JPS5296358A - Device for inspecting pattern - Google Patents

Device for inspecting pattern

Info

Publication number
JPS5296358A
JPS5296358A JP1200776A JP1200776A JPS5296358A JP S5296358 A JPS5296358 A JP S5296358A JP 1200776 A JP1200776 A JP 1200776A JP 1200776 A JP1200776 A JP 1200776A JP S5296358 A JPS5296358 A JP S5296358A
Authority
JP
Japan
Prior art keywords
inspecting pattern
inspecting
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1200776A
Other languages
Japanese (ja)
Other versions
JPS5730227B2 (en
Inventor
Tamaki Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP1200776A priority Critical patent/JPS5296358A/en
Publication of JPS5296358A publication Critical patent/JPS5296358A/en
Publication of JPS5730227B2 publication Critical patent/JPS5730227B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP1200776A 1976-02-06 1976-02-06 Device for inspecting pattern Granted JPS5296358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1200776A JPS5296358A (en) 1976-02-06 1976-02-06 Device for inspecting pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1200776A JPS5296358A (en) 1976-02-06 1976-02-06 Device for inspecting pattern

Publications (2)

Publication Number Publication Date
JPS5296358A true JPS5296358A (en) 1977-08-12
JPS5730227B2 JPS5730227B2 (en) 1982-06-28

Family

ID=11793519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1200776A Granted JPS5296358A (en) 1976-02-06 1976-02-06 Device for inspecting pattern

Country Status (1)

Country Link
JP (1) JPS5296358A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310863A (en) * 1976-07-19 1978-01-31 Fujitsu Ltd Method of testing multilayer substrate
JP2008546991A (en) * 2005-06-17 2008-12-25 アーテーゲー ルーテル ウント メルツァー ゲーエムベーハー Method for inspecting a large non-component printed circuit board using a finger tester
JP2013185978A (en) * 2012-03-08 2013-09-19 Mitsubishi Electric Corp Length measurement apparatus and length measurement method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938968U (en) * 1972-07-07 1974-04-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938968U (en) * 1972-07-07 1974-04-05

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310863A (en) * 1976-07-19 1978-01-31 Fujitsu Ltd Method of testing multilayer substrate
JP2008546991A (en) * 2005-06-17 2008-12-25 アーテーゲー ルーテル ウント メルツァー ゲーエムベーハー Method for inspecting a large non-component printed circuit board using a finger tester
JP2013185978A (en) * 2012-03-08 2013-09-19 Mitsubishi Electric Corp Length measurement apparatus and length measurement method

Also Published As

Publication number Publication date
JPS5730227B2 (en) 1982-06-28

Similar Documents

Publication Publication Date Title
JPS5348387A (en) Device for measuring encephalothlipsis
ZA771734B (en) Position testing device
JPS5369689A (en) Inspection apparatus
JPS52113468A (en) Device for inspecting
JPS52137375A (en) Measuring apparatus
JPS52146682A (en) Surface inspecting apparatus
JPS5382496A (en) Measuring apparatus
JPS5348787A (en) Testing device
JPS5322458A (en) Measuring apparatus for outtoffroundness
JPS5383657A (en) Measuring apparatus
JPS5384169A (en) Pattern inspecting device
JPS5394968A (en) Prooving apparatus for surface state
JPS5337094A (en) Electroochemical measuring apparatus
JPS539984A (en) Inspecting apparatus
JPS5296358A (en) Device for inspecting pattern
JPS5335192A (en) Coronaashielding device for strainninsulator device
JPS5384788A (en) Nonndestructive inspection for voltageecontrolled block
JPS52114242A (en) Pattern analyzer
JPS5385375A (en) Pattern inspecting device
JPS5385374A (en) Pattern inspecting device
JPS5242962A (en) Device for analyzing pattern
JPS5384167A (en) Pattern inspecting device
JPS5384166A (en) Pattern inspecting device
JPS5380578A (en) Overrtravel device for microoswitch
JPS5321830A (en) Device for embanking