JPS4983470A - - Google Patents

Info

Publication number
JPS4983470A
JPS4983470A JP48120040A JP12004073A JPS4983470A JP S4983470 A JPS4983470 A JP S4983470A JP 48120040 A JP48120040 A JP 48120040A JP 12004073 A JP12004073 A JP 12004073A JP S4983470 A JPS4983470 A JP S4983470A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48120040A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4983470A publication Critical patent/JPS4983470A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
JP48120040A 1972-11-18 1973-10-26 Pending JPS4983470A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2256736A DE2256736C3 (de) 1972-11-18 1972-11-18 Meßanordnung zur automatischen Prüfung der Oberflächenbeschaffenheit und Ebenheit einer Werkstückoberfläche

Publications (1)

Publication Number Publication Date
JPS4983470A true JPS4983470A (ja) 1974-08-10

Family

ID=5862167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48120040A Pending JPS4983470A (ja) 1972-11-18 1973-10-26

Country Status (5)

Country Link
US (1) US3866038A (ja)
JP (1) JPS4983470A (ja)
DE (1) DE2256736C3 (ja)
FR (1) FR2207268B1 (ja)
GB (1) GB1444566A (ja)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199064A (en) * 1975-02-27 1976-09-01 Toshoshi Sato Hyomenkeijonadono kosokusokuteisochi
JPS51150361A (en) * 1975-06-19 1976-12-23 Oki Eng Kk Surface flatness measuring optical device
JPS5269853A (en) * 1975-12-09 1977-06-10 Yoshizaki Kozo Method and device for detecting curve of surface of body
JPS5310456A (en) * 1976-07-16 1978-01-30 Tanifuji Kikai Kougiyou Kk Road surface roughness inspector
JPS54164570U (ja) * 1978-05-11 1979-11-17
JPS55154402A (en) * 1979-05-21 1980-12-02 Anritsu Corp Shape measuring apparatus
JPS56155803A (en) * 1980-05-07 1981-12-02 Mitsubishi Electric Corp Shape detector
JPS5791403A (en) * 1980-10-04 1982-06-07 Gasuto Teodooru Optoelectronic measuring method of and apparatus for roughness of surface
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS57207852A (en) * 1981-05-15 1982-12-20 Siemens Ag Method of detecting three-dimensional object
JPS59109905U (ja) * 1983-01-14 1984-07-24 ティーディーケイ株式会社 一次元センサによる二次元測定装置
JPS59161010U (ja) * 1983-04-14 1984-10-29 日本板硝子株式会社 平坦度測定装置
JPS63177040A (ja) * 1987-01-19 1988-07-21 Nagoya Denki Kogyo Kk 実装済プリント基板自動検査装置
JPS63177046A (ja) * 1987-01-19 1988-07-21 Nagoya Denki Kogyo Kk 実装済プリント基板自動検査装置におけるフラツトパツケ−ジのリ−ド浮き検出方式
JPS63113947U (ja) * 1987-01-19 1988-07-22
JPS63113948U (ja) * 1987-01-19 1988-07-22
JPS63113949U (ja) * 1987-01-19 1988-07-22
JPH0198949A (ja) * 1987-10-12 1989-04-17 Sumitomo Electric Ind Ltd 屈折角測定装置
JPH02114156A (ja) * 1988-10-25 1990-04-26 Matsushita Electric Ind Co Ltd 実装基板検査装置
JP2000505906A (ja) * 1996-12-24 2000-05-16 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 光学式検査装置及びこの検査装置が設けられているリソグラフィ装置
JP2006078457A (ja) * 2004-09-06 2006-03-23 Oputouea Kk 高さ測定を有する基板検査装置

Families Citing this family (49)

