KR100510961B1 - 석영글라스본체제조방법 - Google Patents

석영글라스본체제조방법 Download PDF

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Publication number
KR100510961B1
KR100510961B1 KR1019980702024A KR19980702024A KR100510961B1 KR 100510961 B1 KR100510961 B1 KR 100510961B1 KR 1019980702024 A KR1019980702024 A KR 1019980702024A KR 19980702024 A KR19980702024 A KR 19980702024A KR 100510961 B1 KR100510961 B1 KR 100510961B1
Authority
KR
South Korea
Prior art keywords
burner
preform
decomposition
temperature
speed
Prior art date
Application number
KR1019980702024A
Other languages
English (en)
Korean (ko)
Other versions
KR20000064248A (ko
Inventor
하르트비그 샤퍼
클라우스 루페르트
Original Assignee
헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지
신에쯔 세끼에이 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지, 신에쯔 세끼에이 가부시키가이샤 filed Critical 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지
Publication of KR20000064248A publication Critical patent/KR20000064248A/ko
Application granted granted Critical
Publication of KR100510961B1 publication Critical patent/KR100510961B1/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01486—Means for supporting, rotating or translating the preforms being formed, e.g. lathes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/52—Linear array of like burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/54—Multiple burner arrangements combined with means for heating the deposit, e.g. non-deposition burner
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/60—Relationship between burner and deposit, e.g. position
    • C03B2207/62—Distance
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/60—Relationship between burner and deposit, e.g. position
    • C03B2207/66—Relative motion
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/70—Control measures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
KR1019980702024A 1996-07-18 1997-07-17 석영글라스본체제조방법 KR100510961B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19628958A DE19628958C2 (de) 1996-07-18 1996-07-18 Verfahren zur Herstellung von Quarzglaskörpern
DE19628958.0 1996-07-18
PCT/EP1997/003818 WO1998003440A1 (de) 1996-07-18 1997-07-17 Verfahren zur herstellung von quarzglaskörpern

Publications (2)

Publication Number Publication Date
KR20000064248A KR20000064248A (ko) 2000-11-06
KR100510961B1 true KR100510961B1 (ko) 2006-03-09

Family

ID=7800151

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980702024A KR100510961B1 (ko) 1996-07-18 1997-07-17 석영글라스본체제조방법

Country Status (6)

Country Link
US (1) US6047564A (ja)
EP (1) EP0852571B1 (ja)
JP (1) JP4015702B2 (ja)
KR (1) KR100510961B1 (ja)
DE (2) DE19628958C2 (ja)
WO (1) WO1998003440A1 (ja)

