SG11201503698RA - Slurry and/or chemical blend supply apparatuses - Google Patents
Slurry and/or chemical blend supply apparatusesInfo
- Publication number
- SG11201503698RA SG11201503698RA SG11201503698RA SG11201503698RA SG11201503698RA SG 11201503698R A SG11201503698R A SG 11201503698RA SG 11201503698R A SG11201503698R A SG 11201503698RA SG 11201503698R A SG11201503698R A SG 11201503698RA SG 11201503698R A SG11201503698R A SG 11201503698RA
- Authority
- SG
- Singapore
- Prior art keywords
- slurry
- supply apparatuses
- chemical blend
- blend supply
- chemical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/45—Mixing liquids with liquids; Emulsifying using flow mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/49—Mixing systems, i.e. flow charts or diagrams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
- B01F25/21—Jet mixers, i.e. mixers using high-speed fluid streams with submerged injectors, e.g. nozzles, for injecting high-pressure jets into a large volume or into mixing chambers
- B01F25/211—Jet mixers, i.e. mixers using high-speed fluid streams with submerged injectors, e.g. nozzles, for injecting high-pressure jets into a large volume or into mixing chambers the injectors being surrounded by guiding tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/50—Circulation mixers, e.g. wherein at least part of the mixture is discharged from and reintroduced into a receptacle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/60—Pump mixers, i.e. mixing within a pump
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/21—Measuring
- B01F35/2132—Concentration, pH, pOH, p(ION) or oxygen-demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/82—Forming a predetermined ratio of the substances to be mixed by adding a material to be mixed to a mixture in response to a detected feature, e.g. density, radioactivity, consumed power or colour
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Accessories For Mixers (AREA)
- Sampling And Sample Adjustment (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261725863P | 2012-11-13 | 2012-11-13 | |
US201361802950P | 2013-03-18 | 2013-03-18 | |
US201361861739P | 2013-08-02 | 2013-08-02 | |
US201361899560P | 2013-11-04 | 2013-11-04 | |
PCT/US2013/069868 WO2014078398A1 (en) | 2012-11-13 | 2013-11-13 | Slurry and/or chemical blend supply apparatuses |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201503698RA true SG11201503698RA (en) | 2015-06-29 |
Family
ID=50731649
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201503698RA SG11201503698RA (en) | 2012-11-13 | 2013-11-13 | Slurry and/or chemical blend supply apparatuses |
SG10201800355QA SG10201800355QA (en) | 2012-11-13 | 2013-11-13 | Slurry and/or chemical blend supply apparatuses |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201800355QA SG10201800355QA (en) | 2012-11-13 | 2013-11-13 | Slurry and/or chemical blend supply apparatuses |
Country Status (8)
Country | Link |
---|---|
EP (3) | EP3564771A3 (en) |
JP (1) | JP6588337B2 (en) |
KR (2) | KR102090015B1 (en) |
CN (1) | CN104956278B (en) |
IL (1) | IL238770B (en) |
SG (2) | SG11201503698RA (en) |
TW (2) | TWI574789B (en) |
WO (1) | WO2014078398A1 (en) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014060852A2 (en) * | 2012-10-15 | 2014-04-24 | Resverlogix Corp. | Compounds useful in the synthesis of benzamide compounds |
DE102015103484A1 (en) * | 2015-03-10 | 2016-09-15 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | In-line measuring device |
JP6540120B2 (en) * | 2015-03-16 | 2019-07-10 | 住友ベークライト株式会社 | Mixing device |
JP6738095B2 (en) * | 2015-08-26 | 2020-08-12 | 株式会社フジキン | Shunt system |
