JPWO2022158053A5 - - Google Patents
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- JPWO2022158053A5 JPWO2022158053A5 JP2022576971A JP2022576971A JPWO2022158053A5 JP WO2022158053 A5 JPWO2022158053 A5 JP WO2022158053A5 JP 2022576971 A JP2022576971 A JP 2022576971A JP 2022576971 A JP2022576971 A JP 2022576971A JP WO2022158053 A5 JPWO2022158053 A5 JP WO2022158053A5
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- JP
- Japan
- Prior art keywords
- side bottom
- bottom region
- active
- outer peripheral
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 claims description 35
- 230000002093 peripheral effect Effects 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 14
- 239000012535 impurity Substances 0.000 claims description 10
- 239000011229 interlayer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021009648 | 2021-01-25 | ||
| JP2021009648 | 2021-01-25 | ||
| PCT/JP2021/036687 WO2022158053A1 (ja) | 2021-01-25 | 2021-10-04 | 半導体装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022158053A1 JPWO2022158053A1 (https=) | 2022-07-28 |
| JPWO2022158053A5 true JPWO2022158053A5 (https=) | 2023-03-16 |
| JP7459976B2 JP7459976B2 (ja) | 2024-04-02 |
Family
ID=82548676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022576971A Active JP7459976B2 (ja) | 2021-01-25 | 2021-10-04 | 半導体装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12575149B2 (https=) |
| JP (1) | JP7459976B2 (https=) |
| CN (1) | CN115769382A (https=) |
| DE (1) | DE112021002612T5 (https=) |
| WO (1) | WO2022158053A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022158053A1 (ja) | 2021-01-25 | 2022-07-28 | 富士電機株式会社 | 半導体装置 |
| JP7593511B2 (ja) * | 2022-01-20 | 2024-12-03 | 富士電機株式会社 | 半導体装置 |
| JP2024034141A (ja) * | 2022-08-31 | 2024-03-13 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
| WO2025142731A1 (ja) * | 2023-12-28 | 2025-07-03 | ローム株式会社 | 半導体装置 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4028333B2 (ja) * | 2002-09-02 | 2007-12-26 | 株式会社東芝 | 半導体装置 |
| JP3934613B2 (ja) | 2004-01-21 | 2007-06-20 | 株式会社東芝 | 半導体装置 |
| US8519477B2 (en) * | 2009-11-20 | 2013-08-27 | Force Mos Technology Co., Ltd. | Trench MOSFET with trenched floating gates and trenched channel stop gates in termination |
| US8680613B2 (en) * | 2012-07-30 | 2014-03-25 | Alpha And Omega Semiconductor Incorporated | Termination design for high voltage device |
| MX2014003783A (es) | 2011-09-28 | 2014-05-14 | Toyota Motor Co Ltd | Igbt y metodo para fabricar el mismo. |
| WO2013080806A1 (ja) | 2011-11-28 | 2013-06-06 | 富士電機株式会社 | 絶縁ゲート型半導体装置およびその製造方法 |
| US8829607B1 (en) * | 2013-07-25 | 2014-09-09 | Fu-Yuan Hsieh | Fast switching super-junction trench MOSFETs |
| JP6208579B2 (ja) * | 2013-12-26 | 2017-10-04 | トヨタ自動車株式会社 | 半導体装置 |
| JP6231396B2 (ja) | 2014-02-10 | 2017-11-15 | トヨタ自動車株式会社 | 半導体装置及び半導体装置の製造方法 |
| JP6472714B2 (ja) | 2015-06-03 | 2019-02-20 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| JP6728953B2 (ja) * | 2015-07-16 | 2020-07-22 | 富士電機株式会社 | 半導体装置及びその製造方法 |
| CN108140674B (zh) | 2015-10-16 | 2021-02-19 | 三菱电机株式会社 | 半导体装置 |
| DE102016112721B4 (de) | 2016-07-12 | 2022-02-03 | Infineon Technologies Ag | n-Kanal-Leistungshalbleitervorrichtung mit p-Schicht im Driftvolumen |
| DE102017107174B4 (de) | 2017-04-04 | 2020-10-08 | Infineon Technologies Ag | IGBT mit dV/dt-Steuerbarkeit und Verfahren zum Verarbeiten eines IGBT |
| JP6946824B2 (ja) * | 2017-07-28 | 2021-10-06 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
| DE102017124872B4 (de) | 2017-10-24 | 2021-02-18 | Infineon Technologies Ag | Verfahren zur Herstellung eines IGBT mit dV/dt-Steuerbarkeit |
| DE102017124871B4 (de) * | 2017-10-24 | 2021-06-17 | Infineon Technologies Ag | Leistungshalbleiter-Vorrichtung und Verfahren zum Herstellen einer Leistungshalbleiter-Vorrichtung |
| WO2020078626A1 (en) | 2018-10-18 | 2020-04-23 | Abb Schweiz Ag | Insulated gate power semiconductor device and method for manufacturing such device |
| WO2022158053A1 (ja) | 2021-01-25 | 2022-07-28 | 富士電機株式会社 | 半導体装置 |
-
2021
- 2021-10-04 WO PCT/JP2021/036687 patent/WO2022158053A1/ja not_active Ceased
- 2021-10-04 CN CN202180046974.1A patent/CN115769382A/zh active Pending
- 2021-10-04 JP JP2022576971A patent/JP7459976B2/ja active Active
- 2021-10-04 DE DE112021002612.7T patent/DE112021002612T5/de active Pending
-
2022
- 2022-12-19 US US18/067,743 patent/US12575149B2/en active Active
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