JP2015536239A5 - - Google Patents
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- JP2015536239A5 JP2015536239A5 JP2015542745A JP2015542745A JP2015536239A5 JP 2015536239 A5 JP2015536239 A5 JP 2015536239A5 JP 2015542745 A JP2015542745 A JP 2015542745A JP 2015542745 A JP2015542745 A JP 2015542745A JP 2015536239 A5 JP2015536239 A5 JP 2015536239A5
- Authority
- JP
- Japan
- Prior art keywords
- module
- slurry
- chemical
- mixed
- mixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261725863P | 2012-11-13 | 2012-11-13 | |
| US61/725,863 | 2012-11-13 | ||
| US201361802950P | 2013-03-18 | 2013-03-18 | |
| US61/802,950 | 2013-03-18 | ||
| US201361861739P | 2013-08-02 | 2013-08-02 | |
| US61/861,739 | 2013-08-02 | ||
| US201361899560P | 2013-11-04 | 2013-11-04 | |
| US61/899,560 | 2013-11-04 | ||
| PCT/US2013/069868 WO2014078398A1 (en) | 2012-11-13 | 2013-11-13 | Slurry and/or chemical blend supply apparatuses |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015536239A JP2015536239A (ja) | 2015-12-21 |
| JP2015536239A5 true JP2015536239A5 (enExample) | 2016-12-28 |
| JP6588337B2 JP6588337B2 (ja) | 2019-10-09 |
Family
ID=50731649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015542745A Active JP6588337B2 (ja) | 2012-11-13 | 2013-11-13 | スラリー及び/又は化学ブレンド供給装置 |
Country Status (8)
| Country | Link |
|---|---|
| EP (3) | EP4166226B1 (enExample) |
| JP (1) | JP6588337B2 (enExample) |
| KR (2) | KR102090015B1 (enExample) |
| CN (1) | CN104956278B (enExample) |
| IL (1) | IL238770B (enExample) |
| SG (2) | SG11201503698RA (enExample) |
| TW (2) | TWI641936B (enExample) |
| WO (1) | WO2014078398A1 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MX338885B (es) * | 2012-10-15 | 2016-05-04 | Resverlogix Corp | Compuestos utiles en la sintesis de compuestos de benzamida. |
| DE102015103484A1 (de) * | 2015-03-10 | 2016-09-15 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | In-Line-Messeinrichtung |
| JP6540120B2 (ja) * | 2015-03-16 | 2019-07-10 | 住友ベークライト株式会社 | 混合装置 |
| US10768641B2 (en) * | 2015-08-26 | 2020-09-08 | Fujikin Incorporated | Flow dividing system |
| JP7306608B2 (ja) * | 2016-03-11 | 2023-07-11 | フジフイルム エレクトロニック マテリアルズ ユー.エス.エー., インコーポレイテッド | 高度な流体処理方法およびシステム |
| US10081036B2 (en) | 2016-09-19 | 2018-09-25 | Applied Materials, Inc. | Methods and systems for liquid particle prequalification |
| CA3041841A1 (en) | 2016-11-01 | 2018-05-11 | Cms Technology, Inc. | Systems and methods for improved blending of agents in chemical applications |
| JP6602334B2 (ja) * | 2017-03-30 | 2019-11-06 | 栗田工業株式会社 | 規定濃度水の供給方法及び装置 |
| CN107050700A (zh) * | 2017-05-12 | 2017-08-18 | 广州三业科技有限公司 | 数字定比大流量混合装置及其测试系统和调试方法 |
| CN107300488B (zh) * | 2017-07-25 | 2023-11-24 | 广西糖业集团红河制糖有限公司 | 一种半自动间歇式蜜料采样装置 |
| CN109551960A (zh) * | 2017-09-27 | 2019-04-02 | 河北科技大学 | 一种艺术绘画专用二十四位自动调色板 |
| CA2992255A1 (en) * | 2018-01-18 | 2019-07-18 | Nova Chemicals Corporation | Odh complex with on-line mixer unit and feed line cleaning |
