JPS5384167A - Pattern inspecting device - Google Patents

Pattern inspecting device

Info

Publication number
JPS5384167A
JPS5384167A JP15935776A JP15935776A JPS5384167A JP S5384167 A JPS5384167 A JP S5384167A JP 15935776 A JP15935776 A JP 15935776A JP 15935776 A JP15935776 A JP 15935776A JP S5384167 A JPS5384167 A JP S5384167A
Authority
JP
Japan
Prior art keywords
inspecting device
pattern inspecting
pattern
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15935776A
Other languages
Japanese (ja)
Other versions
JPS602616B2 (en
Inventor
Masahito Nakashima
Katsumi Fujiwara
Yoshiaki Gotou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15935776A priority Critical patent/JPS602616B2/en
Publication of JPS5384167A publication Critical patent/JPS5384167A/en
Publication of JPS602616B2 publication Critical patent/JPS602616B2/en
Expired legal-status Critical Current

Links

JP15935776A 1976-12-29 1976-12-29 pattern inspection equipment Expired JPS602616B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15935776A JPS602616B2 (en) 1976-12-29 1976-12-29 pattern inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15935776A JPS602616B2 (en) 1976-12-29 1976-12-29 pattern inspection equipment

Publications (2)

Publication Number Publication Date
JPS5384167A true JPS5384167A (en) 1978-07-25
JPS602616B2 JPS602616B2 (en) 1985-01-23

Family

ID=15692070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15935776A Expired JPS602616B2 (en) 1976-12-29 1976-12-29 pattern inspection equipment

Country Status (1)

Country Link
JP (1) JPS602616B2 (en)

Also Published As

Publication number Publication date
JPS602616B2 (en) 1985-01-23

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