JPWO2008032668A1 - 真空蒸気処理装置 - Google Patents
真空蒸気処理装置 Download PDFInfo
- Publication number
- JPWO2008032668A1 JPWO2008032668A1 JP2008534324A JP2008534324A JPWO2008032668A1 JP WO2008032668 A1 JPWO2008032668 A1 JP WO2008032668A1 JP 2008534324 A JP2008534324 A JP 2008534324A JP 2008534324 A JP2008534324 A JP 2008534324A JP WO2008032668 A1 JPWO2008032668 A1 JP WO2008032668A1
- Authority
- JP
- Japan
- Prior art keywords
- processing
- box
- furnace
- metal evaporation
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/0293—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
- Hard Magnetic Materials (AREA)
- Thin Magnetic Films (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
Abstract
Description
(比較例1)
11 処理炉
2 加熱手段
21 断熱材
22 発熱体
3 載置テーブル
4 処理箱
40 処理室
41 箱部
42 蓋部
54 熱交換器
55b 連通路
56 気体通路
S 被処理物
V 金属蒸発材料
Claims (11)
- 処理炉と、この処理炉内に配置される少なくとも1個の処理箱と、この処理箱を加熱する加熱手段とを備え、処理箱内に被処理物と金属蒸発材料とを配置した状態で処理炉及び処理箱を所定圧力まで減圧する真空排気手段を設け、減圧下で加熱手段を作動させて被処理物を所定温度まで昇温させて金属蒸発材料を蒸発させ、この蒸発した金属原子が被処理物表面に供給されるように構成したことを特徴とする真空蒸気処理装置。
- 前記処理箱は、前記処理炉内に出入れ自在であって、上面が開口した箱部とこの開口した上面に着脱自在に装着される蓋部とから構成されたものであり、真空排気手段を作動させて前記処理炉を減圧するのに伴って処理箱内が減圧されることを特徴とする請求項1記載の真空蒸気処理装置。
- 前記加熱手段及び処理箱を、金属蒸発材料と反応しない材料、または少なくとも表面に金属蒸発材料と反応しない材料を内張膜として形成したものから構成したことを特徴とする請求項1または請求項2記載の真空蒸気処理装置。
- 前記金属蒸発材料と反応しない材料はMoであることを特徴とする請求項3記載の真空蒸気処理装置。
- 前記加熱手段は、処理箱の周囲を囲う断熱材とその内側に配置した発熱体とから構成され、この断熱材は所定の間隔を置いて複数枚を重ねて構成したものであることを特徴とする請求項1乃至請求項4のいずれか1項に記載の真空蒸気処理装置。
- 前記処理箱の底面から所定の高さ位置で被処理物の載置を可能とする載置部を備え、この載置部は複数本の線材を配置して構成されることを特徴とする請求項1乃至請求項5のいずれか1項に記載の真空蒸気処理装置。
- 前記処理箱内に、金属蒸発材料の収納を可能とする収納部を設けたことを特徴とする請求項1乃至請求項6のいずれか1項に記載の真空蒸気処理装置。
- 前記収納部を、被処理物の周囲を囲うように処理箱の側壁に設けたことを特徴とする請求項7記載の真空蒸気処理装置。
- 前記収納部を、前記処理箱内に配置した被処理物相互の間に位置させて設けたことを特徴とする請求項7記載の真空蒸気処理装置。
- 前記加熱手段は複数の連通路を有し、この連通路に通じる気体通路が加熱手段と処理炉の内壁との間に設けられ、この気体通路がファンと熱交換器とを備えた空冷手段に接続されたことを特徴とする請求項5乃至請求項9のいずれか1項に記載の真空蒸気処理装置。
- 前記処理物が鉄−ホウ素−希土類系の焼結磁石であり、前記金属蒸発材料がDy、Tbの少なくとも一種からなることを特徴とする請求項1乃至請求項10のいずれか1項に記載の真空蒸気処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008534324A JP5159629B2 (ja) | 2006-09-11 | 2007-09-10 | 真空蒸気処理装置 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006245303 | 2006-09-11 | ||
JP2006245303 | 2006-09-11 | ||
JP2006248964 | 2006-09-14 | ||
JP2006248964 | 2006-09-14 | ||
JP2008534324A JP5159629B2 (ja) | 2006-09-11 | 2007-09-10 | 真空蒸気処理装置 |
PCT/JP2007/067573 WO2008032668A1 (en) | 2006-09-11 | 2007-09-10 | Vacuum evaporation processing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2008032668A1 true JPWO2008032668A1 (ja) | 2010-01-28 |
JP5159629B2 JP5159629B2 (ja) | 2013-03-06 |
Family
ID=39183727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008534324A Expired - Fee Related JP5159629B2 (ja) | 2006-09-11 | 2007-09-10 | 真空蒸気処理装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8375891B2 (ja) |
JP (1) | JP5159629B2 (ja) |
KR (1) | KR101373266B1 (ja) |
CN (1) | CN101512036B (ja) |
DE (1) | DE112007002116T5 (ja) |
RU (1) | RU2449049C2 (ja) |
TW (1) | TWI433174B (ja) |
WO (1) | WO2008032668A1 (ja) |
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JP2009200179A (ja) * | 2008-02-20 | 2009-09-03 | Ulvac Japan Ltd | 焼結体の製造方法 |
FI123769B (fi) * | 2009-02-13 | 2013-10-31 | Beneq Oy | Kaasukasvatusreaktori |
CN102781562B (zh) * | 2009-12-24 | 2014-11-19 | Lg伊诺特有限公司 | 用于真空热处理设备的热处理容器 |
