KR100838065B1 - 박막증착기용 고정장치와 이를 이용한 고정방법 - Google Patents

박막증착기용 고정장치와 이를 이용한 고정방법 Download PDF

Info

Publication number
KR100838065B1
KR100838065B1 KR1020020030613A KR20020030613A KR100838065B1 KR 100838065 B1 KR100838065 B1 KR 100838065B1 KR 1020020030613 A KR1020020030613 A KR 1020020030613A KR 20020030613 A KR20020030613 A KR 20020030613A KR 100838065 B1 KR100838065 B1 KR 100838065B1
Authority
KR
South Korea
Prior art keywords
substrate
mask
pressing plate
magnetic material
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020020030613A
Other languages
English (en)
Korean (ko)
Other versions
KR20030092789A (ko
Inventor
강창호
장용원
김태승
Original Assignee
삼성에스디아이 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성에스디아이 주식회사 filed Critical 삼성에스디아이 주식회사
Priority to KR1020020030613A priority Critical patent/KR100838065B1/ko
Priority to US10/448,141 priority patent/US7097750B2/en
Priority to CN03142457A priority patent/CN100587996C/zh
Priority to JP2003156776A priority patent/JP4545393B2/ja
Publication of KR20030092789A publication Critical patent/KR20030092789A/ko
Priority to US11/434,722 priority patent/US7695596B2/en
Application granted granted Critical
Publication of KR100838065B1 publication Critical patent/KR100838065B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020020030613A 2002-05-31 2002-05-31 박막증착기용 고정장치와 이를 이용한 고정방법 Expired - Lifetime KR100838065B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020020030613A KR100838065B1 (ko) 2002-05-31 2002-05-31 박막증착기용 고정장치와 이를 이용한 고정방법
US10/448,141 US7097750B2 (en) 2002-05-31 2003-05-30 Device for fixing substrate for thin film sputter and method of fixing substrate using the same
CN03142457A CN100587996C (zh) 2002-05-31 2003-06-02 固定薄膜溅射用衬底的装置及用此装置来固定衬底的方法
JP2003156776A JP4545393B2 (ja) 2002-05-31 2003-06-02 薄膜蒸着装置用基板固定装置及び基板固定方法
US11/434,722 US7695596B2 (en) 2002-05-31 2006-05-17 Device for fixing substrate for thin film sputter and method of fixing substrate using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020020030613A KR100838065B1 (ko) 2002-05-31 2002-05-31 박막증착기용 고정장치와 이를 이용한 고정방법

Publications (2)

Publication Number Publication Date
KR20030092789A KR20030092789A (ko) 2003-12-06
KR100838065B1 true KR100838065B1 (ko) 2008-06-16

Family

ID=36969574

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020030613A Expired - Lifetime KR100838065B1 (ko) 2002-05-31 2002-05-31 박막증착기용 고정장치와 이를 이용한 고정방법

Country Status (4)

Country Link
US (2) US7097750B2 (enExample)
JP (1) JP4545393B2 (enExample)
KR (1) KR100838065B1 (enExample)
CN (1) CN100587996C (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101049804B1 (ko) * 2009-02-19 2011-07-15 삼성모바일디스플레이주식회사 증착 장치용 마스크 밀착 수단 및 이를 이용한 증착 장치
KR20150009828A (ko) * 2013-07-17 2015-01-27 주식회사 선익시스템 기판 탈부착 장치
KR20170122830A (ko) * 2015-06-12 2017-11-06 가부시키가이샤 아루박 기판 보지 장치, 성막 장치 및 기판 보지 방법
KR20190081585A (ko) * 2017-12-29 2019-07-09 주식회사 에스에프에이 기판 증착장치
KR20190081584A (ko) * 2017-12-29 2019-07-09 주식회사 에스에프에이 기판 증착장치

