JP6882503B2 - 高ブレークダウン電圧の窒化ガリウム系高電子移動度トランジスタおよびその形成方法 - Google Patents
高ブレークダウン電圧の窒化ガリウム系高電子移動度トランジスタおよびその形成方法 Download PDFInfo
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- 229910002601 GaN Inorganic materials 0.000 title claims description 91
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims description 86
- 238000000034 method Methods 0.000 title claims description 38
- 230000015556 catabolic process Effects 0.000 title description 28
- 230000015572 biosynthetic process Effects 0.000 title description 6
- 230000004888 barrier function Effects 0.000 claims description 99
- 239000000463 material Substances 0.000 claims description 43
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 41
- 230000006911 nucleation Effects 0.000 claims description 25
- 238000010899 nucleation Methods 0.000 claims description 24
- 239000004047 hole gas Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 238000003780 insertion Methods 0.000 claims description 15
- 230000037431 insertion Effects 0.000 claims description 15
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 10
- 229910052733 gallium Inorganic materials 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 9
- 238000009616 inductively coupled plasma Methods 0.000 claims description 6
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 223
- 230000010287 polarization Effects 0.000 description 9
- 230000005533 two-dimensional electron gas Effects 0.000 description 9
- 150000004767 nitrides Chemical class 0.000 description 8
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical group [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000002269 spontaneous effect Effects 0.000 description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- YQNQTEBHHUSESQ-UHFFFAOYSA-N lithium aluminate Chemical compound [Li+].[O-][Al]=O YQNQTEBHHUSESQ-UHFFFAOYSA-N 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005516 deep trap Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
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Description
図1は、本発明の特定の一実施形態に係る高ブレークダウン電圧を有する窒化ガリウム系高電子移動度トランジスタの形成方法を概略的に示すフローチャートである(図1参照)。
Claims (3)
- 基板を用意することと、
前記基板上に窒化ガリウムチャネル層、前記窒化ガリウムチャネル層上に第1バリア層を順次形成することと、
前記第1バリア層の表面上に二次元正孔ガスを生成するための第2バリア層を形成することと、
第2バリア層をエッチングして第1バリア層の表面の一部を露出させることと、
ゲートがソースと第2バリア層との間に位置し、かつ、前記ゲートの一側壁が前記第2バリア層の側壁に接続されるように、前記第1バリア層の表面上にソース、ドレインおよびゲートをそれぞれ形成することと、
を含み、
前記第2バリア層は、前記第1バリア層の表面上の第1サブ層、前記第1サブ層の表面上の第2サブ層、および前記第2サブ層の表面上の第3サブ層を含み、前記第1サブ層と第2サブ層がヘテロ接合を構成し、前記第3サブ層はp型ドープ層であり、
前記第1サブ層の材料は窒化アルミニウムであり、
前記第2サブ層の材料は窒化ガリウムであり、
前記第3サブ層の材料はp型窒化ガリウムであり、
前記第2バリア層は、窒化アルミニウムの前記第1サブ層、窒化ガリウムの前記第2サブ層、およびp型窒化ガリウムの前記第3サブ層を誘導結合プラズマエッチングプロセスによってエッチングされてなり、
前記誘導結合プラズマエッチングプロセスの後、ソース、ゲート、ドレインを別々に作製し、電極金属としてTi層とAl層の複合層を電子ビームで堆積し、この電子ビームによる堆積において、Ti層の厚さは20nm、Al層の厚さは200nmとし、窒素雰囲気中でアニール処理を行い、温度は850℃であり、時間は30秒であり、
前記ゲートは、前記第1サブ層、前記第2サブ層、及び前記第3サブ層の全層の一側壁に、隙間を挟むことなく接続される
ことを特徴とする窒化ガリウム系高電子移動度トランジスタの形成方法。 - 前記基板と前記窒化ガリウムチャネル層との間に、核生成層および前記核生成層の表面上のバッファ層を形成することと、
前記窒化ガリウムチャネル層と前記第1バリア層との間に挿入層を形成することと、
をさらに含むことを特徴とする請求項1に記載の窒化ガリウム系高電子移動度トランジスタの形成方法。 - 前記核生成層の材料は窒化ガリウム、窒化アルミニウムまたは窒化アルミニウムガリウムであり、
前記バッファ層の材料は窒化ガリウムであり、
前記挿入層の材料は窒化アルミニウムであり、
前記第1バリア層の材料は窒化アルミニウムガリウムまたは窒化アルミニウムインジウムである、
ことを特徴とする請求項2に記載の窒化ガリウム系高電子移動度トランジスタの形成方法。
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CN201710122935.0A CN106876443A (zh) | 2017-03-03 | 2017-03-03 | 高击穿电压的氮化镓高电子迁移率晶体管及其形成方法 |
PCT/CN2017/090232 WO2018157523A1 (zh) | 2017-03-03 | 2017-06-27 | 高击穿电压的氮化镓高电子迁移率晶体管及其形成方法 |
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CN106876443A (zh) * | 2017-03-03 | 2017-06-20 | 上海新傲科技股份有限公司 | 高击穿电压的氮化镓高电子迁移率晶体管及其形成方法 |
CN108878509B (zh) * | 2018-08-02 | 2024-02-23 | 杭州士兰集成电路有限公司 | 氮化镓晶体管及其制造方法 |
CN111640671B (zh) * | 2020-06-03 | 2023-04-18 | 上海新傲科技股份有限公司 | 氮化镓基高电子迁移率晶体管及其制备方法 |
CN113990948A (zh) * | 2020-12-01 | 2022-01-28 | 深圳市晶相技术有限公司 | 一种半导体器件及其应用与制造方法 |
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