JPWO2022158053A1 - - Google Patents

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Publication number
JPWO2022158053A1
JPWO2022158053A1 JP2022576971A JP2022576971A JPWO2022158053A1 JP WO2022158053 A1 JPWO2022158053 A1 JP WO2022158053A1 JP 2022576971 A JP2022576971 A JP 2022576971A JP 2022576971 A JP2022576971 A JP 2022576971A JP WO2022158053 A1 JPWO2022158053 A1 JP WO2022158053A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2022576971A
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Japanese (ja)
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JPWO2022158053A5 (https=
JP7459976B2 (ja
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Publication of JPWO2022158053A1 publication Critical patent/JPWO2022158053A1/ja
Publication of JPWO2022158053A5 publication Critical patent/JPWO2022158053A5/ja
Application granted granted Critical
Publication of JP7459976B2 publication Critical patent/JP7459976B2/ja
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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/177Base regions of bipolar transistors, e.g. BJTs or IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411Insulated-gate bipolar transistors [IGBT]
    • H10D12/441Vertical IGBTs
    • H10D12/461Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions
    • H10D12/481Vertical IGBTs having non-planar surfaces, e.g. having trenches, recesses or pillars in the surfaces of the emitter, base or collector regions having gate structures on slanted surfaces, on vertical surfaces, or in grooves, e.g. trench gate IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • H10D62/107Buried supplementary regions, e.g. buried guard rings 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126Top-view geometrical layouts of the regions or the junctions
    • H10D62/127Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • H10D64/112Field plates comprising multiple field plate segments
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/111Field plates
    • H10D64/117Recessed field plates, e.g. trench field plates or buried field plates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/517Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
    • H10D64/519Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their top-view geometrical layouts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
JP2022576971A 2021-01-25 2021-10-04 半導体装置 Active JP7459976B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021009648 2021-01-25
JP2021009648 2021-01-25
PCT/JP2021/036687 WO2022158053A1 (ja) 2021-01-25 2021-10-04 半導体装置

Publications (3)

Publication Number Publication Date
JPWO2022158053A1 true JPWO2022158053A1 (https=) 2022-07-28
JPWO2022158053A5 JPWO2022158053A5 (https=) 2023-03-16
JP7459976B2 JP7459976B2 (ja) 2024-04-02

Family

ID=82548676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022576971A Active JP7459976B2 (ja) 2021-01-25 2021-10-04 半導体装置

Country Status (5)

Country Link
US (1) US12575149B2 (https=)
JP (1) JP7459976B2 (https=)
CN (1) CN115769382A (https=)
DE (1) DE112021002612T5 (https=)
WO (1) WO2022158053A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022158053A1 (ja) 2021-01-25 2022-07-28 富士電機株式会社 半導体装置
JP7593511B2 (ja) * 2022-01-20 2024-12-03 富士電機株式会社 半導体装置
JP2024034141A (ja) * 2022-08-31 2024-03-13 富士電機株式会社 半導体装置および半導体装置の製造方法
WO2025142731A1 (ja) * 2023-12-28 2025-07-03 ローム株式会社 半導体装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004095954A (ja) * 2002-09-02 2004-03-25 Toshiba Corp 半導体装置
WO2015098169A1 (ja) * 2013-12-26 2015-07-02 トヨタ自動車株式会社 半導体装置
JP2017028250A (ja) * 2015-07-16 2017-02-02 富士電機株式会社 半導体装置及びその製造方法
WO2017064887A1 (ja) * 2015-10-16 2017-04-20 三菱電機株式会社 半導体装置
JP2019091892A (ja) * 2017-10-24 2019-06-13 インフィネオン テクノロジーズ アーゲーInfineon Technologies Ag dV/dt制御性を備えたIGBT

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3934613B2 (ja) 2004-01-21 2007-06-20 株式会社東芝 半導体装置
US8519477B2 (en) * 2009-11-20 2013-08-27 Force Mos Technology Co., Ltd. Trench MOSFET with trenched floating gates and trenched channel stop gates in termination
US8680613B2 (en) * 2012-07-30 2014-03-25 Alpha And Omega Semiconductor Incorporated Termination design for high voltage device
MX2014003783A (es) 2011-09-28 2014-05-14 Toyota Motor Co Ltd Igbt y metodo para fabricar el mismo.
WO2013080806A1 (ja) 2011-11-28 2013-06-06 富士電機株式会社 絶縁ゲート型半導体装置およびその製造方法
US8829607B1 (en) * 2013-07-25 2014-09-09 Fu-Yuan Hsieh Fast switching super-junction trench MOSFETs
JP6231396B2 (ja) 2014-02-10 2017-11-15 トヨタ自動車株式会社 半導体装置及び半導体装置の製造方法
JP6472714B2 (ja) 2015-06-03 2019-02-20 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
DE102016112721B4 (de) 2016-07-12 2022-02-03 Infineon Technologies Ag n-Kanal-Leistungshalbleitervorrichtung mit p-Schicht im Driftvolumen
DE102017107174B4 (de) 2017-04-04 2020-10-08 Infineon Technologies Ag IGBT mit dV/dt-Steuerbarkeit und Verfahren zum Verarbeiten eines IGBT
JP6946824B2 (ja) * 2017-07-28 2021-10-06 富士電機株式会社 半導体装置および半導体装置の製造方法
DE102017124872B4 (de) 2017-10-24 2021-02-18 Infineon Technologies Ag Verfahren zur Herstellung eines IGBT mit dV/dt-Steuerbarkeit
WO2020078626A1 (en) 2018-10-18 2020-04-23 Abb Schweiz Ag Insulated gate power semiconductor device and method for manufacturing such device
WO2022158053A1 (ja) 2021-01-25 2022-07-28 富士電機株式会社 半導体装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004095954A (ja) * 2002-09-02 2004-03-25 Toshiba Corp 半導体装置
WO2015098169A1 (ja) * 2013-12-26 2015-07-02 トヨタ自動車株式会社 半導体装置
JP2017028250A (ja) * 2015-07-16 2017-02-02 富士電機株式会社 半導体装置及びその製造方法
WO2017064887A1 (ja) * 2015-10-16 2017-04-20 三菱電機株式会社 半導体装置
JP2019091892A (ja) * 2017-10-24 2019-06-13 インフィネオン テクノロジーズ アーゲーInfineon Technologies Ag dV/dt制御性を備えたIGBT

Also Published As

Publication number Publication date
US12575149B2 (en) 2026-03-10
DE112021002612T5 (de) 2023-03-16
CN115769382A (zh) 2023-03-07
WO2022158053A1 (ja) 2022-07-28
JP7459976B2 (ja) 2024-04-02
US20230124922A1 (en) 2023-04-20

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