KR930010527A - 조사를 이용한 표면상태 검사방법 및 그 장치 - Google Patents

조사를 이용한 표면상태 검사방법 및 그 장치 Download PDF

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KR930010527A
KR930010527A KR1019920022264A KR920022264A KR930010527A KR 930010527 A KR930010527 A KR 930010527A KR 1019920022264 A KR1019920022264 A KR 1019920022264A KR 920022264 A KR920022264 A KR 920022264A KR 930010527 A KR930010527 A KR 930010527A
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South Korea
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light
inspection
irradiation
receiving image
change pattern
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KR1019920022264A
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KR960012329B1 (ko
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가스모도 다나까
가즈오 히로나가
요시미 산바라
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와다 요시히로
마쓰다 가부시끼가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Closed-Circuit Television Systems (AREA)

Abstract

피검사면(10)의 색조에 관계없이 그 피검사면(10)의 표면상태를 정밀도가 양호하게 검사하는 것을 가능하게 한 조사를 이용한 표면상태검사방법 및 그 장치를 제공하는 것으로서 경면이라고 인지되는 피검사면(10)에 대향해서 배치된 광조사수단(1)로부터 그 피검사면(10)으로 향해 소정의 변화패턴을 갖는 광을 조사함과 동시에 상기한 피검사면(10)에 있어서 반사된 상기한 광조사수단(1)의 상을 촬상수단(2)에 의해 촬영해서 상기한 변화패턴에 대응하는 수광화상을 작성하고 다시또 화상처리수단(3)에 의해 상기 수광광화상에 기초하여 상기한 변화패턴과 다른 개소를 식별하므로서 상기한 피검사면(10)의 표면결함을 검출함에 있어서 220nm-350nm의 파장범위의 반사광만을 상기한 촬상수단(2)에 잡아넣어서 수광화상의 작성을 행하도록 한 것이다.

Description

조사를 이용한 표면상태 검사방법 및 그 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시예에 관한 조사를 이용한 표면상태 검사장치의 시스템도, 제2도는 파장에 대한 반사율 특성도.

Claims (4)

  1. 경면이라고 인지되는 피검사면(10)에 대향해서 배치된 광조사수단(1)으로부터 피검사면(10)에 향해서 소정의 변화패턴을 갖는 광을 조사함과 동시에 상기한 피검사면(10)에 있어서 반사된 상기한 광조사수단(1)의 상을 촬상수단(2)에 의해 촬영해서 상기한 변화패턴에 대응하는 수광화상을 작성하고 다시또 화성처리수단(3)에 의해 상기한 수광화상에 기초하여 상기한 변화패턴과 다른 개소를 식별하므로서 상기한 피검사면(10)의 표면결함(21)(22)를 검출함에 있어서, 220nm-350nm의 파장범위의 반사광만을 상기한 촬상수단(2)에 잡아 넣어서 수광화상의 작성을 행하게 하는 것을 특징으로 하는 조사를 이용한 표면상태 검사방법.
  2. 경면이라고 인지되는 피검사면(10)에 대향해서 배치되고, 그 피검사면(10)을 향해 소정의 변화 패턴을 갖는 광을 조사하는 광조사수단(1)과 상기한 피검사면(10)에 있어서 반사된 상기한 광조사수단(1)의 상을 촬영해서 상기한 변화패턴에 대응하는 수광화상을 작성하는 촬상수단(2)와 그 수광화상에 기초하여 상기한 변화패턴과 다른 개소를 식별하므로서 상기한 피검사면(10)의 표면결함(21)(22)를 검출하는 화상처리수단(3)과를 구비함과 동시에 상기한 촬상수단(2)에 있어서의 수광화상의 작성을 220nm-350nm의 파장범위의 반사광에 의해 행하도록 구성한 것을 특징으로 하는 조사를 이용한 표면상태 검사장치.
  3. 제2항에 있어서, 광조사수단(1)이 조사광으로서 220nm-350nm의 파장범위의 광을 조사하도록 구성되어 있는 것을 특징으로 하는 조사를 이용한 표면상태 검사장치.
  4. 제2항에 있어서, 촬상수단(2)가 피검사면(10)으로부터의 반사광중 220nm-350nm의 파장범위의 반사광만을 수광할 수 있도록 구성되어 있는 것을 특징으로 하는 조사를 이용한 표면상태 검사장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920022264A 1991-11-25 1992-11-25 조사를 이용한 표면상태 검사방법 및 그 장치 KR960012329B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP30914891A JPH05142153A (ja) 1991-11-25 1991-11-25 照射を用いた表面状態検査方法及びその装置
JP91-309148 1991-11-25

Publications (2)

Publication Number Publication Date
KR930010527A true KR930010527A (ko) 1993-06-22
KR960012329B1 KR960012329B1 (ko) 1996-09-18

