TW345748B - Circuit and method of compensating for membrane stress in a sensor - Google Patents
Circuit and method of compensating for membrane stress in a sensorInfo
- Publication number
- TW345748B TW345748B TW086113199A TW86113199A TW345748B TW 345748 B TW345748 B TW 345748B TW 086113199 A TW086113199 A TW 086113199A TW 86113199 A TW86113199 A TW 86113199A TW 345748 B TW345748 B TW 345748B
- Authority
- TW
- Taiwan
- Prior art keywords
- sensor
- compensating
- circuit
- membrane stress
- sense
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2268—Arrangements for correcting or for compensating unwanted effects
- G01L1/2275—Arrangements for correcting or for compensating unwanted effects for non linearity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
- Measurement Of Force In General (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/722,384 US6308577B1 (en) | 1996-09-30 | 1996-09-30 | Circuit and method of compensating for membrane stress in a sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
TW345748B true TW345748B (en) | 1998-11-21 |
Family
ID=24901612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086113199A TW345748B (en) | 1996-09-30 | 1997-09-11 | Circuit and method of compensating for membrane stress in a sensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US6308577B1 (zh) |
EP (1) | EP0833137A3 (zh) |
JP (1) | JPH10111200A (zh) |
KR (1) | KR19980025190A (zh) |
CN (1) | CN1089161C (zh) |
TW (1) | TW345748B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI651522B (zh) * | 2013-02-28 | 2019-02-21 | Mks公司 | 具有即時健康監測及補償的壓力感測器 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6056888A (en) * | 1999-04-19 | 2000-05-02 | Motorola, Inc. | Electronic component and method of manufacture |
DE19957556A1 (de) * | 1999-11-30 | 2001-05-31 | Bosch Gmbh Robert | Halbleiter-Drucksensor und Meßanordnung |
JP2002310826A (ja) * | 2001-02-08 | 2002-10-23 | Tgk Co Ltd | 圧力センサの調整方法 |
JP4228827B2 (ja) * | 2003-07-31 | 2009-02-25 | パナソニック電工株式会社 | 圧電型超音波センサ及びその共振周波数調節方法 |
US7006938B2 (en) * | 2004-06-16 | 2006-02-28 | Ami Semiconductor, Inc. | Reactive sensor modules using Pade' Approximant based compensation and providing module-sourced excitation |
DE502004011268D1 (de) * | 2004-09-24 | 2010-07-22 | Grundfos As | Drucksensor |
DE102005017853A1 (de) * | 2005-04-18 | 2006-10-19 | Siemens Ag | Drucksensorvorrichtung |
US8132465B1 (en) | 2007-08-01 | 2012-03-13 | Silicon Microstructures, Inc. | Sensor element placement for package stress compensation |
US10027078B2 (en) | 2014-01-02 | 2018-07-17 | Sears Brands, L.L.C. | Slide battery and power tool for use with both slide and post batteries |
DE102015104410B4 (de) * | 2015-03-24 | 2018-09-13 | Tdk-Micronas Gmbh | Drucksensor |
US10553843B2 (en) | 2016-03-28 | 2020-02-04 | Transform Sr Brands Llc | Portable power tool, battery pack, and cell configurations for same |
JP6663314B2 (ja) * | 2016-07-08 | 2020-03-11 | アズビル株式会社 | 圧力センサ |
CN107192556B (zh) * | 2017-05-12 | 2019-07-02 | 重庆交通大学 | 微型定容燃烧空间测试装置 |
CN114152369A (zh) * | 2020-09-07 | 2022-03-08 | 中国科学院微电子研究所 | 一种mems压阻式压力传感器及压阻排布方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3663833A (en) | 1970-04-02 | 1972-05-16 | Monsanto Co | Square root extractor for a process control system |
US3743926A (en) * | 1972-04-06 | 1973-07-03 | Gen Electric | Fine linearity control in integral silicon transducers |
US3772628A (en) * | 1972-05-30 | 1973-11-13 | Gen Electric | Integral silicon diaphragms for low pressure measurements |
US4050313A (en) * | 1975-06-04 | 1977-09-27 | Hitachi, Ltd. | Semiconductor pressure transducer |
US4317126A (en) | 1980-04-14 | 1982-02-23 | Motorola, Inc. | Silicon pressure sensor |
US4476726A (en) * | 1982-08-19 | 1984-10-16 | Kulite Semiconductor Products, Inc. | Pressure transducers exhibiting linear pressure operation |
JPS59127876A (ja) * | 1983-01-13 | 1984-07-23 | Nec Corp | ダイアフラム形半導体圧力センサ |
JPS62204580A (ja) * | 1986-03-05 | 1987-09-09 | Fujikura Ltd | 半導体圧力センサの直線性改善方法 |
US4800759A (en) | 1987-08-31 | 1989-01-31 | Yokogawa Electric Corporation | Semiconductor pressure converter |
JPH01109231A (ja) * | 1987-10-22 | 1989-04-26 | Komatsu Ltd | 圧力センサ |
JPH01253622A (ja) * | 1988-04-01 | 1989-10-09 | Kyowa Electron Instr Co Ltd | ダイヤフラム型荷重変換器 |
JPH02150732A (ja) * | 1988-12-01 | 1990-06-11 | Fuji Electric Co Ltd | 圧力変換器の補償回路 |
FR2650389B1 (fr) * | 1989-07-27 | 1993-03-26 | Sextant Avionique | Dispositif de mesure de deformation d'une membrane |
ATE107770T1 (de) * | 1989-12-06 | 1994-07-15 | Siemens Ag Albis | Kraftwandler. |
DE4000326C2 (de) * | 1990-01-08 | 1995-12-14 | Mannesmann Ag | Drucksensor |
JPH03233334A (ja) * | 1990-02-08 | 1991-10-17 | Nec Corp | 半導体圧力センサ |
US5188983A (en) * | 1990-04-11 | 1993-02-23 | Wisconsin Alumni Research Foundation | Polysilicon resonating beam transducers and method of producing the same |
US5166892A (en) * | 1990-04-30 | 1992-11-24 | Yamato Scale Company, Limited | Device for compensating for time-dependent error due to creep and like of measuring apparatus |
US5291788A (en) * | 1991-09-24 | 1994-03-08 | Kabushiki Kaisha Toshiba | Semiconductor pressure sensor |
-
1996
- 1996-09-30 US US08/722,384 patent/US6308577B1/en not_active Expired - Fee Related
-
1997
- 1997-09-11 TW TW086113199A patent/TW345748B/zh not_active IP Right Cessation
- 1997-09-26 CN CN97117023A patent/CN1089161C/zh not_active Expired - Fee Related
- 1997-09-29 JP JP9279406A patent/JPH10111200A/ja active Pending
- 1997-09-29 EP EP97116849A patent/EP0833137A3/en not_active Ceased
- 1997-09-30 KR KR1019970051242A patent/KR19980025190A/ko not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI651522B (zh) * | 2013-02-28 | 2019-02-21 | Mks公司 | 具有即時健康監測及補償的壓力感測器 |
US10458870B2 (en) | 2013-02-28 | 2019-10-29 | Mks Instruments, Inc. | Pressure sensor with real time health monitoring and compensation |
Also Published As
Publication number | Publication date |
---|---|
EP0833137A3 (en) | 1999-05-19 |
US6308577B1 (en) | 2001-10-30 |
KR19980025190A (ko) | 1998-07-06 |
JPH10111200A (ja) | 1998-04-28 |
CN1178900A (zh) | 1998-04-15 |
EP0833137A2 (en) | 1998-04-01 |
CN1089161C (zh) | 2002-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |