JP6626083B2 - 高効率熱経路を有する積層半導体ダイアセンブリおよび関連システム - Google Patents
高効率熱経路を有する積層半導体ダイアセンブリおよび関連システム Download PDFInfo
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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Description
Claims (33)
- パッケージ支持基板と、
周辺領域と積層領域とを有する、第一の半導体ダイと、
前記周辺領域が第二の半導体ダイの側方向にあるように、前記第一の半導体ダイの前記積層領域に取り付けられる、第二の半導体ダイと、
前記第一の半導体ダイの前記周辺領域に取り付けられる第一部分と、接着剤によって前記第一部分に取り付けられた第二部分と、前記第一および第二部分によって画定される空洞と、を有する熱伝達ユニットであって、前記第二の半導体ダイが間隙によって前記第一部分から離隔されるように、前記第二の半導体ダイは前記空洞内にある、熱伝達ユニットと、
前記空洞内のアンダーフィル材料であって、前記熱伝達ユニットの前記第一部分と、前記第二の半導体ダイとの間の前記間隙の少なくとも下方領域を充填するフィレットを有する、アンダーフィル材料と、
を含む、
半導体ダイアセンブリ。 - 前記第一の半導体ダイの前記積層領域に取り付けられる前記第二の半導体ダイは、底部の第二の半導体ダイを含み、前記半導体ダイアセンブリは、前記熱伝達ユニットに取り付けられた最上部の第二の半導体ダイを含む、前記底部の第二の半導体ダイの上に積層された複数のさらなる第二の半導体ダイをさらに含む、
請求項1に記載の半導体ダイアセンブリ。 - 前記熱伝達ユニットは、前記第一の半導体ダイの前記周辺領域に取り付けられた側壁と、前記最上部の第二の半導体ダイに取り付けられた上部と、を有する内部ケーシングと、前記内部ケーシングを包囲する外部ケーシングを含む、
請求項2に記載の半導体ダイアセンブリ。 - 前記熱伝達ユニットは、側壁と、上部と、を有するケーシングを含み、前記側壁は、前記第一の半導体ダイの前記周辺領域に取り付けられ、前記上部は、熱界面材料によって前
記最上部の第二の半導体ダイに取り付けられる、
請求項2に記載の半導体ダイアセンブリ。 - 前記側壁は、前記パッケージ支持基板に取り付けられた基盤と、前記第一の半導体ダイの前記周辺領域に取り付けられたショルダと、を有し、前記ショルダは、熱界面材料によって、前記周辺領域に取り付けられる、
請求項4に記載の半導体ダイアセンブリ。 - 前記熱伝達ユニットは、側壁と上部とを有するケーシングを含み、前記側壁は、4つの側面パネルを有し、前記上部は、前記4つの側面パネルに取り付けられた別個の部材である、
請求項2に記載の半導体ダイアセンブリ。 - 前記熱伝達ユニットの前記第一部分は、前記第二の半導体ダイの積層を包囲するリングを含み、前記熱伝達ユニットの前記第二部分は、熱界面材料で前記リングに取り付けられたカバーを含む、
請求項2に記載の半導体ダイアセンブリ。 - 前記熱伝達ユニットの前記第一および第二部分は、金属を含む、
請求項2に記載の半導体ダイアセンブリ。 - パッケージ支持基板と、
周辺領域と積層部位とを有する第一の半導体ダイと、
積層されて配置され、前記第一の半導体ダイの前記積層部位に取り付けられた複数の第二の半導体ダイと、
第一部分と第二部分とを有する金属のケーシングであって、前記第一部分は、前記第一の半導体ダイの周辺領域に取り付けられ、内部表面を有し、前記内部表面は、前記第二の半導体ダイの積層から離隔され、上方に延び、前記第二部分は、前記第二の半導体ダイの積層を包囲し、前記第一部分は、側壁を含み、前記第二部分は、前記側壁に取り付けられ、前記第二部分は上部を含み、前記側壁は、前記第一の半導体ダイの前記周辺領域および前記パッケージ支持基板に取り付けられる、金属のケーシングと、
前記第二の半導体ダイの積層と前記ケーシングの前記第一部分との間のアンダーフィル材料と、
を含み、
前記アンダーフィル材料の一部は、前記第一部分の内部表面と接触している、
半導体ダイアセンブリ。 - 前記ケーシングの前記第一部分は、熱界面材料によって前記第一の半導体ダイの前記周辺領域に取り付けられ、前記ケーシングの前記第二部分は、熱界面材料によって前記ケーシングの前記第一部分に取り付けられる、
