JPS5385374A - Pattern inspecting device - Google Patents
Pattern inspecting deviceInfo
- Publication number
- JPS5385374A JPS5385374A JP15805276A JP15805276A JPS5385374A JP S5385374 A JPS5385374 A JP S5385374A JP 15805276 A JP15805276 A JP 15805276A JP 15805276 A JP15805276 A JP 15805276A JP S5385374 A JPS5385374 A JP S5385374A
- Authority
- JP
- Japan
- Prior art keywords
- inspecting device
- pattern inspecting
- pattern
- inspecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15805276A JPS5385374A (en) | 1976-12-31 | 1976-12-31 | Pattern inspecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15805276A JPS5385374A (en) | 1976-12-31 | 1976-12-31 | Pattern inspecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5385374A true JPS5385374A (en) | 1978-07-27 |
Family
ID=15663231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15805276A Pending JPS5385374A (en) | 1976-12-31 | 1976-12-31 | Pattern inspecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5385374A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62136896A (en) * | 1985-12-11 | 1987-06-19 | 日本電気株式会社 | Alignment mark detection of high density multilayer board |
-
1976
- 1976-12-31 JP JP15805276A patent/JPS5385374A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62136896A (en) * | 1985-12-11 | 1987-06-19 | 日本電気株式会社 | Alignment mark detection of high density multilayer board |
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