JP6368961B2 - ポリイミド系溶液、及びこれを用いて製造されたポリイミド系フィルム - Google Patents
ポリイミド系溶液、及びこれを用いて製造されたポリイミド系フィルム Download PDFInfo
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- JP6368961B2 JP6368961B2 JP2016544304A JP2016544304A JP6368961B2 JP 6368961 B2 JP6368961 B2 JP 6368961B2 JP 2016544304 A JP2016544304 A JP 2016544304A JP 2016544304 A JP2016544304 A JP 2016544304A JP 6368961 B2 JP6368961 B2 JP 6368961B2
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- polyimide
- organic group
- fluoro atom
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- containing substituent
- Prior art date
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- 229920001721 polyimide Polymers 0.000 title claims description 147
- 239000004642 Polyimide Substances 0.000 title claims description 112
- 125000000962 organic group Chemical group 0.000 claims description 112
- 125000001153 fluoro group Chemical group F* 0.000 claims description 68
- 125000001424 substituent group Chemical group 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 45
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 39
- 239000000126 substance Substances 0.000 claims description 36
- 229920005575 poly(amic acid) Polymers 0.000 claims description 31
- 125000002950 monocyclic group Chemical group 0.000 claims description 26
- 239000002904 solvent Substances 0.000 claims description 25
- 125000002723 alicyclic group Chemical group 0.000 claims description 24
- 125000005647 linker group Chemical group 0.000 claims description 24
- 239000002253 acid Substances 0.000 claims description 22
- 125000003118 aryl group Chemical group 0.000 claims description 21
- 150000004985 diamines Chemical class 0.000 claims description 19
- 150000001875 compounds Chemical class 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 12
- NVKGJHAQGWCWDI-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical compound FC(F)(F)C1=CC(N)=CC=C1C1=CC=C(N)C=C1C(F)(F)F NVKGJHAQGWCWDI-UHFFFAOYSA-N 0.000 claims description 11
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 10
- 125000001931 aliphatic group Chemical group 0.000 claims description 9
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical group C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 claims description 9
- 125000003367 polycyclic group Chemical group 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 8
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 claims description 7
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 claims description 6
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 claims description 6
- LJMPOXUWPWEILS-UHFFFAOYSA-N 3a,4,4a,7a,8,8a-hexahydrofuro[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1C2C(=O)OC(=O)C2CC2C(=O)OC(=O)C21 LJMPOXUWPWEILS-UHFFFAOYSA-N 0.000 claims description 6
- QHHKLPCQTTWFSS-UHFFFAOYSA-N 5-[2-(1,3-dioxo-2-benzofuran-5-yl)-1,1,1,3,3,3-hexafluoropropan-2-yl]-2-benzofuran-1,3-dione Chemical group C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)(C(F)(F)F)C(F)(F)F)=C1 QHHKLPCQTTWFSS-UHFFFAOYSA-N 0.000 claims description 6
