JPH1124105A5 - - Google Patents

Info

Publication number
JPH1124105A5
JPH1124105A5 JP1997191775A JP19177597A JPH1124105A5 JP H1124105 A5 JPH1124105 A5 JP H1124105A5 JP 1997191775 A JP1997191775 A JP 1997191775A JP 19177597 A JP19177597 A JP 19177597A JP H1124105 A5 JPH1124105 A5 JP H1124105A5
Authority
JP
Japan
Prior art keywords
film
active element
active
electrode
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997191775A
Other languages
English (en)
Japanese (ja)
Other versions
JP4027465B2 (ja
JPH1124105A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP19177597A external-priority patent/JP4027465B2/ja
Priority to JP19177597A priority Critical patent/JP4027465B2/ja
Priority to TW087110257A priority patent/TW444265B/zh
Priority to US09/104,979 priority patent/US6087648A/en
Priority to KR1019980026345A priority patent/KR100530678B1/ko
Publication of JPH1124105A publication Critical patent/JPH1124105A/ja
Priority to US09/590,130 priority patent/US6274861B1/en
Priority to US09/908,794 priority patent/US6399933B2/en
Priority to US10/139,236 priority patent/US6784411B2/en
Priority to US10/861,365 priority patent/US7235814B2/en
Publication of JPH1124105A5 publication Critical patent/JPH1124105A5/ja
Priority to KR1020050061314A priority patent/KR100541787B1/ko
Priority to US11/812,528 priority patent/US7510917B2/en
Publication of JP4027465B2 publication Critical patent/JP4027465B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP19177597A 1997-07-01 1997-07-01 アクティブマトリクス型表示装置およびその製造方法 Expired - Lifetime JP4027465B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP19177597A JP4027465B2 (ja) 1997-07-01 1997-07-01 アクティブマトリクス型表示装置およびその製造方法
TW087110257A TW444265B (en) 1997-07-01 1998-06-25 Active matrix display device and method of manufacturing the same
US09/104,979 US6087648A (en) 1997-07-01 1998-06-26 Active matrix display device and method of manufacturing the same
KR1019980026345A KR100530678B1 (ko) 1997-07-01 1998-07-01 활성매트릭스 디스플레이장치와 그 제조방법
US09/590,130 US6274861B1 (en) 1997-07-01 2000-06-09 Active matrix display device having a common substrate and method of manufacturing the same
US09/908,794 US6399933B2 (en) 1997-07-01 2001-07-20 Active matrix display device and method of manufacturing the same
US10/139,236 US6784411B2 (en) 1997-07-01 2002-05-07 Display device with a pixel matrix and a sensor over same substrate
US10/861,365 US7235814B2 (en) 1997-07-01 2004-06-07 Active matrix display device and method of manufacturing the same
KR1020050061314A KR100541787B1 (ko) 1997-07-01 2005-07-07 활성 매트릭스 디스플레이 장치와 그 제조 방법
US11/812,528 US7510917B2 (en) 1997-07-01 2007-06-19 Active matrix display device and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19177597A JP4027465B2 (ja) 1997-07-01 1997-07-01 アクティブマトリクス型表示装置およびその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2004218591A Division JP4163156B2 (ja) 2004-07-27 2004-07-27 表示装置

Publications (3)

Publication Number Publication Date
JPH1124105A JPH1124105A (ja) 1999-01-29
JPH1124105A5 true JPH1124105A5 (enExample) 2005-05-26
JP4027465B2 JP4027465B2 (ja) 2007-12-26

Family

ID=16280335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19177597A Expired - Lifetime JP4027465B2 (ja) 1997-07-01 1997-07-01 アクティブマトリクス型表示装置およびその製造方法

Country Status (4)

Country Link
US (6) US6087648A (enExample)
JP (1) JP4027465B2 (enExample)
KR (2) KR100530678B1 (enExample)
TW (1) TW444265B (enExample)

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JP4044187B2 (ja) 1997-10-20 2008-02-06 株式会社半導体エネルギー研究所 アクティブマトリクス型表示装置およびその作製方法
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KR100952087B1 (ko) 2003-02-20 2010-04-13 램 리써치 코포레이션 패터닝된 기판의 메가소닉 세정을 위한 방법 및 장치

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