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005206939A (ja) * 2003-12-26 2005-08-04 Seiko Epson Corp 薄膜形成方法、薄膜形成装置、有機エレクトロルミネッセンス装置の製造方法、有機エレクトロルミネッセンス装置、及び電子機器
JP4734508B2 (ja) * 2004-06-21 2011-07-27 京セラ株式会社 Ｅｌディスプレイおよびその製造方法
KR100692049B1 (ko) * 2004-12-01 2007-03-12 엘지전자 주식회사 유기 전계발광표시소자의 제조장치 및 방법
KR100583522B1 (ko) * 2005-01-05 2006-05-25 삼성에스디아이 주식회사 기판 고정 트레이, 이를 이용한 기판 정렬 시스템 및 그방법
JP2006199998A (ja) * 2005-01-20 2006-08-03 Seiko Epson Corp 成膜装置、成膜方法
JP4609754B2 (ja) * 2005-02-23 2011-01-12 三井造船株式会社 マスククランプの移動機構および成膜装置
KR100696554B1 (ko) * 2005-12-16 2007-03-19 삼성에스디아이 주식회사 증착 장치
KR100721056B1 (ko) * 2006-01-06 2007-05-25 한국원자력연구원 자성체가 적용되는 물리적 구조물을 이용하여 임의의금속막 패턴을 소재 표면에 형성하는 장치 및 방법
US8039052B2 (en) * 2007-09-06 2011-10-18 Intermolecular, Inc. Multi-region processing system and heads
JP5297046B2 (ja) * 2008-01-16 2013-09-25 キヤノントッキ株式会社 成膜装置
KR101517020B1 (ko) * 2008-05-15 2015-05-04 삼성디스플레이 주식회사 유기전계발광표시장치의 제조장치 및 제조방법
DE102008037387A1 (de) * 2008-09-24 2010-03-25 Aixtron Ag Verfahren sowie Vorrichtung zum Abscheiden lateral strukturierter Schichten mittels einer magnetisch auf einem Substrathalter gehaltenen Schattenmaske
JP2011233510A (ja) * 2010-04-05 2011-11-17 Canon Inc 蒸着装置
JP6243898B2 (ja) * 2012-04-19 2017-12-06 インテヴァック インコーポレイテッド 太陽電池製造のための２重マスク装置
US10062600B2 (en) 2012-04-26 2018-08-28 Intevac, Inc. System and method for bi-facial processing of substrates
SG11201406893XA (en) 2012-04-26 2014-11-27 Intevac Inc System architecture for vacuum processing
KR102112751B1 (ko) * 2013-02-01 2020-05-19 삼성디스플레이 주식회사 레이저 빔을 이용한 마스크 제조 방법 및 마스크 제조 장치
KR102270080B1 (ko) * 2013-10-30 2021-06-29 삼성디스플레이 주식회사 박막 증착 장치
KR102218644B1 (ko) * 2013-12-19 2021-02-23 삼성디스플레이 주식회사 증착 장치
CN106688088B (zh) 2014-08-05 2020-01-10 因特瓦克公司 注入掩膜及对齐
CN104993070A (zh) * 2015-07-02 2015-10-21 深圳市华星光电技术有限公司 一种制作柔性oled显示器件的方法
CN106337164A (zh) * 2015-07-08 2017-01-18 上海和辉光电有限公司 一种蒸镀装置
KR102396758B1 (ko) * 2015-08-07 2022-05-13 (주)선익시스템 마스크를 이용하는 공정챔버용 처킹시스템
KR102339616B1 (ko) * 2015-08-17 2021-12-17 (주)선익시스템 마스크를 이용하는 공정챔버용 처킹시스템
CN105154830B (zh) * 2015-09-06 2017-04-19 京东方科技集团股份有限公司 一种固定方法和蒸镀方法
JP6298138B2 (ja) * 2015-11-25 2018-03-20 キヤノントッキ株式会社 成膜システム、磁性体部及び膜の製造方法
KR101702785B1 (ko) * 2015-12-02 2017-02-07 에스엔유 프리시젼 주식회사 박막 증착장치
JP6309048B2 (ja) * 2016-07-01 2018-04-11 キヤノントッキ株式会社 マスク吸着装置
CN106756779B (zh) * 2017-01-03 2019-09-06 京东方科技集团股份有限公司 一种磁控溅射台以及磁控溅射装置
JP6785171B2 (ja) * 2017-03-08 2020-11-18 株式会社日本製鋼所 成膜方法および電子装置の製造方法並びにプラズマ原子層成長装置
JP6857522B2 (ja) * 2017-03-17 2021-04-14 株式会社日本製鋼所 成膜方法および電子装置の製造方法並びにマスク保持体
KR102411538B1 (ko) * 2017-09-04 2022-06-22 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
CN108060388A (zh) * 2017-12-18 2018-05-22 信利（惠州）智能显示有限公司 一种基板和掩膜板的对位方法
KR102489336B1 (ko) * 2017-12-26 2023-01-19 삼성디스플레이 주식회사 증착 장치 및 이를 이용한 표시 장치의 제조 방법
KR101963982B1 (ko) * 2017-12-27 2019-03-29 캐논 톡키 가부시키가이샤 성막 장치, 성막 방법, 및 전자 디바이스의 제조 방법
CN108110092A (zh) * 2018-02-28 2018-06-01 北京创昱科技有限公司 一种基片装夹装置
