JPWO2015025447A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JPWO2015025447A1 JPWO2015025447A1 JP2015532684A JP2015532684A JPWO2015025447A1 JP WO2015025447 A1 JPWO2015025447 A1 JP WO2015025447A1 JP 2015532684 A JP2015532684 A JP 2015532684A JP 2015532684 A JP2015532684 A JP 2015532684A JP WO2015025447 A1 JPWO2015025447 A1 JP WO2015025447A1
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Abstract
Description
従来のパワー半導体モジュールとしては、例えば特許文献1に記載されているものが知られている。従来のパワー半導体モジュールの構成を図4に示す。このパワー半導体モジュールは、ヒートシンク101と、絶縁基板103と、半導体チップ102と、樹脂ケース104などで構成されている。ヒートシンク101は、熱伝導性の高いベース101aおよび冷却フィン101bで構成される。そして、ベース101a上に半導体チップ102を実装した絶縁基板103が固着されている。また、半導体チップ102および絶縁基板103が樹脂ケース104で囲まれている。さらに、半導体チップ102のおもて面電極にはボンディングワイヤ105が接合され、絶縁基板103の回路板106と電気的に接続されている。また、樹脂ケース104の上端を蓋107で覆い、蓋107を貫通して上方に突出する外部端子108が回路板106上に配置されている。
また、特許文献2には、複数の半導体ユニットとボルト締めユニットを弾性接着剤で一体化し、ボルト締めユニットでヒートシンクに固定可能としたパワー半導体モジュールが記載されている。
特許文献1に記載のパワー半導体モジュールでは、半導体チップ102、絶縁基板103、樹脂ケース104、蓋体107および端子108を各定格に応じてそれぞれ用意する必要がある。
さらに、製造に必要な治工具もそれぞれの定格で必要となるため、製造コストの低減が困難という課題がある。
そこで、本発明では、上記従来例の問題点に着目してなされたものであり、半導体装置を構成する基本構造を共通化して、生産効率の向上を図るとともに、十分な冷却効率を確保可能な半導体装置を提供することを目的としている。
なお、本出願の記載に用いられている「電気的かつ機械的に接続されている」という用語は、対象物同士が直接接合により接続されている場合に限られず、ハンダや金属焼結材などの導電性の接合材を介して対象物同士が接続されている場合も含むものとする。
図1は本発明に係る半導体装置の第1の実施形態の全体構成を示す断面図、図2は図1の半導体ユニットを示す拡大断面図である。
本発明に係る半導体装置としてのパワー半導体モジュール1は、半導体ユニット2と、支持板3を備えている。そして、支持板3がヒートシンク4に固定されている。
半導体チップ15は、例えば絶縁ゲートバイポーラトランジスタ(IGBT)やパワーMOSFET、還流ダイオード(FWD)等のパワー半導体素子である。
金属ブロック14は、円柱状であり、封止樹脂22から外方に突出している。そして、この突出部分の厚さは、支持板3の厚さより厚く、またその外周面に雄ねじ部14aを備えている。雄ねじ部14aは、精密機械加工により形成できる。
そして、上記構成を有する2つの半導体ユニット2を、金属ブロック14の雄ねじ部14aを用いて、支持板3の雌ねじ部16aに第1面3a側から螺合させる。そして、封止樹脂22の底面を支持板3の上面に接触させて、支持板3に固定する。またその際、金属ブロック14の端面は、支持板3の第2面3bより所定の距離突出させる。
そして、半導体ユニット2や外部端子25を、絶縁樹脂などで構成される筐体32で覆い、端子部29〜31を筐体32から外方に突出させる。これにより、本発明の一態様である2in1のパワー半導体モジュールとなる半導体装置1が構成される。
このように、上記実施形態によると、半導体チップ15と、突出した金属ブロック14を有する半導体ユニット2を支持板3に固定し、この支持板3をヒートシンク4に止めねじ33によって固定している。これにより、一つの定格の半導体ユニット2を支持板3で複数組み合わせることができ、さまざまな定格のパワー半導体モジュールを用意することができる。また、半導体ユニット2の金属ブロック14が直接ヒートシンク4に接触している。このため、半導体チップ15からの発熱を、金属ブロック14を介して直接ヒートシンク4に放熱することができ、冷却効率を改善することができる。