- FYYYKXFEKMGYLZ-UHFFFAOYSA-N 4-(1,3-dioxo-2-benzofuran-5-yl)-2-benzofuran-1,3-dione Chemical compound C=1C=C2C(=O)OC(=O)C2=CC=1C1=CC=CC2=C1C(=O)OC2=O FYYYKXFEKMGYLZ-UHFFFAOYSA-N 0.000 claims description 5
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 claims description 4
- KIFDSGGWDIVQGN-UHFFFAOYSA-N 4-[9-(4-aminophenyl)fluoren-9-yl]aniline Chemical compound C1=CC(N)=CC=C1C1(C=2C=CC(N)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 KIFDSGGWDIVQGN-UHFFFAOYSA-N 0.000 claims description 2
- YUZSJKBFHATJHV-UHFFFAOYSA-N 2-[4-[2-[4-(2-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]aniline Chemical compound NC1=CC=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C(=CC=CC=3)N)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 YUZSJKBFHATJHV-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 56
- 238000000034 method Methods 0.000 description 47
- 125000004432 carbon atom Chemical group C* 0.000 description 32
- 239000002243 precursor Substances 0.000 description 29
- -1 [4-(-aminophenoxy) phenyl] hexafluoropropane (2,2'-Bis [4-(-aminophenoxy) phenyl] hexafluoropropane) Chemical compound 0.000 description 22
- 230000008569 process Effects 0.000 description 20
- SUAKHGWARZSWIH-UHFFFAOYSA-N N,N‐diethylformamide Chemical compound CCN(CC)C=O SUAKHGWARZSWIH-UHFFFAOYSA-N 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000006116 polymerization reaction Methods 0.000 description 12
- 239000011521 glass Substances 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 10
- 125000000217 alkyl group Chemical group 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 9
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 8
- 125000000524 functional group Chemical group 0.000 description 7
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- 125000003709 fluoroalkyl group Chemical group 0.000 description 6
- 230000009477 glass transition Effects 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 5
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 5
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 4
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 4
- KZTYYGOKRVBIMI-UHFFFAOYSA-N diphenyl sulfone Chemical compound C=1C=CC=CC=1S(=O)(=O)C1=CC=CC=C1 KZTYYGOKRVBIMI-UHFFFAOYSA-N 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 3
- MVODMCPZFNNNBR-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical group FC(C1=C(C=CC(=C1)N)C1=C(C=C(N)C=C1)C(F)(F)F)(F)F.FC(C1=C(C=CC(=C1)N)C1=C(C=C(N)C=C1)C(F)(F)F)(F)F MVODMCPZFNNNBR-UHFFFAOYSA-N 0.000 description 3
- QGMGHALXLXKCBD-UHFFFAOYSA-N 4-amino-n-(2-aminophenyl)benzamide Chemical compound C1=CC(N)=CC=C1C(=O)NC1=CC=CC=C1N QGMGHALXLXKCBD-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 125000003277 amino group Chemical group 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 239000001294 propane Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- PAMIQIKDUOTOBW-UHFFFAOYSA-N 1-methylpiperidine Chemical compound CN1CCCCC1 PAMIQIKDUOTOBW-UHFFFAOYSA-N 0.000 description 2
