JPS57128834A - Inspecting apparatus of foreign substance - Google Patents
Inspecting apparatus of foreign substanceInfo
- Publication number
- JPS57128834A JPS57128834A JP1438781A JP1438781A JPS57128834A JP S57128834 A JPS57128834 A JP S57128834A JP 1438781 A JP1438781 A JP 1438781A JP 1438781 A JP1438781 A JP 1438781A JP S57128834 A JPS57128834 A JP S57128834A
- Authority
- JP
- Japan
- Prior art keywords
- foreign substance
- scattered light
- edge
- irradiates
- occasion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1438781A JPS57128834A (en) | 1981-02-04 | 1981-02-04 | Inspecting apparatus of foreign substance |
US06/343,552 US4468120A (en) | 1981-02-04 | 1982-01-28 | Foreign substance inspecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1438781A JPS57128834A (en) | 1981-02-04 | 1981-02-04 | Inspecting apparatus of foreign substance |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62249879A Division JPS63171346A (ja) | 1987-10-05 | 1987-10-05 | 欠陥検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57128834A true JPS57128834A (en) | 1982-08-10 |
JPS6364738B2 JPS6364738B2 (ja) | 1988-12-13 |
Family
ID=11859641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1438781A Granted JPS57128834A (en) | 1981-02-04 | 1981-02-04 | Inspecting apparatus of foreign substance |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57128834A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5982727A (ja) * | 1982-11-04 | 1984-05-12 | Hitachi Ltd | 異物検出方法及びその装置 |
JPS62188945A (ja) * | 1986-02-14 | 1987-08-18 | Canon Inc | 表面状態測定装置 |
JPS62188943A (ja) * | 1986-02-14 | 1987-08-18 | Canon Inc | 表面状態測定装置 |
JPS6333648A (ja) * | 1986-07-28 | 1988-02-13 | Canon Inc | 表面状態検査装置 |
JPS64452A (en) * | 1988-06-03 | 1989-01-05 | Hitachi Ltd | Detection of foreign matter |
JPH02167452A (ja) * | 1989-11-27 | 1990-06-27 | Hitachi Ltd | 異物検出方法及びその装置 |
JPH04230837A (ja) * | 1991-04-26 | 1992-08-19 | Hitachi Ltd | 両面異物検出方法及びその装置 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS498292A (ja) * | 1972-05-10 | 1974-01-24 | ||
JPS4983470A (ja) * | 1972-11-18 | 1974-08-10 | ||
US3879131A (en) * | 1974-02-06 | 1975-04-22 | Bell Telephone Labor Inc | Photomask inspection by real time diffraction pattern analysis |
US3984189A (en) * | 1973-01-19 | 1976-10-05 | Hitachi Electronics, Ltd. | Method and apparatus for detecting defects in a surface regardless of surface finish |
JPS5228594A (en) * | 1975-08-29 | 1977-03-03 | Matsushita Electric Works Ltd | Process for producing modified melamine resins having flexibility |
JPS5385375A (en) * | 1976-12-31 | 1978-07-27 | Fujitsu Ltd | Pattern inspecting device |
JPS54128682A (en) * | 1978-03-30 | 1979-10-05 | Hitachi Ltd | Automatic detector for foreign matters |
JPS5594145A (en) * | 1979-01-12 | 1980-07-17 | Hitachi Ltd | Method of and device for inspecting surface of article |
JPS5599735A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Testing method for foreign material on wafer |
JPS55107942A (en) * | 1979-02-13 | 1980-08-19 | Matsushita Electric Works Ltd | Inspecting method of plate |
JPS55149829A (en) * | 1979-05-11 | 1980-11-21 | Hitachi Ltd | Detector for foreign matter in wafer |
JPS5780546A (en) * | 1980-11-07 | 1982-05-20 | Nippon Kogaku Kk <Nikon> | Detecting device for foreign substance |
-
1981
- 1981-02-04 JP JP1438781A patent/JPS57128834A/ja active Granted
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS498292A (ja) * | 1972-05-10 | 1974-01-24 | ||
JPS4983470A (ja) * | 1972-11-18 | 1974-08-10 | ||
US3984189A (en) * | 1973-01-19 | 1976-10-05 | Hitachi Electronics, Ltd. | Method and apparatus for detecting defects in a surface regardless of surface finish |
US3879131A (en) * | 1974-02-06 | 1975-04-22 | Bell Telephone Labor Inc | Photomask inspection by real time diffraction pattern analysis |
JPS5228594A (en) * | 1975-08-29 | 1977-03-03 | Matsushita Electric Works Ltd | Process for producing modified melamine resins having flexibility |
JPS5385375A (en) * | 1976-12-31 | 1978-07-27 | Fujitsu Ltd | Pattern inspecting device |
JPS54128682A (en) * | 1978-03-30 | 1979-10-05 | Hitachi Ltd | Automatic detector for foreign matters |
JPS5594145A (en) * | 1979-01-12 | 1980-07-17 | Hitachi Ltd | Method of and device for inspecting surface of article |
JPS5599735A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Testing method for foreign material on wafer |
JPS55107942A (en) * | 1979-02-13 | 1980-08-19 | Matsushita Electric Works Ltd | Inspecting method of plate |
JPS55149829A (en) * | 1979-05-11 | 1980-11-21 | Hitachi Ltd | Detector for foreign matter in wafer |
JPS5780546A (en) * | 1980-11-07 | 1982-05-20 | Nippon Kogaku Kk <Nikon> | Detecting device for foreign substance |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5982727A (ja) * | 1982-11-04 | 1984-05-12 | Hitachi Ltd | 異物検出方法及びその装置 |
JPS6365904B2 (ja) * | 1982-11-04 | 1988-12-19 | Hitachi Ltd | |
JPS62188945A (ja) * | 1986-02-14 | 1987-08-18 | Canon Inc | 表面状態測定装置 |
JPS62188943A (ja) * | 1986-02-14 | 1987-08-18 | Canon Inc | 表面状態測定装置 |
JPS6333648A (ja) * | 1986-07-28 | 1988-02-13 | Canon Inc | 表面状態検査装置 |
JPH0629860B2 (ja) * | 1986-07-28 | 1994-04-20 | キヤノン株式会社 | 表面状態検査装置 |
JPS64452A (en) * | 1988-06-03 | 1989-01-05 | Hitachi Ltd | Detection of foreign matter |
JPH05662B2 (ja) * | 1988-06-03 | 1993-01-06 | Hitachi Ltd | |
JPH02167452A (ja) * | 1989-11-27 | 1990-06-27 | Hitachi Ltd | 異物検出方法及びその装置 |
JPH04230837A (ja) * | 1991-04-26 | 1992-08-19 | Hitachi Ltd | 両面異物検出方法及びその装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6364738B2 (ja) | 1988-12-13 |
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