JPH09321037A5 - - Google Patents

Info

Publication number
JPH09321037A5
JPH09321037A5 JP1996359883A JP35988396A JPH09321037A5 JP H09321037 A5 JPH09321037 A5 JP H09321037A5 JP 1996359883 A JP1996359883 A JP 1996359883A JP 35988396 A JP35988396 A JP 35988396A JP H09321037 A5 JPH09321037 A5 JP H09321037A5
Authority
JP
Japan
Prior art keywords
fluid conduit
chamber
electrode
electrodes
pfc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996359883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09321037A (ja
JP3992315B2 (ja
Filing date
Publication date
Priority claimed from US08/741,272 external-priority patent/US6187072B1/en
Application filed filed Critical
Publication of JPH09321037A publication Critical patent/JPH09321037A/ja
Publication of JPH09321037A5 publication Critical patent/JPH09321037A5/ja
Application granted granted Critical
Publication of JP3992315B2 publication Critical patent/JP3992315B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP35988396A 1995-12-27 1996-12-26 基板処理装置排出物からパーフルオロ化合物ガスを低減する装置 Expired - Fee Related JP3992315B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US57937595A 1995-12-27 1995-12-27
US08/741,272 US6187072B1 (en) 1995-09-25 1996-10-30 Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
US08/579375 1996-10-30
US08/741272 1996-10-30

Publications (3)

Publication Number Publication Date
JPH09321037A JPH09321037A (ja) 1997-12-12
JPH09321037A5 true JPH09321037A5 (enExample) 2006-11-30
JP3992315B2 JP3992315B2 (ja) 2007-10-17

Family

ID=27077737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35988396A Expired - Fee Related JP3992315B2 (ja) 1995-12-27 1996-12-26 基板処理装置排出物からパーフルオロ化合物ガスを低減する装置

Country Status (5)

Country Link
US (2) US6187072B1 (enExample)
EP (2) EP0781599B1 (enExample)
JP (1) JP3992315B2 (enExample)
KR (1) KR100271694B1 (enExample)
DE (2) DE69623583T2 (enExample)

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