JPS5384167A - Pattern inspecting device - Google Patents
Pattern inspecting deviceInfo
- Publication number
- JPS5384167A JPS5384167A JP15935776A JP15935776A JPS5384167A JP S5384167 A JPS5384167 A JP S5384167A JP 15935776 A JP15935776 A JP 15935776A JP 15935776 A JP15935776 A JP 15935776A JP S5384167 A JPS5384167 A JP S5384167A
- Authority
- JP
- Japan
- Prior art keywords
- inspecting device
- pattern inspecting
- pattern
- inspecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15935776A JPS602616B2 (en) | 1976-12-29 | 1976-12-29 | pattern inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15935776A JPS602616B2 (en) | 1976-12-29 | 1976-12-29 | pattern inspection equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5384167A true JPS5384167A (en) | 1978-07-25 |
JPS602616B2 JPS602616B2 (en) | 1985-01-23 |
Family
ID=15692070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15935776A Expired JPS602616B2 (en) | 1976-12-29 | 1976-12-29 | pattern inspection equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS602616B2 (en) |
-
1976
- 1976-12-29 JP JP15935776A patent/JPS602616B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS602616B2 (en) | 1985-01-23 |
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