| KR101944309B1 (ko) * | 2018-03-09 | 2019-02-01 | (주)한국에이티아이 | 반도체 cmp 공정 연마제의 측정을 통한 품질 예측 및 조정 통합 시스템 |
| JP7064979B2 (ja) * | 2018-06-25 | 2022-05-11 | 株式会社荏原製作所 | 流体の漏洩を確認する方法、および研磨装置 |
| CN109164837B (zh) * | 2018-08-13 | 2021-08-03 | 力合科技(湖南)股份有限公司 | 流量恒定装置及其使用方法、快速分析仪器及其检测方法 |
| TWI699237B (zh) * | 2019-02-22 | 2020-07-21 | 亞泰半導體設備股份有限公司 | 研磨液混料供應系統 |
| JP6835126B2 (ja) * | 2019-03-28 | 2021-02-24 | 栗田工業株式会社 | 希薄薬液製造装置 |
| US20200338688A1 (en) * | 2019-04-25 | 2020-10-29 | Lth Co., Ltd. | Method for automatically verifying and cleaning large-sized particle counter for analyzing cmp slurry and verification system suitable for same |
| KR102277512B1 (ko) * | 2019-07-29 | 2021-07-15 | 솔리스 주식회사 | 대용량 슬러리 공급 장치 |
| DE202019104349U1 (de) * | 2019-08-07 | 2020-11-10 | Eversys Ag | Vorrichtung zum Erhitzen und Aufschäumen einer Flüssigkeit, insbesondere eines Getränks |
| CN110561275B (zh) * | 2019-10-17 | 2023-09-05 | 群福电子科技(上海)有限公司 | 研磨液供应方法 |
| US11465110B2 (en) * | 2019-12-26 | 2022-10-11 | Asahi Kasei Bioprocess America, Inc. | Scaleable inline buffer dilution scheme |
| CN112255051B (zh) * | 2020-11-17 | 2022-07-08 | 攀钢集团攀枝花钢铁研究院有限公司 | 一种开放式管道的矿浆取样装置 |
| US11828696B2 (en) | 2020-12-16 | 2023-11-28 | Caterpillar Inc. | System and method for processing data from a particle monitoring sensor |
| IT202100001856A1 (it) * | 2021-01-29 | 2022-07-29 | D B N Tubetti S R L | Sistema di alimentazione in continuo per un impianto di spruzzatura interna di vernice all’interno di un tubetto |
| US20220362902A1 (en) * | 2021-05-14 | 2022-11-17 | Taiwan Semiconductor Manufacturing Company Ltd. | Method and system for slurry quality monitoring |
| KR102712625B1 (ko) * | 2021-11-18 | 2024-10-02 | 삼성이앤에이 주식회사 | 수지 충진 장치 및 방법 |
| US12272544B2 (en) | 2021-12-24 | 2025-04-08 | Semes Co., Ltd. | Apparatus for treating substrate and method for treating substrate |
| KR102431849B1 (ko) * | 2022-01-21 | 2022-08-12 | 웨스글로벌 주식회사 | 씨엠피 슬러리 혼합 및 공급 제어 시스템 |
| CN114699941A (zh) * | 2022-03-14 | 2022-07-05 | 长鑫存储技术有限公司 | 一种液体混合装置、供给系统及供给方法 |
| EP4245406A1 (en) * | 2022-03-17 | 2023-09-20 | Saravanos Process++ SRL | Systems and methods for feeding inlet materials to a process system |
| CN115041044B (zh) * | 2022-04-25 | 2024-04-02 | 安徽广信农化股份有限公司 | 一种多菌灵可湿性粉剂加工用上料装置及其上料方法 |
| TWI830579B (zh) * | 2023-01-12 | 2024-01-21 | 全營科技有限公司 | 研磨液混合槽的製造方法 |
| TWI882529B (zh) * | 2023-01-12 | 2025-05-01 | 全營科技有限公司 | 研磨液混合槽的結構 |
| CN117839408A (zh) * | 2023-02-16 | 2024-04-09 | 李佳辉 | 一种湿法脱硫脱硝装置 |
| CN116808906A (zh) * | 2023-07-11 | 2023-09-29 | 湖南经源科技有限公司 | 一种正极材料制备用管道连续式粉体混合装置 |
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| DE1275512B (de) * | 1962-01-08 | 1968-08-22 | Willi Walbersdorf Sondermaschb | Mischvorrichtung |
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| US4538222A (en) * | 1983-04-06 | 1985-08-27 | Halliburton Company | Apparatus and method for mixing a plurality of substances |
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| US5823670A (en) * | 1993-11-17 | 1998-10-20 | Calgon Corporation | Chemical delivery and on-site blending system for producing multiple products |
