KR101293381B1 - 전자 장치를 테스트하기 위한 시스템의 동작 주파수를증가시키는 방법 및 장치 - Google Patents

전자 장치를 테스트하기 위한 시스템의 동작 주파수를증가시키는 방법 및 장치 Download PDF

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Publication number
KR101293381B1
KR101293381B1 KR1020077018038A KR20077018038A KR101293381B1 KR 101293381 B1 KR101293381 B1 KR 101293381B1 KR 1020077018038 A KR1020077018038 A KR 1020077018038A KR 20077018038 A KR20077018038 A KR 20077018038A KR 101293381 B1 KR101293381 B1 KR 101293381B1
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South Korea
Prior art keywords
probe
resistors
terminals
shunt
substrate
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Expired - Fee Related
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KR1020077018038A
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English (en)
Korean (ko)
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KR20070097095A (ko
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찰스 에이 밀러
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폼팩터, 인코포레이티드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Leads Or Probes (AREA)
KR1020077018038A 2005-01-07 2005-12-15 전자 장치를 테스트하기 위한 시스템의 동작 주파수를증가시키는 방법 및 장치 Expired - Fee Related KR101293381B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/031,504 US7414418B2 (en) 2005-01-07 2005-01-07 Method and apparatus for increasing operating frequency of a system for testing electronic devices
US11/031,504 2005-01-07
PCT/US2005/045583 WO2006073737A2 (en) 2005-01-07 2005-12-15 A method and apparatus for increasing the operating frequency of a system for testing electronic devices

Publications (2)

Publication Number Publication Date
KR20070097095A KR20070097095A (ko) 2007-10-02
KR101293381B1 true KR101293381B1 (ko) 2013-08-05

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KR1020077018038A Expired - Fee Related KR101293381B1 (ko) 2005-01-07 2005-12-15 전자 장치를 테스트하기 위한 시스템의 동작 주파수를증가시키는 방법 및 장치

Country Status (7)

Country Link
US (2) US7414418B2 (enExample)
EP (1) EP1839062A4 (enExample)
JP (2) JP2008527346A (enExample)
KR (1) KR101293381B1 (enExample)
CN (1) CN101099085B (enExample)
TW (1) TWI404948B (enExample)
WO (1) WO2006073737A2 (enExample)

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US7414418B2 (en) * 2005-01-07 2008-08-19 Formfactor, Inc. Method and apparatus for increasing operating frequency of a system for testing electronic devices
JP2006343146A (ja) * 2005-06-07 2006-12-21 Advantest Corp 試験装置
US7970971B2 (en) * 2007-01-30 2011-06-28 Finisar Corporation Tapping systems and methods
KR100978233B1 (ko) * 2008-05-19 2010-08-26 티에스씨멤시스(주) 전기 검사 장치 그리고 이의 제조 방법, 이의 전기 신호인터페이싱 어셈블리, 및 이의 전기 신호 인터페이싱 방법
KR20100083364A (ko) * 2009-01-13 2010-07-22 삼성전자주식회사 전기적 특성 검사 장치
US8410804B1 (en) * 2009-02-24 2013-04-02 Keithley Instruments, Inc. Measurement system with high frequency ground switch
US8098076B2 (en) * 2009-04-01 2012-01-17 Formfactor, Inc. Method and apparatus for terminating a test signal applied to multiple semiconductor loads under test
CN101949961B (zh) * 2010-08-16 2012-09-12 南京国博电子有限公司 射频测试用直流偏置探针卡
JP5621523B2 (ja) * 2010-11-09 2014-11-12 パナソニック株式会社 入力装置
EP2561759A1 (en) 2011-08-26 2013-02-27 Bayer Cropscience AG Fluoroalkyl-substituted 2-amidobenzimidazoles and their effect on plant growth
KR102168688B1 (ko) * 2013-12-19 2020-10-22 삼성디스플레이 주식회사 구동 칩 및 이를 포함하는 표시 장치
US10698020B2 (en) * 2014-03-26 2020-06-30 Teradyne, Inc. Current regulation for accurate and low-cost voltage measurements at the wafer level
US11041900B2 (en) * 2014-03-26 2021-06-22 Teradyne, Inc. Equi-resistant probe distribution for high-accuracy voltage measurements at the wafer level
CN105548752B (zh) * 2015-12-09 2018-06-26 上海华岭集成电路技术股份有限公司 可提高激励信号信噪比的测试系统
TWI595248B (zh) * 2016-01-20 2017-08-11 新特系統股份有限公司 使用開關切換單一訊號通道與複數個連接墊之連結的測試電路
US10642671B2 (en) * 2018-02-22 2020-05-05 Elite Semiconductor Memory Tecnology Inc. Testing apparatus and folded probe card testing system
KR102594695B1 (ko) * 2018-06-29 2023-10-25 주식회사 엘지에너지솔루션 배터리 관리 시스템, 그것을 포함하는 배터리팩 및 전류 측정 회로의 고장 판정 방법
US11573264B2 (en) * 2019-04-10 2023-02-07 Mediatek Inc. Device for testing chip or die with better system IR drop
CN114019338A (zh) * 2021-10-26 2022-02-08 上海华虹宏力半导体制造有限公司 分立器件的晶圆测试方法

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Also Published As

Publication number Publication date
TWI404948B (zh) 2013-08-11
US20060152234A1 (en) 2006-07-13
US20080303541A1 (en) 2008-12-11
CN101099085B (zh) 2011-01-19
JP2008527346A (ja) 2008-07-24
JP2012189607A (ja) 2012-10-04
CN101099085A (zh) 2008-01-02
KR20070097095A (ko) 2007-10-02
US7880486B2 (en) 2011-02-01
US7414418B2 (en) 2008-08-19
TW200636260A (en) 2006-10-16
EP1839062A4 (en) 2010-09-29
WO2006073737A3 (en) 2007-03-08
WO2006073737A2 (en) 2006-07-13
EP1839062A2 (en) 2007-10-03

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