JPS5385375A - Pattern inspecting device - Google Patents
Pattern inspecting deviceInfo
- Publication number
- JPS5385375A JPS5385375A JP15805376A JP15805376A JPS5385375A JP S5385375 A JPS5385375 A JP S5385375A JP 15805376 A JP15805376 A JP 15805376A JP 15805376 A JP15805376 A JP 15805376A JP S5385375 A JPS5385375 A JP S5385375A
- Authority
- JP
- Japan
- Prior art keywords
- inspecting device
- pattern inspecting
- pattern
- inspecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15805376A JPS5385375A (en) | 1976-12-31 | 1976-12-31 | Pattern inspecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15805376A JPS5385375A (en) | 1976-12-31 | 1976-12-31 | Pattern inspecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5385375A true JPS5385375A (en) | 1978-07-27 |
Family
ID=15663252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15805376A Pending JPS5385375A (en) | 1976-12-31 | 1976-12-31 | Pattern inspecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5385375A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57128834A (en) * | 1981-02-04 | 1982-08-10 | Nippon Kogaku Kk <Nikon> | Inspecting apparatus of foreign substance |
JPS57161640A (en) * | 1981-03-31 | 1982-10-05 | Olympus Optical Co Ltd | Inspecting device for surface |
-
1976
- 1976-12-31 JP JP15805376A patent/JPS5385375A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57128834A (en) * | 1981-02-04 | 1982-08-10 | Nippon Kogaku Kk <Nikon> | Inspecting apparatus of foreign substance |
JPS6364738B2 (en) * | 1981-02-04 | 1988-12-13 | ||
JPS57161640A (en) * | 1981-03-31 | 1982-10-05 | Olympus Optical Co Ltd | Inspecting device for surface |
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