請求項9に記載の半導体ダイアセンブリ。 - 前記ケーシングの前記第一部分は、基盤とショルダとを有するリングを含み、前記基盤は、前記パッケージ支持基板に取り付けられ、前記ショルダは、熱界面材料によって前記周辺領域に取り付けられ、前記リングは、前記複数の第二の半導体ダイのうちの最上部の第二の半導体ダイの位置よりも低い高さを有し、
前記第二部分の前記上部は、前記複数の第二の半導体ダイのうちの最上部の第二の半導体ダイに取り付けられ、
前記ケーシングの前記第二部分は、前記上部から張り出している側壁を更に含み、前記第二部分の前記側壁は、熱界面材料によって前記リングに取り付けられる、
請求項9に記載の半導体ダイアセンブリ。 - パッケージ支持基板と、
周辺領域と積層部位とを有する第一の半導体ダイと、
積層されて配置され、前記第一の半導体ダイの前記積層部位に取り付けられた複数の第二の半導体ダイと、
第一部分と第二部分とを有する金属のケーシングであって、前記第一部分は、前記第一の半導体ダイの周辺領域に取り付けられ、内部表面を有し、前記内部表面は、前記第二の半導体ダイの積層から離隔され、上方に延び、前記第二部分は、前記第二の半導体ダイの積層を包囲し、前記ケーシングの前記第一部分は、前記第一の半導体ダイの前記周辺領域に取り付けられた第一の支持物と、前記複数の第二の半導体ダイのうちの最上部の第二の半導体ダイに取り付けられたキャップとを有する内部ケーシングを含み、前記第二部分は、前記内部ケーシングの前記キャップの上の上部と、前記パッケージ支持基板に取り付けられた側壁とを有する外部ケーシングを含む、金属のケーシングと、
前記第二の半導体ダイの積層と前記ケーシングの前記第一部分との間のアンダーフィル材料と、
を含み、
前記アンダーフィル材料の一部は、前記第一部分の内部表面と接触している、
半導体ダイアセンブリ。 - 前記内部ケーシングは、前記第一の支持物と対向する第二の支持物をさらに含み、前記第二の支持物は、前記第一の半導体ダイの前記周辺領域に取り付けられる、
請求項12に記載の半導体ダイアセンブリ。 - 前記上部は、熱界面材料によって前記側壁に取り付けられ、前記上部は、熱界面材料によって前記複数の第二の半導体ダイのうちの最上部の第二の半導体ダイに取り付けられる、
請求項9に記載の半導体ダイアセンブリ。 - 前記側壁は、前記複数の第二の半導体ダイのうちの最上部の第二の半導体ダイの高さ以上の高さを有する、
請求項9に記載の半導体ダイアセンブリ。 - パッケージ支持基板と、
周辺領域および積層部位を有する第一の半導体ダイと、
積層されて配置され、前記第一の半導体ダイの前記積層部位に取り付けられた複数の第二の半導体ダイと、
第一部分および第二部分を有するケーシングであって、前記第一部分は、前記第一の半導体ダイの周辺領域に取り付けられ、前記ケーシングは、前記第二の半導体ダイの積層を包囲する空洞を有する、ケーシングと、
前記空洞内の熱伝導性誘電材料であって、前記ケーシング、および、前記第二の半導体ダイのうちの少なくとも一つに接触し、30容積%のエチレングリコール溶液で120℃において約0.50W/mKの熱伝導率を有する液体を含む、熱伝導性誘電材料と、
を含む、
半導体ダイアセンブリ。 - 前記液体は、前記空洞内に注入されて、前記空洞内で固体になる、
請求項16に記載の半導体ダイアセンブリ。 - 前記ケーシングは、前記空洞内に前記熱伝導性誘電材料を注入するように構成された注
入口と、前記空洞から物質を排出するように構成された排出口と、を有する、
請求項16に記載の半導体ダイアセンブリ。 - 前記ケーシングの前記第一部分は、側壁を含み、前記ケーシングの前記第二部分は、前記側壁と一体化して形成された上部を含む、
請求項18に記載の半導体ダイアセンブリ。 - 前記ケーシングの前記第一部分は、最上部の第二の半導体ダイの高さに少なくとも近接する高さを有する側壁を含み、前記ケーシングの前記第二部分は、前記側壁および前記最上部の第二の半導体ダイに接着剤によって取り付けられた上部を含む、
請求項16に記載の半導体ダイアセンブリ。 - 前記第二の半導体ダイは、最大動作温度を有し、前記熱伝導性誘電材料は、前記熱伝導性誘電材料が液体を形成する前記最大動作温度に基づいた、相遷移温度を有する、
請求項16に記載の半導体ダイアセンブリ。 - 前記第二の半導体ダイ同士の間にアンダーフィル材料をさらに含み、前記熱伝導性誘電材料は、前記ケーシングと少なくとも前記第一の半導体ダイとの間に熱経路を提供する、請求項16に記載の半導体ダイアセンブリ。
- 前記熱伝導性誘電材料は、前記アンダーフィル材料よりも高い熱伝導率を有する、
請求項22に記載の半導体ダイアセンブリ。 - パッケージ支持基板と、前記パッケージ支持基板に取り付けられた第一の半導体ダイと、積層されて配置され、前記第一の半導体ダイに取り付けられた複数の第二の半導体ダイと、前記第二の半導体ダイの積層が配置される空洞を有する熱伝達ユニットと、を有する半導体アセンブリを製造する方法であって、
前記第二の半導体ダイの積層の周辺である前記第一の半導体ダイの領域で、アンダーフィル材料が前記第一の半導体ダイの上部表面に直接接触するように、且つ、前記アンダーフィル材料が、前記熱伝達ユニットの内部表面であって前記第二の半導体ダイの積層から離隔している前記内部表面に沿って上方に延びるように、前記アンダーフィル材料を前記空洞内に配置することと、
熱伝導性誘電材料が、前記熱伝達ユニット、および、前記第二の半導体ダイのうちの少なくとも一つに接触するように、前記熱伝達ユニットの前記空洞内に前記熱伝導性誘電材料を注入することと、
前記熱伝達ユニットの前記空洞を封止することと、
を含む、
方法。 - 前記熱伝導性誘電材料はパラフィンを含み、前記空洞内に前記熱伝導性誘電材料を注入することは、前記空洞内に前記パラフィンを液体状態で流すことを含む、
請求項24に記載の方法。 - 前記熱伝導性誘電材料は、200℃において0.1から0.15W/mKの熱伝導率を有し、前記空洞内に前記熱伝導性誘電材料を注入することは、前記空洞内に前記熱伝導性誘電材料を液体状態で流すことを含む、
請求項24に記載の方法。 - 前記熱伝導性誘電材料は、30容積%のエチレングリコール溶液内で、120℃において約0.50W/mKの熱伝導率を有し、前記空洞内に前記熱伝導性誘電材料を注入する
ことは、前記空洞内に前記熱伝導性誘電材料を液体状態で流すことを含む、
請求項24に記載の方法。 - 前記熱伝導性誘電材料を前記空洞内に注入することは、前記空洞内に前記熱伝導性誘電材料を液体状態で流すことを含む、
請求項24に記載の方法。 - 前記方法は、前記空洞内で前記液体状態の熱伝導性誘電材料を少なくとも部分的に凝固させることをさらに含む、
請求項28に記載の方法。 - 前記方法は、前記空洞内で前記液体状態の熱伝導性誘電材料を完全に凝固させることをさらに含む、
請求項28に記載の方法。 - 前記熱伝達ユニットは、少なくとも前記パッケージ支持基板に取り付けられた側壁と、前記側壁と一体化して形成された上部と、注入口と、排出口と、を有する金属のケーシングを含み、
前記熱伝導性誘電材料を注入することは、前記注入口を通じて前記空洞内に前記熱伝導性誘電材料を注入することを含む、
請求項24に記載の方法。 - 前記熱伝導性誘電材料が前記排出口を少なくとも通り抜けるまで、前記熱伝導性誘電材料で前記空洞を充填することをさらに含む、
請求項31に記載の方法。 - 前記熱伝達ユニットは、前記パッケージ支持基板から前記第二の半導体ダイの積層の少なくともほぼ最上部の第二の半導体ダイへと延びる側壁と、上部と、を有する第一部分を含み、
前記熱伝導性誘電材料を注入することは、前記上部が前記側壁から分離されている間、前記空洞内に前記熱伝導性誘電材料を堆積することを含み、
前記方法は、前記空洞内に前記熱伝導性誘電材料を堆積した後、前記側壁に前記上部を取り付けることをさらに含む、
請求項24に記載の方法。
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US9837396B2 (en) | 2017-12-05 |
KR20170031735A (ko) | 2017-03-21 |
CN106663661B (zh) | 2020-10-16 |
US20160372452A1 (en) | 2016-12-22 |
EP3170198B1 (en) | 2022-11-16 |
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TWI560821B (en) | 2016-12-01 |
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