KR102591646B1 (ko) * 2018-06-29 2023-10-20 삼성디스플레이 주식회사 증착 장치 및 증착 장치의 마그넷 플레이트 얼라인 방법
CN110004407B (zh) * 2019-05-21 2021-03-02 京东方科技集团股份有限公司 掩膜版组件及其制备方法
US11613802B2 (en) * 2020-04-17 2023-03-28 Rockwell Collins, Inc. Additively manufactured shadow masks for material deposition control
US11326246B2 (en) * 2020-07-27 2022-05-10 Rockwell Collins, Inc. Controlled warping of shadow mask tooling for improved reliability and miniturization via thin film deposition
CN112853273B (zh) * 2020-12-31 2022-12-16 南京深光科技有限公司 一种柔性amoled掩模版表面镀膜设备
CN114112573B (zh) * 2021-11-15 2022-06-10 哈尔滨工业大学（威海） 用于介观尺度拉伸试样力学性能测试的磁控溅射成形装置
CN114112574B (zh) * 2021-11-15 2022-06-24 哈尔滨工业大学（威海） 用于介观尺度弯曲试样力学性能测试的磁控溅射成形装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11158605A (ja) * 1997-12-01 1999-06-15 Anelva Corp 真空成膜装置、そのマスク着脱装置、及びマスク位置合わせ方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US625123A (en) * 1899-05-16 romans
US4011143A (en) * 1973-06-25 1977-03-08 Honeywell Inc. Material deposition masking for microcircuit structures
US4599970A (en) * 1985-03-11 1986-07-15 Rca Corporation Apparatus for coating a selected area of the surface of an object
US4915057A (en) * 1985-10-23 1990-04-10 Gte Products Corporation Apparatus and method for registration of shadow masked thin-film patterns
JP2950338B2 (ja) 1990-09-03 1999-09-20 富士通株式会社 メタルマスク位置合わせ装置
GB9317170D0 (en) * 1993-08-18 1993-10-06 Applied Vision Ltd Improvements in physical vapour deposition apparatus
CH687427A5 (de) 1993-10-13 1996-11-29 Balzers Hochvakuum Sputterquelle mit Targetanordnung und Halterung.
JPH08297869A (ja) 1995-04-24 1996-11-12 Shin Etsu Chem Co Ltd 基板ホルダー保持装置
US6251233B1 (en) 1998-08-03 2001-06-26 The Coca-Cola Company Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation
US6132575A (en) 1998-09-28 2000-10-17 Alcatel Magnetron reactor for providing a high density, inductively coupled plasma source for sputtering metal and dielectric films
JP2002075638A (ja) * 2000-08-29 2002-03-15 Nec Corp マスク蒸着方法及び蒸着装置
EP1202329A3 (en) * 2000-10-31 2006-04-12 The Boc Group, Inc. Mask Restraining method and apparatus
JP4112535B2 (ja) 2004-07-30 2008-07-02 株式会社一宮電機 ステータ及びブラシレスモータ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11158605A (ja) * 1997-12-01 1999-06-15 Anelva Corp 真空成膜装置、そのマスク着脱装置、及びマスク位置合わせ方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101049804B1 (ko) * 2009-02-19 2011-07-15 삼성모바일디스플레이주식회사 증착 장치용 마스크 밀착 수단 및 이를 이용한 증착 장치
KR20150009828A (ko) * 2013-07-17 2015-01-27 주식회사 선익시스템 기판 탈부착 장치
KR102103176B1 (ko) * 2013-07-17 2020-04-22 주식회사 선익시스템 기판 탈부착 장치
KR20170122830A (ko) * 2015-06-12 2017-11-06 가부시키가이샤 아루박 기판 보지 장치, 성막 장치 및 기판 보지 방법
KR102091560B1 (ko) * 2015-06-12 2020-03-20 가부시키가이샤 아루박 기판 보지 장치, 성막 장치 및 기판 보지 방법
KR20190081585A (ko) * 2017-12-29 2019-07-09 주식회사 에스에프에이 기판 증착장치
KR20190081584A (ko) * 2017-12-29 2019-07-09 주식회사 에스에프에이 기판 증착장치
KR102020766B1 (ko) * 2017-12-29 2019-09-11 주식회사 에스에프에이 기판 증착장치
KR102036523B1 (ko) * 2017-12-29 2019-10-25 주식회사 에스에프에이 기판 증착장치

