JP2009229410A - 電気試験用接触子及びその製造方法 - Google Patents

電気試験用接触子及びその製造方法 Download PDF

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Publication number
JP2009229410A
JP2009229410A JP2008078560A JP2008078560A JP2009229410A JP 2009229410 A JP2009229410 A JP 2009229410A JP 2008078560 A JP2008078560 A JP 2008078560A JP 2008078560 A JP2008078560 A JP 2008078560A JP 2009229410 A JP2009229410 A JP 2009229410A
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JP
Japan
Prior art keywords
contact
reinforcing
contact portion
recess
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008078560A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009229410A5 (https=
Inventor
Yuko Yamada
優子 山田
Hideki Hirakawa
秀樹 平川
Akira Soma
亮 相馬
Takayuki Hayashizaki
孝幸 林崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2008078560A priority Critical patent/JP2009229410A/ja
Priority to TW098104020A priority patent/TWI399544B/zh
Priority to KR1020090015145A priority patent/KR101029987B1/ko
Publication of JP2009229410A publication Critical patent/JP2009229410A/ja
Publication of JP2009229410A5 publication Critical patent/JP2009229410A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Geometry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2008078560A 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法 Pending JP2009229410A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008078560A JP2009229410A (ja) 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法
TW098104020A TWI399544B (zh) 2008-03-25 2009-02-09 Contactors for electrical testing and methods for their manufacture
KR1020090015145A KR101029987B1 (ko) 2008-03-25 2009-02-24 전기 시험용 접촉자 및 그 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008078560A JP2009229410A (ja) 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法

Publications (2)

Publication Number Publication Date
JP2009229410A true JP2009229410A (ja) 2009-10-08
JP2009229410A5 JP2009229410A5 (https=) 2011-03-31

Family

ID=41244964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008078560A Pending JP2009229410A (ja) 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法

Country Status (3)

Country Link
JP (1) JP2009229410A (https=)
KR (1) KR101029987B1 (https=)
TW (1) TWI399544B (https=)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9052342B2 (en) 2011-09-30 2015-06-09 Formfactor, Inc. Probe with cantilevered beam having solid and hollow sections
US9146257B2 (en) 2012-08-10 2015-09-29 Kabushiki Kaisha Nihon Micronics Contact probe and probe card
US9435854B2 (en) 2012-07-06 2016-09-06 Kabushiki Kaisha Nihon Micronics Electrical contactor and contact method for the same
KR20170064058A (ko) * 2015-11-30 2017-06-09 삼성전자주식회사 프로브 카드 및 그를 포함하는 테스트 장치
CN111825056A (zh) * 2020-07-17 2020-10-27 杭州电子科技大学 基于飞秒激光与高温成型悬臂梁探针的方法及悬臂梁探针
KR20210018087A (ko) 2019-08-09 2021-02-17 가부시키가이샤 니혼 마이크로닉스 전기적 접촉자 및 전기적 접속장치
KR20210018086A (ko) 2019-08-09 2021-02-17 가부시키가이샤 니혼 마이크로닉스 전기적 접촉자 및 전기적 접속장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6068925B2 (ja) * 2012-10-23 2017-01-25 株式会社日本マイクロニクス プローブの製造方法
KR102762781B1 (ko) * 2022-06-24 2025-02-05 주식회사 가온닉스 전자부품의 회로 검사용 프로브 제조 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390865A (ja) * 1989-09-01 1991-04-16 Sumitomo Electric Ind Ltd プローブカードのプローブ
JP2005351846A (ja) * 2004-06-14 2005-12-22 Micronics Japan Co Ltd プローブ針
JP2007271343A (ja) * 2006-03-30 2007-10-18 Sumitomo Electric Ind Ltd コンタクトプローブおよびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3745184B2 (ja) * 1999-03-25 2006-02-15 株式会社東京カソード研究所 プローブカード用探針及びその製造方法
JP2001337110A (ja) * 2000-05-29 2001-12-07 Bureijingu:Kk プローブピンおよびプローブカード
JP4527267B2 (ja) * 2000-11-13 2010-08-18 東京エレクトロン株式会社 コンタクタの製造方法
KR100664393B1 (ko) * 2003-05-13 2007-01-04 가부시키가이샤 니혼 마이크로닉스 통전 시험용 프로브
JP4932499B2 (ja) * 2005-01-14 2012-05-16 株式会社日本マイクロニクス 通電試験用プローブ
JP2007192719A (ja) * 2006-01-20 2007-08-02 Japan Electronic Materials Corp プローブカード

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390865A (ja) * 1989-09-01 1991-04-16 Sumitomo Electric Ind Ltd プローブカードのプローブ
JP2005351846A (ja) * 2004-06-14 2005-12-22 Micronics Japan Co Ltd プローブ針
JP2007271343A (ja) * 2006-03-30 2007-10-18 Sumitomo Electric Ind Ltd コンタクトプローブおよびその製造方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9052342B2 (en) 2011-09-30 2015-06-09 Formfactor, Inc. Probe with cantilevered beam having solid and hollow sections
US9435854B2 (en) 2012-07-06 2016-09-06 Kabushiki Kaisha Nihon Micronics Electrical contactor and contact method for the same
US9146257B2 (en) 2012-08-10 2015-09-29 Kabushiki Kaisha Nihon Micronics Contact probe and probe card
KR20170064058A (ko) * 2015-11-30 2017-06-09 삼성전자주식회사 프로브 카드 및 그를 포함하는 테스트 장치
KR102466151B1 (ko) 2015-11-30 2022-11-15 삼성전자주식회사 프로브 카드 및 그를 포함하는 테스트 장치
KR20210018087A (ko) 2019-08-09 2021-02-17 가부시키가이샤 니혼 마이크로닉스 전기적 접촉자 및 전기적 접속장치
KR20210018086A (ko) 2019-08-09 2021-02-17 가부시키가이샤 니혼 마이크로닉스 전기적 접촉자 및 전기적 접속장치
US11255878B2 (en) 2019-08-09 2022-02-22 Kabushiki Kaisha Nihon Micronics Electrical contactor and electrical connecting apparatus
US11372022B2 (en) 2019-08-09 2022-06-28 Kabushiki Kaisha Nihon Micronics Electrical contactor and electrical connecting apparatus
TWI787636B (zh) * 2019-08-09 2022-12-21 日商日本麥克隆尼股份有限公司 電性接觸件及電性連接裝置
CN111825056A (zh) * 2020-07-17 2020-10-27 杭州电子科技大学 基于飞秒激光与高温成型悬臂梁探针的方法及悬臂梁探针

Also Published As

Publication number Publication date
TW200940999A (en) 2009-10-01
KR101029987B1 (ko) 2011-04-20
KR20090102636A (ko) 2009-09-30
TWI399544B (zh) 2013-06-21

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