Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OKI ENG KK
OKI ENGINEERING KK
Original Assignee
OKI ENG KK
OKI ENGINEERING KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OKI ENG KK, OKI ENGINEERING KKfiledCriticalOKI ENG KK
Priority to JP7367275ApriorityCriticalpatent/JPS51150361A/en
Publication of JPS51150361ApublicationCriticalpatent/JPS51150361A/en
PURPOSE: An optical device, which is capable of performing an automatic measurement of overall surface flatness or coarseness of such test-piece objects as the semiconductor silicon wafers, magnetic disks for memory, and others without directly touching these objects.