JPS5384166A - Pattern inspecting device - Google Patents

Pattern inspecting device

Info

Publication number
JPS5384166A
JPS5384166A JP15935676A JP15935676A JPS5384166A JP S5384166 A JPS5384166 A JP S5384166A JP 15935676 A JP15935676 A JP 15935676A JP 15935676 A JP15935676 A JP 15935676A JP S5384166 A JPS5384166 A JP S5384166A
Authority
JP
Japan
Prior art keywords
inspecting device
pattern inspecting
pattern
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15935676A
Other languages
Japanese (ja)
Inventor
Masahito Nakashima
Katsumi Fujiwara
Yoshiaki Gotou
Yuushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15935676A priority Critical patent/JPS5384166A/en
Publication of JPS5384166A publication Critical patent/JPS5384166A/en
Pending legal-status Critical Current

Links

JP15935676A 1976-12-29 1976-12-29 Pattern inspecting device Pending JPS5384166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15935676A JPS5384166A (en) 1976-12-29 1976-12-29 Pattern inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15935676A JPS5384166A (en) 1976-12-29 1976-12-29 Pattern inspecting device

Publications (1)

Publication Number Publication Date
JPS5384166A true JPS5384166A (en) 1978-07-25

Family

ID=15692049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15935676A Pending JPS5384166A (en) 1976-12-29 1976-12-29 Pattern inspecting device

Country Status (1)

Country Link
JP (1) JPS5384166A (en)

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