JPH11284151A5 - - Google Patents

Info

Publication number
JPH11284151A5
JPH11284151A5 JP1998081068A JP8106898A JPH11284151A5 JP H11284151 A5 JPH11284151 A5 JP H11284151A5 JP 1998081068 A JP1998081068 A JP 1998081068A JP 8106898 A JP8106898 A JP 8106898A JP H11284151 A5 JPH11284151 A5 JP H11284151A5
Authority
JP
Japan
Prior art keywords
cell array
memory cell
memory cells
region
circuit elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998081068A
Other languages
English (en)
Japanese (ja)
Other versions
JP4427108B2 (ja
JPH11284151A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP08106898A priority Critical patent/JP4427108B2/ja
Priority claimed from JP08106898A external-priority patent/JP4427108B2/ja
Priority to US09/271,209 priority patent/US6501127B2/en
Publication of JPH11284151A publication Critical patent/JPH11284151A/ja
Publication of JPH11284151A5 publication Critical patent/JPH11284151A5/ja
Application granted granted Critical
Publication of JP4427108B2 publication Critical patent/JP4427108B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP08106898A 1998-03-27 1998-03-27 半導体装置及びその製造方法 Expired - Fee Related JP4427108B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP08106898A JP4427108B2 (ja) 1998-03-27 1998-03-27 半導体装置及びその製造方法
US09/271,209 US6501127B2 (en) 1998-03-27 1999-03-17 Semiconductor device including a nonvolatile memory-cell array, and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08106898A JP4427108B2 (ja) 1998-03-27 1998-03-27 半導体装置及びその製造方法

Publications (3)

Publication Number Publication Date
JPH11284151A JPH11284151A (ja) 1999-10-15
JPH11284151A5 true JPH11284151A5 (enExample) 2005-02-24
JP4427108B2 JP4427108B2 (ja) 2010-03-03

Family

ID=13736085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08106898A Expired - Fee Related JP4427108B2 (ja) 1998-03-27 1998-03-27 半導体装置及びその製造方法

Country Status (2)

Country Link
US (1) US6501127B2 (enExample)
JP (1) JP4427108B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000311992A (ja) * 1999-04-26 2000-11-07 Toshiba Corp 不揮発性半導体記憶装置およびその製造方法
JP2002057212A (ja) * 2000-08-09 2002-02-22 Mitsubishi Electric Corp 半導体装置、及び半導体装置の製造方法
JP2001267437A (ja) * 2000-03-22 2001-09-28 Sony Corp 不揮発性半導体記憶装置およびその製造方法
JP2003188286A (ja) * 2001-12-14 2003-07-04 Mitsubishi Electric Corp 半導体装置およびその製造方法
KR100549591B1 (ko) * 2003-11-05 2006-02-08 매그나칩 반도체 유한회사 비휘발성 메모리 소자 및 그의 제조 방법
TWI285410B (en) * 2006-01-27 2007-08-11 Ind Tech Res Inst Interlayer interconnect of three-dimensional memory and method for manufacturing the same
US7601998B2 (en) * 2006-09-14 2009-10-13 Samsung Electronics Co., Ltd. Semiconductor memory device having metallization comprising select lines, bit lines and word lines
JP2009021319A (ja) * 2007-07-11 2009-01-29 Panasonic Corp 不揮発性半導体記憶装置及びその製造方法
JP2008113017A (ja) * 2007-12-03 2008-05-15 Toshiba Corp 半導体装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145641A (ja) 1984-01-10 1985-08-01 Toshiba Corp 半導体集積回路装置
JP2504599B2 (ja) * 1990-02-23 1996-06-05 株式会社東芝 不揮発性半導体記憶装置
US5705415A (en) * 1994-10-04 1998-01-06 Motorola, Inc. Process for forming an electrically programmable read-only memory cell
US5814850A (en) * 1995-08-22 1998-09-29 Nippon Steel Corporation Semiconductor device including a capacitor responsible for a power supply voltage to semiconductor device and capable of blocking an increased voltage
JP3853406B2 (ja) 1995-10-27 2006-12-06 エルピーダメモリ株式会社 半導体集積回路装置及び当該装置の製造方法
JPH10135425A (ja) * 1996-11-05 1998-05-22 Hitachi Ltd 半導体集積回路装置およびその製造方法
JPH10189579A (ja) 1996-12-27 1998-07-21 Toshiba Corp 半導体装置の製造方法

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