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KR100651146B1 (ko) 1999-07-02 2006-11-28 신에쓰 가가꾸 고교 가부시끼가이샤 유리 모재를 제조하는 장치 및 그 방법
EP1270521A1 (en) * 2000-05-09 2003-01-02 PIRELLI CAVI E SISTEMI S.p.A. Method and device for manufacturing a preform for optical fibres
DE10025176A1 (de) * 2000-05-24 2001-12-06 Heraeus Quarzglas Verfahren für die Herstellung einer optischen Faser und Vorform für eine optische Faser
DE10029151C1 (de) * 2000-06-19 2001-08-16 Heraeus Quarzglas Verfahren für die Herstellung eines SiO¶2¶-Rohlings sowie SiO¶2¶-Rohling
DE10047100B4 (de) * 2000-09-21 2004-09-30 Heraeus Tenevo Ag Verfahren und Vorrichtung zur Herstellung eines Zylinders aus dotiertem Quarzglas
JP3521891B2 (ja) * 2000-09-21 2004-04-26 住友電気工業株式会社 光ファイバプリフォームの製造方法
DE10055362C1 (de) * 2000-11-08 2002-01-24 Heraeus Quarzglas Verfahren zur Herstellung eines SiO¶2¶-Rohlings und Vorrichtung zur Durchführung des Verfahrens
CN1220643C (zh) * 2000-11-29 2005-09-28 住友电气工业株式会社 生产玻璃微粒沉积体的方法
US20020083739A1 (en) * 2000-12-29 2002-07-04 Pandelisev Kiril A. Hot substrate deposition fiber optic preforms and preform components process and apparatus
US7797966B2 (en) * 2000-12-29 2010-09-21 Single Crystal Technologies, Inc. Hot substrate deposition of fused silica
US20020083740A1 (en) * 2000-12-29 2002-07-04 Pandelisev Kiril A. Process and apparatus for production of silica grain having desired properties and their fiber optic and semiconductor application
DE10102611B4 (de) * 2001-01-21 2004-07-15 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines SiO2-Rohlings
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ATE505442T1 (de) * 2001-04-27 2011-04-15 Prysmian Spa Verfarhren zum herstellen einer glasvorform für optische fasern durch abscheidung aus der dampfphase
WO2003000607A1 (en) * 2001-06-25 2003-01-03 Pirelli & C. S.P.A. Device for manufacturing a preform for optical fibres through chemical deposition
US7461524B2 (en) * 2001-06-25 2008-12-09 Prysmian Cavi E Sistemi Energia S.R.L. Device and method for manufacturing a preform for optical fibres by chemical vapour deposition
US7415844B2 (en) * 2001-06-25 2008-08-26 Prysmian Cavi E Sistemi Energia S.R.L. Device for manufacturing a preform for optical fibres through chemical deposition
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DE10155134C1 (de) * 2001-11-12 2002-12-19 Heraeus Tenevo Ag Verfahren für die Herstellung einer Vorform für eine optische Faser und Vorform für eine optische Faser
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JP2003171137A (ja) * 2001-11-30 2003-06-17 Fujikura Ltd 光ファイバ母材の製造方法
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JP2003335541A (ja) * 2002-03-13 2003-11-25 Fujikura Ltd 多孔質母材の製造方法
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JP4370798B2 (ja) * 2002-04-18 2009-11-25 住友電気工業株式会社 多孔質ガラス母材の製造方法
KR100496449B1 (ko) * 2002-06-28 2005-06-20 엘에스전선 주식회사 광섬유모재 제조를 위한 외부기상 증착장치 및 이를 이용한 광섬유모재 제조방법
KR100521958B1 (ko) * 2002-09-18 2005-10-14 엘에스전선 주식회사 수정화학기상증착법에 있어서 이중토치를 이용한 광섬유모재의 제조 방법 및 장치
KR100507622B1 (ko) * 2002-10-17 2005-08-10 엘에스전선 주식회사 외부기상증착법을 이용한 광섬유 프리폼의 제조방법 및 장치
DE10251390B4 (de) * 2002-11-01 2006-01-12 Heraeus Tenevo Ag Verfahren und Vorrichtung zur Herstellung eines Körpers aus Quarzglas
US20050092030A1 (en) * 2003-10-31 2005-05-05 Jitendra Balakrishnan Method and apparatus for depositing glass soot
JP2005225702A (ja) 2004-02-12 2005-08-25 Sumitomo Electric Ind Ltd ガラス微粒子堆積体の製造方法
JP4427425B2 (ja) * 2004-09-30 2010-03-10 信越化学工業株式会社 光ファイバ母材の製造方法及び装置
DE102005012232B4 (de) * 2005-03-15 2007-04-05 Heraeus Tenevo Gmbh Verfahren und Vorrichtung zur Herstellung eines Glaskörpers
US20080053155A1 (en) * 2006-08-31 2008-03-06 Sanket Shah Optical fiber preform having large size soot porous body and its method of preparation
JP5345352B2 (ja) * 2008-08-04 2013-11-20 株式会社フジクラ 光ファイバ用母材の製造方法
JP5777880B2 (ja) * 2010-12-31 2015-09-09 株式会社Sumco シリカガラスルツボの製造方法
JP5528489B2 (ja) * 2012-02-09 2014-06-25 信越化学工業株式会社 多孔質ガラス母材の焼結方法
JP6158731B2 (ja) * 2013-04-08 2017-07-05 信越化学工業株式会社 光ファイバ用ガラス母材の製造方法および光ファイバ用ガラス母材
JP5843084B2 (ja) * 2014-11-21 2016-01-13 住友電気工業株式会社 ガラス母材製造方法
US10464838B2 (en) 2015-01-13 2019-11-05 Asi/Silica Machinery, Llc Enhanced particle deposition system and method
EP3279155B1 (en) * 2015-03-31 2020-12-16 Furukawa Electric Co., Ltd. Method for manufacturing porous glass base material for optical fiber
JP6839586B2 (ja) * 2017-03-30 2021-03-10 古河電気工業株式会社 光ファイバ多孔質母材の製造装置及び製造方法
WO2019044805A1 (ja) * 2017-08-29 2019-03-07 住友電気工業株式会社 ガラス微粒子堆積体の製造方法、ガラス母材の製造方法及びガラス母材
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Also Published As

Publication number Publication date
US6047564A (en) 2000-04-11
DE19628958A1 (de) 1998-01-22
DE19628958C2 (de) 2000-02-24
JP2001504426A (ja) 2001-04-03
KR20000064248A (ko) 2000-11-06
DE59710343D1 (de) 2003-07-31
EP0852571B1 (de) 2003-06-25
EP0852571A1 (de) 1998-07-15
WO1998003440A1 (de) 1998-01-29
JP4015702B2 (ja) 2007-11-28

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