JP6588337B2 - スラリー及び/又は化学ブレンド供給装置 - Google Patents
スラリー及び/又は化学ブレンド供給装置 Download PDFInfo
- Publication number
- JP6588337B2 JP6588337B2 JP2015542745A JP2015542745A JP6588337B2 JP 6588337 B2 JP6588337 B2 JP 6588337B2 JP 2015542745 A JP2015542745 A JP 2015542745A JP 2015542745 A JP2015542745 A JP 2015542745A JP 6588337 B2 JP6588337 B2 JP 6588337B2
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- JP
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- slurry
- chemical blend
- module
- mixed
- chemical
- Prior art date
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Links
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- MLIWQXBKMZNZNF-KUHOPJCQSA-N (2e)-2,6-bis[(4-azidophenyl)methylidene]-4-methylcyclohexan-1-one Chemical compound O=C1\C(=C\C=2C=CC(=CC=2)N=[N+]=[N-])CC(C)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 MLIWQXBKMZNZNF-KUHOPJCQSA-N 0.000 description 1
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- VCUFZILGIRCDQQ-KRWDZBQOSA-N N-[[(5S)-2-oxo-3-(2-oxo-3H-1,3-benzoxazol-6-yl)-1,3-oxazolidin-5-yl]methyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C1O[C@H](CN1C1=CC2=C(NC(O2)=O)C=C1)CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F VCUFZILGIRCDQQ-KRWDZBQOSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- OMOVVBIIQSXZSZ-UHFFFAOYSA-N [6-(4-acetyloxy-5,9a-dimethyl-2,7-dioxo-4,5a,6,9-tetrahydro-3h-pyrano[3,4-b]oxepin-5-yl)-5-formyloxy-3-(furan-3-yl)-3a-methyl-7-methylidene-1a,2,3,4,5,6-hexahydroindeno[1,7a-b]oxiren-4-yl] 2-hydroxy-3-methylpentanoate Chemical compound CC12C(OC(=O)C(O)C(C)CC)C(OC=O)C(C3(C)C(CC(=O)OC4(C)COC(=O)CC43)OC(C)=O)C(=C)C32OC3CC1C=1C=COC=1 OMOVVBIIQSXZSZ-UHFFFAOYSA-N 0.000 description 1
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- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 1
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- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/45—Mixing liquids with liquids; Emulsifying using flow mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/49—Mixing systems, i.e. flow charts or diagrams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
- B01F25/21—Jet mixers, i.e. mixers using high-speed fluid streams with submerged injectors, e.g. nozzles, for injecting high-pressure jets into a large volume or into mixing chambers
- B01F25/211—Jet mixers, i.e. mixers using high-speed fluid streams with submerged injectors, e.g. nozzles, for injecting high-pressure jets into a large volume or into mixing chambers the injectors being surrounded by guiding tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/50—Circulation mixers, e.g. wherein at least part of the mixture is discharged from and reintroduced into a receptacle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/60—Pump mixers, i.e. mixing within a pump
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/21—Measuring
- B01F35/2132—Concentration, pH, pOH, p(ION) or oxygen-demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/82—Forming a predetermined ratio of the substances to be mixed by adding a material to be mixed to a mixture in response to a detected feature, e.g. density, radioactivity, consumed power or colour
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Accessories For Mixers (AREA)
- Sampling And Sample Adjustment (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261725863P | 2012-11-13 | 2012-11-13 | |
| US61/725,863 | 2012-11-13 | ||
| US201361802950P | 2013-03-18 | 2013-03-18 | |
| US61/802,950 | 2013-03-18 | ||
| US201361861739P | 2013-08-02 | 2013-08-02 | |
| US61/861,739 | 2013-08-02 | ||
| US201361899560P | 2013-11-04 | 2013-11-04 | |
| US61/899,560 | 2013-11-04 | ||
| PCT/US2013/069868 WO2014078398A1 (en) | 2012-11-13 | 2013-11-13 | Slurry and/or chemical blend supply apparatuses |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015536239A JP2015536239A (ja) | 2015-12-21 |
| JP2015536239A5 JP2015536239A5 (enExample) | 2016-12-28 |
| JP6588337B2 true JP6588337B2 (ja) | 2019-10-09 |
Family
ID=50731649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015542745A Active JP6588337B2 (ja) | 2012-11-13 | 2013-11-13 | スラリー及び/又は化学ブレンド供給装置 |
Country Status (8)
| Country | Link |
|---|---|
| EP (3) | EP4166226B1 (enExample) |
| JP (1) | JP6588337B2 (enExample) |
| KR (2) | KR102090015B1 (enExample) |
| CN (1) | CN104956278B (enExample) |
| IL (1) | IL238770B (enExample) |
| SG (2) | SG11201503698RA (enExample) |
| TW (2) | TWI641936B (enExample) |
| WO (1) | WO2014078398A1 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MX338885B (es) * | 2012-10-15 | 2016-05-04 | Resverlogix Corp | Compuestos utiles en la sintesis de compuestos de benzamida. |
| DE102015103484A1 (de) * | 2015-03-10 | 2016-09-15 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | In-Line-Messeinrichtung |
| JP6540120B2 (ja) * | 2015-03-16 | 2019-07-10 | 住友ベークライト株式会社 | 混合装置 |
| US10768641B2 (en) * | 2015-08-26 | 2020-09-08 | Fujikin Incorporated | Flow dividing system |
| JP7306608B2 (ja) * | 2016-03-11 | 2023-07-11 | フジフイルム エレクトロニック マテリアルズ ユー.エス.エー., インコーポレイテッド | 高度な流体処理方法およびシステム |
| US10081036B2 (en) | 2016-09-19 | 2018-09-25 | Applied Materials, Inc. | Methods and systems for liquid particle prequalification |
| CA3041841A1 (en) | 2016-11-01 | 2018-05-11 | Cms Technology, Inc. | Systems and methods for improved blending of agents in chemical applications |
| JP6602334B2 (ja) * | 2017-03-30 | 2019-11-06 | 栗田工業株式会社 | 規定濃度水の供給方法及び装置 |
| CN107050700A (zh) * | 2017-05-12 | 2017-08-18 | 广州三业科技有限公司 | 数字定比大流量混合装置及其测试系统和调试方法 |
| CN107300488B (zh) * | 2017-07-25 | 2023-11-24 | 广西糖业集团红河制糖有限公司 | 一种半自动间歇式蜜料采样装置 |
| CN109551960A (zh) * | 2017-09-27 | 2019-04-02 | 河北科技大学 | 一种艺术绘画专用二十四位自动调色板 |
| CA2992255A1 (en) * | 2018-01-18 | 2019-07-18 | Nova Chemicals Corporation | Odh complex with on-line mixer unit and feed line cleaning |
| KR101944309B1 (ko) * | 2018-03-09 | 2019-02-01 | (주)한국에이티아이 | 반도체 cmp 공정 연마제의 측정을 통한 품질 예측 및 조정 통합 시스템 |
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| KR20170049625A (ko) | 2017-05-10 |
| TW201721322A (zh) | 2017-06-16 |
| EP2920662A1 (en) | 2015-09-23 |
| EP3564771A2 (en) | 2019-11-06 |
| SG10201800355QA (en) | 2018-02-27 |
| KR20150085013A (ko) | 2015-07-22 |
| EP4166226A1 (en) | 2023-04-19 |
| CN104956278A (zh) | 2015-09-30 |
| KR101732092B1 (ko) | 2017-05-04 |
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