CN1089161C - 一种传感器及检测物理状态的方法 - Google Patents

一种传感器及检测物理状态的方法 Download PDF

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Publication number
CN1089161C
CN1089161C CN97117023A CN97117023A CN1089161C CN 1089161 C CN1089161 C CN 1089161C CN 97117023 A CN97117023 A CN 97117023A CN 97117023 A CN97117023 A CN 97117023A CN 1089161 C CN1089161 C CN 1089161C
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CN
China
Prior art keywords
transmitter
detection signal
physical state
sensor
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN97117023A
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English (en)
Chinese (zh)
Other versions
CN1178900A (zh
Inventor
艾拉·E·巴斯克特
安德鲁·C·麦克耐尔
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NXP USA Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of CN1178900A publication Critical patent/CN1178900A/zh
Application granted granted Critical
Publication of CN1089161C publication Critical patent/CN1089161C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2275—Arrangements for correcting or for compensating unwanted effects for non linearity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Force In General (AREA)
CN97117023A 1996-09-30 1997-09-26 一种传感器及检测物理状态的方法 Expired - Fee Related CN1089161C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/722,384 US6308577B1 (en) 1996-09-30 1996-09-30 Circuit and method of compensating for membrane stress in a sensor
US08/722,384 1996-09-30

Publications (2)

Publication Number Publication Date
CN1178900A CN1178900A (zh) 1998-04-15
CN1089161C true CN1089161C (zh) 2002-08-14

Family

ID=24901612

Family Applications (1)

Application Number Title Priority Date Filing Date
CN97117023A Expired - Fee Related CN1089161C (zh) 1996-09-30 1997-09-26 一种传感器及检测物理状态的方法

Country Status (6)

Country Link
US (1) US6308577B1 (enExample)
EP (1) EP0833137A3 (enExample)
JP (1) JPH10111200A (enExample)
KR (1) KR19980025190A (enExample)
CN (1) CN1089161C (enExample)
TW (1) TW345748B (enExample)

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* Cited by examiner, † Cited by third party
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US6056888A (en) * 1999-04-19 2000-05-02 Motorola, Inc. Electronic component and method of manufacture
DE19957556A1 (de) * 1999-11-30 2001-05-31 Bosch Gmbh Robert Halbleiter-Drucksensor und Meßanordnung
JP2002310826A (ja) * 2001-02-08 2002-10-23 Tgk Co Ltd 圧力センサの調整方法
JP4228827B2 (ja) * 2003-07-31 2009-02-25 パナソニック電工株式会社 圧電型超音波センサ及びその共振周波数調節方法
US7006938B2 (en) * 2004-06-16 2006-02-28 Ami Semiconductor, Inc. Reactive sensor modules using Pade' Approximant based compensation and providing module-sourced excitation
ATE470844T1 (de) * 2004-09-24 2010-06-15 Grundfos As Drucksensor
DE102005017853A1 (de) * 2005-04-18 2006-10-19 Siemens Ag Drucksensorvorrichtung
US8132465B1 (en) 2007-08-01 2012-03-13 Silicon Microstructures, Inc. Sensor element placement for package stress compensation
US9562820B2 (en) * 2013-02-28 2017-02-07 Mks Instruments, Inc. Pressure sensor with real time health monitoring and compensation
US10027078B2 (en) 2014-01-02 2018-07-17 Sears Brands, L.L.C. Slide battery and power tool for use with both slide and post batteries
DE102015104410B4 (de) * 2015-03-24 2018-09-13 Tdk-Micronas Gmbh Drucksensor
US10553843B2 (en) 2016-03-28 2020-02-04 Transform Sr Brands Llc Portable power tool, battery pack, and cell configurations for same
JP6663314B2 (ja) * 2016-07-08 2020-03-11 アズビル株式会社 圧力センサ
CN107192556B (zh) * 2017-05-12 2019-07-02 重庆交通大学 微型定容燃烧空间测试装置
CN114152369B (zh) * 2020-09-07 2024-10-08 中国科学院微电子研究所 一种mems压阻式压力传感器及压阻排布方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3663833A (en) 1970-04-02 1972-05-16 Monsanto Co Square root extractor for a process control system
US3743926A (en) * 1972-04-06 1973-07-03 Gen Electric Fine linearity control in integral silicon transducers
US3772628A (en) * 1972-05-30 1973-11-13 Gen Electric Integral silicon diaphragms for low pressure measurements
US4050313A (en) * 1975-06-04 1977-09-27 Hitachi, Ltd. Semiconductor pressure transducer
US4317126A (en) 1980-04-14 1982-02-23 Motorola, Inc. Silicon pressure sensor
US4476726A (en) * 1982-08-19 1984-10-16 Kulite Semiconductor Products, Inc. Pressure transducers exhibiting linear pressure operation
JPS59127876A (ja) * 1983-01-13 1984-07-23 Nec Corp ダイアフラム形半導体圧力センサ
JPS62204580A (ja) * 1986-03-05 1987-09-09 Fujikura Ltd 半導体圧力センサの直線性改善方法
US4800759A (en) 1987-08-31 1989-01-31 Yokogawa Electric Corporation Semiconductor pressure converter
JPH01109231A (ja) * 1987-10-22 1989-04-26 Komatsu Ltd 圧力センサ
JPH01253622A (ja) * 1988-04-01 1989-10-09 Kyowa Electron Instr Co Ltd ダイヤフラム型荷重変換器
JPH02150732A (ja) * 1988-12-01 1990-06-11 Fuji Electric Co Ltd 圧力変換器の補償回路
FR2650389B1 (fr) * 1989-07-27 1993-03-26 Sextant Avionique Dispositif de mesure de deformation d'une membrane
EP0454901B1 (de) * 1989-12-06 1994-06-22 Siemens-Albis Aktiengesellschaft Kraftwandler
DE4000326C2 (de) * 1990-01-08 1995-12-14 Mannesmann Ag Drucksensor
JPH03233334A (ja) * 1990-02-08 1991-10-17 Nec Corp 半導体圧力センサ
US5188983A (en) * 1990-04-11 1993-02-23 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers and method of producing the same
US5166892A (en) * 1990-04-30 1992-11-24 Yamato Scale Company, Limited Device for compensating for time-dependent error due to creep and like of measuring apparatus
US5291788A (en) * 1991-09-24 1994-03-08 Kabushiki Kaisha Toshiba Semiconductor pressure sensor

Also Published As

Publication number Publication date
TW345748B (en) 1998-11-21
CN1178900A (zh) 1998-04-15
EP0833137A3 (en) 1999-05-19
JPH10111200A (ja) 1998-04-28
KR19980025190A (ko) 1998-07-06
EP0833137A2 (en) 1998-04-01
US6308577B1 (en) 2001-10-30

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SE01 Entry into force of request for substantive examination
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Owner name: FREESCALE SEMICONDUCTOR INC.

Free format text: FORMER OWNER: MOTOROLA, INC.

Effective date: 20041203

C41 Transfer of patent application or patent right or utility model
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Effective date of registration: 20041203

Address after: texas

Patentee after: Fisical Semiconductor Inc.

Address before: Illinois

Patentee before: Motorola Inc.

C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20020814

Termination date: 20120926