CN101099085B - 用于提高电子器件测试系统的工作频率的方法和装置 - Google Patents

用于提高电子器件测试系统的工作频率的方法和装置 Download PDF

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Publication number
CN101099085B
CN101099085B CN2005800461810A CN200580046181A CN101099085B CN 101099085 B CN101099085 B CN 101099085B CN 2005800461810 A CN2005800461810 A CN 2005800461810A CN 200580046181 A CN200580046181 A CN 200580046181A CN 101099085 B CN101099085 B CN 101099085B
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CN
China
Prior art keywords
probe
channel
resistor
shunt resistor
divert shunt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2005800461810A
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English (en)
Chinese (zh)
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CN101099085A (zh
Inventor
C·A·米勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FormFactor Inc filed Critical FormFactor Inc
Publication of CN101099085A publication Critical patent/CN101099085A/zh
Application granted granted Critical
Publication of CN101099085B publication Critical patent/CN101099085B/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Leads Or Probes (AREA)
CN2005800461810A 2005-01-07 2005-12-15 用于提高电子器件测试系统的工作频率的方法和装置 Expired - Fee Related CN101099085B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/031,504 US7414418B2 (en) 2005-01-07 2005-01-07 Method and apparatus for increasing operating frequency of a system for testing electronic devices
US11/031,504 2005-01-07
PCT/US2005/045583 WO2006073737A2 (en) 2005-01-07 2005-12-15 A method and apparatus for increasing the operating frequency of a system for testing electronic devices

Publications (2)

Publication Number Publication Date
CN101099085A CN101099085A (zh) 2008-01-02
CN101099085B true CN101099085B (zh) 2011-01-19

Family

ID=36647974

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2005800461810A Expired - Fee Related CN101099085B (zh) 2005-01-07 2005-12-15 用于提高电子器件测试系统的工作频率的方法和装置

Country Status (7)

Country Link
US (2) US7414418B2 (enExample)
EP (1) EP1839062A4 (enExample)
JP (2) JP2008527346A (enExample)
KR (1) KR101293381B1 (enExample)
CN (1) CN101099085B (enExample)
TW (1) TWI404948B (enExample)
WO (1) WO2006073737A2 (enExample)

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US7064566B2 (en) * 1993-11-16 2006-06-20 Formfactor, Inc. Probe card assembly and kit
US7414418B2 (en) * 2005-01-07 2008-08-19 Formfactor, Inc. Method and apparatus for increasing operating frequency of a system for testing electronic devices
JP2006343146A (ja) * 2005-06-07 2006-12-21 Advantest Corp 試験装置
US7970971B2 (en) * 2007-01-30 2011-06-28 Finisar Corporation Tapping systems and methods
KR100978233B1 (ko) * 2008-05-19 2010-08-26 티에스씨멤시스(주) 전기 검사 장치 그리고 이의 제조 방법, 이의 전기 신호인터페이싱 어셈블리, 및 이의 전기 신호 인터페이싱 방법
KR20100083364A (ko) * 2009-01-13 2010-07-22 삼성전자주식회사 전기적 특성 검사 장치
US8410804B1 (en) * 2009-02-24 2013-04-02 Keithley Instruments, Inc. Measurement system with high frequency ground switch
US8098076B2 (en) * 2009-04-01 2012-01-17 Formfactor, Inc. Method and apparatus for terminating a test signal applied to multiple semiconductor loads under test
CN101949961B (zh) * 2010-08-16 2012-09-12 南京国博电子有限公司 射频测试用直流偏置探针卡
JP5621523B2 (ja) * 2010-11-09 2014-11-12 パナソニック株式会社 入力装置
EP2561759A1 (en) 2011-08-26 2013-02-27 Bayer Cropscience AG Fluoroalkyl-substituted 2-amidobenzimidazoles and their effect on plant growth
KR102168688B1 (ko) * 2013-12-19 2020-10-22 삼성디스플레이 주식회사 구동 칩 및 이를 포함하는 표시 장치
US10698020B2 (en) * 2014-03-26 2020-06-30 Teradyne, Inc. Current regulation for accurate and low-cost voltage measurements at the wafer level
US11041900B2 (en) * 2014-03-26 2021-06-22 Teradyne, Inc. Equi-resistant probe distribution for high-accuracy voltage measurements at the wafer level
CN105548752B (zh) * 2015-12-09 2018-06-26 上海华岭集成电路技术股份有限公司 可提高激励信号信噪比的测试系统
TWI595248B (zh) * 2016-01-20 2017-08-11 新特系統股份有限公司 使用開關切換單一訊號通道與複數個連接墊之連結的測試電路
US10642671B2 (en) * 2018-02-22 2020-05-05 Elite Semiconductor Memory Tecnology Inc. Testing apparatus and folded probe card testing system
KR102594695B1 (ko) * 2018-06-29 2023-10-25 주식회사 엘지에너지솔루션 배터리 관리 시스템, 그것을 포함하는 배터리팩 및 전류 측정 회로의 고장 판정 방법
US11573264B2 (en) * 2019-04-10 2023-02-07 Mediatek Inc. Device for testing chip or die with better system IR drop
CN114019338A (zh) * 2021-10-26 2022-02-08 上海华虹宏力半导体制造有限公司 分立器件的晶圆测试方法