- LDXJRKWFNNFDSA-UHFFFAOYSA-N 2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound C1CN(CC2=NNN=C21)CC(=O)N3CCN(CC3)C4=CN=C(N=C4)NCC5=CC(=CC=C5)OC(F)(F)F LDXJRKWFNNFDSA-UHFFFAOYSA-N 0.000 description 2
- WKOCXPIOHONZAM-UHFFFAOYSA-N N,N-diethylacetamide Chemical compound C(C)(=O)N(CC)CC.C(C)(=O)N(CC)CC WKOCXPIOHONZAM-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- 150000004984 aromatic diamines Chemical class 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 125000000753 cycloalkyl group Chemical group 0.000 description 2
- 239000012024 dehydrating agents Substances 0.000 description 2
- 125000006159 dianhydride group Chemical group 0.000 description 2
- 238000010528 free radical solution polymerization reaction Methods 0.000 description 2
- 125000005842 heteroatom Chemical group 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- ZHDTXTDHBRADLM-UHFFFAOYSA-N hydron;2,3,4,5-tetrahydropyridin-6-amine;chloride Chemical compound Cl.NC1=NCCCC1 ZHDTXTDHBRADLM-UHFFFAOYSA-N 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000006358 imidation reaction Methods 0.000 description 2
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 2
- 229940018564 m-phenylenediamine Drugs 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- 125000002733 (C1-C6) fluoroalkyl group Chemical group 0.000 description 1
- PVOAHINGSUIXLS-UHFFFAOYSA-N 1-Methylpiperazine Chemical compound CN1CCNCC1 PVOAHINGSUIXLS-UHFFFAOYSA-N 0.000 description 1
- UICGXCCDQFJUFM-UHFFFAOYSA-N 1-ethylpyrrolidin-2-one Chemical compound C(C)N1C(CCC1)=O.C(C)N1C(CCC1)=O UICGXCCDQFJUFM-UHFFFAOYSA-N 0.000 description 1
- NOGFHTGYPKWWRX-UHFFFAOYSA-N 2,2,6,6-tetramethyloxan-4-one Chemical compound CC1(C)CC(=O)CC(C)(C)O1 NOGFHTGYPKWWRX-UHFFFAOYSA-N 0.000 description 1
- NGNBDVOYPDDBFK-UHFFFAOYSA-N 2-[2,4-di(pentan-2-yl)phenoxy]acetyl chloride Chemical compound CCCC(C)C1=CC=C(OCC(Cl)=O)C(C(C)CCC)=C1 NGNBDVOYPDDBFK-UHFFFAOYSA-N 0.000 description 1
- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 1
- OLQWMCSSZKNOLQ-UHFFFAOYSA-N 3-(2,5-dioxooxolan-3-yl)oxolane-2,5-dione Chemical compound O=C1OC(=O)CC1C1C(=O)OC(=O)C1 OLQWMCSSZKNOLQ-UHFFFAOYSA-N 0.000 description 1
- LXJLFVRAWOOQDR-UHFFFAOYSA-N 3-(3-aminophenoxy)aniline Chemical compound NC1=CC=CC(OC=2C=C(N)C=CC=2)=C1 LXJLFVRAWOOQDR-UHFFFAOYSA-N 0.000 description 1
- LJGHYPLBDBRCRZ-UHFFFAOYSA-N 3-(3-aminophenyl)sulfonylaniline Chemical compound NC1=CC=CC(S(=O)(=O)C=2C=C(N)C=CC=2)=C1 LJGHYPLBDBRCRZ-UHFFFAOYSA-N 0.000 description 1
- DKKYOQYISDAQER-UHFFFAOYSA-N 3-[3-(3-aminophenoxy)phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=C(OC=3C=C(N)C=CC=3)C=CC=2)=C1 DKKYOQYISDAQER-UHFFFAOYSA-N 0.000 description 1
- NYRFBMFAUFUULG-UHFFFAOYSA-N 3-[4-[2-[4-(3-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=C(OC=2C=C(N)C=CC=2)C=CC=1C(C)(C)C(C=C1)=CC=C1OC1=CC=CC(N)=C1 NYRFBMFAUFUULG-UHFFFAOYSA-N 0.000 description 1
