JPS6122031B2 - - Google Patents

Info

Publication number
JPS6122031B2
JPS6122031B2 JP1560179A JP1560179A JPS6122031B2 JP S6122031 B2 JPS6122031 B2 JP S6122031B2 JP 1560179 A JP1560179 A JP 1560179A JP 1560179 A JP1560179 A JP 1560179A JP S6122031 B2 JPS6122031 B2 JP S6122031B2
Authority
JP
Japan
Prior art keywords
etching
film
metal
substrate
metal film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1560179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55107781A (en
Inventor
Shuji Tabuchi
Akira Abiru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1560179A priority Critical patent/JPS55107781A/ja
Publication of JPS55107781A publication Critical patent/JPS55107781A/ja
Publication of JPS6122031B2 publication Critical patent/JPS6122031B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1560179A 1979-02-13 1979-02-13 Etching method for metal film Granted JPS55107781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1560179A JPS55107781A (en) 1979-02-13 1979-02-13 Etching method for metal film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1560179A JPS55107781A (en) 1979-02-13 1979-02-13 Etching method for metal film

Publications (2)

Publication Number Publication Date
JPS55107781A JPS55107781A (en) 1980-08-19
JPS6122031B2 true JPS6122031B2 (enrdf_load_stackoverflow) 1986-05-29

Family

ID=11893233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1560179A Granted JPS55107781A (en) 1979-02-13 1979-02-13 Etching method for metal film

Country Status (1)

Country Link
JP (1) JPS55107781A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3400918B2 (ja) 1996-11-14 2003-04-28 東京エレクトロン株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS55107781A (en) 1980-08-19

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