JPS5385374A - Pattern inspecting device - Google Patents

Pattern inspecting device

Info

Publication number
JPS5385374A
JPS5385374A JP15805276A JP15805276A JPS5385374A JP S5385374 A JPS5385374 A JP S5385374A JP 15805276 A JP15805276 A JP 15805276A JP 15805276 A JP15805276 A JP 15805276A JP S5385374 A JPS5385374 A JP S5385374A
Authority
JP
Japan
Prior art keywords
inspecting device
pattern inspecting
pattern
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15805276A
Other languages
Japanese (ja)
Inventor
Masahito Nakashima
Katsumi Fujiwara
Yoshiaki Gotou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15805276A priority Critical patent/JPS5385374A/en
Publication of JPS5385374A publication Critical patent/JPS5385374A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15805276A 1976-12-31 1976-12-31 Pattern inspecting device Pending JPS5385374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15805276A JPS5385374A (en) 1976-12-31 1976-12-31 Pattern inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15805276A JPS5385374A (en) 1976-12-31 1976-12-31 Pattern inspecting device

Publications (1)

Publication Number Publication Date
JPS5385374A true JPS5385374A (en) 1978-07-27

Family

ID=15663231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15805276A Pending JPS5385374A (en) 1976-12-31 1976-12-31 Pattern inspecting device

Country Status (1)

Country Link
JP (1) JPS5385374A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136896A (en) * 1985-12-11 1987-06-19 日本電気株式会社 Alignment mark detection of high density multilayer board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136896A (en) * 1985-12-11 1987-06-19 日本電気株式会社 Alignment mark detection of high density multilayer board

Similar Documents

Publication Publication Date Title
ZA771734B (en) Position testing device
JPS5319737A (en) Tester
JPS5369689A (en) Inspection apparatus
JPS52113468A (en) Device for inspecting
JPS52137375A (en) Measuring apparatus
JPS52146682A (en) Surface inspecting apparatus
JPS5382496A (en) Measuring apparatus
JPS52113767A (en) Measuring device
JPS5348787A (en) Testing device
JPS53143974A (en) Inspecting device
JPS5383657A (en) Measuring apparatus
JPS5384169A (en) Pattern inspecting device
JPS5337094A (en) Electroochemical measuring apparatus
JPS539984A (en) Inspecting apparatus
JPS5296358A (en) Device for inspecting pattern
JPS52114242A (en) Pattern analyzer
JPS5385375A (en) Pattern inspecting device
JPS5385374A (en) Pattern inspecting device
JPS52131753A (en) Measuring device
JPS52133241A (en) Shape detecting apparatus
JPS5384166A (en) Pattern inspecting device
JPS5384167A (en) Pattern inspecting device
JPS53139993A (en) Xxray inspecting device
JPS5326157A (en) Stereophotographic measuring apparatus
JPS5368159A (en) Measuring device