JPS6350847Y2 - - Google Patents
Info
- Publication number
- JPS6350847Y2 JPS6350847Y2 JP13748684U JP13748684U JPS6350847Y2 JP S6350847 Y2 JPS6350847 Y2 JP S6350847Y2 JP 13748684 U JP13748684 U JP 13748684U JP 13748684 U JP13748684 U JP 13748684U JP S6350847 Y2 JPS6350847 Y2 JP S6350847Y2
- Authority
- JP
- Japan
- Prior art keywords
- developer
- rotary table
- wafer
- outlet
- discharge port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 22
- 239000002699 waste material Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 34
- 238000004140 cleaning Methods 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 238000000746 purification Methods 0.000 description 6
- 239000002351 wastewater Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13748684U JPS6350847Y2 (ko) | 1984-09-10 | 1984-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13748684U JPS6350847Y2 (ko) | 1984-09-10 | 1984-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6151733U JPS6151733U (ko) | 1986-04-07 |
| JPS6350847Y2 true JPS6350847Y2 (ko) | 1988-12-27 |
Family
ID=30695901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13748684U Expired JPS6350847Y2 (ko) | 1984-09-10 | 1984-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350847Y2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07105332B2 (ja) * | 1988-03-09 | 1995-11-13 | 東京エレクトロン株式会社 | 液処理方法 |
| JP2002329705A (ja) * | 2001-04-26 | 2002-11-15 | Shibaura Mechatronics Corp | スピン処理装置 |
-
1984
- 1984-09-10 JP JP13748684U patent/JPS6350847Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6151733U (ko) | 1986-04-07 |
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