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US4392107A (en) * 1980-09-09 1983-07-05 The Bendix Corporation Switching equipment for testing apparatus
US5086271A (en) * 1990-01-12 1992-02-04 Reliability Incorporated Driver system and distributed transmission line network for driving devices under test
US5623214A (en) * 1994-10-14 1997-04-22 Hughes Aircraft Company Multiport membrane probe for full-wafer testing
US20030020502A1 (en) * 2001-07-26 2003-01-30 Osamu Sugihara Contact probe member and manufacturing method of the same
US6784674B2 (en) * 2002-05-08 2004-08-31 Formfactor, Inc. Test signal distribution system for IC tester
US6798225B2 (en) * 2002-05-08 2004-09-28 Formfactor, Inc. Tester channel to multiple IC terminals

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US3512083A (en) * 1966-12-12 1970-05-12 Automated Measurements Corp Sampling system and apparatus for testing electronic devices using a plurality of self-contained probes
US4418314A (en) * 1980-10-20 1983-11-29 The United States Of America As Represented By The Secretary Of The Army High impedance fast voltage probe
JP2556038B2 (ja) * 1987-06-09 1996-11-20 日本電装株式会社 混成集積回路
JPS6447973A (en) * 1987-08-18 1989-02-22 Yokogawa Electric Corp Device tester
JPH03226683A (ja) * 1990-02-01 1991-10-07 Fujitsu Ltd Ｌｓｉ試験方法
US5172051A (en) * 1991-04-24 1992-12-15 Hewlett-Packard Company Wide bandwidth passive probe
JPH06140484A (ja) * 1992-10-28 1994-05-20 Nippon Telegr & Teleph Corp <Ntt> プローブカード
JPH0763788A (ja) * 1993-08-21 1995-03-10 Hewlett Packard Co <Hp> プローブおよび電気部品／回路検査装置ならびに電気部品／回路検査方法
US6175228B1 (en) * 1998-10-30 2001-01-16 Agilent Technologies Electronic probe for measuring high impedance tri-state logic circuits
US6218910B1 (en) * 1999-02-25 2001-04-17 Formfactor, Inc. High bandwidth passive integrated circuit tester probe card assembly
US6657455B2 (en) * 2000-01-18 2003-12-02 Formfactor, Inc. Predictive, adaptive power supply for an integrated circuit under test
US6339338B1 (en) * 2000-01-18 2002-01-15 Formfactor, Inc. Apparatus for reducing power supply noise in an integrated circuit
JP2001296335A (ja) * 2000-04-14 2001-10-26 Nec Corp 半導体装置の検査方法及び検査装置
US6603323B1 (en) * 2000-07-10 2003-08-05 Formfactor, Inc. Closed-grid bus architecture for wafer interconnect structure
JP2002131388A (ja) * 2000-10-26 2002-05-09 Ando Electric Co Ltd 終端回路
JP2002196048A (ja) * 2000-12-26 2002-07-10 Advantest Corp 半導体試験装置のデバイスインタフェース
KR100693540B1 (ko) * 2001-07-17 2007-03-14 주식회사 아도반테스토 입출력 회로, 및 시험 장치
JP2003121500A (ja) * 2001-10-10 2003-04-23 Mitsubishi Electric Corp 半導体装置の試験装置及び試験方法
JP2004020408A (ja) * 2002-06-18 2004-01-22 Advantest Corp 半導体試験装置
US6812691B2 (en) * 2002-07-12 2004-11-02 Formfactor, Inc. Compensation for test signal degradation due to DUT fault
US7190119B2 (en) * 2003-11-07 2007-03-13 Lam Research Corporation Methods and apparatus for optimizing a substrate in a plasma processing system
US7414418B2 (en) 2005-01-07 2008-08-19 Formfactor, Inc. Method and apparatus for increasing operating frequency of a system for testing electronic devices

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4392107A (en) * 1980-09-09 1983-07-05 The Bendix Corporation Switching equipment for testing apparatus
US5086271A (en) * 1990-01-12 1992-02-04 Reliability Incorporated Driver system and distributed transmission line network for driving devices under test
US5623214A (en) * 1994-10-14 1997-04-22 Hughes Aircraft Company Multiport membrane probe for full-wafer testing
US20030020502A1 (en) * 2001-07-26 2003-01-30 Osamu Sugihara Contact probe member and manufacturing method of the same
US6784674B2 (en) * 2002-05-08 2004-08-31 Formfactor, Inc. Test signal distribution system for IC tester
US6798225B2 (en) * 2002-05-08 2004-09-28 Formfactor, Inc. Tester channel to multiple IC terminals

Also Published As

Publication number Publication date
TWI404948B (zh) 2013-08-11
US20060152234A1 (en) 2006-07-13
US20080303541A1 (en) 2008-12-11
JP2008527346A (ja) 2008-07-24
JP2012189607A (ja) 2012-10-04
CN101099085A (zh) 2008-01-02
KR101293381B1 (ko) 2013-08-05
KR20070097095A (ko) 2007-10-02
US7880486B2 (en) 2011-02-01
US7414418B2 (en) 2008-08-19
TW200636260A (en) 2006-10-16
EP1839062A4 (en) 2010-09-29
WO2006073737A3 (en) 2007-03-08
WO2006073737A2 (en) 2006-07-13
EP1839062A2 (en) 2007-10-03

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110119

Termination date: 20111215