KR101162912B1 - 어레이기판 검사장치 및 어레이기판 검사방법 - Google Patents

어레이기판 검사장치 및 어레이기판 검사방법 Download PDF

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Publication number
KR101162912B1
KR101162912B1 KR1020090102012A KR20090102012A KR101162912B1 KR 101162912 B1 KR101162912 B1 KR 101162912B1 KR 1020090102012 A KR1020090102012 A KR 1020090102012A KR 20090102012 A KR20090102012 A KR 20090102012A KR 101162912 B1 KR101162912 B1 KR 101162912B1
Authority
KR
South Korea
Prior art keywords
probe
array substrate
electrodes
electrode
energized
Prior art date
Application number
KR1020090102012A
Other languages
English (en)
Korean (ko)
Other versions
KR20110045431A (ko
Inventor
박종현
Original Assignee
주식회사 탑 엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 탑 엔지니어링 filed Critical 주식회사 탑 엔지니어링
Priority to KR1020090102012A priority Critical patent/KR101162912B1/ko
Priority to TW098142267A priority patent/TWI421513B/zh
Priority to CN2009102496373A priority patent/CN102053400B/zh
Publication of KR20110045431A publication Critical patent/KR20110045431A/ko
Application granted granted Critical
Publication of KR101162912B1 publication Critical patent/KR101162912B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1020090102012A 2009-10-27 2009-10-27 어레이기판 검사장치 및 어레이기판 검사방법 KR101162912B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020090102012A KR101162912B1 (ko) 2009-10-27 2009-10-27 어레이기판 검사장치 및 어레이기판 검사방법
TW098142267A TWI421513B (zh) 2009-10-27 2009-12-10 陣列基板檢測裝置及方法
CN2009102496373A CN102053400B (zh) 2009-10-27 2009-12-10 阵列基板检测装置及方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090102012A KR101162912B1 (ko) 2009-10-27 2009-10-27 어레이기판 검사장치 및 어레이기판 검사방법

Publications (2)

Publication Number Publication Date
KR20110045431A KR20110045431A (ko) 2011-05-04
KR101162912B1 true KR101162912B1 (ko) 2012-07-06

Family

ID=43957900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090102012A KR101162912B1 (ko) 2009-10-27 2009-10-27 어레이기판 검사장치 및 어레이기판 검사방법

Country Status (3)

Country Link
KR (1) KR101162912B1 (zh)
CN (1) CN102053400B (zh)
TW (1) TWI421513B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101286250B1 (ko) * 2011-11-23 2013-07-12 양 전자시스템 주식회사 다수의 헤드 유니트를 갖는 어레이 테스트 장치
CN102621731B (zh) * 2012-04-17 2014-11-19 深圳市华星光电技术有限公司 液晶基板的电压施加装置
KR101695283B1 (ko) * 2014-03-27 2017-01-12 주식회사 탑 엔지니어링 박막 트랜지스터 기판 검사 장치
CN110007525B (zh) * 2019-04-08 2021-11-09 北海惠科光电技术有限公司 一种基板的加电装置和基板的加电组件

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005227056A (ja) * 2004-02-12 2005-08-25 Hioki Ee Corp 回路基板検査用プロービング装置および回路基板検査装置
JP2008286757A (ja) * 2007-05-21 2008-11-27 Toshiba Teli Corp プローブユニット

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0513520A (ja) * 1991-07-03 1993-01-22 Matsushita Electric Ind Co Ltd プローブ装置
JP3762444B2 (ja) * 1993-08-24 2006-04-05 信昭 鈴木 回路基板の検査用プローブとその取付構造
JP2002148280A (ja) * 2000-11-08 2002-05-22 Soushiyou Tec:Kk 検査用プローブブロックの並列搭載ユニット
JP2002181889A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置
US6960923B2 (en) * 2001-12-19 2005-11-01 Formfactor, Inc. Probe card covering system and method
AU2003303828A1 (en) * 2003-01-31 2004-08-23 Advantest Corporation Tcp handling device and positional deviation correcting method for the same
JP2007024582A (ja) * 2005-07-13 2007-02-01 Agilent Technol Inc 表示パネルの検査装置、及びそれに用いるインターフェース
JP2009539112A (ja) * 2006-05-31 2009-11-12 アプライド マテリアルズ インコーポレイテッド Ｔｆｔ−ｌｃｄ検査のための小型プローバ
TWI339730B (en) * 2006-05-31 2011-04-01 Applied Materials Inc Prober for electronic device testing on large area substrates

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005227056A (ja) * 2004-02-12 2005-08-25 Hioki Ee Corp 回路基板検査用プロービング装置および回路基板検査装置
JP2008286757A (ja) * 2007-05-21 2008-11-27 Toshiba Teli Corp プローブユニット

Also Published As

Publication number Publication date
CN102053400B (zh) 2013-04-24
TWI421513B (zh) 2014-01-01
CN102053400A (zh) 2011-05-11
KR20110045431A (ko) 2011-05-04
TW201115159A (en) 2011-05-01

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