また、半導体ユニット2の支持板3への固定を螺合させるだけで可能なため、製造コストを低減することができる。
本発明に係る半導体装置の一態様であるパワー半導体モジュール50は、伝熱板40と、ボルト41をさらに備えている。
伝熱板40は、第1面40aとその反対側に位置する第2面40bとを有している。伝熱板40は、第2面40bが筐体32の端子面32aに、接着材などを用いて固定されている。また、筐体32の端子面32aから突出している外部端子25の端子部29〜31を、L字状に折り曲げた状態で伝熱板40の第2面40bに設けられた端子孔41に挿通している。さらに、端子部29〜31は第1面40aから挿通されたボルト42および第2主面から挿通されたナット43を用いて固定している。このとき、筐体32の端子面32aにナット43を嵌め込んで回り止めを行う凹部50を形成することが好ましい。
なお、上記実施形態においては、半導体ユニット2の金属ブロック14を支持板3の第2面3bから突出させる場合について説明したが、これに限定されるものではない。例えば、金属ブロック14の端面と、支持板3の第2面3bとが同一平面となるようにしてもよい。
また、上記実施形態においては、半導体ユニット2が絶縁板12を備えた絶縁型の半導体ユニットである場合について説明したが、これに限定されるものではない。例えば、絶縁板12を有さない非絶縁型の半導体ユニットであっても、上記と同様に支持板3に固定することができる。
また、上記実施形態では、支持板3に2つの半導体ユニット2を固定する場合について説明したが、これに限定されるものではない。所望の定格に必要な半導体ユニットの数に応じて、支持板3に雌ねじ部16aを有する貫通孔16を形成すればよいものである。
また、上記実施形態では、支持板3をヒートシンク4に止めねじ33によって固定する場合について説明したが、これに限定されるものではなく、ヒートシンク4に固定した雄ねじ部を支持板3に挿通して、第1面3aより突出させ、この雄ねじ部にナットを螺合させるようにしてもよい。要は、支持板3に支持した金属ブロックがヒートシンク4に接触した状態で固定されればよく、任意の固定手段を適用することができる。
以上、本発明の半導体装置を図面及び実施形態を用いて具体的に説明したが、本発明の半導体装置は、実施形態及び図面の記載に限定されるものではなく、本発明の趣旨を逸脱しない範囲で幾多の変形が可能である。
2 半導体ユニット
3 支持板
3a 第1面
3b 第2面
4 ヒートシンク
12 絶縁板
13 回路板
14 金属ブロック
14a 雄ねじ部
15 半導体チップ
16 貫通孔
16a 雌ねじ部
17 取付孔
18 配線基板
19〜21 接続端子
22 封止樹脂
23 保護膜
25 外部端子
29〜31 端子部
32 筐体
40 伝熱板
41 ボルト
42 ナット
特許文献1に記載のパワー半導体モジュールでは、半導体チップ102、絶縁基板103、樹脂ケース104、蓋107および端子108を各定格に応じてそれぞれ用意する必要がある。
さらに、製造に必要な治工具もそれぞれの定格で必要となるため、製造コストの低減が困難という課題がある。
半導体チップ15は、例えば絶縁ゲートバイポーラトランジスタ(IGBT)やパワーMOSFET、還流ダイオード(FWD)等のパワー半導体素子である。
金属ブロック14は、円柱状であり、封止樹脂22から外方に突出している。そして、この突出部分の厚さは、支持板3の厚さより厚く、またその外周面に雄ねじ部14aを備えている。雄ねじ部14aは、精密機械加工により形成できる。
本発明に係る半導体装置の一態様であるパワー半導体モジュール50は、伝熱板40と、ボルト41をさらに備えている。
伝熱板40は、第1面40aとその反対側に位置する第2面40bとを有している。伝熱板40は、第2面40bが筐体32の端子面32aに、接着材などを用いて固定されている。また、筐体32の端子面32aから突出している外部端子25の端子部29〜31を、L字状に折り曲げた状態で伝熱板40の第2面40bに設けられた端子孔41に挿通している。さらに、端子部29〜31は第1面40aから挿通されたボルト42および第2主面から挿通されたナット43を用いて固定している。このとき、筐体32の端子面32aにナット43を嵌め込んで回り止めを行う凹部51を形成することが好ましい。
Claims (12)
- 第1面と、前記第1面の反対側に位置する第2面と、前記第1面から前記第2面まで貫通する貫通孔を有する支持板と、
半導体チップと、突出した金属ブロックを有し、前記第1面に固定され、前記金属ブロックは前記貫通孔を通じて前記第2面まで貫通している半導体ユニットと、
