JPH0862308A - 半導体試験装置の測定信号のタイミング校正方法及びその回路 - Google Patents

半導体試験装置の測定信号のタイミング校正方法及びその回路

Info

Publication number
JPH0862308A
JPH0862308A JP6220971A JP22097194A JPH0862308A JP H0862308 A JPH0862308 A JP H0862308A JP 6220971 A JP6220971 A JP 6220971A JP 22097194 A JP22097194 A JP 22097194A JP H0862308 A JPH0862308 A JP H0862308A
Authority
JP
Japan
Prior art keywords
point
driver
calibration
measurement
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6220971A
Other languages
English (en)
Japanese (ja)
Inventor
Shinichiro Kuroe
真一郎 黒江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP6220971A priority Critical patent/JPH0862308A/ja
Priority to TW084108057A priority patent/TW284850B/zh
Priority to KR1019950025404A priority patent/KR0184041B1/ko
Priority to US08/518,039 priority patent/US5703489A/en
Publication of JPH0862308A publication Critical patent/JPH0862308A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuits
    • G01R31/31903Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31908Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns
    • G01R31/3191Calibration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
JP6220971A 1994-08-22 1994-08-22 半導体試験装置の測定信号のタイミング校正方法及びその回路 Pending JPH0862308A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6220971A JPH0862308A (ja) 1994-08-22 1994-08-22 半導体試験装置の測定信号のタイミング校正方法及びその回路
TW084108057A TW284850B (ko) 1994-08-22 1995-08-02
KR1019950025404A KR0184041B1 (ko) 1994-08-22 1995-08-18 반도체 시험장치의 측정 신호의 타이밍 교정 방법 및 그 회로
US08/518,039 US5703489A (en) 1994-08-22 1995-08-22 Timing calibration circuit and method for test signals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6220971A JPH0862308A (ja) 1994-08-22 1994-08-22 半導体試験装置の測定信号のタイミング校正方法及びその回路

Publications (1)

Publication Number Publication Date
JPH0862308A true JPH0862308A (ja) 1996-03-08

Family

ID=16759438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6220971A Pending JPH0862308A (ja) 1994-08-22 1994-08-22 半導体試験装置の測定信号のタイミング校正方法及びその回路

Country Status (4)

Country Link
US (1) US5703489A (ko)
JP (1) JPH0862308A (ko)
KR (1) KR0184041B1 (ko)
TW (1) TW284850B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020010545A (ko) * 2000-07-27 2002-02-04 오우라 히로시 타이밍 교정방법 및 타이밍 교정기능을 가진 반도체 디바이스 시험장치

