrangement and substrate inspection apparatus using the same
US7131211B2 (en) * 2003-08-18 2006-11-07 Micron Technology, Inc. Method and apparatus for measurement of thickness and warpage of substrates
KR101294450B1 (en) * 2005-07-27 2013-08-07 코닝 인코포레이티드 Apparatus and method for measuring a glass sheet
US7225665B2 (en) * 2005-07-27 2007-06-05 Corning Incorporated Process and apparatus for measuring the shape of an article

Also Published As

Publication number Publication date
EP1907791A4 (en) 2009-12-23
JP6169063B2 (en) 2017-07-26
JP5676726B2 (en) 2015-02-25
CN101268356B (en) 2012-07-25
JP5469340B2 (en) 2014-04-16
CN101268356A (en) 2008-09-17
WO2007015772A2 (en) 2007-02-08
JP2014066721A (en) 2014-04-17
JP2009503504A (en) 2009-01-29
EP1907791A2 (en) 2008-04-09
WO2007015772A3 (en) 2007-04-12
TWI300838B (en) 2008-09-11
JP2015062023A (en) 2015-04-02
KR101294450B1 (en) 2013-08-07
KR20080036118A (en) 2008-04-24

Similar Documents

Publication Publication Date Title
TW200722705A (en) Apparatus and method for measuring a glass sheet
TW200801859A (en) Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
SG126883A1 (en) Lithographic apparatus and positioning apparatus
SG137828A1 (en) Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
SE0401085D0 (en) Coordinate
WO2007087485A3 (en) Method and apparatus for photographic measurement
SG162618A1 (en) Test head positioning system and method
HK1129340A1 (en) Vials and apparatus for obtaining an aliquot of a sample
PL2027363T3 (en) In-borehole gas monitor apparatus and method
SE0401130L (en) Fixed and / or movable system and device in mainly vehicles, eg cars
TW200617363A (en) Methods and apparatus for low distortion parameter measurements
BRPI0418101A (en) device and method for measuring the profile of a surface
BR112013004741A2 (en) "Method of measuring downhole properties, machine readable storage medium, and apparatus for measuring downhole properties."
HK1115636A1 (en) Use of cyfra 21-1 as a marker for colorectal cancer cyfra 21-1
TW200724890A (en) Apparatus and method for continuously bending flexible device
ATE431617T1 (en) APPARATUS AND METHOD FOR CUTTING A CATHODE RAY TUBE
TW200720732A (en) Inspecting system of flat panel display
TW200833913A (en) Suspended ceiling with measurement indicia
FR2892188B1 (en) METHOD AND DEVICE FOR MEASURING PATTERN HEIGHTS
ITMI20030620A1 (en) MANUAL OPTICAL APPARATUS FOR MEASURING THE LATERAL DISTANCE
EP3543191A3 (en) Monitoring roller guide health
MX2022006646A (en) Measuring device for measuring unevenness of a surface of an item.
SG10201800620XA (en) Determining method, measuring apparatus and adhesive tape attaching apparatus
FR2922131B1 (en) MEASURING DEVICE, PLATE HOLDER AND TOOL HOLDER THEREFOR
DE502004002367D1 (en) Weighing cell

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees