JP6814116B2 - 半導体装置の製造方法および半導体製造装置 - Google Patents
半導体装置の製造方法および半導体製造装置 Download PDFInfo
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- H01J37/32—Gas-filled discharge tubes
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/167—Coating processes; Apparatus therefor from the gas phase, by plasma deposition
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
- G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H01J37/32—Gas-filled discharge tubes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31058—After-treatment of organic layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
Description
図1および図2は、第1実施形態の半導体装置の製造方法を示す断面図である。
以上の説明では、有機膜5の例はフォトレジスト膜、金属ガスの例はTMAガス、プラズマ放電条件の例は50℃、5分間となっている。この場合、実験によれば、有機膜5の金属含有率は32%となった。プラズマ放電条件を100℃、5分間に変更したところ、有機膜5の金属含有率は36%となった。また、プラズマ放電条件を50℃、2分間に変更したところ、有機膜5の金属含有率は30%となった。このように、本実施形態によれば、好適な金属含有率を有する有機膜5が得られることが判明した。
図5から図7は、第2実施形態の半導体製造装置の動作を示す断面図である。
図8から図10は、第3実施形態の半導体製造装置の動作を示す断面図である。
本実施形態による半導体装置の製造方法は、基板上に第1膜を形成し、第1膜を有する基板をチャンバ内に収容し、チャンバ内に第1ガスを導入し、チャンバ内で第1ガスのプラズマ放電を発生させ、または、チャンバ内で第1ガスに放射線を照射し、プラズマ放電の発生開始後または放射線の照射開始後に、金属成分を含有する第2ガスをチャンバ内に導入して、金属成分を第1膜内に浸透させることを含む。
3:第1下地層、4:第2下地層、5:有機膜、5a:有機膜パターン、
6:樹脂膜、6a:樹脂膜パターン、7:有機膜、7a:有機膜パターン、
11:チャンバ、11a:第1部分、11b:第2部分、12:ステージ、
13:加熱部、14:プラズマ源、15:第1ガス導入部、16:第2ガス導入部、
17:水蒸気導入部、18:排気部、19:制御部、
21:チャンバ、21a:第1部分、21b:第2部分、22:ステージ、
23:加熱部、24:放射線源、25:第1ガス導入部、26:第2ガス導入部、
27:水蒸気導入部、28:排気部、29:制御部
Claims (6)
- 基板上に第1膜を形成し、
前記第1膜を有する前記基板をチャンバ内に収容し、
前記チャンバ内に第1ガスを導入し、
前記チャンバ内で前記第1ガスのプラズマ放電を発生させ、または、前記チャンバ内で前記第1ガスに放射線を照射することで、前記第1膜に到達する前に失活する生成物を前記第1ガスから生成し、
前記プラズマ放電の発生開始後または前記放射線の照射開始後に、金属成分を含有する第2ガスを前記チャンバ内に導入し、前記生成物により前記金属成分の少なくとも一部を活性化し、前記金属成分を前記第1膜内に浸透させ、
前記金属成分を前記第1膜内に浸透させた後、前記チャンバ内に水蒸気を導入し、
前記第1膜内に浸透した前記金属成分を前記水蒸気により酸化させる、
ことを含む半導体装置の製造方法。 - 前記基板は、前記第1膜に第1パターンが形成された後に前記チャンバ内に収容され、
前記金属成分は、前記第1パターン内に浸透する、
請求項1に記載の半導体装置の製造方法。 - 前記第1ガスは、前記基板を支持するステージから第1距離に位置する第1ガス導入部から前記チャンバ内に導入され、
前記第2ガスは、前記ステージから前記第1距離よりも近い第2距離に位置する第2ガス導入部から前記チャンバ内に導入される、
請求項1または2に記載の半導体装置の製造方法。 - 前記第1距離は、前記第1ガスからの生成物が前記第1膜に到達する前に失活する距離である、請求項3に記載の半導体装置の製造方法。
- 第1膜を有する基板を収容するチャンバと、
前記チャンバ内に第1ガスを導入する第1ガス導入部と、
前記チャンバ内で前記第1ガスのプラズマ放電を発生させる、または、前記チャンバ内で前記第1ガスに放射線を照射することで、前記第1膜に到達する前に失活する生成物を前記第1ガスから生成するガス処理部と、
金属成分を含有する第2ガスを前記チャンバ内に導入し、前記生成物により前記金属成分の少なくとも一部を活性化し、前記金属成分を前記第1膜内に浸透させる第2ガス導入部と、
前記第1膜内に浸透した前記金属成分を酸化させる水蒸気を前記チャンバ内に導入する水蒸気導入部と、
を備える半導体製造装置。 - 前記第1ガス導入部は、前記基板を支持するステージから第1距離に位置し、
前記第2ガス導入部は、前記ステージから前記第1距離よりも近い第2距離に位置している、請求項5に記載の半導体製造装置。
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US15/891,400 US10395899B2 (en) | 2017-09-13 | 2018-02-08 | Method of manufacturing semiconductor device and semiconductor manufacturing apparatus |
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JP2020150175A (ja) * | 2019-03-14 | 2020-09-17 | キオクシア株式会社 | 半導体装置の製造方法、パターン膜の製造方法および金属含有有機膜 |
JP7242463B2 (ja) * | 2019-07-26 | 2023-03-20 | 株式会社アルバック | 半導体装置の製造方法 |
JP2021150404A (ja) | 2020-03-17 | 2021-09-27 | キオクシア株式会社 | パターン形成方法および半導体装置の製造方法 |
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JP2012204456A (ja) | 2011-03-24 | 2012-10-22 | Toshiba Corp | 半導体装置の製造方法 |
US9134909B2 (en) * | 2011-08-30 | 2015-09-15 | International Business Machines Corporation | Multiple I/O request processing in a storage system |
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