KR101029987B1 - 전기 시험용 접촉자 및 그 제조방법 - Google Patents

전기 시험용 접촉자 및 그 제조방법 Download PDF

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KR101029987B1
KR101029987B1 KR1020090015145A KR20090015145A KR101029987B1 KR 101029987 B1 KR101029987 B1 KR 101029987B1 KR 1020090015145 A KR1020090015145 A KR 1020090015145A KR 20090015145 A KR20090015145 A KR 20090015145A KR 101029987 B1 KR101029987 B1 KR 101029987B1
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South Korea
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reinforcement
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Korean (ko)
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KR20090102636A (ko
Inventor
유코 야마다
히데키 히라카와
아키라 소마
타카유키 하야시자키
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가부시키가이샤 니혼 마이크로닉스
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Geometry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020090015145A 2008-03-25 2009-02-24 전기 시험용 접촉자 및 그 제조방법 Active KR101029987B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2008-078560 2008-03-25
JP2008078560A JP2009229410A (ja) 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法

Publications (2)

Publication Number Publication Date
KR20090102636A KR20090102636A (ko) 2009-09-30
KR101029987B1 true KR101029987B1 (ko) 2011-04-20

Family

ID=41244964

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090015145A Active KR101029987B1 (ko) 2008-03-25 2009-02-24 전기 시험용 접촉자 및 그 제조방법

Country Status (3)

Country Link
JP (1) JP2009229410A (https=)
KR (1) KR101029987B1 (https=)
TW (1) TWI399544B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240000932A (ko) * 2022-06-24 2024-01-03 주식회사 가온닉스 전자부품의 회로 검사용 프로브 제조 방법

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9052342B2 (en) 2011-09-30 2015-06-09 Formfactor, Inc. Probe with cantilevered beam having solid and hollow sections
JP2014016204A (ja) 2012-07-06 2014-01-30 Micronics Japan Co Ltd 電気的接触子及び電気的接触子の接触方法
JP5968158B2 (ja) 2012-08-10 2016-08-10 株式会社日本マイクロニクス コンタクトプローブ及びプローブカード
JP6068925B2 (ja) * 2012-10-23 2017-01-25 株式会社日本マイクロニクス プローブの製造方法
KR102466151B1 (ko) * 2015-11-30 2022-11-15 삼성전자주식회사 프로브 카드 및 그를 포함하는 테스트 장치
JP7353859B2 (ja) * 2019-08-09 2023-10-02 株式会社日本マイクロニクス 電気的接触子及び電気的接続装置
JP2021028603A (ja) 2019-08-09 2021-02-25 株式会社日本マイクロニクス 電気的接触子及び電気的接続装置
CN111825056B (zh) * 2020-07-17 2024-10-25 杭州电子科技大学 基于飞秒激光与高温成型悬臂梁探针的方法及悬臂梁探针

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000338131A (ja) 1999-03-25 2000-12-08 Tokyo Cathode Laboratory Co Ltd プローブカード用探針及びその製造方法
JP2001337110A (ja) 2000-05-29 2001-12-07 Bureijingu:Kk プローブピンおよびプローブカード

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390865A (ja) * 1989-09-01 1991-04-16 Sumitomo Electric Ind Ltd プローブカードのプローブ
JP4527267B2 (ja) * 2000-11-13 2010-08-18 東京エレクトロン株式会社 コンタクタの製造方法
KR100664393B1 (ko) * 2003-05-13 2007-01-04 가부시키가이샤 니혼 마이크로닉스 통전 시험용 프로브
JP2005351846A (ja) * 2004-06-14 2005-12-22 Micronics Japan Co Ltd プローブ針
JP4932499B2 (ja) * 2005-01-14 2012-05-16 株式会社日本マイクロニクス 通電試験用プローブ
JP2007192719A (ja) * 2006-01-20 2007-08-02 Japan Electronic Materials Corp プローブカード
JP2007271343A (ja) * 2006-03-30 2007-10-18 Sumitomo Electric Ind Ltd コンタクトプローブおよびその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000338131A (ja) 1999-03-25 2000-12-08 Tokyo Cathode Laboratory Co Ltd プローブカード用探針及びその製造方法
JP2001337110A (ja) 2000-05-29 2001-12-07 Bureijingu:Kk プローブピンおよびプローブカード

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240000932A (ko) * 2022-06-24 2024-01-03 주식회사 가온닉스 전자부품의 회로 검사용 프로브 제조 방법
KR102762781B1 (ko) 2022-06-24 2025-02-05 주식회사 가온닉스 전자부품의 회로 검사용 프로브 제조 방법

Also Published As

Publication number Publication date
TW200940999A (en) 2009-10-01
JP2009229410A (ja) 2009-10-08
KR20090102636A (ko) 2009-09-30
TWI399544B (zh) 2013-06-21

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