BRPI1009273A2 (pt) * | 2010-03-02 | 2016-03-08 | Toyota Motor Co Ltd | método de fabricação de pó para núcleo de poeira, núcleo de poeira feito do pó para núcleo de poeira fabricado através do método, e aparelho para fabricação de pó para núcleo de poeira |
TW201200628A (en) * | 2010-06-29 | 2012-01-01 | Hon Hai Prec Ind Co Ltd | Coating apparatus |
US10267564B2 (en) * | 2010-07-30 | 2019-04-23 | Lg Innotek Co., Ltd. | Heat treatment container for vacuum heat treatment apparatus |
JP5732284B2 (ja) * | 2010-08-27 | 2015-06-10 | 株式会社ニューフレアテクノロジー | 成膜装置および成膜方法 |
US20120168143A1 (en) * | 2010-12-30 | 2012-07-05 | Poole Ventura, Inc. | Thermal Diffusion Chamber With Heat Exchanger |
US20110254228A1 (en) * | 2011-01-28 | 2011-10-20 | Poole Ventura, Inc. | Thermal Chamber |
US8097085B2 (en) * | 2011-01-28 | 2012-01-17 | Poole Ventura, Inc. | Thermal diffusion chamber |
JP2012195565A (ja) * | 2011-02-28 | 2012-10-11 | Hitachi Kokusai Electric Inc | 基板処理装置、基板処理方法及び半導体装置の製造方法 |
JP5871172B2 (ja) * | 2011-04-28 | 2016-03-01 | 日立金属株式会社 | R−t−b系焼結磁石の製造方法 |
CN102768891B (zh) * | 2011-05-06 | 2015-11-04 | 有研稀土新材料股份有限公司 | 稀土含氮磁粉制备工艺及设备和制备的产品 |
KR101353605B1 (ko) | 2011-12-05 | 2014-01-27 | 재단법인 포항산업과학연구원 | 자기이방성 희토류 영구자석 소결장치 |
JP5541274B2 (ja) * | 2011-12-28 | 2014-07-09 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
CN103192084B (zh) * | 2013-05-05 | 2015-11-25 | 沈阳中北真空磁电科技有限公司 | 一种旋转式真空热处理设备 |
CN103205543B (zh) * | 2013-05-05 | 2014-12-03 | 沈阳中北真空磁电科技有限公司 | 一种钕铁硼稀土永磁器件的真空热处理方法和设备 |
CN104907572B (zh) * | 2015-07-16 | 2017-11-10 | 浙江中杭新材料科技有限公司 | 一种钕铁硼磁材料的制备方法 |
WO2017033861A1 (ja) * | 2015-08-24 | 2017-03-02 | 日立金属株式会社 | 拡散処理装置およびそれを用いたr-t-b系焼結磁石の製造方法 |
CN105185497B (zh) * | 2015-08-28 | 2017-06-16 | 包头天和磁材技术有限责任公司 | 一种永磁材料的制备方法 |
JP6512146B2 (ja) * | 2016-03-25 | 2019-05-15 | 日立金属株式会社 | 拡散処理装置およびそれを用いたr−t−b系焼結磁石の製造方法 |
RU2665860C2 (ru) * | 2016-11-30 | 2018-09-04 | Вячеслав Максимович Бушуев | Способ металлирования крупногабаритных заготовок в реакторе установки для объемного металлирования, конструкция реактора и способ его изготовления |
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-
2007
- 2007-09-10 DE DE112007002116T patent/DE112007002116T5/de not_active Withdrawn
- 2007-09-10 KR KR1020097006810A patent/KR101373266B1/ko active IP Right Grant
- 2007-09-10 WO PCT/JP2007/067573 patent/WO2008032668A1/ja active Application Filing
- 2007-09-10 RU RU2009113603/02A patent/RU2449049C2/ru active
- 2007-09-10 JP JP2008534324A patent/JP5159629B2/ja not_active Expired - Fee Related
- 2007-09-10 CN CN200780033699XA patent/CN101512036B/zh active Active
- 2007-09-10 US US12/440,635 patent/US8375891B2/en active Active
- 2007-09-11 TW TW096133896A patent/TWI433174B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP5159629B2 (ja) | 2013-03-06 |
US20100012035A1 (en) | 2010-01-21 |
KR20090051255A (ko) | 2009-05-21 |
DE112007002116T5 (de) | 2009-09-10 |
TWI433174B (zh) | 2014-04-01 |
KR101373266B1 (ko) | 2014-03-11 |
TW200820273A (en) | 2008-05-01 |
RU2009113603A (ru) | 2010-10-20 |
RU2449049C2 (ru) | 2012-04-27 |
CN101512036B (zh) | 2011-11-02 |
CN101512036A (zh) | 2009-08-19 |
US8375891B2 (en) | 2013-02-19 |
WO2008032668A1 (en) | 2008-03-20 |
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