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KR1019920022264A KR960012329B1 (ko) 1991-11-25 1992-11-25 조사를 이용한 표면상태 검사방법 및 그 장치

Country Status (3)

Country Link
US (1) US5331169A (ko)
JP (1) JPH05142153A (ko)
KR (1) KR960012329B1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100952934B1 (ko) * 2009-12-04 2010-04-16 대아공전주식회사 무대 기기 제어시스템
KR101479889B1 (ko) * 2010-12-06 2015-01-06 가부시키가이샤 히다치 하이테크놀로지즈 하전 입자선 장치

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686987A (en) 1995-12-29 1997-11-11 Orfield Associates, Inc. Methods for assessing visual tasks to establish desirable lighting and viewing conditions for performance of tasks; apparatus; and, applications
DE19730885A1 (de) 1997-07-18 1999-01-21 Audi Ag Verfahren zur automatischen Erkennung von Oberflächenfehlern an Rohkarosserien und Vorrichtung zur Durchführung des Verfahrens
US6800859B1 (en) 1998-12-28 2004-10-05 Hitachi, Ltd. Method and equipment for detecting pattern defect
US6266138B1 (en) * 1999-10-12 2001-07-24 Perceptron, Inc. System and method for detecting defects in a surface of a workpiece
US6836000B1 (en) * 2000-03-01 2004-12-28 Micron Technology, Inc. Antifuse structure and method of use
JP3858571B2 (ja) * 2000-07-27 2006-12-13 株式会社日立製作所 パターン欠陥検査方法及びその装置
DE10036741A1 (de) 2000-07-27 2002-02-07 Duerr Systems Gmbh Verfahren und Kontrollsystem zur Kontrolle der Beschichtungsqualität von Werkstücken
GB2395289A (en) * 2002-11-11 2004-05-19 Qinetiq Ltd Structured light generator
US7559258B2 (en) * 2003-06-12 2009-07-14 Matzoll Robert J Torque sensor using signal amplitude analysis
EP1768724A4 (en) * 2004-06-07 2010-08-25 Bard Inc C R SUBCUTANEOUS INFUSION DEVICES
US7253908B2 (en) * 2004-07-22 2007-08-07 The Boeing Company Non-destructive inspection using laser profiling and associated method
JP2006242814A (ja) * 2005-03-04 2006-09-14 Kanto Auto Works Ltd 表面検査装置
JP2007017379A (ja) * 2005-07-11 2007-01-25 Gen Tec:Kk 表面形状測定装置
DE102006044443A1 (de) * 2006-09-21 2008-04-03 Robert Bosch Gmbh Automatische Erkennung von Beschichtungsfehlern
EP2080535A4 (en) * 2006-11-07 2012-10-17 Kaneka Corp CATHETER TUBES FOR MEDICAL USE
US7784364B2 (en) * 2008-04-28 2010-08-31 Matzoll Robert J Optical sensor for measurement of static and dynamic torque
US8542351B2 (en) 2011-09-01 2013-09-24 Nike, Inc. Coating inspection device
CN103245677A (zh) * 2013-05-02 2013-08-14 苏州欧菲光科技有限公司 感光光阻检验方法及装置
US9988242B1 (en) * 2017-01-11 2018-06-05 Otis Elevator Company Elevator rail healthy monitoring method
US11397111B2 (en) * 2018-09-18 2022-07-26 Axalta Coating Systems Ip Co., Llc Device and method for determining observation geometry
US10996165B1 (en) * 2020-03-19 2021-05-04 The Boeing Company Apparatus and method for measuring UV coating effectiveness
JP7256166B2 (ja) * 2020-12-21 2023-04-11 新日本空調株式会社 塗装表面観察方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4629319A (en) * 1984-02-14 1986-12-16 Diffracto Ltd. Panel surface flaw inspection
JPH0621775B2 (ja) * 1986-04-04 1994-03-23 日産自動車株式会社 表面検査装置
US5072128A (en) * 1989-07-26 1991-12-10 Nikon Corporation Defect inspecting apparatus using multiple color light to detect defects
US5041726A (en) * 1990-06-11 1991-08-20 Hughes Aircraft Company Infrared holographic defect detector
US5208766A (en) * 1990-11-13 1993-05-04 Hughes Aircraft Company Automated evaluation of painted surface quality
US5153445A (en) * 1991-07-22 1992-10-06 General Motors Corporation Method and apparatus for measuring orange peel and texture in painted surfaces

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100952934B1 (ko) * 2009-12-04 2010-04-16 대아공전주식회사 무대 기기 제어시스템
KR101479889B1 (ko) * 2010-12-06 2015-01-06 가부시키가이샤 히다치 하이테크놀로지즈 하전 입자선 장치

Also Published As

Publication number Publication date
US5331169A (en) 1994-07-19
JPH05142153A (ja) 1993-06-08
KR960012329B1 (ko) 1996-09-18

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