を備えた半導体装置。 - 前記半導体ユニットは、絶縁板、および前記絶縁板のおもて面に固定された回路板をさらに有し、
前記半導体チップは前記回路板に固定され、
前記金属ブロックは前記絶縁板の裏面に固定された請求項1記載の半導体装置。 - 前記金属ブロックが、前記第2面から突出している請求項1に記載の半導体装置。
- 前記金属ブロックは雄ねじ部を備え、
前記貫通孔は雌ねじ部を備え、
前記半導体ユニットは、前記雄ねじ部と前記雌ねじ部との螺合により、前記第1面に固定されている請求項1に記載の半導体装置。 - 前記支持板は複数の前記貫通孔を有し、
前記複数の貫通孔に、複数の前記半導体ユニットがそれぞれ固定されている請求項1に記載の半導体装置。 - 前記半導体ユニットは外部電極をさらに有し、
複数の前記半導体ユニットが有する前記外部電極をそれぞれ接続する外部端子をさらに備えた請求項5に記載の半導体装置。 - 複数の前記半導体ユニットおよび前記外部端子を覆う筐体と、
前記筐体に固定される伝熱板と、
をさらに備えた請求項6記載の半導体装置。 - 前記伝熱板は、前記外部端子を挿入する端子孔を有する請求項7記載の半導体装置。
- 前記半導体ユニットは、前記半導体チップを覆う封止樹脂を有する請求項1に記載の半導体装置。
- 前記支持板は、Cu、Al、Mo、W、Cu−C、Al−C、Al−SiC、Cu−Mo、Si−SiCの何れか1つで構成されている請求項1に記載の半導体装置。
- 前記半導体ユニットは、側面に凹凸を有する請求項1に記載の半導体装置。
- 前記半導体ユニットは、表面にAl2O3、AlN、Si3N4、Si02、BNの何れか1つで構成される保護膜を有する請求項1に記載の半導体装置。
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JP2017022209A (ja) * | 2015-07-08 | 2017-01-26 | 三菱電機株式会社 | 半導体モジュール |
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55165657A (en) * | 1979-06-11 | 1980-12-24 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Multi-chip package |
JPS567353U (ja) * | 1979-06-27 | 1981-01-22 | ||
JPS57157550A (en) * | 1981-03-23 | 1982-09-29 | Fujitsu Ltd | Semiconductor device |
JPH0451549A (ja) * | 1990-06-19 | 1992-02-20 | Mitsubishi Electric Corp | 高放熱型半導体装置 |
JPH06196625A (ja) * | 1992-12-24 | 1994-07-15 | Nippon Chemicon Corp | パワーモジュール |
JP2002313841A (ja) * | 2000-04-14 | 2002-10-25 | Namics Corp | フリップチップ実装方法 |
JP2002329815A (ja) * | 2001-05-01 | 2002-11-15 | Sony Corp | 半導体装置と、その製造方法、及びその製造装置 |
JP2007243051A (ja) * | 2006-03-10 | 2007-09-20 | Fujitsu Ltd | 放熱装置 |
JP2011249684A (ja) * | 2010-05-28 | 2011-12-08 | Shinko Electric Ind Co Ltd | 放熱用部品及びそれを備えた半導体パッケージ |
JP2012054319A (ja) * | 2010-08-31 | 2012-03-15 | Shindengen Electric Mfg Co Ltd | リードフレーム、半導体装置及びその製造方法 |
WO2013121691A1 (ja) * | 2012-02-14 | 2013-08-22 | パナソニック株式会社 | 半導体装置及びその製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003234440A (ja) * | 2002-02-08 | 2003-08-22 | Fujitsu Access Ltd | 温度検出器取付具 |
JP2003243611A (ja) | 2002-02-21 | 2003-08-29 | Mitsubishi Electric Corp | 半導体モジュール及び半導体装置 |