WO2017155669A1 (en) * | 2016-03-11 | 2017-09-14 | Fujifilm Planar Solutions, LLC | Advanced fluid processing methods and systems |
US10081036B2 (en) | 2016-09-19 | 2018-09-25 | Applied Materials, Inc. | Methods and systems for liquid particle prequalification |
US12017194B2 (en) | 2016-11-01 | 2024-06-25 | CMS Technology, LLC | Systems and methods for improved blending of agents in chemical applications |
JP6602334B2 (en) * | 2017-03-30 | 2019-11-06 | 栗田工業株式会社 | Method and apparatus for supplying specified concentration water |
CN107050700A (en) * | 2017-05-12 | 2017-08-18 | 广州三业科技有限公司 | Numeral is fixed than big flow mixing arrangement and its test system and adjustment method |
CN107300488B (en) * | 2017-07-25 | 2023-11-24 | 广西糖业集团红河制糖有限公司 | Semi-automatic intermittent honey sampling device |
CN109551960A (en) * | 2017-09-27 | 2019-04-02 | 河北科技大学 | A kind of dedicated 24 automatic color regulating plates of art drawing |
CA2992255A1 (en) * | 2018-01-18 | 2019-07-18 | Nova Chemicals Corporation | Odh complex with on-line mixer unit and feed line cleaning |
KR101944309B1 (en) * | 2018-03-09 | 2019-02-01 | (주)한국에이티아이 | integration system for quality prediction and adjustment of abrasive slurries for semiconductor CMP process |
JP7064979B2 (en) * | 2018-06-25 | 2022-05-11 | 株式会社荏原製作所 | How to check for fluid leaks and polishing equipment |
CN109164837B (en) * | 2018-08-13 | 2021-08-03 | 力合科技(湖南)股份有限公司 | Flow constant device and using method thereof, rapid analysis instrument and detection method thereof |
TWI699237B (en) * | 2019-02-22 | 2020-07-21 | 亞泰半導體設備股份有限公司 | Slurry mixing and supplying system |
US20200338688A1 (en) * | 2019-04-25 | 2020-10-29 | Lth Co., Ltd. | Method for automatically verifying and cleaning large-sized particle counter for analyzing cmp slurry and verification system suitable for same |
KR102277512B1 (en) * | 2019-07-29 | 2021-07-15 | 솔리스 주식회사 | Slurry supply apparatus |
DE202019104349U1 (en) * | 2019-08-07 | 2020-11-10 | Eversys Ag | Device for heating and foaming a liquid, in particular a drink |
CN110561275B (en) * | 2019-10-17 | 2023-09-05 | 群福电子科技(上海)有限公司 | Method for supplying polishing liquid |
CN112255051B (en) * | 2020-11-17 | 2022-07-08 | 攀钢集团攀枝花钢铁研究院有限公司 | Ore pulp sampling device of open type pipeline |
US11828696B2 (en) | 2020-12-16 | 2023-11-28 | Caterpillar Inc. | System and method for processing data from a particle monitoring sensor |
IT202100001856A1 (en) * | 2021-01-29 | 2022-07-29 | D B N Tubetti S R L | CONTINUOUS FEEDING SYSTEM FOR AN INTERNAL SPRAYING SYSTEM OF PAINT INTO A TUBE |
US20220362902A1 (en) * | 2021-05-14 | 2022-11-17 | Taiwan Semiconductor Manufacturing Company Ltd. | Method and system for slurry quality monitoring |
KR102431849B1 (en) * | 2022-01-21 | 2022-08-12 | 웨스글로벌 주식회사 | Mixing and supply control system of cmp slurry |
CN114699941A (en) * | 2022-03-14 | 2022-07-05 | 长鑫存储技术有限公司 | Liquid mixing device, supply system and supply method |
EP4245406A1 (en) * | 2022-03-17 | 2023-09-20 | Saravanos Process++ SRL | Systems and methods for feeding inlet materials to a process system |
CN115041044B (en) * | 2022-04-25 | 2024-04-02 | 安徽广信农化股份有限公司 | Feeding device and feeding method for carbendazim wettable powder processing |
TWI830579B (en) * | 2023-01-12 | 2024-01-21 | 全營科技有限公司 | Manufacturing method of grinding fluid mixing tank |
CN117839408A (en) * | 2023-02-16 | 2024-04-09 | 李佳辉 | Wet desulfurization and denitrification device |
Family Cites Families (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB798983A (en) * | 1957-02-08 | 1958-07-30 | Courtaulds Ltd | Improvements in and relating to mixing materials |
