JPS60187117A - 圧電振動子 - Google Patents
圧電振動子Info
- Publication number
- JPS60187117A JPS60187117A JP60025357A JP2535785A JPS60187117A JP S60187117 A JPS60187117 A JP S60187117A JP 60025357 A JP60025357 A JP 60025357A JP 2535785 A JP2535785 A JP 2535785A JP S60187117 A JPS60187117 A JP S60187117A
- Authority
- JP
- Japan
- Prior art keywords
- glass plate
- hole
- piezoelectric vibrator
- conductive
- vibrator according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
- H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH73084A CH655423GA3 (en, 2012) | 1984-02-15 | 1984-02-15 | |
CH730/84-4 | 1984-02-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60187117A true JPS60187117A (ja) | 1985-09-24 |
Family
ID=4193846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60025357A Pending JPS60187117A (ja) | 1984-02-15 | 1985-02-14 | 圧電振動子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4652787A (en, 2012) |
EP (1) | EP0156146B1 (en, 2012) |
JP (1) | JPS60187117A (en, 2012) |
CH (1) | CH655423GA3 (en, 2012) |
DE (1) | DE3564521D1 (en, 2012) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS627214A (ja) * | 1985-07-01 | 1987-01-14 | モトロ−ラ・インコ−ポレ−テツド | 静電密封された圧電装置 |
US6924429B2 (en) | 2001-08-17 | 2005-08-02 | Citizen Watch Co., Ltd. | Electronic device and production method therefor |
JP2010219505A (ja) * | 2009-02-23 | 2010-09-30 | Seiko Instruments Inc | ガラス封止型パッケージの製造方法およびガラス基板 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6196812A (ja) * | 1984-10-17 | 1986-05-15 | Murata Mfg Co Ltd | 電子部品 |
EP0515521B1 (en) * | 1990-02-14 | 1994-09-28 | Endevco Corporation | Surface-mount piezoceramic accelerometer and method for making same |
US5369862A (en) * | 1990-02-26 | 1994-12-06 | Murata Manufacturing Co., Ltd. | Method of producing a piezoelectric device |
JP2601016B2 (ja) * | 1990-11-17 | 1997-04-16 | 株式会社村田製作所 | 圧電共振子の製造方法 |
DE69310031T2 (de) * | 1992-06-23 | 1997-10-09 | Matsushita Electric Ind Co Ltd | Quartzgerät und Verfahren zur Herstellung |
JPH06291587A (ja) * | 1992-07-08 | 1994-10-18 | Matsushita Electric Ind Co Ltd | 圧電振動子 |
EP0596522A1 (en) * | 1992-11-06 | 1994-05-11 | AVANCE TECHNOLOGY, Inc. | High frequency crystal resonator |
US6182508B1 (en) * | 1996-12-18 | 2001-02-06 | Denso Corporation | Structure of angular rate sensor |
US6960870B2 (en) * | 1997-07-29 | 2005-11-01 | Seiko Epson Corporation | Piezo-electric resonator and manufacturing method thereof |
US6976295B2 (en) * | 1997-07-29 | 2005-12-20 | Seiko Epson Corporation | Method of manufacturing a piezoelectric device |
JP4547788B2 (ja) * | 2000-03-15 | 2010-09-22 | セイコーエプソン株式会社 | 圧電振動子のパッケージ構造 |
JP3646258B2 (ja) * | 2001-10-31 | 2005-05-11 | 有限会社ピエデック技術研究所 | 水晶ユニットとその製造方法 |
JP2004080221A (ja) * | 2002-08-13 | 2004-03-11 | Fujitsu Media Device Kk | 弾性波デバイス及びその製造方法 |
JP4329492B2 (ja) * | 2003-10-28 | 2009-09-09 | セイコーエプソン株式会社 | 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
JP4690146B2 (ja) * | 2005-08-26 | 2011-06-01 | セイコーインスツル株式会社 | 水晶振動子、発振器及び電子機器 |
KR100878410B1 (ko) * | 2007-07-11 | 2009-01-13 | 삼성전기주식회사 | 수정 진동자 제조방법 |