- NQZOFDAHZVLQJO-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenoxy]phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(OC=3C=CC(OC=4C=C(N)C=CC=4)=CC=3)=CC=2)=C1 NQZOFDAHZVLQJO-UHFFFAOYSA-N 0.000 description 1
- UCQABCHSIIXVOY-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]phenoxy]aniline Chemical group NC1=CC=CC(OC=2C=CC(=CC=2)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 UCQABCHSIIXVOY-UHFFFAOYSA-N 0.000 description 1
- JERFEOKUSPGKGV-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]sulfanylphenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(SC=3C=CC(OC=4C=C(N)C=CC=4)=CC=3)=CC=2)=C1 JERFEOKUSPGKGV-UHFFFAOYSA-N 0.000 description 1
- WCXGOVYROJJXHA-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]sulfonylphenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(=CC=2)S(=O)(=O)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 WCXGOVYROJJXHA-UHFFFAOYSA-N 0.000 description 1
- YSMXOEWEUZTWAK-UHFFFAOYSA-N 3-[4-[[4-(3-aminophenoxy)phenyl]methyl]phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=CC(CC=3C=CC(OC=4C=C(N)C=CC=4)=CC=3)=CC=2)=C1 YSMXOEWEUZTWAK-UHFFFAOYSA-N 0.000 description 1
- MGENSHRLAKPCSM-UHFFFAOYSA-N 3-methylcyclohexane-1,1,2,2-tetracarboxylic acid Chemical compound CC1CCCC(C(O)=O)(C(O)=O)C1(C(O)=O)C(O)=O MGENSHRLAKPCSM-UHFFFAOYSA-N 0.000 description 1
- ICNFHJVPAJKPHW-UHFFFAOYSA-N 4,4'-Thiodianiline Chemical compound C1=CC(N)=CC=C1SC1=CC=C(N)C=C1 ICNFHJVPAJKPHW-UHFFFAOYSA-N 0.000 description 1
- YARZEPAVWOMMHZ-UHFFFAOYSA-N 4-(3,4-dicarboxy-4-phenylcyclohexa-1,5-dien-1-yl)phthalic acid Chemical compound OC(=O)C1C=C(C=2C=C(C(C(O)=O)=CC=2)C(O)=O)C=CC1(C(O)=O)C1=CC=CC=C1 YARZEPAVWOMMHZ-UHFFFAOYSA-N 0.000 description 1
- NIBWEPNXTOWAHK-UHFFFAOYSA-N 4-(3,4-diformylphenyl)phthalaldehyde Chemical compound C1=C(C=O)C(C=O)=CC=C1C1=CC=C(C=O)C(C=O)=C1 NIBWEPNXTOWAHK-UHFFFAOYSA-N 0.000 description 1
- QNLCDRXVEPWSBQ-UHFFFAOYSA-N 4-(4,5-dicarboxy-5-phenylcyclohexa-1,3-dien-1-yl)phthalic acid Chemical compound OC(=O)C1=CC=C(C=2C=C(C(C(O)=O)=CC=2)C(O)=O)CC1(C(O)=O)C1=CC=CC=C1 QNLCDRXVEPWSBQ-UHFFFAOYSA-N 0.000 description 1
- VWAXWVUVEMNRNM-UHFFFAOYSA-N 4-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1.C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 VWAXWVUVEMNRNM-UHFFFAOYSA-N 0.000 description 1
- BCJIMAHNJOIWKQ-UHFFFAOYSA-N 4-[(1,3-dioxo-2-benzofuran-4-yl)oxy]-2-benzofuran-1,3-dione Chemical compound O=C1OC(=O)C2=C1C=CC=C2OC1=CC=CC2=C1C(=O)OC2=O BCJIMAHNJOIWKQ-UHFFFAOYSA-N 0.000 description 1
- WUPRYUDHUFLKFL-UHFFFAOYSA-N 4-[3-(4-aminophenoxy)phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(OC=2C=CC(N)=CC=2)=C1 WUPRYUDHUFLKFL-UHFFFAOYSA-N 0.000 description 1
- HHLMWQDRYZAENA-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]-1,1,1,3,3,3-hexafluoropropan-2-yl]phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=C(C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)(C(F)(F)F)C(F)(F)F)C=C1 HHLMWQDRYZAENA-UHFFFAOYSA-N 0.000 description 1