US7115998B2 (en) * | 2002-08-29 | 2006-10-03 | Micron Technology, Inc. | Multi-component integrated circuit contacts |
JP4526771B2 (ja) * | 2003-03-14 | 2010-08-18 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
CN2847525Y (zh) * | 2005-08-30 | 2006-12-13 | 资重兴 | 裸晶封装的保护结构 |
JP4765101B2 (ja) | 2006-01-20 | 2011-09-07 | 富士電機株式会社 | 半導体装置 |
EP2293050B1 (en) * | 2009-04-07 | 2016-09-07 | ANBE SMT Co. | Heating apparatus for x-ray inspection |
JP5158102B2 (ja) | 2010-01-05 | 2013-03-06 | 富士電機株式会社 | 半導体装置 |
JP5327195B2 (ja) * | 2010-02-05 | 2013-10-30 | 株式会社デンソー | 電力変換装置 |
KR101752829B1 (ko) * | 2010-11-26 | 2017-06-30 | 삼성전자주식회사 | 반도체 장치 |
JP5602095B2 (ja) * | 2011-06-09 | 2014-10-08 | 三菱電機株式会社 | 半導体装置 |
-
2014
- 2014-06-25 WO PCT/JP2014/003408 patent/WO2015025447A1/ja active Application Filing
- 2014-06-25 JP JP2015532684A patent/JP6160698B2/ja not_active Expired - Fee Related
- 2014-06-25 CN CN201480015666.2A patent/CN105051898B/zh not_active Expired - Fee Related
-
2015
- 2015-09-11 US US14/851,748 patent/US9842786B2/en not_active Expired - Fee Related
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55165657A (en) * | 1979-06-11 | 1980-12-24 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Multi-chip package |
JPS567353U (ja) * | 1979-06-27 | 1981-01-22 | ||
JPS57157550A (en) * | 1981-03-23 | 1982-09-29 | Fujitsu Ltd | Semiconductor device |
JPH0451549A (ja) * | 1990-06-19 | 1992-02-20 | Mitsubishi Electric Corp | 高放熱型半導体装置 |
JPH06196625A (ja) * | 1992-12-24 | 1994-07-15 | Nippon Chemicon Corp | パワーモジュール |
JP2002313841A (ja) * | 2000-04-14 | 2002-10-25 | Namics Corp | フリップチップ実装方法 |
JP2002329815A (ja) * | 2001-05-01 | 2002-11-15 | Sony Corp | 半導体装置と、その製造方法、及びその製造装置 |
JP2007243051A (ja) * | 2006-03-10 | 2007-09-20 | Fujitsu Ltd | 放熱装置 |
JP2011249684A (ja) * | 2010-05-28 | 2011-12-08 | Shinko Electric Ind Co Ltd | 放熱用部品及びそれを備えた半導体パッケージ |
JP2012054319A (ja) * | 2010-08-31 | 2012-03-15 | Shindengen Electric Mfg Co Ltd | リードフレーム、半導体装置及びその製造方法 |
WO2013121691A1 (ja) * | 2012-02-14 | 2013-08-22 | パナソニック株式会社 | 半導体装置及びその製造方法 |
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