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10170603A (ja) * 1996-12-13 1998-06-26 Ando Electric Co Ltd Icテスタのキャリブレーション方法
US6810358B1 (en) * 1998-03-24 2004-10-26 Exergetic Systems Llc Method to synchronize data when used for input/loss performance monitoring of a power plant
JP3616247B2 (ja) * 1998-04-03 2005-02-02 株式会社アドバンテスト Ic試験装置におけるスキュー調整方法及びこれに用いる疑似デバイス
DE19922907B4 (de) * 1998-05-19 2006-08-10 Advantest Corp. Kalibrierverfahren zum Kalibrieren einer Ausgabezeit eines Prüfsignals, Kalibrierverfahren zum Kalibrieren einer Zeitverschiebung und Halbleiterprüfeinrichtung
US6417682B1 (en) * 1998-05-19 2002-07-09 Advantest Corporation Semiconductor device testing apparatus and its calibration method
US6032107A (en) * 1998-05-19 2000-02-29 Micron Technology, Inc. Calibrating test equipment
JP4272726B2 (ja) * 1998-10-08 2009-06-03 株式会社アドバンテスト Ic試験方法及び装置
US6327546B1 (en) * 1998-12-14 2001-12-04 Adac Laboratories Method and apparatus for independently calibrating event detectors
JP4138163B2 (ja) * 1999-07-07 2008-08-20 株式会社ルネサステクノロジ Lsi試験装置およびそのタイミングキャリブレーション方法
US6448799B1 (en) * 1999-09-30 2002-09-10 Hitachi Electronics Engineering Co., Ltd. Timing adjustment method and apparatus for semiconductor IC tester
US6643787B1 (en) * 1999-10-19 2003-11-04 Rambus Inc. Bus system optimization
US6369636B1 (en) * 1999-12-21 2002-04-09 Cypress Semiconductor Corp. Method, architecture and circuit for selecting, calibrating and monitoring circuits
US6609077B1 (en) 2000-05-31 2003-08-19 Teradyne, Inc. ATE timing measurement unit and method
JPWO2002068976A1 (ja) * 2001-02-27 2004-07-02 株式会社アドバンテスト 伝播遅延時間測定方法及び試験装置
TW557527B (en) * 2001-03-26 2003-10-11 Schlumberger Technologies Inc Method and apparatus for calibration of integrated circuit tester timing
DE10121291B4 (de) * 2001-04-27 2006-09-28 Infineon Technologies Ag Verfahren zum Kalibrieren einer Testvorrichtung zum parallelen Testen einer Mehrzahl von elektronischen Bauteilen
DE10131712B4 (de) * 2001-06-29 2009-04-09 Qimonda Ag Elektronisches Bauelement, Testereinrichtung und Verfahren zur Kalibrierung einer Testereinrichtung
WO2003062843A1 (fr) * 2002-01-18 2003-07-31 Advantest Corporation Testeur
US6839301B2 (en) * 2003-04-28 2005-01-04 Micron Technology, Inc. Method and apparatus for improving stability and lock time for synchronous circuits
US6967485B1 (en) * 2003-06-27 2005-11-22 Rae Systems, Inc. Automatic drive adjustment of ultraviolet lamps in photo-ionization detectors
US7248058B2 (en) * 2003-10-17 2007-07-24 Clarridge Ronald P Testing and calibration device with diagnostics
US9244111B2 (en) * 2003-10-17 2016-01-26 Ronald P. Clarridge Amperage/voltage loop calibrator with loop diagnostics
US7009382B1 (en) * 2003-12-04 2006-03-07 Credence Systems Corporation System and method for test socket calibration
US7079973B2 (en) * 2004-04-06 2006-07-18 Avago Technologies General Ip Pte. Ltd. Apparatus and method for compensating clock period elongation during scan testing in an integrated circuit (IC)
US7516379B2 (en) * 2004-04-06 2009-04-07 Avago Technologies General Ip (Singapore) Pte. Ltd. Circuit and method for comparing circuit performance between functional and AC scan testing in an integrated circuit (IC)
US7078950B2 (en) * 2004-07-20 2006-07-18 Micron Technology, Inc. Delay-locked loop with feedback compensation
BRPI0516496A (pt) * 2004-10-15 2008-09-09 Trico Products Corp Of Tenness sistema de detecção de objeto com autocalibração
US7281181B2 (en) * 2005-06-27 2007-10-09 Verigy (Singapore) Pte. Ltd. Systems, methods and computer programs for calibrating an automated circuit test system
US7865660B2 (en) * 2007-04-16 2011-01-04 Montage Technology Group Ltd. Calibration of read/write memory access via advanced memory buffer
JP5429727B2 (ja) * 2007-08-24 2014-02-26 ワイアイケー株式会社 半導体試験装置
US8692538B2 (en) * 2011-06-09 2014-04-08 Teradyne, Inc. Test equipment calibration
KR101348425B1 (ko) * 2013-05-14 2014-01-10 주식회사 아이티엔티 자동 테스트 장비의 타이밍 보정 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4829236A (en) * 1987-10-30 1989-05-09 Teradyne, Inc. Digital-to-analog calibration system
GB9120004D0 (en) * 1991-09-19 1991-11-06 Ampy Automation Digilog Improvements relating to the calibration of power meters
US5471145A (en) * 1994-04-07 1995-11-28 Texas Instruments Incorporated Calibrating transition dependent timing errors in automatic test equipment using a precise pulse width generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020010545A (ko) * 2000-07-27 2002-02-04 오우라 히로시 타이밍 교정방법 및 타이밍 교정기능을 가진 반도체 디바이스 시험장치

Also Published As

Publication number Publication date
KR0184041B1 (ko) 1999-04-15
US5703489A (en) 1997-12-30
TW284850B (ko) 1996-09-01
KR960008338A (ko) 1996-03-22

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