GB835975A (en) * | 1957-07-15 | 1960-06-01 | Walter Jordan | Surge absorber for pressure fluid lines |
US3166020A (en) * | 1961-09-20 | 1965-01-19 | Hypro Engineering Inc | Venturi mixer nozzle |
DE1275512B (en) * | 1962-01-08 | 1968-08-22 | Willi Walbersdorf Sondermaschb | Mixing device |
US3946994A (en) * | 1974-04-10 | 1976-03-30 | Petrolite Corporation | System for producing emulsions |
US4045004A (en) * | 1976-10-01 | 1977-08-30 | Berger Henry F | Chemical mixing and pumping apparatus |
US4538222A (en) * | 1983-04-06 | 1985-08-27 | Halliburton Company | Apparatus and method for mixing a plurality of substances |
EP0595821A1 (en) * | 1992-05-21 | 1994-05-11 | Eastman Kodak Company | A system for producing a photographic dispersion |
US5823670A (en) * | 1993-11-17 | 1998-10-20 | Calgon Corporation | Chemical delivery and on-site blending system for producing multiple products |
DE19723802C2 (en) * | 1997-06-06 | 1999-08-12 | Kuesters Eduard Maschf | Device for applying a fluid treatment agent to a web |
JP3382138B2 (en) * | 1997-08-21 | 2003-03-04 | 富士通株式会社 | Chemical liquid supply device and chemical liquid supply method |
US5887974A (en) * | 1997-11-26 | 1999-03-30 | The Boc Group, Inc. | Slurry mixing apparatus and method |
KR20010072569A (en) * | 1998-04-09 | 2001-07-31 | 추후제출 | Automated chemical process control system |
US6224252B1 (en) * | 1998-07-07 | 2001-05-01 | Air Products And Chemicals, Inc. | Chemical generator with controlled mixing and concentration feedback and adjustment |
JP2000071172A (en) * | 1998-08-28 | 2000-03-07 | Nec Corp | Regenerative unit for and regenerative method of slurry for mechanochemical polishing |
KR100268417B1 (en) * | 1998-09-18 | 2000-10-16 | 윤종용 | Slurry supply system of cmp equipment for semiconductor device |
JP2000117635A (en) * | 1998-10-15 | 2000-04-25 | Sumitomo Metal Ind Ltd | Polishing method and system |
JP2000218107A (en) * | 1998-11-25 | 2000-08-08 | Ebara Corp | Filter and grinding liquid supply apparatus |
US6280300B1 (en) * | 1998-11-25 | 2001-08-28 | Ebara Corporation | Filter apparatus |
JP3464929B2 (en) * | 1999-02-12 | 2003-11-10 | 東京エレクトロン株式会社 | Slurry supply system and polishing system having the same |
JP3748731B2 (en) * | 1999-03-26 | 2006-02-22 | 株式会社荏原製作所 | Abrasive fluid supply device |
US6048256A (en) * | 1999-04-06 | 2000-04-11 | Lucent Technologies Inc. | Apparatus and method for continuous delivery and conditioning of a polishing slurry |
US20020117559A1 (en) * | 2000-02-11 | 2002-08-29 | Kaligian Raymond A. | Continuous slurry dispenser apparatus |
US6866784B2 (en) * | 2000-06-27 | 2005-03-15 | Nymtech, Co., Ltd. | Slurry recycling system and method for CMP apparatus |
JP2002016029A (en) * | 2000-06-27 | 2002-01-18 | Mitsubishi Chemical Engineering Corp | Preparation method and apparatus for polishing liquid |
CN101274230A (en) * | 2000-07-31 | 2008-10-01 | 迅捷公司 | Method and apparatus for mixing process material |
JP3677203B2 (en) * | 2000-10-06 | 2005-07-27 | 株式会社荏原製作所 | Abrasive liquid supply device, polishing apparatus, and operation method of abrasive liquid supply device |
JP3774681B2 (en) * | 2001-06-21 | 2006-05-17 | エム・エフエスアイ株式会社 | Slurry mixed supply device and slurry mixed supply method |
TW583355B (en) * | 2001-06-21 | 2004-04-11 | M Fsi Ltd | Slurry mixing feeder and slurry mixing and feeding method |
US6903138B2 (en) * | 2002-06-03 | 2005-06-07 | Intevep, S.A. | Manufacture of stable bimodal emulsions using dynamic mixing |
US7344298B2 (en) * | 2002-07-19 | 2008-03-18 | Celerity, Inc. | Method and apparatus for blending process materials |
JP2004207422A (en) * | 2002-12-25 | 2004-07-22 | Matsushita Electric Ind Co Ltd | Polishing method of semiconductor device, method for manufacturing semiconductor device, and polishing equipment |