Also Published As

Publication number Publication date
US7695596B2 (en) 2010-04-13
JP4545393B2 (ja) 2010-09-15
US7097750B2 (en) 2006-08-29
KR20030092789A (ko) 2003-12-06
CN1462160A (zh) 2003-12-17
US20030224109A1 (en) 2003-12-04
US20060201618A1 (en) 2006-09-14
CN100587996C (zh) 2010-02-03
JP2004003030A (ja) 2004-01-08

Similar Documents

Publication Publication Date Title
KR100838065B1 (ko) 박막증착기용 고정장치와 이를 이용한 고정방법
JP7199889B2 (ja) 成膜装置、成膜方法、及び電子デバイス製造方法
US20160260902A1 (en) Vapor deposition device, vapor deposition method, and method for producing organic electroluminescence display device
US20050130356A1 (en) Method of manufacturing organic electro luminescence panel, manufacturing apparatus of organic electro luminescence panel, and organic electro luminescence panel
JP2001296819A (ja) 有機薄膜ｅｌデバイス及びその製造方法
KR100711878B1 (ko) 레이저 열 전사 장치 및 레이저 열 전사 방법
KR100712953B1 (ko) 기판 얼라인장치 및 이를 이용한 기판얼라인방법
KR100672971B1 (ko) 기판얼라인장치
JP2002305080A (ja) 統合マスク、ならびに統合マスクを用いた有機ｅｌ素子の製造方法およびその製造装置
KR102130114B1 (ko) 기판 얼라인 기구와 이를 구비한 증착장치
KR102080480B1 (ko) 기판 고정 유닛 및 이를 포함하는 유기물 증착 장치
KR101407421B1 (ko) 기판 증착 시스템
KR101570073B1 (ko) 기판 이송캐리어 및 그를 이용하는 기판 이송장치
KR100842182B1 (ko) 기판과 마스크를 얼라인하는 장치 및 방법
KR102818196B1 (ko) 얼라인 챔버 모듈과 그 얼라인 방법 및 이를 구비하는 인라인 증착 시스템
KR102751568B1 (ko) 새도우 마스크 제조 방법 및 새도우 마스크 핸들링 장치
KR101829613B1 (ko) 기판 증착장치
KR101479944B1 (ko) 기판 센터링장치 및 그를 구비하는 유기물 증착시스템
KR20230009193A (ko) 기판 지지 장치 및 그 제어 방법
KR100700830B1 (ko) 레이저 열 전사 장치 및 레이저 열 전사 방법
KR20030092791A (ko) 기판고정장치
KR20180000959A (ko) 기판의 움직임을 방지하는 기판 정렬 장치 및 이를 구비한 증착 장비
KR20230004144A (ko) 기판 지지 장치 및 이를 포함하는 박막 증착 시스템
KR100700832B1 (ko) 레이저 열 전사 장치 및 레이저 열 전사 방법 그리고 이를이용한 유기 발광 표시소자
KR102141855B1 (ko) 마스크 얼라인 장치

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20020531

PG1501 Laying open of application
N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20050427

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20070110

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 20020531

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20071213

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20080516

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20080609

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20080610

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20110527

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20120601

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20130530

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20130530

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20140530

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20140530

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20150601

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20150601

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20160530

Year of fee payment: 9

PR1001 Payment of annual fee

Payment date: 20160530

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 20170704

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20170704

Start annual number: 10

End annual number: 10

FPAY Annual fee payment

Payment date: 20190529

Year of fee payment: 12

PR1001 Payment of annual fee

Payment date: 20190529

Start annual number: 12

End annual number: 12

PR1001 Payment of annual fee

Payment date: 20200527

Start annual number: 13

End annual number: 13

PR1001 Payment of annual fee

Payment date: 20210601

Start annual number: 14

End annual number: 14

PC1801 Expiration of term

Termination date: 20221130

Termination category: Expiration of duration