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FR2327513A1 (fr) * 1974-01-10 1977-05-06 Cilas Dispositif pour determiner le profil d'une surface
FR2277326A1 (fr) * 1974-07-02 1976-01-30 Centre Rech Metallurgique Procede et dispositif pour determiner la forme et les dimensions de la section transversale d'un objet
US4312590A (en) * 1977-06-10 1982-01-26 Eocom Corporation Optical scanner and system for laser beam exposure of photo surfaces
JPS5483853A (en) * 1977-12-16 1979-07-04 Canon Inc Measuring device
US4342515A (en) * 1978-01-27 1982-08-03 Hitachi, Ltd. Method of inspecting the surface of an object and apparatus therefor
US4306808A (en) * 1979-12-14 1981-12-22 Ford Aerospace & Communications Corp. Glass flaw inspection system
US4323307A (en) * 1980-06-06 1982-04-06 American Hoechst Corporation Light beam scanning apparatus
US4622462A (en) * 1981-06-11 1986-11-11 Mts Vektronics Corporation Method and apparatus for three-dimensional scanning
US4832429A (en) * 1983-01-19 1989-05-23 T. R. Whitney Corporation Scanning imaging system and method
DE8303856U1 (de) * 1983-02-11 1985-11-14 Optische Werke G. Rodenstock, 8000 Muenchen Vorrichtung zur Ermittlung einer Oberflächenstruktur, insbesondere der Rauheit
DE3337251A1 (de) * 1983-10-13 1985-04-25 Gerd Dipl.-Phys. Dr. 8520 Erlangen Häusler Optisches abtastverfahren zur dreidimensionalen vermessung von objekten
US4629319A (en) * 1984-02-14 1986-12-16 Diffracto Ltd. Panel surface flaw inspection
US4920385A (en) * 1984-02-14 1990-04-24 Diffracto Ltd. Panel surface flaw inspection
DE3408106A1 (de) * 1984-03-05 1985-09-12 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optischer rauheits-scanner
GB2157419A (en) * 1984-04-11 1985-10-23 Elco Ass R D Optical sensor for for use in controlling a robot
DE3415043C1 (de) * 1984-04-21 1985-07-11 Eltro GmbH, Gesellschaft für Strahlungstechnik, 6900 Heidelberg Verfahren und Schaltungsanordnung zum entfernungs- und winkelunabhaengigen Messen gleicher Abstandspunkte von einem gemeinsamen Bezugspunkt aus
DE3426332A1 (de) * 1984-07-17 1986-01-30 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optische rauheitssonde mit abtastung der indikatrix
SE444728B (sv) * 1984-08-31 1986-04-28 Electrolux Ab Metanordning for identifiering av ytprofilen hos ett foremal
DE3503858A1 (de) * 1985-02-05 1986-08-21 Daimler-Benz Ag, 7000 Stuttgart Vorrichtung zur ermittlung von gestaltsfehlern niedriger ordnung
US5206700A (en) * 1985-03-14 1993-04-27 Diffracto, Ltd. Methods and apparatus for retroreflective surface inspection and distortion measurement
DE3518832A1 (de) * 1985-05-24 1986-11-27 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Oberflaechenbeschaffenheitsfeststellungs-lichtabtastvorrichtung mit einem lichtkonzentrator
GB8626812D0 (en) * 1986-11-10 1986-12-10 Sira Ltd Surface inspection
DE3643470A1 (de) * 1986-12-19 1988-06-30 Ernst Scheid Verfahren und vorrichtung zum ermitteln des geometrischen profiles von fahrbahnoberflaechen
DE3703505A1 (de) * 1987-02-05 1988-08-18 Automation W & R Gmbh Vorrichtung und verfahren zum erzeugen einer profilbilddarstellung einer werkstueckoberflaeche