JP4362473B2 (en) * | 2003-06-20 | 2009-11-11 | 富士通マイクロエレクトロニクス株式会社 | Chemical solution supply device and supply device |
JP4645056B2 (en) * | 2004-03-31 | 2011-03-09 | パナソニック株式会社 | Polishing fluid supply device |
US7524383B2 (en) * | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
JP4915897B2 (en) * | 2005-07-19 | 2012-04-11 | 東京エレクトロン株式会社 | Pulsation reduction device and inspection device |
US7726870B1 (en) * | 2007-04-19 | 2010-06-01 | Vortex Systems (International) Ci | Method for mixing fluids with an eductor |
US8052127B2 (en) * | 2007-10-19 | 2011-11-08 | Philip Morris Usa Inc. | Respiratory humidification system |
JP2011506110A (en) * | 2007-12-06 | 2011-03-03 | フォアサイト プロセッシング,エルエルシー | System and method for conveying a work material mixture containing fluid |
GB2470165B (en) * | 2008-02-14 | 2012-09-05 | David Randolph Smith | Method and apparatus to treat well stimulation fluids in-situ |
JP5297695B2 (en) * | 2008-05-30 | 2013-09-25 | Sumco Techxiv株式会社 | Slurry supply device and semiconductor wafer polishing method using the same |
JP5340760B2 (en) * | 2009-02-12 | 2013-11-13 | 倉敷紡績株式会社 | Fluid control method and fluid control apparatus |
US20100258196A1 (en) * | 2009-04-14 | 2010-10-14 | Mega Fluid Systems, Inc. | Arrangement of multiple pumps for delivery of process materials |
US8746960B2 (en) * | 2009-04-20 | 2014-06-10 | Mega Fluid Systems, Inc. | Method and apparatus for blending process materials |
KR101041450B1 (en) * | 2009-04-22 | 2011-06-15 | 세메스 주식회사 | apparatus and method for treating substrate |
EP2336093A1 (en) * | 2009-12-14 | 2011-06-22 | Arkema Vlissingen B.V. | Process for scratch masking of glass containers |
US20120042575A1 (en) * | 2010-08-18 | 2012-02-23 | Cabot Microelectronics Corporation | Cmp slurry recycling system and methods |
TWI403662B (en) * | 2010-11-19 | 2013-08-01 | Circulation system and method thereof |
-
2013
- 2013-11-12 TW TW102141075A patent/TWI574789B/en active
- 2013-11-12 TW TW106103534A patent/TWI641936B/en active
- 2013-11-13 EP EP19177129.4A patent/EP3564771A3/en not_active Ceased
- 2013-11-13 WO PCT/US2013/069868 patent/WO2014078398A1/en active Application Filing
- 2013-11-13 KR KR1020177011248A patent/KR102090015B1/en active IP Right Grant
- 2013-11-13 SG SG11201503698RA patent/SG11201503698RA/en unknown
- 2013-11-13 EP EP22212575.9A patent/EP4166226A1/en active Pending
- 2013-11-13 EP EP13854888.8A patent/EP2920662B1/en active Active
- 2013-11-13 SG SG10201800355QA patent/SG10201800355QA/en unknown
- 2013-11-13 KR KR1020157015652A patent/KR101732092B1/en active IP Right Grant
- 2013-11-13 JP JP2015542745A patent/JP6588337B2/en active Active
- 2013-11-13 CN CN201380070325.0A patent/CN104956278B/en active Active
-
2015
- 2015-05-12 IL IL238770A patent/IL238770B/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP2920662A1 (en) | 2015-09-23 |
TW201721322A (en) | 2017-06-16 |
EP4166226A1 (en) | 2023-04-19 |
TWI641936B (en) | 2018-11-21 |
EP3564771A3 (en) | 2020-03-18 |
TW201422376A (en) | 2014-06-16 |
IL238770A0 (en) | 2015-06-30 |
KR20170049625A (en) | 2017-05-10 |
KR20150085013A (en) | 2015-07-22 |
CN104956278A (en) | 2015-09-30 |
JP2015536239A (en) | 2015-12-21 |
TWI574789B (en) | 2017-03-21 |
IL238770B (en) | 2021-06-30 |
EP3564771A2 (en) | 2019-11-06 |
EP2920662B1 (en) | 2019-05-29 |
KR102090015B1 (en) | 2020-03-17 |
SG10201800355QA (en) | 2018-02-27 |
KR101732092B1 (en) | 2017-05-04 |
EP2920662A4 (en) | 2017-01-25 |
CN104956278B (en) | 2018-05-29 |
JP6588337B2 (en) | 2019-10-09 |
WO2014078398A1 (en) | 2014-05-22 |
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