- KMKWGXGSGPYISJ-UHFFFAOYSA-N 4-[4-[2-[4-(4-aminophenoxy)phenyl]propan-2-yl]phenoxy]aniline Chemical compound C=1C=C(OC=2C=CC(N)=CC=2)C=CC=1C(C)(C)C(C=C1)=CC=C1OC1=CC=C(N)C=C1 KMKWGXGSGPYISJ-UHFFFAOYSA-N 0.000 description 1
- LDFYRFKAYFZVNH-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenoxy]phenoxy]aniline Chemical compound C1=CC(N)=CC=C1OC(C=C1)=CC=C1OC(C=C1)=CC=C1OC1=CC=C(N)C=C1 LDFYRFKAYFZVNH-UHFFFAOYSA-N 0.000 description 1
- HYDATEKARGDBKU-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenyl]phenoxy]aniline Chemical group C1=CC(N)=CC=C1OC1=CC=C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)C=C1 HYDATEKARGDBKU-UHFFFAOYSA-N 0.000 description 1
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- C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
- C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
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Description
まず、ACD/Labs社製のACD/Percepta platformのACD/LogP module(ここで、ACD/LogP moduleは、分子の2D構造を用いて、QSPR(Quantitative Structure−Property Relationship)方法論に基づいたアルゴリズム法)を使用して計算された25℃での分配係数(LogP値)は、次の通りである。
DMAc:N,N−ジメチルアセトアミド(N,N-Dimethylacetamide)
DEAc:N,N−ジエチルアセトアミド(N,N−Diethylacetamide)
DEF:N,N−ジエチルホルムアミド
DMF:N,N−ジメチルホルムアミド
NMP:N−メチルピロリドン(N−methylpyrrolideone)
NEP:N−エチルピロリドン(N−ethylpyrrolidone)
Equamide−M100(出光興産社製)
6FDA:4,4′−(ヘキサフルオロイソプロピリデン)ジフタル酸無水物(4,4′−(Hexafluoroisopropylidene)diphthalic anhydride)
PMDA:ピロメリット酸二無水物(pyromellitic dianhydride)
PMDA−H:1,2,4,5−シクロへキサンテトラカルボン酸二無水物(1,2,4,5−cyclohexanetetracarboxylic dianhydride)
BPDA:3,3′,4,4′−ビフェニルテトラカルボン酸二無水物(3,3′,4,4′−Biphenylteracarboxylic dianhydride)
aBPDA:2,3,3′,4′−ビフェニルテトラカルボン酸二無水物(2,3,3′,4′−Bipheyltetracarboxylic dianhydride)
ODPA:4,4′−オキシジフタル酸無水物(4,4′−oxydiphthalic anhydride)
aODPA:2,3,3′,4′−オキシジフタル酸無水物(2,3,3′,4′−oxydiphthalic anhydride)
TFMB:2,2′−ビス(トリフルオロメチル)ベンジジン(2,2′−bis(trifluoromethyl)benzidine)
PDA:パラ−フェニレンジアミン(para−phenylenediamine)
m−PDA:メタ−フェニレンジアミン(meta−phenylenediamine)
ODA:4,4′−オキシジアニリン(4,4′−oxydianiline)
FDA:4,4′−(9−フルオレニリデン)ジアニリン(4,4′−(9−fluorenylidene)dianiline)
HFBAPP:2,2−ビス[4−(−アミノフェノキシ)フェニル]ヘキサフルオロプロパン(2,2−Bis[4−(−aminophenoxy)phenyl]hexafluoropropane)
実施例1−1
ODPA 18gを窒素雰囲気下でDEF 45gに20分間にかけて溶解させた。結果として得られたODPA/DEF溶液に、ジアミン系化合物としてTFMB 18.5gをDEF 45gに溶解させて製造したTFMB/DEF溶液を添加し、25℃で2時間反応させた後、温度を40℃に上昇させて24時間反応させた。結果として得られた反応溶液にDEFを添加し、反応溶液の粘度が5,000cPとなるように、固形分18重量%に調節した後、24時間均一に混合して、ポリアミック酸溶液(ポリイミド前駆体溶液)を製造した。
ポリアミック酸を製造するための酸二無水物及びジアミン系化合物として、下記の表2に記載された化合物を使用し、溶媒を変えたことを除いては、前記実施例1と同様な方法によりポリアミック酸溶液を製造した。
製造したポリイミド前駆体溶液をガラス基板上に20ミクロンの厚さでスピンコーティングした後、30℃、湿度70%雰囲気で30分間放置後、ヘーズ測定器(ヘーズメーター;日本電色社製、NDH5000SP)を使用して、ASTM D1003測定規定によってヘーズを測定し、その結果を表2に示した。
実験例1−1で製造したポリイミド前駆体溶液が塗布されたガラス基板をオーブンに入れ、2℃/minの速度で加熱し、80℃で15分、150℃で30分、220℃で30分、350℃で1時間維持して硬化工程を行った。硬化工程の完了後、ガラス基板を水に浸し、ガラス基板上に形成されたフィルムを剥離し、オーブンで100℃に乾燥した。
実施例2−1から2−3及び比較例2−1から2−3