DE3703504A1 (de) * 1987-02-05 1988-08-18 Automation W & R Gmbh Verfahren und vorrichtung zur bestimmung der oberflaechenrauhigkeit und/oder der oberflaechenstruktur von gegenstaenden
US4849643A (en) * 1987-09-18 1989-07-18 Eaton Leonard Technologies Optical probe with overlapping detection fields
DE3737632A1 (de) * 1987-11-05 1989-05-24 Sick Optik Elektronik Erwin Optische oberflaechenwelligkeitsmessvorrichtung
DE3741680A1 (de) * 1987-12-09 1989-06-22 Pagendarm Gmbh Verfahren und vorrichtung zum glaetten der oberflaeche einer papierbahn
US5008555A (en) * 1988-04-08 1991-04-16 Eaton Leonard Technologies, Inc. Optical probe with overlapping detection fields
FR2656430B1 (fr) * 1989-12-26 1994-01-21 Telecommunications Sa Dispositif de balayage et son application aux dispositifsd'analyse.
JP2510786B2 (ja) * 1990-04-14 1996-06-26 松下電工株式会社 物体の形状検出方法及びその装置
US5063292A (en) * 1990-04-27 1991-11-05 Xerox Corporation Optical scanner with reduced end of scan wobble having an even number of beam reflections
DE4025682A1 (de) * 1990-08-14 1992-02-20 Fraunhofer Ges Forschung Vorrichtung zum messen und verfahren beim messen von profilen strangfoermigen guts
US5243405A (en) * 1991-01-07 1993-09-07 Tichenor Clyde L Optical system for surface verification
US5168322A (en) * 1991-08-19 1992-12-01 Diffracto Ltd. Surface inspection using retro-reflective light field
US5225890A (en) * 1991-10-28 1993-07-06 Gencorp Inc. Surface inspection apparatus and method
DE4325921A1 (de) * 1993-08-02 1995-02-09 Schlafhorst & Co W Kreuzspulenqualitätsprüfung
DE19549233C2 (de) * 1995-01-06 1998-02-26 Ver Energiewerke Ag Verfahren und Anordnung zur zerstörungsfreien Werkstoffprüfung mittels Gefügeabdruck an einem zeitstandsbeanspruchten Bauteils unter vorzugsweise Vor-Ort-Bedingungen, z. B. in einem Kraftwerk
US5661561A (en) * 1995-06-02 1997-08-26 Accu-Sort Systems, Inc. Dimensioning system
US5978089A (en) * 1997-04-15 1999-11-02 Nextel Ltd. Non-contact method for measuring the shape of an object
US6999183B2 (en) * 1998-11-18 2006-02-14 Kla-Tencor Corporation Detection system for nanometer scale topographic measurements of reflective surfaces
DE10139237A1 (de) * 2001-08-09 2003-03-06 Conti Temic Microelectronic Vorrichtung zur Entfernungsmessung
CN100351608C (zh) * 2005-04-12 2007-11-28 鸿富锦精密工业（深圳）有限公司 激光量测机台扫描精度验证方法
US20080218763A1 (en) * 2006-03-21 2008-09-11 Hans Weber Maschinenfabrik Gmbh Apparatus for optically determining the surface contour of flat workpieces in a wide belt abrading machine
DE102009050371B3 (de) * 2009-10-22 2011-04-21 Polytec Gmbh Verfahren und Vorrichtung zur spektrometrischen Vermessung eines sich in Längsrichtung bewegenden Materialstromes
US8812149B2 (en) 2011-02-24 2014-08-19 Mss, Inc. Sequential scanning of multiple wavelengths
JP6066192B2 (ja) * 2013-03-12 2017-01-25 株式会社荏原製作所 研磨パッドの表面性状測定装置
FR3008497B1 (fr) * 2013-07-10 2015-08-07 Univ Strasbourg Dispositif pour compenser la derive d'un dephasage d'un modulateur d'etat de polarisation d'un faisceau lumineux
CN111795657B (zh) * 2020-07-16 2022-02-15 南京大量数控科技有限公司 一种快速测量柔性板材平整度设备及方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB960596A (en) * 1959-09-28 1964-06-10 Licentia Gmbh An arrangement for the photo-electric observation of surfaces

