JPWO2014147677A1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JPWO2014147677A1 JPWO2014147677A1 JP2015506371A JP2015506371A JPWO2014147677A1 JP WO2014147677 A1 JPWO2014147677 A1 JP WO2014147677A1 JP 2015506371 A JP2015506371 A JP 2015506371A JP 2015506371 A JP2015506371 A JP 2015506371A JP WO2014147677 A1 JPWO2014147677 A1 JP WO2014147677A1
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Abstract
Description
第1の実施形態に係る半導体装置について、図1及び図2を参照しながら説明する。
以下、第1の実施形態の第1変形例について、図6及び図7を参照しながら説明する。
以下、第1の実施形態の第2変形例について、図8〜図10を参照しながら説明する。
以下、第1の実施形態の第3変形例について、図11〜図13を参照しながら説明する。なお、図13におけるグラフの縦軸は相対強度を表している。
以下、第2の実施形態について、図14及び図15を参照しながら説明する。
以下、第2の実施形態の第1変形例について、図16及び図17を参照しながら説明する。
以下、第3の実施形態について、図18〜図20を参照しながら説明する。
以下、第4の実施形態について、図21及び図22を参照しながら説明する。なお、図22におけるグラフの縦軸は相対強度を表している。
101 半導体基板
102 第1の配線
103 第1のビア
104 第2の配線
105 第2のビア
106 第3の配線
108 第1の絶縁膜
108a 第1のビアホール
109 第1のシード層
110 レジスト膜
111 第2の絶縁膜
111a 第2のビアホール
112 第2のシード層
113 レジスト膜
114 第3の絶縁膜
114a パッド開口部
120 層間絶縁膜
Claims (18)
- 半導体基板上に形成された第1の配線と、
前記第1の配線上に形成された第1の絶縁膜と、
前記第1の絶縁膜中に、前記第1の配線と接続するように形成された第1のビアと、
前記第1の絶縁膜上に、前記第1のビアを介して前記第1の配線と接続するように形成された第2の配線と、
前記第2の配線上に形成された第1の有機絶縁膜と、
前記第1の有機絶縁膜中に、前記第2の配線と接続するように形成された第2のビアと、
前記第1の有機絶縁膜上に、前記第2のビアを介して前記第2の配線と接続するように形成された第3の配線と、
前記第1の有機絶縁膜上に形成された第2の有機絶縁膜とを備え、
前記第2の有機絶縁膜には、前記第3の配線を露出するパッド開口部が設けられ、
前記第1のビア、前記第2のビア、前記第2の配線及び前記第3の配線は、銅を主成分とする金属により構成されている半導体装置。 - 請求項1に記載の半導体装置において、
前記第2の配線と前記第1の絶縁膜との境界部、及び前記第3の配線と前記第1の有機絶縁膜との境界部には、シード層が形成されている半導体装置。 - 請求項2に記載の半導体装置において、
前記シード層は、前記第1のビアと前記第2の配線との接続部、及び前記第2のビアと前記第3の配線との接続部には形成されていない半導体装置。 - 請求項1〜3のいずれか1項に記載の半導体装置において、
前記第2の配線及び前記第3の配線の少なくとも一方には、バリア膜が形成されている半導体装置。 - 請求項1〜4のいずれか1項に記載の半導体装置において、
前記第3の配線の上面における前記第2のビアの上側部分に窪みが形成されている半導体装置。 - 請求項1〜5のいずれか1項に記載の半導体装置において、
前記第1の配線は、前記パッド開口部の下側の領域において、複数で且つ互いに並行する線状に配置されており、
前記第1のビアは、それぞれ線状に設けられたラインビアであって、平面視で前記第1の配線の上に該第1の配線に沿って配置されている半導体装置。 - 請求項6に記載の半導体装置において、
前記ラインビアは、平面視で前記複数の第1の配線の上に1本おきに配置されている半導体装置。 - 請求項6又は7に記載の半導体装置において、
前記第2のビアは、線状に設けられたラインビアである半導体装置。 - 請求項8に記載の半導体装置において、
前記第1のビアと前記第2のビアとは、平面視で互いに並行して配置されている半導体装置。 - 請求項8に記載の半導体装置において、
前記第1のビアと前記第2のビアとは、平面視で互いに重なる領域が存在するように配置されている半導体装置。 - 請求項6又は7に記載の半導体装置において、
前記第2のビアは、島状に設けられたドットビアである半導体装置。 - 請求項11に記載の半導体装置において、
前記第2のビアは、平面視で前記第1のビアと互いに重なるように配置されている半導体装置。 - 請求項12に記載の半導体装置において、
前記第2のビアは、前記第1のビアの上方に、互いに間隔をおいて複数個設けられると共に、前記第1のビアの延伸方向と交差する方向にも、互いに間隔をおいて複数個設けられている半導体装置。 - 請求項13に記載の半導体装置において、
前記複数の第2のビアは、前記第1のビアが設けられていない前記第1の配線上を通る第1の仮想線と、前記第1のビアが設けられている前記第1の配線上の第2のビアを通り且つ前記第1の仮想線と交差する第2の仮想線との交点上を除いて配置されている半導体装置。 - 請求項1〜5のいずれか1項に記載の半導体装置において、
前記第1の配線は、前記パッド開口部の下側の領域において、複数で且つ互いに並行する線状に配置されており、
前記第1のビア及び前記第2のビアは、平面視で前記第1の配線の上に互いに重ならないように島状に設けられたドットビアであり、
前記第1のビアは、前記第1の配線の上に1本おきに配置されており、
前記第2のビアは、前記第1のビアが設けられていない前記第1の配線上を通る第1の仮想線と、前記第1のビアが設けられている前記第1の配線上の第2のビアを通り且つ前記第1の仮想線と交差する第2の仮想線との交点上を除いて配置されている半導体装置。 - 請求項1〜5のいずれか1項に記載の半導体装置において、
前記第1の配線は、前記パッド開口部の下側の領域において、複数で且つ互いに並行する線状に配置されており、
前記第2の配線は、平面視で前記第1の配線と交差する方向に線状に複数配置され、
前記第1のビアは、島状に設けられたドットビアであり、前記第1の配線と前記第2の配線とが互いに重なる領域に配置されている半導体装置。 - 請求項16に記載の半導体装置において、
前記第2のビアは、島状に設けられたドットビアであり、前記第1の配線と前記第2の配線とが互いに重なる領域に配置され、且つ、前記第1のビアとは重ならない領域に配置されている半導体装置。 - 請求項1〜17のいずれか1項に記載の半導体装置において、
前記半導体基板には、半導体素子が形成されており、
前記第2の有機絶縁膜における前記パッド開口部は、前記半導体素子の上方に設けられている半導体装置。
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