6FDA 15gを窒素雰囲気下でDEF 30gに20分間にかけて溶解させた。結果として得られた6FDA/DEF溶液に、ジアミン系化合物としてTFMB 5.4gとm−PDA 1.82gをDEF 30gに溶解させて製造したTFMB/m−PDA/DEF溶液を添加し、25℃で2時間反応させた後、温度を40℃に上昇させて24時間反応させた。結果として得られた反応溶液にDEFを添加し、反応溶液の粘度が5,000cPとなるように、固形分18重量%に調節した後、24時間均一に混合して、ポリイミド前駆体溶液を製造した。
製造したポリイミド前駆体溶液をガラス基板上に20ミクロンの厚さでスピンコーティングした後、30℃、湿度70%雰囲気で30分間放置後、ヘーズ測定器(ヘーズメーター;日本電色社製、NDH5000SP)を使用して、ASTM D1003測定規定によってヘーズを測定し、その結果を表4に示した。
実験例2−1で製造したポリイミド前駆体溶液が塗布されたガラス基板を、実験例1−2と同様な方法により処理してフィルムを得た。製造したそれぞれのポリイミド系フィルムに対して、実験例1−2と同様な方法により透過度、黄色度、位相差値、ガラス転移温度、及び熱膨張係数等のフィルム物性を測定した。その結果を下記の表5から表8に示した。
実施例3−1及び3−2、比較例3−1
6FDA 4.52g、PMDA 6.67g、BPDA 3gを窒素雰囲気下でNEP 45.42gに20分間にかけて溶解させた。結果として得られた6FDA/PMDA/BPDA/NEP溶液に、ジアミン系化合物としてTFMB 16.32gをNEP 50gに溶解させて製造したTFMB/NEP溶液を添加し、25℃で2時間反応させた後、温度を40℃に上昇させて24時間反応させた。結果として得られた反応溶液にNEPを添加し、反応溶液の粘度が5,000cPとなるように、固形分18重量%に調節した後、24時間均一に混合して、ポリイミド前駆体溶液を製造した。
製造したポリイミド前駆体溶液をガラス基板上に20ミクロンの厚さでスピンコーティングした後、30℃、湿度70%雰囲気で30分間放置後、ヘーズ測定器(ヘーズメーター;日本電色社製、NDH5000SP)を使用して、ASTM D1003測定規定によって白濁現象及びカーリング現象を観察し、その結果を図2及び図3に示した。
実験例3−1で製造したポリイミド前駆体溶液が塗布されたガラス基板を、実験例1−2と同様な方法により処理してフィルムを得た。製造したそれぞれのポリイミド系フィルムに対して、実験例1−2と同様な方法により透過度、黄色度、位相差値、ガラス転移温度、及び熱膨張係数等のフィルム物性を測定した。その結果を下記の表9に示した。
Claims (18)
- 前記2価有機基または4価有機基は、それぞれ独立して芳香族、脂環族、脂肪族及びこれらの組み合わせから選択される2価有機基または4価有機基である、請求項1に記載のポリイミド系溶液。
- 前記ポリアミック酸は、前記Yが、フルオロ原子含有置換基を有する2価有機基である構造と、フルオロ原子含有置換基を有していない2価有機基である構造を共に含む、請求項1に記載のポリイミド系溶液。
- 2価有機基Yの全体モル数に対して、フルオロ置換基を有する2価有機基のモル比が0.1〜1である、請求項1に記載のポリイミド系溶液。
- 前記Yが、一環式または多環式芳香族、一環式または多環式脂環族、あるいはこれらのうち二つ以上が単一結合または連結基により連結された構造を有する2価有機基を含む、請求項1に記載のポリイミド系溶液。
- フルオロ原子含有置換基を有する2価有機基が、一環式または多環式芳香族、一環式または多環式脂環族、あるいはこれらのうち二つ以上が単一結合または連結基により連結された構造を有する2価有機基であり、前記フルオロ原子含有置換基が、前記芳香族または脂環族環に直接置換されているか、前記連結基に置換されている構造である、請求項1に記載のポリイミド系溶液。
- フルオロ原子含有置換基を有する2価有機基が、2,2′−ビス(トリフルオロメチル)ベンジジン、または2,2−ビス[4−(−アミノフェノキシ)フェニル]ヘキサフルオロプロパンから来由された2価有機基である、請求項1に記載のポリイミド系溶液。
- フルオロ原子含有置換基を有していない2価有機基が、4,4′−オキシジアニリン、4,4′−(9−フルオレニリデン)ジアニリン、パラ−フェニレンジアミン、メタ−フェニレンジアミン、及びこれらの混合物から選択される化合物から来由されたものである、請求項3に記載のポリイミド系溶液。
- 前記ポリアミック酸は、前記Xが、フルオロ原子含有置換基を有する4価有機基である構造と、フルオロ原子含有置換基を有していない4価有機基である構造を共に含む、請求項1に記載のポリイミド系溶液。
- 4価有機基Xの全体モル数に対して、フルオロ置換基を有する4価有機基のモル比が0.1〜1である、請求項1に記載のポリイミド系溶液。
- 前記Xが、一環式または多環式芳香族、一環式または多環式脂環族、あるいはこれらのうち二つ以上が単一結合または連結基により連結された構造を有する4価有機基を含む、請求項1に記載のポリイミド系溶液。
- フルオロ原子含有置換基を有する4価有機基が、一環式または多環式芳香族、一環式または多環式脂環族、あるいはこれらのうち二つ以上が単一結合または連結基により連結された構造を有する4価有機基であり、前記フルオロ原子含有置換基が、前記芳香族または脂環族環に直接置換されているか、前記連結基に置換されている構造である、請求項1に記載のポリイミド系溶液。
- フルオロ原子含有置換基を有する4価有機基が、4,4′−(ヘキサフルオロイソプロピリデン)ジフタル酸無水物である、請求項1に記載のポリイミド系溶液。
- フルオロ原子含有置換基を有していない4価有機基が、3,3′,4,4′−ビフェニルテトラカルボン酸二無水物、2,3,3′,4′−ビフェニルテトラカルボン酸二無水物、ピロメリット酸無水物、1,2,4,5−シクロヘキサンテトラカルボン酸二無水物、4,4′−オキシジフタル酸無水物、2,3,3′,4′−オキシジフタル酸無水物、及びこれらの混合物から選択される化合物から来由されたものである、請求項9に記載のポリイミド系溶液。
- 前記ポリイミド系溶液は、ブルックフィールド回転粘度計(Brookfield rotational viscometer)により25℃で測定した粘度が、400cP以上、かつ50,000cP以下である、請求項1に記載のポリイミド系溶液。
- 請求項1から15のうちいずれか一項に記載のポリイミド系溶液を基板の一面に塗布して硬化した後、基板から分離して得られたポリイミド系フィルム。
- 請求項16に記載のポリイミド系フィルムを含むディスプレイ基板。
- 請求項16に記載のポリイミド系フィルムを含む素子。
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