Family Cites Families (6)

* Cited by examiner, † Cited by third party
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US549263A (en) * 1895-11-05 Samuel frank welch
US3023900A (en) * 1958-04-18 1962-03-06 Feldmuhle Papier Und Zellstoff Apparatus for detecting imperfections in sheet material
NL279098A (ja) * 1961-05-31
US3360659A (en) * 1964-04-23 1967-12-26 Outlook Engineering Corp Compensated optical scanning system
US3705755A (en) * 1970-08-24 1972-12-12 Stephen Charles Baer Microscopy apparatus
US3781078A (en) * 1971-12-20 1973-12-25 E Wildhaber Optical scanner with laser

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB960596A (en) * 1959-09-28 1964-06-10 Licentia Gmbh An arrangement for the photo-electric observation of surfaces

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199064A (en) * 1975-02-27 1976-09-01 Toshoshi Sato Hyomenkeijonadono kosokusokuteisochi
JPS553641B2 (ja) * 1975-02-27 1980-01-26
JPS51150361A (en) * 1975-06-19 1976-12-23 Oki Eng Kk Surface flatness measuring optical device
JPS5269853A (en) * 1975-12-09 1977-06-10 Yoshizaki Kozo Method and device for detecting curve of surface of body
JPS5310456A (en) * 1976-07-16 1978-01-30 Tanifuji Kikai Kougiyou Kk Road surface roughness inspector
JPS54164570U (ja) * 1978-05-11 1979-11-17
JPS55154402A (en) * 1979-05-21 1980-12-02 Anritsu Corp Shape measuring apparatus
JPS56155803A (en) * 1980-05-07 1981-12-02 Mitsubishi Electric Corp Shape detector
JPS5791403A (en) * 1980-10-04 1982-06-07 Gasuto Teodooru Optoelectronic measuring method of and apparatus for roughness of surface
JPH0153401B2 (ja) * 1980-10-04 1989-11-14 Gasuto Teodooru
JPS6364738B2 (ja) * 1981-02-04 1988-12-13
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS57207852A (en) * 1981-05-15 1982-12-20 Siemens Ag Method of detecting three-dimensional object
JPS59109905U (ja) * 1983-01-14 1984-07-24 ティーディーケイ株式会社 一次元センサによる二次元測定装置
JPH0120641Y2 (ja) * 1983-01-14 1989-06-21
JPS59161010U (ja) * 1983-04-14 1984-10-29 日本板硝子株式会社 平坦度測定装置
JPS63177046A (ja) * 1987-01-19 1988-07-21 Nagoya Denki Kogyo Kk 実装済プリント基板自動検査装置におけるフラツトパツケ−ジのリ−ド浮き検出方式
JPS63113949U (ja) * 1987-01-19 1988-07-22
JPS63113948U (ja) * 1987-01-19 1988-07-22
JPS63113947U (ja) * 1987-01-19 1988-07-22
JPS63177040A (ja) * 1987-01-19 1988-07-21 Nagoya Denki Kogyo Kk 実装済プリント基板自動検査装置
JPH0198949A (ja) * 1987-10-12 1989-04-17 Sumitomo Electric Ind Ltd 屈折角測定装置
JPH02114156A (ja) * 1988-10-25 1990-04-26 Matsushita Electric Ind Co Ltd 実装基板検査装置
JP2000505906A (ja) * 1996-12-24 2000-05-16 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 光学式検査装置及びこの検査装置が設けられているリソグラフィ装置
JP2006078457A (ja) * 2004-09-06 2006-03-23 Oputouea Kk 高さ測定を有する基板検査装置

Also Published As

Publication number Publication date
US3866038A (en) 1975-02-11
DE2256736A1 (de) 1974-06-06
GB1444566A (en) 1976-08-04
DE2256736B2 (de) 1978-05-24
FR2207268A1 (ja) 1974-06-14
DE2256736C3 (de) 1979-01-25
FR2207268B1 (ja) 1976-05-14

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