| DE19723802C2 (de) * | 1997-06-06 | 1999-08-12 | Kuesters Eduard Maschf | Vorrichtung zum Auftragen eines fluiden Behandlungsmittels auf eine Bahn |
| JP3382138B2 (ja) * | 1997-08-21 | 2003-03-04 | 富士通株式会社 | 薬液供給装置及び薬液供給方法 |
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| KR20010072569A (ko) * | 1998-04-09 | 2001-07-31 | 추후제출 | 자동화 화학공정 제어 시스템 |
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| JP2000071172A (ja) * | 1998-08-28 | 2000-03-07 | Nec Corp | 化学機械研磨用スラリーの再生装置及び再生方法 |
| KR100268417B1 (ko) * | 1998-09-18 | 2000-10-16 | 윤종용 | 반도체 씨엠피설비의 슬러리공급시스템 |
| JP2000117635A (ja) * | 1998-10-15 | 2000-04-25 | Sumitomo Metal Ind Ltd | 研磨方法及び研磨システム |
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| JP3677203B2 (ja) * | 2000-10-06 | 2005-07-27 | 株式会社荏原製作所 | 砥液供給装置、研磨装置及び砥液供給装置の運転方法 |
| TW583355B (en) * | 2001-06-21 | 2004-04-11 | M Fsi Ltd | Slurry mixing feeder and slurry mixing and feeding method |
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| JP2011506110A (ja) * | 2007-12-06 | 2011-03-03 | フォアサイト プロセッシング,エルエルシー | 流体を含む加工材料混合物を搬送するシステムおよび方法 |
| WO2009103038A1 (en) * | 2008-02-14 | 2009-08-20 | David Randolph Smith | Method and apparatus to treat well stimulation fluids in-situ |
| JP5297695B2 (ja) * | 2008-05-30 | 2013-09-25 | Sumco Techxiv株式会社 | スラリー供給装置及び同装置を用いる半導体ウェーハの研磨方法 |
| JP5340760B2 (ja) * | 2009-02-12 | 2013-11-13 | 倉敷紡績株式会社 | 流体制御方法及び流体制御装置 |
| US20100258196A1 (en) * | 2009-04-14 | 2010-10-14 | Mega Fluid Systems, Inc. | Arrangement of multiple pumps for delivery of process materials |
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| KR101041450B1 (ko) * | 2009-04-22 | 2011-06-15 | 세메스 주식회사 | 기판 세정 장치 및 방법 |
| EP2336093A1 (en) * | 2009-12-14 | 2011-06-22 | Arkema Vlissingen B.V. | Process for scratch masking of glass containers |
| US20120042575A1 (en) * | 2010-08-18 | 2012-02-23 | Cabot Microelectronics Corporation | Cmp slurry recycling system and methods |
| TWI403662B (zh) * | 2010-11-19 | 2013-08-01 | 循環系統及方法 |
-
2013
- 2013-11-12 TW TW106103534A patent/TWI641936B/zh active
- 2013-11-12 TW TW102141075A patent/TWI574789B/zh active
- 2013-11-13 CN CN201380070325.0A patent/CN104956278B/zh active Active
- 2013-11-13 WO PCT/US2013/069868 patent/WO2014078398A1/en not_active Ceased
- 2013-11-13 KR KR1020177011248A patent/KR102090015B1/ko active Active
- 2013-11-13 SG SG11201503698RA patent/SG11201503698RA/en unknown
- 2013-11-13 EP EP22212575.9A patent/EP4166226B1/en active Active
- 2013-11-13 SG SG10201800355QA patent/SG10201800355QA/en unknown
- 2013-11-13 EP EP13854888.8A patent/EP2920662B1/en active Active
- 2013-11-13 EP EP19177129.4A patent/EP3564771A3/en not_active Ceased
- 2013-11-13 KR KR1020157015652A patent/KR101732092B1/ko active Active
- 2013-11-13 JP JP2015542745A patent/JP6588337B2/ja active Active
-
2015
- 2015-05-12 IL IL238770A patent/IL238770B/en active IP Right Grant
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