US8446079B2 (en) * | 2008-05-23 | 2013-05-21 | Statek Corporation | Piezoelectric resonator with vibration isolation |
JP5421690B2 (ja) * | 2009-08-12 | 2014-02-19 | セイコーインスツル株式会社 | パッケージの製造方法 |
JP5479874B2 (ja) * | 2009-12-10 | 2014-04-23 | セイコーインスツル株式会社 | パッケージの製造方法及びパッケージ |
JP2011142374A (ja) * | 2010-01-05 | 2011-07-21 | Seiko Epson Corp | 圧電デバイス、圧電デバイスの製造方法 |
JP5325151B2 (ja) * | 2010-03-31 | 2013-10-23 | 日本電波工業株式会社 | 水晶デバイス、及びその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5714412U (en, 2012) * | 1980-06-30 | 1982-01-25 | ||
JPS57115013A (en) * | 1981-01-09 | 1982-07-17 | Citizen Watch Co Ltd | Case for quartz oscillator |
JPS57174917A (en) * | 1981-04-02 | 1982-10-27 | Ebauches Sa | Piezoelectric resonator and method of producing same |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3073975A (en) * | 1958-12-23 | 1963-01-15 | Rca Corp | Crystal unit |
JPS5279794A (en) * | 1975-12-26 | 1977-07-05 | Seiko Instr & Electronics Ltd | Piezo-vibrator unit |
JPS5421295A (en) * | 1977-07-19 | 1979-02-17 | Matsushima Kogyo Kk | Crystal oscillator |
JPS5478693A (en) * | 1977-12-05 | 1979-06-22 | Matsushima Kogyo Co Ltd | Crystal vibrator |
JPS5513553A (en) * | 1978-07-14 | 1980-01-30 | Matsushima Kogyo Co Ltd | Crystal vibrator |
CH629358GA3 (en) * | 1979-05-17 | 1982-04-30 | Piezoelectric resonator | |
CH625372A5 (en, 2012) * | 1979-07-06 | 1981-09-15 | Ebauchesfabrik Eta Ag | |
DE3117788A1 (de) * | 1980-05-14 | 1982-05-06 | Ebauchesfabrik Eta Ag | "verfahren zum fertigen von gehaeusen fuer elektronische komponenten" |
JPS5710513A (en) * | 1980-06-23 | 1982-01-20 | Citizen Watch Co Ltd | Airtight sealing method for quartz oscillator |
US4405875A (en) * | 1980-07-24 | 1983-09-20 | Kiyoshi Nagai | Hermetically sealed flat-type piezo-electric oscillator assembly |
-
1984
- 1984-02-15 CH CH73084A patent/CH655423GA3/fr unknown
-
1985
- 1985-01-30 US US06/696,366 patent/US4652787A/en not_active Expired - Fee Related
- 1985-02-13 DE DE8585101537T patent/DE3564521D1/de not_active Expired
- 1985-02-13 EP EP85101537A patent/EP0156146B1/fr not_active Expired
- 1985-02-14 JP JP60025357A patent/JPS60187117A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5714412U (en, 2012) * | 1980-06-30 | 1982-01-25 | ||
JPS57115013A (en) * | 1981-01-09 | 1982-07-17 | Citizen Watch Co Ltd | Case for quartz oscillator |
JPS57174917A (en) * | 1981-04-02 | 1982-10-27 | Ebauches Sa | Piezoelectric resonator and method of producing same |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS627214A (ja) * | 1985-07-01 | 1987-01-14 | モトロ−ラ・インコ−ポレ−テツド | 静電密封された圧電装置 |
US6924429B2 (en) | 2001-08-17 | 2005-08-02 | Citizen Watch Co., Ltd. | Electronic device and production method therefor |
JP2010219505A (ja) * | 2009-02-23 | 2010-09-30 | Seiko Instruments Inc | ガラス封止型パッケージの製造方法およびガラス基板 |
Also Published As
Publication number | Publication date |
---|---|
EP0156146B1 (fr) | 1988-08-17 |
US4652787A (en) | 1987-03-24 |
EP0156146A1 (fr) | 1985-10-02 |
DE3564521D1 (en) | 1988-09-22 |
CH655423GA3 (en, 2012) | 1986-04-30 |
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