JP4922704B2 - 永久磁石及び永久磁石の製造方法 - Google Patents
永久磁石及び永久磁石の製造方法 Download PDFInfo
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- JP4922704B2 JP4922704B2 JP2006248632A JP2006248632A JP4922704B2 JP 4922704 B2 JP4922704 B2 JP 4922704B2 JP 2006248632 A JP2006248632 A JP 2006248632A JP 2006248632 A JP2006248632 A JP 2006248632A JP 4922704 B2 JP4922704 B2 JP 4922704B2
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- sintered magnet
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- 238000000034 method Methods 0.000 title claims description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 55
- 229910052771 Terbium Inorganic materials 0.000 claims description 49
- 238000010438 heat treatment Methods 0.000 claims description 36
- 239000013078 crystal Substances 0.000 claims description 33
- 238000009792 diffusion process Methods 0.000 claims description 20
- 230000008569 process Effects 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
- 239000010408 film Substances 0.000 description 53
- 238000002360 preparation method Methods 0.000 description 36
- 230000005291 magnetic effect Effects 0.000 description 31
- 239000000047 product Substances 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 10
- 229910001172 neodymium magnet Inorganic materials 0.000 description 10
- 230000007797 corrosion Effects 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000003825 pressing Methods 0.000 description 7
- 238000002791 soaking Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
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- 238000010298 pulverizing process Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 229910052779 Neodymium Inorganic materials 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 238000001883 metal evaporation Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000005293 ferrimagnetic effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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Description
Improvement of coercivity on thin Nd2Fe14B sintered permanent magnets(薄型Nd2Fe14B系焼結磁石における保磁力の向上)/ 朴起兌、東北大学 博士論文 平成12年3月23日)
を構成する。準備室3には、ターボ分子ポンプ、クライオポンプ、拡散ポンプなどの真空排気手段31が接続され、この真空排気手段31によって、準備室3と、第1空間4を介して連通した処理室2内を所定の真空度に保持できる。準備室3の底部には、エアーシリンダなどの駆動手段71が設けられ、準備室3内に突出させた軸部72の先端には円形の支持台73が取付けられ、駆動手段71と支持台73とが搬送手段7を構成し、支持台73が、準備室3内の所定位置(下降位置)と処理室2内の所定位置(上昇位置)と間で昇降自在となる。
12 真空チャンバ
13 蒸発源
14 ホルダ
S 焼結磁石
M 永久磁石
Claims (2)
- 所定形状を有する鉄−ホウ素−希土類系の焼結磁石の表面の少なくとも一部に、Dy、Tbの少なくとも一方を成膜する成膜工程と、所定温度下で熱処理を施して表面に形成したDy、Tbの少なくとも一方を焼結磁石の結晶粒界相に拡散させる拡散工程とを含む永久磁石の製造方法であって、
前記焼結磁石として、その平均結晶粒径が1μm〜5μmの範囲となるように製作したものを用い、
前記成膜工程として、処理室を加熱し、この処理室内に予め配置したDy、Tbの少なくとも一方を蒸発させて金属蒸気雰囲気を処理室内に形成する第一工程と、処理室内の温度より低く保持した焼結磁石をこの処理室に搬入し、この焼結磁石が所定温度に達するまでに、処理室内と焼結磁石との間の温度差によって焼結磁石表面にDy、Tbの少なくとも一方を選択的に付着堆積させる第二工程とを含むことを特徴とする永久磁石の製造方法。 - 前記焼結磁石はCoを含有しないものであることを特徴とする請求項1記載の永久磁石の製造方法。
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JP4922704B2 true JP4922704B2 (ja) | 2012-04-25 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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GB2540150B (en) | 2015-07-06 | 2020-01-08 | Dyson Technology Ltd | Rare earth magnet with Dysprosium treatment |
GB2540149B (en) * | 2015-07-06 | 2019-10-02 | Dyson Technology Ltd | Magnet |
CN107424825A (zh) * | 2017-07-21 | 2017-12-01 | 烟台首钢磁性材料股份有限公司 | 一种钕铁硼磁体矫顽力提高方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0663086B2 (ja) * | 1985-09-27 | 1994-08-17 | 住友特殊金属株式会社 | 永久磁石材料及びその製造方法 |
JPH01117303A (ja) * | 1987-10-30 | 1989-05-10 | Taiyo Yuden Co Ltd | 永久磁石 |
JP2005011973A (ja) * | 2003-06-18 | 2005-01-13 | Japan Science & Technology Agency | 希土類−鉄−ホウ素系磁石及びその製造方法 |
JP3914557B2 (ja) * | 2004-11-17 | 2007-05-16 | Tdk株式会社 | 希土類焼結磁石 |
RU2401881C2 (ru) * | 2005-03-18 | 2010-10-20 | Улвак, Инк. | Способ и устройство нанесения покрытия, постоянный магнит и способ его изготовления |
MY181243A (en) * | 2006-03-03 | 2020-12-21 | Hitachi Metals Ltd | R-fe-b rare earth sintered magnet |
WO2007119271A1 (ja) * | 2006-03-20 | 2007-10-25 | Namiki Seimitsu Houseki Kabushiki Kaisha | 薄膜希土類磁石及びその製造方法 |
JP2007305878A (ja) * | 2006-05-12 | 2007-11-22 | Ulvac Japan Ltd | 永久磁石及び永久磁石の製造方法 |
JP2007329250A (ja) * | 2006-06-07 | 2007-12-20 | Ulvac Japan Ltd | 永久磁石及び永久磁石の製造方法 |
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