JPH10111200A - センサにおける膜応力を補償する回路および方法 - Google Patents

センサにおける膜応力を補償する回路および方法

Info

Publication number
JPH10111200A
JPH10111200A JP9279406A JP27940697A JPH10111200A JP H10111200 A JPH10111200 A JP H10111200A JP 9279406 A JP9279406 A JP 9279406A JP 27940697 A JP27940697 A JP 27940697A JP H10111200 A JPH10111200 A JP H10111200A
Authority
JP
Japan
Prior art keywords
sensor
detection signal
stress
converter
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9279406A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10111200A5 (enExample
Inventor
Ira E Baskett
イラ・イー・バスケット
Andrew C Mcneil
アンドリュー・シー・マックネイル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of JPH10111200A publication Critical patent/JPH10111200A/ja
Publication of JPH10111200A5 publication Critical patent/JPH10111200A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2275—Arrangements for correcting or for compensating unwanted effects for non linearity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Force In General (AREA)
JP9279406A 1996-09-30 1997-09-29 センサにおける膜応力を補償する回路および方法 Pending JPH10111200A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/722,384 US6308577B1 (en) 1996-09-30 1996-09-30 Circuit and method of compensating for membrane stress in a sensor
US722384 1996-09-30

Publications (2)

Publication Number Publication Date
JPH10111200A true JPH10111200A (ja) 1998-04-28
JPH10111200A5 JPH10111200A5 (enExample) 2005-06-16

Family

ID=24901612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9279406A Pending JPH10111200A (ja) 1996-09-30 1997-09-29 センサにおける膜応力を補償する回路および方法

Country Status (6)

Country Link
US (1) US6308577B1 (enExample)
EP (1) EP0833137A3 (enExample)
JP (1) JPH10111200A (enExample)
KR (1) KR19980025190A (enExample)
CN (1) CN1089161C (enExample)
TW (1) TW345748B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000340805A (ja) * 1999-04-19 2000-12-08 Motorola Inc 電子部品および製造方法
JP2005051687A (ja) * 2003-07-31 2005-02-24 Matsushita Electric Works Ltd 圧電型超音波センサ及びその共振周波数調節方法
JP2016508615A (ja) * 2013-02-28 2016-03-22 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 健全状態のリアルタイム監視および補償をする圧力センサ

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19957556A1 (de) * 1999-11-30 2001-05-31 Bosch Gmbh Robert Halbleiter-Drucksensor und Meßanordnung
JP2002310826A (ja) * 2001-02-08 2002-10-23 Tgk Co Ltd 圧力センサの調整方法
US7006938B2 (en) * 2004-06-16 2006-02-28 Ami Semiconductor, Inc. Reactive sensor modules using Pade' Approximant based compensation and providing module-sourced excitation
ATE470844T1 (de) * 2004-09-24 2010-06-15 Grundfos As Drucksensor
DE102005017853A1 (de) * 2005-04-18 2006-10-19 Siemens Ag Drucksensorvorrichtung
US8132465B1 (en) 2007-08-01 2012-03-13 Silicon Microstructures, Inc. Sensor element placement for package stress compensation
US10027078B2 (en) 2014-01-02 2018-07-17 Sears Brands, L.L.C. Slide battery and power tool for use with both slide and post batteries
DE102015104410B4 (de) * 2015-03-24 2018-09-13 Tdk-Micronas Gmbh Drucksensor
US10553843B2 (en) 2016-03-28 2020-02-04 Transform Sr Brands Llc Portable power tool, battery pack, and cell configurations for same
JP6663314B2 (ja) * 2016-07-08 2020-03-11 アズビル株式会社 圧力センサ
CN107192556B (zh) * 2017-05-12 2019-07-02 重庆交通大学 微型定容燃烧空间测试装置
CN114152369B (zh) * 2020-09-07 2024-10-08 中国科学院微电子研究所 一种mems压阻式压力传感器及压阻排布方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3663833A (en) 1970-04-02 1972-05-16 Monsanto Co Square root extractor for a process control system
US3743926A (en) * 1972-04-06 1973-07-03 Gen Electric Fine linearity control in integral silicon transducers
US3772628A (en) * 1972-05-30 1973-11-13 Gen Electric Integral silicon diaphragms for low pressure measurements
US4050313A (en) * 1975-06-04 1977-09-27 Hitachi, Ltd. Semiconductor pressure transducer
US4317126A (en) 1980-04-14 1982-02-23 Motorola, Inc. Silicon pressure sensor
US4476726A (en) * 1982-08-19 1984-10-16 Kulite Semiconductor Products, Inc. Pressure transducers exhibiting linear pressure operation
JPS59127876A (ja) * 1983-01-13 1984-07-23 Nec Corp ダイアフラム形半導体圧力センサ
JPS62204580A (ja) * 1986-03-05 1987-09-09 Fujikura Ltd 半導体圧力センサの直線性改善方法
US4800759A (en) 1987-08-31 1989-01-31 Yokogawa Electric Corporation Semiconductor pressure converter
JPH01109231A (ja) * 1987-10-22 1989-04-26 Komatsu Ltd 圧力センサ
JPH01253622A (ja) * 1988-04-01 1989-10-09 Kyowa Electron Instr Co Ltd ダイヤフラム型荷重変換器
JPH02150732A (ja) * 1988-12-01 1990-06-11 Fuji Electric Co Ltd 圧力変換器の補償回路
FR2650389B1 (fr) * 1989-07-27 1993-03-26 Sextant Avionique Dispositif de mesure de deformation d'une membrane
EP0454901B1 (de) * 1989-12-06 1994-06-22 Siemens-Albis Aktiengesellschaft Kraftwandler
DE4000326C2 (de) * 1990-01-08 1995-12-14 Mannesmann Ag Drucksensor
JPH03233334A (ja) * 1990-02-08 1991-10-17 Nec Corp 半導体圧力センサ
US5188983A (en) * 1990-04-11 1993-02-23 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers and method of producing the same
US5166892A (en) * 1990-04-30 1992-11-24 Yamato Scale Company, Limited Device for compensating for time-dependent error due to creep and like of measuring apparatus
US5291788A (en) * 1991-09-24 1994-03-08 Kabushiki Kaisha Toshiba Semiconductor pressure sensor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000340805A (ja) * 1999-04-19 2000-12-08 Motorola Inc 電子部品および製造方法
JP2005051687A (ja) * 2003-07-31 2005-02-24 Matsushita Electric Works Ltd 圧電型超音波センサ及びその共振周波数調節方法
JP2016508615A (ja) * 2013-02-28 2016-03-22 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 健全状態のリアルタイム監視および補償をする圧力センサ
KR20180110228A (ko) * 2013-02-28 2018-10-08 엠케이에스 인스트루먼츠, 인코포레이티드 실시간 건강 모니터링 및 보상 기능을 가진 압력 센서
US10458870B2 (en) 2013-02-28 2019-10-29 Mks Instruments, Inc. Pressure sensor with real time health monitoring and compensation

Also Published As

Publication number Publication date
TW345748B (en) 1998-11-21
CN1178900A (zh) 1998-04-15
EP0833137A3 (en) 1999-05-19
CN1089161C (zh) 2002-08-14
KR19980025190A (ko) 1998-07-06
EP0833137A2 (en) 1998-04-01
US6308577B1 (en) 2001-10-30

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